Kepler-Release/Venus/Venus_RT/Modules/PMs/LLPlaceRoutine.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Venus_RT.Devices;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using System.Diagnostics;
using System.Collections.Generic;
using Venus_Core;
namespace Venus_RT.Modules.PMs
{
    class LLPlaceRoutine : PMRoutineBase, IRoutine
    {
        private enum LLPlaceStep
        {
            kPrepareTransfer,
            kExtend,
            kPinUp,
            kRetract,
            kPostTransfer,
            kOpenFastPump,
        }

        private int _prepareTransferTimeout = 120;
        private int _transferWaferTimeout = 120;
        private bool _isATMMode = false;
        public LLPlaceRoutine(JetPM chamber) : base(chamber)
        {
            Name = "PlaceWafer";
        }

        public RState Start(params object[] objs)
        {
            _prepareTransferTimeout = SC.GetValue<int>($"{Module}.PrepareTransferTimeout");
            _transferWaferTimeout = SC.GetValue<int>($"{Module}.TransferWaferTimeout");
            _isATMMode = SC.GetValue<bool>("System.IsATMMode");

            if (WaferManager.Instance.CheckHasWafer(ModuleName.PMA, 0))
            {
                Stop("腔体里面有 Wafer，不能执行放片动作");
                return RState.Failed;
            }

            if (WaferManager.Instance.CheckNoWafer(ModuleName.LLA, 0))
            {
                Stop("Loadlock 里面没有 Wafer，不能执行放片动作");
                return RState.Failed;
            }

            if (_isATMMode)
            {
                if(!_chamber.IsATM || !_chamber.IsATMLoadlock)
                {
                    Stop("腔体非大气状态，请先执行充气动作");
                    return RState.Failed;
                }
            }
            else
            {
                if(!_chamber.IsVAC || !_chamber.IsVACLoadLock)
                {
                    Stop("腔体非真空状态，请先执行抽真空动作");
                    return RState.Failed;
                }
            }

            _chamber.OpenValve(ValveType.FastPump, false);
            _chamber.OpenValve(ValveType.LoadlockPumping, false);

            Reset();
            return Runner.Start(Module, Name);
        }
        public RState Monitor()
        {
            Runner.Run((int)LLPlaceStep.kPrepareTransfer,   PrepareTransfer,        IsPrepareReady,                                     _prepareTransferTimeout * 1000)
                .Run((int)LLPlaceStep.kExtend,              _chamber.ExtendWafer,   () => { return _chamber.IsLoadlockArmExtend; },     _transferWaferTimeout * 1000)
                .Run((int)LLPlaceStep.kPinUp,               SetLiftPinUp,           () => { return _chamber.CheckLiftUp(); })
                .Run((int)LLPlaceStep.kRetract,             _chamber.RetractWafer,  () => { return _chamber.IsLoadlockArmRetract; },    _transferWaferTimeout * 1000)
                .Run((int)LLPlaceStep.kPostTransfer,        PostTransfer,           IsPostTransferReady,                                _prepareTransferTimeout * 1000)
                .End((int)LLPlaceStep.kOpenFastPump,        OpenFastPump,           _delay_50ms);

            return Runner.Status;
        }

        private bool PrepareTransfer()
        {
            _chamber.SetLiftPin(MovementPosition.Down, out _);
            _chamber.SetSlitDoor(true, out _);
            return true;
        }

        private bool IsPrepareReady()
        {
            return _chamber.CheckLiftDown() && _chamber.CheckSlitDoorOpen();
        }

        private bool PostTransfer()
        {
            WaferManager.Instance.WaferMoved(ModuleName.LLA, 0, ModuleName.PMA, 0);
            _chamber.SetLiftPin(MovementPosition.Down, out _);
            _chamber.SetSlitDoor(false, out _);
            return true;
        }

        private bool IsPostTransferReady()
        {
            return _chamber.CheckLiftDown() && _chamber.CheckSlitDoorClose();
        }

        private bool SetLiftPinUp()
        {
            return _chamber.SetLiftPin(MovementPosition.Up, out _);
        }

        private bool OpenFastPump()
        {
            if (!_isATMMode)
                _chamber.OpenValve(ValveType.FastPump, true);

            return true;
        }

        public void Abort()
        {
        }
    }
}