OverKepler2300ViewModel.cs 66 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. namespace Venus_MainPages.ViewModels
  20. {
  21. internal class OverKepler2300ViewModel : BindableBase
  22. {
  23. #region 私有字段
  24. private List<string> m_CurrentModuleRecipes = new List<string>();
  25. private bool m_PVN21ValveIsOpen;
  26. private bool m_PVN22ValveIsOpen;
  27. private bool m_N2ValveIsOpen;
  28. private bool m_PV11ValveIsOpen;
  29. private bool m_PV12ValveIsOpen;
  30. private bool m_PV21ValveIsOpen;
  31. private bool m_PV22ValveIsOpen;
  32. private bool m_PV31ValveIsOpen;
  33. private bool m_PV32ValveIsOpen;
  34. private bool m_PV41ValveIsOpen;
  35. private bool m_PV42ValveIsOpen;
  36. private bool m_MFC1ValveIsOpen;
  37. private bool m_MFC2ValveIsOpen;
  38. private bool m_MFC3ValveIsOpen;
  39. private bool m_MFC4ValveIsOpen;
  40. private bool m_MFC5ValveIsOpen;
  41. private bool m_MFC6ValveIsOpen;
  42. private bool m_MFC7ValveIsOpen;
  43. private bool m_MFC8ValveIsOpen;
  44. private bool m_GasFinalValveIsOpen;
  45. private bool m_SoftPumpValveIsOpen;
  46. private bool m_FastPumpValveIsOpen;
  47. private bool m_PVHe1ValveIsOpen;
  48. private bool m_PVHe2ValveIsOpen;
  49. private bool m_TurboPumpPumpingValveIsOpen;
  50. private bool m_TurboPumpPurgeValveIsOpen;
  51. private bool m_GuageValveIsOpen;
  52. private bool m_PendulumValveIsOpen;
  53. private double m_HeGasSetpoint;
  54. private int m_HePressureSetpoint;
  55. private float m_SRFFwdPowerSetpoint;
  56. private float m_BRFFwdPowerSetpoint;
  57. private float m_SRFMatchC1;
  58. private float m_SRFMatchC2;
  59. private float m_BRFMatchC1;
  60. private float m_BRFMatchC2;
  61. private double m_MFC1SetPoint;
  62. private double m_MFC2SetPoint;
  63. private double m_MFC3SetPoint;
  64. private double m_MFC4SetPoint;
  65. private double m_MFC5SetPoint;
  66. private double m_MFC6SetPoint;
  67. private double m_MFC7SetPoint;
  68. private double m_MFC8SetPoint;
  69. private double m_N2SetPoint;
  70. private AITMfcData m_MFC1Data;
  71. private AITMfcData m_MFC2Data;
  72. private AITMfcData m_MFC3Data;
  73. private AITMfcData m_MFC4Data;
  74. private AITMfcData m_MFC5Data;
  75. private AITMfcData m_MFC6Data;
  76. private AITMfcData m_MFC7Data;
  77. private AITMfcData m_MFC8Data;
  78. private AITMfcData m_MFCHeData;
  79. private AITMfcData m_MFCN2Data;
  80. private AITHeaterData m_ValveHeaterData;
  81. private AITHeaterData m_ForelineHeaterData;
  82. private AITHeaterData m_WallHeaterData;
  83. private AITHeaterData m_PendulumHeaterData;
  84. private AITRfData m_SRFData;
  85. private AITRfData m_BRFData;
  86. private AITPendulumValveData m_PendulumValveData;
  87. private PMState m_PMCurrentState;
  88. private bool m_SourceRFFanInterlock;
  89. private bool m_IsWLK;
  90. private bool m_IsWaterFlowOk;
  91. private bool m_IsTurboPumpInterlock;
  92. private bool m_IsCDAOK;
  93. private bool m_SensorGasBoxDoor;
  94. private bool m_SensorGasBoxPressure;
  95. private bool m_PumpIsOpen;
  96. private bool m_TurboIsOpen;
  97. private bool m_IsATM;
  98. private bool m_IsVAC;
  99. private List<string> m_RtDataKeys;
  100. private Dictionary<string, object> m_RtDataValues;
  101. private int m_PositionValue;
  102. private bool m_IsPositionMode;
  103. private int m_ESCVoltage;
  104. private bool m_GasIsFlowing;
  105. private bool m_IsProcessing;
  106. private bool m_IsAutoMode;
  107. private string m_SelectedRecipe;
  108. private float m_ChillerTempSetpoint;
  109. private float m_InnerChillerTempSetpoint;
  110. private float m_OuterChillerTempSetpoint;
  111. private float m_TopChillerTempSetpoint;
  112. private float m_WallTempSetpoint;
  113. private bool m_HeIsPressureMode = true;
  114. private bool m_ChillerIsOn;
  115. private bool m_InnerChillerIsOn;
  116. private bool m_OuterChillerIsOn;
  117. private bool m_TopChillerIsOn;
  118. private float m_ProcessHighPressure;
  119. private float m_ProcessLowPressure;
  120. private float m_ForelinePressurePressure;
  121. private float m_ESCHePressure;
  122. ButterflyValveView butterflyValveMessageBox;
  123. HeaterView heaterView;
  124. private int m_TurboPumpRotationalSpeed;
  125. private bool m_LiftPinIsUp;
  126. private bool m_IsSlitDoorClosed;
  127. private bool m_IsLidClosed;
  128. private float m_ChillerTemperature;
  129. private float m_InnerTemperature;
  130. private float m_OuterTemperature;
  131. private float m_TopTemperature;
  132. private int m_ESCHVOutputVoltage;
  133. private float m_MatchC1;
  134. private float m_MatchC2;
  135. private float m_BiasMatchC1;
  136. private float m_BiasMatchC2;
  137. private float m_PendulumValvePosition;
  138. private bool m_IsTurboPumpAtSpeed;
  139. private bool m_TurboPumpWaterFlowSwitch;
  140. private bool m_IsHasWafer;
  141. private Recipe m_CurrentRecipe = new Recipe();
  142. private RecipeResult m_CurrentRecipeResult = new RecipeResult();
  143. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  144. private double m_ChamberPressureFeedBack;
  145. private double m_TurboN2FlowSetPoint;
  146. private string m_ModuleName;
  147. private string m_WaferID;
  148. private int? currentRecipeNumber;
  149. #endregion
  150. #region 属性
  151. public List<string> CurrentModuleRecipes
  152. {
  153. get { return m_CurrentModuleRecipes; }
  154. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  155. }
  156. public Recipe CurrentRecipe
  157. {
  158. get { return m_CurrentRecipe; }
  159. set { SetProperty(ref m_CurrentRecipe, value); }
  160. }
  161. public RecipeResult CurrentRecipeResult
  162. {
  163. get { return m_CurrentRecipeResult; }
  164. set { SetProperty(ref m_CurrentRecipeResult, value); }
  165. }
  166. public RecipeStep CurrentRecipeStep
  167. {
  168. get { return m_CurrentRecipeStep; }
  169. set { SetProperty(ref m_CurrentRecipeStep, value); }
  170. }
  171. public bool IsHasWafer
  172. {
  173. get { return m_IsHasWafer; }
  174. set { SetProperty(ref m_IsHasWafer, value); }
  175. }
  176. public bool IsTurboPumpAtSpeed
  177. {
  178. get { return m_IsTurboPumpAtSpeed; }
  179. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  180. }
  181. public bool TurboPumpWaterFlowSwitch
  182. {
  183. get { return m_TurboPumpWaterFlowSwitch; }
  184. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  185. }
  186. public float PendulumValvePosition
  187. {
  188. get { return m_PendulumValvePosition; }
  189. set { SetProperty(ref m_PendulumValvePosition, value); }
  190. }
  191. public float BiasMatchC1
  192. {
  193. get { return m_BiasMatchC1; }
  194. set
  195. {
  196. SetProperty(ref m_BiasMatchC1, value);
  197. }
  198. }
  199. public float BiasMatchC2
  200. {
  201. get { return m_BiasMatchC2; }
  202. set
  203. {
  204. SetProperty(ref m_BiasMatchC2, value);
  205. }
  206. }
  207. public float MatchC1
  208. {
  209. get { return m_MatchC1; }
  210. set
  211. {
  212. SetProperty(ref m_MatchC1, value);
  213. }
  214. }
  215. public float MatchC2
  216. {
  217. get { return m_MatchC2; }
  218. set
  219. {
  220. SetProperty(ref m_MatchC2, value);
  221. }
  222. }
  223. public AITPendulumValveData PendulumValveData
  224. {
  225. get { return m_PendulumValveData; }
  226. set
  227. {
  228. SetProperty(ref m_PendulumValveData, value);
  229. }
  230. }
  231. //public AITHVData ESCHVData
  232. //{
  233. // get { return m_ESCHVData; }
  234. // set
  235. // {
  236. // SetProperty(ref m_ESCHVData, value);
  237. // }
  238. //}
  239. public int ESCHVOutputVoltage
  240. {
  241. get { return m_ESCHVOutputVoltage; }
  242. set
  243. {
  244. SetProperty(ref m_ESCHVOutputVoltage, value);
  245. }
  246. }
  247. public float ChillerTemperature
  248. {
  249. get { return m_ChillerTemperature; }
  250. set
  251. {
  252. SetProperty(ref m_ChillerTemperature, value);
  253. }
  254. }
  255. public float InnerTemperature
  256. {
  257. get { return m_InnerTemperature; }
  258. set
  259. {
  260. SetProperty(ref m_InnerTemperature, value);
  261. }
  262. }
  263. public float OuterTemperature
  264. {
  265. get { return m_OuterTemperature; }
  266. set
  267. {
  268. SetProperty(ref m_OuterTemperature, value);
  269. }
  270. }
  271. public float TopTemperature
  272. {
  273. get { return m_TopTemperature; }
  274. set
  275. {
  276. SetProperty(ref m_TopTemperature, value);
  277. }
  278. }
  279. //public float HVTemperature
  280. //{
  281. // get { return m_HVTemperature; }
  282. // set
  283. // {
  284. // SetProperty(ref m_HVTemperature, value);
  285. // }
  286. //}
  287. public bool IsLidClosed
  288. {
  289. get { return m_IsLidClosed; }
  290. set
  291. {
  292. SetProperty(ref m_IsLidClosed, value);
  293. }
  294. }
  295. public bool IsSlitDoorClosed
  296. {
  297. get { return m_IsSlitDoorClosed; }
  298. set
  299. {
  300. SetProperty(ref m_IsSlitDoorClosed, value);
  301. }
  302. }
  303. public bool LiftPinIsUp
  304. {
  305. get { return m_LiftPinIsUp; }
  306. set
  307. {
  308. SetProperty(ref m_LiftPinIsUp, value);
  309. }
  310. }
  311. public int TurboPumpRotationalSpeed
  312. {
  313. get { return m_TurboPumpRotationalSpeed; }
  314. set
  315. {
  316. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  317. }
  318. }
  319. public float ESCHePressure
  320. {
  321. get { return m_ESCHePressure; }
  322. set
  323. {
  324. SetProperty(ref m_ESCHePressure, value);
  325. }
  326. }
  327. public float ProcessHighPressure
  328. {
  329. get { return m_ProcessHighPressure; }
  330. set
  331. {
  332. SetProperty(ref m_ProcessHighPressure, value);
  333. }
  334. }
  335. public float ProcessLowPressure
  336. {
  337. get { return m_ProcessLowPressure; }
  338. set
  339. {
  340. SetProperty(ref m_ProcessLowPressure, value);
  341. }
  342. }
  343. public float ForelinePressure
  344. {
  345. get { return m_ForelinePressurePressure; }
  346. set
  347. {
  348. SetProperty(ref m_ForelinePressurePressure, value);
  349. }
  350. }
  351. public bool SourceRFFanInterlock
  352. {
  353. get { return m_SourceRFFanInterlock; }
  354. set
  355. {
  356. SetProperty(ref m_SourceRFFanInterlock, value);
  357. }
  358. }
  359. public bool IsWLK
  360. {
  361. get { return m_IsWLK; }
  362. set
  363. {
  364. SetProperty(ref m_IsWLK, value);
  365. }
  366. }
  367. public bool IsWaterFlowOk
  368. {
  369. get { return m_IsWaterFlowOk; }
  370. set
  371. {
  372. SetProperty(ref m_IsWaterFlowOk, value);
  373. }
  374. }
  375. public bool IsCDAOK
  376. {
  377. get { return m_IsCDAOK; }
  378. set
  379. {
  380. SetProperty(ref m_IsCDAOK, value);
  381. }
  382. }
  383. public bool SensorGasBoxDoor
  384. {
  385. get { return m_SensorGasBoxDoor; }
  386. set
  387. {
  388. SetProperty(ref m_SensorGasBoxDoor, value);
  389. }
  390. }
  391. public bool SensorGasBoxPressure
  392. {
  393. get { return m_SensorGasBoxPressure; }
  394. set
  395. {
  396. SetProperty(ref m_SensorGasBoxPressure, value);
  397. }
  398. }
  399. public bool IsTurboPumpInterlock
  400. {
  401. get { return m_IsTurboPumpInterlock; }
  402. set
  403. {
  404. SetProperty(ref m_IsTurboPumpInterlock, value);
  405. }
  406. }
  407. public string ModuleName
  408. {
  409. get { return m_ModuleName; }
  410. set
  411. {
  412. SetProperty(ref m_ModuleName, value);
  413. }
  414. }
  415. public double MFC1SetPoint
  416. {
  417. get { return m_MFC1SetPoint; }
  418. set { SetProperty(ref m_MFC1SetPoint, value); }
  419. }
  420. public double MFC2SetPoint
  421. {
  422. get { return m_MFC2SetPoint; }
  423. set { SetProperty(ref m_MFC2SetPoint, value); }
  424. }
  425. public double MFC3SetPoint
  426. {
  427. get { return m_MFC3SetPoint; }
  428. set { SetProperty(ref m_MFC3SetPoint, value); }
  429. }
  430. public double MFC4SetPoint
  431. {
  432. get { return m_MFC4SetPoint; }
  433. set { SetProperty(ref m_MFC4SetPoint, value); }
  434. }
  435. public double MFC5SetPoint
  436. {
  437. get { return m_MFC5SetPoint; }
  438. set { SetProperty(ref m_MFC5SetPoint, value); }
  439. }
  440. public double MFC6SetPoint
  441. {
  442. get { return m_MFC6SetPoint; }
  443. set { SetProperty(ref m_MFC6SetPoint, value); }
  444. }
  445. public double MFC7SetPoint
  446. {
  447. get { return m_MFC7SetPoint; }
  448. set { SetProperty(ref m_MFC7SetPoint, value); }
  449. }
  450. public double MFC8SetPoint
  451. {
  452. get { return m_MFC8SetPoint; }
  453. set { SetProperty(ref m_MFC8SetPoint, value); }
  454. }
  455. public double N2SetPoint
  456. {
  457. get { return m_N2SetPoint; }
  458. set { SetProperty(ref m_N2SetPoint, value); }
  459. }
  460. public double TurboN2FlowSetPoint
  461. {
  462. get { return m_TurboN2FlowSetPoint; }
  463. set
  464. {
  465. if (value != m_TurboN2FlowSetPoint)
  466. {
  467. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  468. }
  469. SetProperty(ref m_TurboN2FlowSetPoint, value);
  470. }
  471. }
  472. public AITMfcData MFC1Data
  473. {
  474. get { return m_MFC1Data; }
  475. set { SetProperty(ref m_MFC1Data, value); }
  476. }
  477. public AITMfcData MFC2Data
  478. {
  479. get { return m_MFC2Data; }
  480. set { SetProperty(ref m_MFC2Data, value); }
  481. }
  482. public AITMfcData MFC3Data
  483. {
  484. get { return m_MFC3Data; }
  485. set { SetProperty(ref m_MFC3Data, value); }
  486. }
  487. public AITMfcData MFC4Data
  488. {
  489. get { return m_MFC4Data; }
  490. set { SetProperty(ref m_MFC4Data, value); }
  491. }
  492. public AITMfcData MFC5Data
  493. {
  494. get { return m_MFC5Data; }
  495. set { SetProperty(ref m_MFC5Data, value); }
  496. }
  497. public AITMfcData MFC6Data
  498. {
  499. get { return m_MFC6Data; }
  500. set { SetProperty(ref m_MFC6Data, value); }
  501. }
  502. public AITMfcData MFC7Data
  503. {
  504. get { return m_MFC7Data; }
  505. set { SetProperty(ref m_MFC7Data, value); }
  506. }
  507. public AITMfcData MFC8Data
  508. {
  509. get { return m_MFC8Data; }
  510. set { SetProperty(ref m_MFC8Data, value); }
  511. }
  512. public AITMfcData MFCHeData
  513. {
  514. get { return m_MFCHeData; }
  515. set { SetProperty(ref m_MFCHeData, value); }
  516. }
  517. public AITMfcData MFCN2Data
  518. {
  519. get { return m_MFCN2Data; }
  520. set { SetProperty(ref m_MFCN2Data, value); }
  521. }
  522. public AITHeaterData ValveHeaterData
  523. {
  524. get { return m_ValveHeaterData; }
  525. set { SetProperty(ref m_ValveHeaterData, value); }
  526. }
  527. public AITHeaterData ForelineHeaterData
  528. {
  529. get { return m_ForelineHeaterData; }
  530. set { SetProperty(ref m_ForelineHeaterData, value); }
  531. }
  532. public AITHeaterData WallHeaterData
  533. {
  534. get { return m_WallHeaterData; }
  535. set { SetProperty(ref m_WallHeaterData, value); }
  536. }
  537. public AITHeaterData PendulumHeaterData
  538. {
  539. get { return m_PendulumHeaterData; }
  540. set { SetProperty(ref m_PendulumHeaterData, value); }
  541. }
  542. public AITRfData SRFData
  543. {
  544. get { return m_SRFData; }
  545. set { SetProperty(ref m_SRFData, value); }
  546. }
  547. public AITRfData BRFData
  548. {
  549. get { return m_BRFData; }
  550. set { SetProperty(ref m_BRFData, value); }
  551. }
  552. public PMState PMCurrentState
  553. {
  554. get { return m_PMCurrentState; }
  555. set { SetProperty(ref m_PMCurrentState, value); }
  556. }
  557. #region 阀
  558. public bool GasFinalValveIsOpen
  559. {
  560. get { return m_GasFinalValveIsOpen; }
  561. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  562. }
  563. public bool PVN21ValveIsOpen
  564. {
  565. get { return m_PVN21ValveIsOpen; }
  566. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  567. }
  568. public bool PVN22ValveIsOpen
  569. {
  570. get { return m_PVN22ValveIsOpen; }
  571. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  572. }
  573. public bool N2ValveIsOpen
  574. {
  575. get { return m_N2ValveIsOpen; }
  576. set { SetProperty(ref m_N2ValveIsOpen, value); }
  577. }
  578. public bool PV11ValveIsOpen
  579. {
  580. get { return m_PV11ValveIsOpen; }
  581. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  582. }
  583. public bool PV12ValveIsOpen
  584. {
  585. get { return m_PV12ValveIsOpen; }
  586. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  587. }
  588. public bool MFC1ValveIsOpen
  589. {
  590. get { return m_MFC1ValveIsOpen; }
  591. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  592. }
  593. public bool PV21ValveIsOpen
  594. {
  595. get { return m_PV21ValveIsOpen; }
  596. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  597. }
  598. public bool PV22ValveIsOpen
  599. {
  600. get { return m_PV22ValveIsOpen; }
  601. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  602. }
  603. public bool MFC2ValveIsOpen
  604. {
  605. get { return m_MFC2ValveIsOpen; }
  606. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  607. }
  608. public bool PV31ValveIsOpen
  609. {
  610. get { return m_PV31ValveIsOpen; }
  611. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  612. }
  613. public bool PV32ValveIsOpen
  614. {
  615. get { return m_PV32ValveIsOpen; }
  616. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  617. }
  618. public bool MFC3ValveIsOpen
  619. {
  620. get { return m_MFC3ValveIsOpen; }
  621. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  622. }
  623. public bool PV41ValveIsOpen
  624. {
  625. get { return m_PV41ValveIsOpen; }
  626. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  627. }
  628. public bool PV42ValveIsOpen
  629. {
  630. get { return m_PV42ValveIsOpen; }
  631. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  632. }
  633. public bool MFC4ValveIsOpen
  634. {
  635. get { return m_MFC4ValveIsOpen; }
  636. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  637. }
  638. public bool MFC5ValveIsOpen
  639. {
  640. get { return m_MFC5ValveIsOpen; }
  641. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  642. }
  643. public bool MFC6ValveIsOpen
  644. {
  645. get { return m_MFC6ValveIsOpen; }
  646. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  647. }
  648. public bool MFC7ValveIsOpen
  649. {
  650. get { return m_MFC7ValveIsOpen; }
  651. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  652. }
  653. public bool MFC8ValveIsOpen
  654. {
  655. get { return m_MFC8ValveIsOpen; }
  656. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  657. }
  658. public bool PVHe1ValveIsOpen
  659. {
  660. get { return m_PVHe1ValveIsOpen; }
  661. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  662. }
  663. public bool PVHe2ValveIsOpen
  664. {
  665. get { return m_PVHe2ValveIsOpen; }
  666. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  667. }
  668. public bool TurboPumpPumpingValveIsOpen
  669. {
  670. get { return m_TurboPumpPumpingValveIsOpen; }
  671. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  672. }
  673. public bool TurboPumpPurgeValveIsOpen
  674. {
  675. get { return m_TurboPumpPurgeValveIsOpen; }
  676. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  677. }
  678. public bool SoftPumpValveIsOpen
  679. {
  680. get { return m_SoftPumpValveIsOpen; }
  681. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  682. }
  683. public bool FastPumpValveIsOpen
  684. {
  685. get { return m_FastPumpValveIsOpen; }
  686. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  687. }
  688. public bool GuageValveIsOpen
  689. {
  690. get { return m_GuageValveIsOpen; }
  691. set { SetProperty(ref m_GuageValveIsOpen, value); }
  692. }
  693. #endregion
  694. public Dictionary<string, object> RtDataValues
  695. {
  696. get { return m_RtDataValues; }
  697. set { SetProperty(ref m_RtDataValues, value); }
  698. }
  699. public bool PumpIsOpen
  700. {
  701. get { return m_PumpIsOpen; }
  702. set { SetProperty(ref m_PumpIsOpen, value); }
  703. }
  704. public bool PendulumValveIsOpen
  705. {
  706. get { return m_PendulumValveIsOpen; }
  707. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  708. }
  709. public bool TurboIsOpen
  710. {
  711. get { return m_TurboIsOpen; }
  712. set { SetProperty(ref m_TurboIsOpen, value); }
  713. }
  714. public bool IsATM
  715. {
  716. get { return m_IsATM; }
  717. set { SetProperty(ref m_IsATM, value); }
  718. }
  719. public bool IsVAC
  720. {
  721. get { return m_IsVAC; }
  722. set { SetProperty(ref m_IsVAC, value); }
  723. }
  724. //public bool BRFIsOn
  725. //{
  726. // get { return m_BRFIsOn; }
  727. // set { SetProperty(ref m_BRFIsOn, value); }
  728. //}
  729. //public bool SRFIsOn
  730. //{
  731. // get { return m_SRFIsOn; }
  732. // set { SetProperty(ref m_SRFIsOn, value); }
  733. //}
  734. public int PositionValue
  735. {
  736. get { return m_PositionValue; }
  737. set { SetProperty(ref m_PositionValue, value); }
  738. }
  739. public bool IsPositionMode
  740. {
  741. get { return m_IsPositionMode; }
  742. set { SetProperty(ref m_IsPositionMode, value); }
  743. }
  744. public double HeGasSetpoint
  745. {
  746. get { return m_HeGasSetpoint; }
  747. set
  748. {
  749. SetProperty(ref m_HeGasSetpoint, value);
  750. }
  751. }
  752. public int HePressureSetpoint
  753. {
  754. get { return m_HePressureSetpoint; }
  755. set
  756. {
  757. SetProperty(ref m_HePressureSetpoint, value);
  758. }
  759. }
  760. public float SRFFwdPowerSetpoint
  761. {
  762. get { return m_SRFFwdPowerSetpoint; }
  763. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  764. }
  765. public float BRFFwdPowerSetpoint
  766. {
  767. get { return m_BRFFwdPowerSetpoint; }
  768. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  769. }
  770. public int ESCVoltage
  771. {
  772. get { return m_ESCVoltage; }
  773. set { SetProperty(ref m_ESCVoltage, value); }
  774. }
  775. public float SRFMatchC1
  776. {
  777. get { return m_SRFMatchC1; }
  778. set { SetProperty(ref m_SRFMatchC1, value); }
  779. }
  780. public float SRFMatchC2
  781. {
  782. get { return m_SRFMatchC2; }
  783. set { SetProperty(ref m_SRFMatchC2, value); }
  784. }
  785. public float BRFMatchC1
  786. {
  787. get { return m_BRFMatchC1; }
  788. set { SetProperty(ref m_BRFMatchC1, value); }
  789. }
  790. public float BRFMatchC2
  791. {
  792. get { return m_BRFMatchC2; }
  793. set { SetProperty(ref m_BRFMatchC2, value); }
  794. }
  795. public bool GasIsFlowing
  796. {
  797. get { return m_GasIsFlowing; }
  798. set { SetProperty(ref m_GasIsFlowing, value); }
  799. }
  800. public bool IsProcessing
  801. {
  802. get { return m_IsProcessing; }
  803. set { SetProperty(ref m_IsProcessing, value); }
  804. }
  805. public bool IsAutoMode
  806. {
  807. get { return m_IsAutoMode; }
  808. set { SetProperty(ref m_IsAutoMode, value); }
  809. }
  810. public string SelectedRecipe
  811. {
  812. get { return m_SelectedRecipe; }
  813. set { SetProperty(ref m_SelectedRecipe, value); }
  814. }
  815. public float ChillerTempSetpoint
  816. {
  817. get { return m_ChillerTempSetpoint; }
  818. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  819. }
  820. public float InnerChillerTempSetpoint
  821. {
  822. get { return m_InnerChillerTempSetpoint; }
  823. set { SetProperty(ref m_InnerChillerTempSetpoint, value); }
  824. }
  825. public float OuterChillerTempSetpoint
  826. {
  827. get { return m_OuterChillerTempSetpoint; }
  828. set { SetProperty(ref m_OuterChillerTempSetpoint, value); }
  829. }
  830. public float TopChillerTempSetpoint
  831. {
  832. get { return m_TopChillerTempSetpoint; }
  833. set { SetProperty(ref m_TopChillerTempSetpoint, value); }
  834. }
  835. public float WallTempSetpoint
  836. {
  837. get { return m_WallTempSetpoint; }
  838. set { SetProperty(ref m_WallTempSetpoint, value); }
  839. }
  840. public bool HeIsPressureMode
  841. {
  842. get { return m_HeIsPressureMode; }
  843. set { SetProperty(ref m_HeIsPressureMode, value); }
  844. }
  845. public bool ChillerIsOn
  846. {
  847. get { return m_ChillerIsOn; }
  848. set { SetProperty(ref m_ChillerIsOn, value); }
  849. }
  850. public bool InnerChillerIsOn
  851. {
  852. get { return m_InnerChillerIsOn; }
  853. set { SetProperty(ref m_InnerChillerIsOn, value); }
  854. }
  855. public bool OuterChillerIsOn
  856. {
  857. get { return m_OuterChillerIsOn; }
  858. set { SetProperty(ref m_OuterChillerIsOn, value); }
  859. }
  860. public bool TopChillerIsOn
  861. {
  862. get { return m_TopChillerIsOn; }
  863. set { SetProperty(ref m_TopChillerIsOn, value); }
  864. }
  865. public double ChamberPressureFeedBack
  866. {
  867. get { return m_ChamberPressureFeedBack; }
  868. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  869. }
  870. public string WaferID
  871. {
  872. get { return m_WaferID; }
  873. set { SetProperty(ref m_WaferID, value); }
  874. }
  875. #endregion
  876. #region 命令
  877. private DelegateCommand _PMInitCommnad;
  878. public DelegateCommand PMInitCommnad =>
  879. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  880. private DelegateCommand _PMAbortCommnad;
  881. public DelegateCommand PMAbortCommnad =>
  882. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  883. private DelegateCommand _GasCommand;
  884. public DelegateCommand GasCommand =>
  885. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  886. private DelegateCommand _HeCommand;
  887. public DelegateCommand HeCommand =>
  888. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  889. private DelegateCommand _RfCommand;
  890. public DelegateCommand RfCommand =>
  891. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  892. private DelegateCommand _PurgeCommand;
  893. public DelegateCommand PurgeCommand =>
  894. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  895. private DelegateCommand _VentCommand;
  896. public DelegateCommand VentCommand =>
  897. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  898. private DelegateCommand _PumpCommand;
  899. public DelegateCommand PumpCommand =>
  900. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  901. private DelegateCommand _OpenPumpCommand;
  902. public DelegateCommand OpenPumpCommand =>
  903. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  904. private DelegateCommand _ClosePumpCommand;
  905. public DelegateCommand ClosePumpCommand =>
  906. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  907. private DelegateCommand _OpenTurboPumpCommand;
  908. public DelegateCommand OpenTurboPumpCommand =>
  909. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  910. private DelegateCommand _CloseTurboPumpCommand;
  911. public DelegateCommand CloseTurboPumpCommand =>
  912. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  913. private DelegateCommand _OpenPendulumValveCommand;
  914. public DelegateCommand OpenPendulumValveCommand =>
  915. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  916. private DelegateCommand _ClosePendulumValveCommand;
  917. public DelegateCommand ClosePendulumValveCommand =>
  918. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  919. private DelegateCommand<object> _PinUpDownCommand;
  920. public DelegateCommand<object> PinUpDownCommand =>
  921. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  922. private DelegateCommand<object> _LidUpDownCommand;
  923. public DelegateCommand<object> LidUpDownCommand =>
  924. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  925. private DelegateCommand _SetSRfCommand;
  926. public DelegateCommand SetSRfCommand =>
  927. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  928. private DelegateCommand _SetBRfCommand;
  929. public DelegateCommand SetBRfCommand =>
  930. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  931. private DelegateCommand _OpenButterflyValveViewCommand;
  932. public DelegateCommand OpenButterflyValveViewCommand =>
  933. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  934. //private DelegateCommand _HVCommand;
  935. //public DelegateCommand HVCommand =>
  936. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  937. private DelegateCommand _HVSetCommand;
  938. public DelegateCommand HVSetCommand =>
  939. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  940. private DelegateCommand _LoadRecipeCommand;
  941. public DelegateCommand LoadRecipeCommand =>
  942. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  943. private DelegateCommand<object> _ControlValveCommand;
  944. public DelegateCommand<object> ControlValveCommand =>
  945. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  946. private DelegateCommand<object> _RunRecipeCommand;
  947. public DelegateCommand<object> RunRecipeCommand =>
  948. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  949. private DelegateCommand<object> _SetChillerTempCommand;
  950. public DelegateCommand<object> SetChillerTempCommand =>
  951. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand<object>(OnSetChillerTemp));
  952. private DelegateCommand<object> _OnOffChillerCommand;
  953. public DelegateCommand<object> OnOffChillerCommand =>
  954. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand<object>(OnOffChiller));
  955. private DelegateCommand<object> _HeaterCommand;
  956. public DelegateCommand<object> HeaterCommand =>
  957. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  958. private DelegateCommand _EndStepCommand;
  959. public DelegateCommand EndStepCommand =>
  960. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  961. private DelegateCommand _OnlineCommand;
  962. public DelegateCommand OnlineCommand =>
  963. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  964. private DelegateCommand _OfflineCommand;
  965. public DelegateCommand OfflineCommand =>
  966. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  967. private DelegateCommand<object> _AbortRecipeCommnad;
  968. public DelegateCommand<object> AbortRecipeCommnad =>
  969. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  970. #endregion
  971. #region 构造函数
  972. public OverKepler2300ViewModel()
  973. {
  974. m_RtDataKeys = new List<string>();
  975. m_IsATM = true;
  976. ModuleName = "PMA";
  977. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  978. DispatcherTimer timer = new DispatcherTimer();
  979. timer.Interval = TimeSpan.FromSeconds(0.5);
  980. timer.Tick += timer_Tick;
  981. timer.Start();
  982. }
  983. #endregion
  984. #region 命令方法
  985. private void OnControlValve(object obj)
  986. {
  987. CommonValveControl commonValveControl = (CommonValveControl)obj;
  988. if (commonValveControl.IsCanEdit == true)
  989. {
  990. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve", Convert.ToInt32(commonValveControl.Tag.ToString()), !commonValveControl.Status);
  991. }
  992. }
  993. private void OnPMInit()
  994. {
  995. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  996. }
  997. private async void OnGas()
  998. {
  999. await Task.Run(async () =>
  1000. {
  1001. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  1002. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  1003. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  1005. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  1006. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  1007. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  1008. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  1009. await Task.Delay(1000);
  1010. object[] mfc = new object[8];
  1011. string[] mfcSetPoint = new string[8];
  1012. mfc[0] = MFC1Data.SetPoint;
  1013. mfc[1] = MFC2Data.SetPoint;
  1014. mfc[2] = MFC3Data.SetPoint;
  1015. mfc[3] = MFC4Data.SetPoint;
  1016. mfc[4] = MFC5Data.SetPoint;
  1017. mfc[5] = MFC6Data.SetPoint;
  1018. mfc[6] = MFC7Data.SetPoint;
  1019. mfc[7] = MFC8Data.SetPoint;
  1020. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1021. });
  1022. }
  1023. private void OnHe()
  1024. {
  1025. if (PVHe1ValveIsOpen == true)
  1026. {
  1027. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1028. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1029. }
  1030. else
  1031. {
  1032. if (HeIsPressureMode)
  1033. {
  1034. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1035. }
  1036. else
  1037. {
  1038. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1039. }
  1040. }
  1041. }
  1042. private void OnRf()
  1043. {
  1044. if (PMCurrentState == PMState.RfPowering)
  1045. {
  1046. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1047. }
  1048. else
  1049. {
  1050. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1051. }
  1052. }
  1053. private void OnPurge()
  1054. {
  1055. if (PMCurrentState == PMState.Purging)
  1056. {
  1057. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1058. }
  1059. else
  1060. {
  1061. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1062. }
  1063. }
  1064. private void OnVent()
  1065. {
  1066. if (PMCurrentState == PMState.Venting)
  1067. {
  1068. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1069. }
  1070. else
  1071. {
  1072. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1073. }
  1074. }
  1075. private void OnPump()
  1076. {
  1077. if (PMCurrentState == PMState.Pumping)
  1078. {
  1079. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1080. return;
  1081. }
  1082. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1083. string PumpLimitSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1084. // 设置底压
  1085. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1086. if (basePressure <= 0.01 || basePressure >= 1000)
  1087. {
  1088. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1089. return;
  1090. }
  1091. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1092. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1093. {
  1094. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1095. return;
  1096. }
  1097. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1098. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1099. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1100. }
  1101. private void OnOpenPump()
  1102. {
  1103. if (PMCurrentState == PMState.LaunchingPump)
  1104. {
  1105. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1106. return;
  1107. }
  1108. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1109. }
  1110. private void OnClosePump()
  1111. {
  1112. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1113. }
  1114. private void OnOpenTurboPump()
  1115. {
  1116. if (PMCurrentState == PMState.LaunchingTurboPump)
  1117. {
  1118. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1119. return;
  1120. }
  1121. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1122. }
  1123. private void OnCloseTurboPump()
  1124. {
  1125. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1126. }
  1127. private void OnOpenPendulumValve()
  1128. {
  1129. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", true);
  1130. }
  1131. private void OnClosePendulumValve()
  1132. {
  1133. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve", false);
  1134. }
  1135. private void OnPinUpDown(object upDown)
  1136. {
  1137. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1138. }
  1139. private void OnLidUpDown(object upDown)
  1140. {
  1141. //var value = (bool)upDown;
  1142. if (upDown.ToString() == "Up")
  1143. {
  1144. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1145. }
  1146. else
  1147. {
  1148. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1149. }
  1150. }
  1151. private async void OnSetSRf()
  1152. {
  1153. if (SRFData.IsRfOn == true)
  1154. {
  1155. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1156. }
  1157. else
  1158. {
  1159. if (GasIsFlowing == true)
  1160. {
  1161. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1162. await Task.Delay(100);
  1163. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1164. }
  1165. }
  1166. }
  1167. private async void OnSetBRf()
  1168. {
  1169. if (BRFData.IsRfOn == true)
  1170. {
  1171. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1172. }
  1173. else
  1174. {
  1175. if (GasIsFlowing == true)
  1176. {
  1177. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1178. await Task.Delay(100);
  1179. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1180. }
  1181. }
  1182. }
  1183. private void OnPMAbort()
  1184. {
  1185. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1186. }
  1187. private void OnOpenButterflyValveView()
  1188. {
  1189. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1190. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1191. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1192. butterflyValveMessageBox.Left = 700;
  1193. butterflyValveMessageBox.Top = 600;
  1194. butterflyValveMessageBox.Show();
  1195. butterflyValveMessageBox.Owner = _mainWindow;
  1196. }
  1197. private void OnLoadRecipe()
  1198. {
  1199. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1200. }
  1201. private void OnHVSet()
  1202. {
  1203. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1204. }
  1205. private void OnRunRecipe(object obj)
  1206. {
  1207. string recipeName = SelectedRecipe;
  1208. if (recipeName == null)
  1209. {
  1210. return;
  1211. }
  1212. ClearData();
  1213. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1214. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1215. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}", recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1216. }
  1217. private void OnSetChillerTemp(object obj)
  1218. {
  1219. float offset;
  1220. float setPoint;
  1221. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1222. switch (chillerType)
  1223. {
  1224. case ChillerType.Chiller:
  1225. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1226. float.TryParse(value, out offset);
  1227. setPoint = ChillerTempSetpoint;
  1228. break;
  1229. case ChillerType.InnerChiller:
  1230. var Innervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.InnerChiller.ChillerTemperatureOffset").ToString());
  1231. float.TryParse(Innervalue, out offset);
  1232. setPoint = InnerChillerTempSetpoint;
  1233. break;
  1234. case ChillerType.OuterChiller:
  1235. var Outervalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.OuterChiller.ChillerTemperatureOffset").ToString());
  1236. float.TryParse(Outervalue, out offset);
  1237. setPoint = OuterChillerTempSetpoint;
  1238. break;
  1239. case ChillerType.TopChiller:
  1240. var Topvalue = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TopChiller.ChillerTemperatureOffset").ToString());
  1241. float.TryParse(Topvalue, out offset);
  1242. setPoint = TopChillerTempSetpoint;
  1243. break;
  1244. default:
  1245. return;
  1246. }
  1247. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", chillerType.ToString(), setPoint, offset);
  1248. }
  1249. private void OnOffChiller(object obj)
  1250. {
  1251. var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), obj.ToString());
  1252. switch (chillerType)
  1253. {
  1254. case ChillerType.Chiller:
  1255. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !ChillerIsOn);
  1256. break;
  1257. case ChillerType.InnerChiller:
  1258. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !InnerChillerIsOn);
  1259. break;
  1260. case ChillerType.OuterChiller:
  1261. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !OuterChillerIsOn);
  1262. break;
  1263. case ChillerType.TopChiller:
  1264. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", chillerType.ToString(), !TopChillerIsOn);
  1265. break;
  1266. default:
  1267. return;
  1268. }
  1269. }
  1270. private void OnHeater(object obj)
  1271. {
  1272. if (IsAutoMode == true)
  1273. {
  1274. return;
  1275. }
  1276. AITHeaterData heaterData = obj as AITHeaterData;
  1277. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1278. heaterView = new HeaterView(heaterData, ModuleName);
  1279. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1280. heaterView.Owner = _mainWindow;
  1281. heaterView.Show();
  1282. }
  1283. private void OnEndStep()
  1284. {
  1285. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1286. {
  1287. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1288. }
  1289. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1290. {
  1291. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1292. }
  1293. }
  1294. private void OnOnline()
  1295. {
  1296. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1297. }
  1298. private void OnOffline()
  1299. {
  1300. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1301. }
  1302. private async void OnAbortRecipe(object obj)
  1303. {
  1304. if (PMCurrentState != PMState.Processing)
  1305. {
  1306. return;
  1307. }
  1308. switch (obj.ToString())
  1309. {
  1310. case "0":
  1311. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1312. break;
  1313. case "1":
  1314. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1315. //if (ESCHVData.IsOn == true)
  1316. //{
  1317. // await Task.Delay(3000);
  1318. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1319. //}
  1320. break;
  1321. case "2":
  1322. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1323. break;
  1324. }
  1325. }
  1326. #endregion
  1327. #region 私有方法
  1328. private void ClearData()
  1329. {
  1330. ESCVoltage = 0;
  1331. SRFFwdPowerSetpoint = 0;
  1332. SRFMatchC1 = 0;
  1333. SRFMatchC2 = 0;
  1334. BRFFwdPowerSetpoint = 0;
  1335. BRFMatchC1 = 0;
  1336. BRFMatchC2 = 0;
  1337. HeGasSetpoint = 0;
  1338. MFC1SetPoint = 0;
  1339. MFC2SetPoint = 0;
  1340. MFC3SetPoint = 0;
  1341. MFC4SetPoint = 0;
  1342. MFC5SetPoint = 0;
  1343. MFC6SetPoint = 0;
  1344. MFC7SetPoint = 0;
  1345. MFC8SetPoint = 0;
  1346. }
  1347. private IEnumerable<string> GetFilesNames(string path)
  1348. {
  1349. return Directory.GetFiles(path, "*.rcp")
  1350. .Select(Path.GetFileNameWithoutExtension);
  1351. }
  1352. void timer_Tick(object sender, EventArgs e)
  1353. {
  1354. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1355. if (RtDataValues == null)
  1356. {
  1357. return;
  1358. }
  1359. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1360. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1361. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1362. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1363. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1364. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1365. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1366. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1367. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1368. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1369. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1370. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1371. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1372. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1373. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1374. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1375. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1376. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1377. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1378. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1379. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1380. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1381. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1382. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1383. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1384. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1385. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1386. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1387. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1388. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1389. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1390. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1391. LiftPinIsUp = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1392. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1393. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1394. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.GetPVPosition");
  1395. TurboPumpRotationalSpeed = Convert.ToInt32(RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1396. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1397. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1398. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1399. IsProcessing = PMCurrentState == PMState.Processing;
  1400. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1401. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1402. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1403. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1404. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1405. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1406. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1407. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1408. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1409. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1410. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1411. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1412. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1413. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1414. ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1415. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1416. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1417. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1418. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1419. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1420. ForelinePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ForelinePressure");
  1421. ESCHePressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ESCHePressure");
  1422. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1423. InnerTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerInnerTemp");
  1424. OuterTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerOuterTemp");
  1425. TopTemperature = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ChillerTopTemp");
  1426. InnerChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.InnerChiller.IsOn");
  1427. OuterChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.OuterChiller.IsOn");
  1428. TopChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TopChiller.IsOn");
  1429. SourceRFFanInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFFanInterlock");
  1430. IsWLK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1431. IsWaterFlowOk = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1432. IsTurboPumpInterlock = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1433. IsCDAOK = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1434. SensorGasBoxDoor = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1435. SensorGasBoxPressure = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1436. IsATM = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1437. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1438. ESCHVOutputVoltage = CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1439. MatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C1");
  1440. MatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.C2");
  1441. BiasMatchC1 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1442. BiasMatchC2 = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1443. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1444. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1445. IsHasWafer = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1446. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1447. {
  1448. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1449. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1450. {
  1451. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,CurrentRecipeResult.RecipeType, CurrentRecipeResult.RecipeName + ".rcp");
  1452. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1453. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1454. }
  1455. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1456. }
  1457. else
  1458. {
  1459. CurrentRecipeResult = null;
  1460. CurrentRecipeStep = null;
  1461. }
  1462. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure < 100)
  1463. {
  1464. ChamberPressureFeedBack = ProcessLowPressure;
  1465. }
  1466. else
  1467. {
  1468. ChamberPressureFeedBack = ProcessHighPressure;
  1469. }
  1470. IsAutoMode= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsOnline");
  1471. }
  1472. public void addDataKeys()
  1473. {
  1474. m_RtDataKeys.Clear();
  1475. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1476. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1477. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1478. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1479. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1480. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1481. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1482. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1483. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1484. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1485. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1486. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1487. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1488. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1489. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1490. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1491. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1492. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1493. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1494. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1495. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1496. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1497. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1498. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1499. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1500. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1501. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1502. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1503. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1504. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1505. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1506. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1507. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1508. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1509. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1510. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1511. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1512. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1513. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1514. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1515. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1516. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1517. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1518. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1519. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1520. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1521. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1523. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1524. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1525. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1526. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1527. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1528. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1529. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1530. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1531. // m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1532. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1533. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1534. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1535. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1536. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1537. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1538. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1539. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1540. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1541. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1542. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1543. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1544. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1545. m_RtDataKeys.Add($"{ModuleName}.InnerChiller.IsOn");
  1546. m_RtDataKeys.Add($"{ModuleName}.OuterChiller.IsOn");
  1547. m_RtDataKeys.Add($"{ModuleName}.TopChiller.IsOn");
  1548. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1549. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1550. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1551. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1552. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1553. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1554. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1555. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1556. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1557. m_RtDataKeys.Add($"{ModuleName}.ChillerInnerTemp");
  1558. m_RtDataKeys.Add($"{ModuleName}.ChillerOuterTemp");
  1559. m_RtDataKeys.Add($"{ModuleName}.ChillerTopTemp");
  1560. m_RtDataKeys.Add($"{ModuleName}.IsOnline");
  1561. }
  1562. #endregion
  1563. }
  1564. }