Kepler-Release/Venus/Venus_RT/Config/Interlock.Venus.xml

<?xml version="1.0" encoding="utf-16"?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  
  <Action do="PMA.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
	<Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
	<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
	<Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
	<Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-33" />
	<Limit di="PMA.DI_PN2_Pressure_SW"     value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-34" />
  </Action>

  <Action do="PMA.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"          tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_PN2_Pressure_SW"     value="true" tip="DI PN2 Pressure SW"       tip.zh-CN="" tip.en-US="DI-34" />
  </Action>
  
  <Action do="PMA.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"          tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC1_Pressure_SW"    value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
  </Action>

  <Action do="PMA.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"          tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC1_Pressure_SW"    value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
  </Action>

  <Action do="PMA.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC2_Pressure_SW"    value="true" tip="DI MFC2 Pressure SW"    tip.zh-CN="" tip.en-US="DI-36" />
  </Action>

  <Action do="PMA.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC2_Pressure_SW"    value="true" tip="DI MFC2 Pressure SW"    tip.zh-CN="" tip.en-US="DI-36" />
  </Action>
  
  <Action do="PMA.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
  </Action>

  <Action do="PMA.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
  </Action>

  <Action do="PMA.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
  </Action>
  
  <Action do="PMA.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
  </Action>

  <Action do="PMA.DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
	  <Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
  </Action>

	<Action do="PMA.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC1_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-35" />
	</Action>

	<Action do="PMA.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-36" />
	</Action>

	<Action do="PMA.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
	</Action>

	<Action do="PMA.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
	</Action>

	<Action do="PMA.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC5_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-39" />
	</Action>

	<Action do="PMA.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC6_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-40" />
	</Action>

	<Action do="PMA.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC7_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-41" />
	</Action>

	<Action do="PMA.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC8_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-42" />
	</Action>

	<Action do="PMA.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
	</Action>

	<Action do="PMA.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
	</Action>

	<Action do="PMA.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN="" tip.en-US="DO-21" >
		<Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI PM Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
	</Action>

	<Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI  Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-28" />
		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-29" />
	</Action>

	<Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-28" />
		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-29" />
	</Action>

	<Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
		<Limit di="PMA.DI_Loadlock_Arm_Retract_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-47" />
	</Action>

	<Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
		<Limit di="PMA.DI_Loadlock_Arm_Retract_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-47" />
	</Action>

	<Action do="PMA.DO_CHB_Purge_Valve" value="true" tip="CHB Purge Valve" tip.zh-CN="" tip.en-US="DO-28" >
		<Limit di="PMA.DI_CDA_Pressure"    value="true" tip="DI CDA Pressure"     tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI PN2 Pressure SW"  tip.zh-CN="" tip.en-US="DI-34" />
		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DO CHB Purge Valve" tip.zh-CN="" tip.en-US="DO-22" />
		<Limit do="PMA.DO_CHB_Vent_Valve"  value="false" tip="DO CHB Vent Valve"  tip.zh-CN="" tip.en-US="DO-23" />
	</Action>
	
	<Action do="PMA.DO_CHB_Vent_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-29" >
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-22" />
		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-23" />
	</Action>

	<Action do="PMA.DO_Loadlock_Pumping_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-42" >
		<Limit do="PMA.DO_Loadlock_Pumping_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-42" />
	</Action>

	<Action do="PMA.DO_Loadlock_Vent_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-43" >
		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-29" />
	</Action>

	<Action do="PMA.DO_Loadlock_Arm_Extend" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-44" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_Slit_Door_Open_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-10" />
		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
	</Action>

	<!--<Action ao="PMA.AO_MFC1_Flow_Setpoint" value="true" tip="AO_MFC1_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-0" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC1_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-35" />
	</Action>

	<Action ao="PMA.AO_MFC2_Flow_Setpoint" value="true" tip="AO_MFC2_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-1" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-36" />
	</Action>

	<Action ao="PMA.AO_MFC3_Flow_Setpoint" value="true" tip="AO_MFC3_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-2" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
	</Action>

	<Action ao="PMA.AO_MFC4_Flow_Setpoint" value="true" tip="AO_MFC4_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-3" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
	</Action>

	<Action ao="PMA.AO_MFC5_Flow_Setpoint" value="true" tip="AO_MFC5_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-4" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC5_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-39" />
	</Action>

	<Action ao="PMA.AO_MFC6_Flow_Setpoint" value="true" tip="AO_MFC6_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-5" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC6_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-40" />
	</Action>

	<Action ao="PMA.AO_MFC7_Flow_Setpoint" value="true" tip="AO_MFC7_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-6" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC7_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-41" />
	</Action>

	<Action ao="PMA.AO_MFC8_Flow_Setpoint" value="true" tip="AO_MFC8_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-7" >
		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
		<Limit di="PMA.DI_MFC8_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-42" />
	</Action>
	
		<Action ao="PMA.AO_He_Flow_Setpoint" value="true" tip="AO_He_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-8" >
			<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
			<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
			<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
			<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
			<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
			<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
		</Action>

		<Action ao="PMA.AO_Turbo_Pump_N2_Flow_Setpoint" value="true" tip="AO_Turbo_Pump_N2_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-9" >
			<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
		    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
			<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
			<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
			<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
			<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
		</Action>-->
	
</Interlock>