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EFEM
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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LLs
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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LPs
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9e9459c927
efem界面按钮功能优化
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10 months ago |
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PMs
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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09e8c5db30
Fix the post clean not running bug.
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9 months ago |
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TM
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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VCE
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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1 year ago |
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Autotransfer_LP_FA.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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10 months ago |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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9 months ago |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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RouteManager.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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9 months ago |
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SEManualTransfer.cs
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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9 months ago |
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SETMCycle.cs
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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9 months ago |
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SystemDispatcher.cs
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ec6ba70d8e
Parallel routing algorithm for kepler/venus.
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9 months ago |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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VenusDispatcher.cs
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5163d9153b
Fix the double place to lp bug while destinations are different loadports.
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9 months ago |
lixiang
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因