Inicio Explorar Axuda
Rexistro Iniciar sesión
JetPlasma
/
Kepler-Release
Seguir 2
Destacar 0
Fork 0
Ficheiros Incidencias 0 Pull Requests 0 Wiki
Árbore: 3f916cd203
Ramas Etiquetas
Kepler-Release
/
Venus
/
Venus_RT
/
Config
/
Interlock.Venus.xml

Interlock.Venus.xml 55 KB
Histórico Raw

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347 
  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3.   
    4. 

  4.   <Action do="PMA.DO_PVN21" value="true" tip="PVN21" tip.zh-CN=""  tip.en-US="DO-0" >
    5. 

  5. 	<Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    6. 

  6.     <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
    7. 

  7. 	<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    8. 

  8. 	<Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    9. 

  9. 	<Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-33" />
    10. 

  10. 	<Limit di="PMA.DI_PN2_Pressure_SW"     value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-34" />
    11. 

  11.   </Action>
    12. 

  12. 

  13.   <Action do="PMA.DO_PVN22"  value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
    14. 

  14. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    15. 

  15. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
    16. 

  16. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    17. 

  17. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    18. 

  18. 	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"          tip.zh-CN="" tip.en-US="DI-33" />
    19. 

  19. 	  <Limit di="PMA.DI_PN2_Pressure_SW"     value="true" tip="DI PN2 Pressure SW"       tip.zh-CN="" tip.en-US="DI-34" />
    20. 

  20.   </Action>
    21. 

  21.   
    22. 

  22.   <Action do="PMA.DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
    23. 

  23. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    24. 

  24. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
    25. 

  25. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    26. 

  26. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    27. 

  27. 	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"          tip.zh-CN="" tip.en-US="DI-33" />
    28. 

  28. 	  <Limit di="PMA.DI_MFC1_Pressure_SW"    value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
    29. 

  29.   </Action>
    30. 

  30. 

  31.   <Action do="PMA.DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
    32. 

  32. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"            tip.zh-CN="" tip.en-US="DI-0" />
    33. 

  33. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"             tip.zh-CN="" tip.en-US="DI-2" />
    34. 

  34. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS"   tip.zh-CN="" tip.en-US="DI-11" />
    35. 

  35. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"          tip.zh-CN="" tip.en-US="DI-12" />
    36. 

  36. 	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"          tip.zh-CN="" tip.en-US="DI-33" />
    37. 

  37. 	  <Limit di="PMA.DI_MFC1_Pressure_SW"    value="true" tip="DI MFC1 Pressure SW"      tip.zh-CN="" tip.en-US="DI-35" />
    38. 

  38.   </Action>
    39. 

  39. 

  40.   <Action do="PMA.DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
    41. 

  41. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    42. 

  42. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
    43. 

  43. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    44. 

  44. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    45. 

  45. 	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-33" />
    46. 

  46. 	  <Limit di="PMA.DI_MFC2_Pressure_SW"    value="true" tip="DI MFC2 Pressure SW"    tip.zh-CN="" tip.en-US="DI-36" />
    47. 

  47.   </Action>
    48. 

  48. 

  49.   <Action do="PMA.DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
    50. 

  50. 	  <Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    51. 

  51. 	  <Limit di="PMA.DI_PM_VAC_SW"           value="true" tip="DI PM VAC SW"           tip.zh-CN="" tip.en-US="DI-2" />
    52. 

  52. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    53. 

  53. 	  <Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    54. 

  54. 	  <Limit di="PMA.DI_GB_Interlock"        value="true" tip="DI GB Interlock"        tip.zh-CN="" tip.en-US="DI-33" />
    55. 

  55. 	  <Limit di="PMA.DI_MFC2_Pressure_SW"    value="true" tip="DI MFC2 Pressure SW"    tip.zh-CN="" tip.en-US="DI-36" />
    56. 

  56.   </Action>
    57. 

  57.   
    58. 

  58.   <Action do="PMA.DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
    59. 

  59. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    60. 

  60. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    61. 

  61. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    62. 

  62. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    63. 

  63. 	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    64. 

  64. 	  <Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    65. 

  65.   </Action>
    66. 

  66. 

  67.   <Action do="PMA.DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
    68. 

  68. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    69. 

  69. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    70. 

  70. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    71. 

  71. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    72. 

  72. 	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    73. 

  73. 	  <Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    74. 

  74.   </Action>
    75. 

  75. 

  76.   <Action do="PMA.DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
    77. 

  77. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    78. 

  78. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    79. 

  79. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    80. 

  80. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    81. 

  81. 	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    82. 

  82. 	  <Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    83. 

  83.   </Action>
    84. 

  84.   
    85. 

  85.   <Action do="PMA.DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
    86. 

  86. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    87. 

  87. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    88. 

  88. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    89. 

  89. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    90. 

  90. 	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    91. 

  91. 	  <Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    92. 

  92.   </Action>
    93. 

  93. 

  94.   <Action do="PMA.DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
    95. 

  95. 	  <Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    96. 

  96. 	  <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    97. 

  97. 	  <Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    98. 

  98. 	  <Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    99. 

  99. 	  <Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    100. 

  100. 	  <Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
    101. 

  101.   </Action>
    102. 

  102. 

  103. 	<Action do="PMA.DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
    104. 

  104. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    105. 

  105. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    106. 

  106. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    107. 

  107. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    108. 

  108. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    109. 

  109. 		<Limit di="PMA.DI_MFC1_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-35" />
    110. 

  110. 	</Action>
    111. 

  111. 

  112. 	<Action do="PMA.DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
    113. 

  113. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    114. 

  114. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    115. 

  115. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    116. 

  116. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    117. 

  117. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    118. 

  118. 		<Limit di="PMA.DI_MFC2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-36" />
    119. 

  119. 	</Action>
    120. 

  120. 

  121. 	<Action do="PMA.DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
    122. 

  122. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    123. 

  123. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    124. 

  124. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    125. 

  125. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    126. 

  126. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    127. 

  127. 		<Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    128. 

  128. 	</Action>
    129. 

  129. 

  130. 	<Action do="PMA.DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
    131. 

  131. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    132. 

  132. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    133. 

  133. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    134. 

  134. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    135. 

  135. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    136. 

  136. 		<Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    137. 

  137. 	</Action>
    138. 

  138. 

  139. 	<Action do="PMA.DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
    140. 

  140. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    141. 

  141. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    142. 

  142. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    143. 

  143. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    144. 

  144. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    145. 

  145. 		<Limit di="PMA.DI_MFC5_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-39" />
    146. 

  146. 	</Action>
    147. 

  147. 

  148. 	<Action do="PMA.DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
    149. 

  149. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    150. 

  150. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    151. 

  151. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    152. 

  152. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    153. 

  153. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    154. 

  154. 		<Limit di="PMA.DI_MFC6_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-40" />
    155. 

  155. 	</Action>
    156. 

  156. 

  157. 	<Action do="PMA.DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
    158. 

  158. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    159. 

  159. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    160. 

  160. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    161. 

  161. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    162. 

  162. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    163. 

  163. 		<Limit di="PMA.DI_MFC7_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-41" />
    164. 

  164. 	</Action>
    165. 

  165. 

  166. 	<Action do="PMA.DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
    167. 

  167. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    168. 

  168. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    169. 

  169. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    170. 

  170. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    171. 

  171. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    172. 

  172. 		<Limit di="PMA.DI_MFC8_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-42" />
    173. 

  173. 	</Action>
    174. 

  174. 

  175. 	<Action do="PMA.DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
    176. 

  176. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    177. 

  177. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    178. 

  178. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    179. 

  179. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    180. 

  180. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    181. 

  181. 		<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
    182. 

  182. 	</Action>
    183. 

  183. 

  184. 	<Action do="PMA.DO_PVHe2" value="true" tip="PVHe2" tip.zh-CN="" tip.en-US="DO-20" >
    185. 

  185. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    186. 

  186. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    187. 

  187. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    188. 

  188. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    189. 

  189. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    190. 

  190. 		<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
    191. 

  191. 	</Action>
    192. 

  192. 

  193. 	<Action do="PMA.DO_Gas_Final_Valve" value="true" tip="Gas Final Valve" tip.zh-CN="" tip.en-US="DO-21" >
    194. 

  194. 		<Limit di="PMA.DI_PM_Lid_Closed"       value="true" tip="DI PM Lid Closed"          tip.zh-CN="" tip.en-US="DI-0" />
    195. 

  195. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
    196. 

  196. 		<Limit di="PMA.DI_CDA_Pressure"        value="true" tip="DI CDA Pressure"        tip.zh-CN="" tip.en-US="DI-12" />
    197. 

  197. 	</Action>
    198. 

  198. 

  199. 	<Action do="PMA.DO_Soft_Pumping_Valve" value="true" tip="Soft Pumping Valve" tip.zh-CN="" tip.en-US="DO-22" >
    200. 

  200. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    201. 

  201. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI  Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    202. 

  202. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    203. 

  203. 		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-28" />
    204. 

  204. 		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-29" />
    205. 

  205. 	</Action>
    206. 

  206. 

  207. 	<Action do="PMA.DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" >
    208. 

  208. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    209. 

  209. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    210. 

  210. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    211. 

  211. 		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-28" />
    212. 

  212. 		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-29" />
    213. 

  213. 	</Action>
    214. 

  214. 

  215. 	<Action do="PMA.DO_Slit_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
    216. 

  216. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    217. 

  217. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    218. 

  218. 		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
    219. 

  219. 		<Limit di="PMA.DI_Loadlock_Arm_Retract_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-47" />
    220. 

  220. 	</Action>
    221. 

  221. 

  222. 	<Action do="PMA.DO_Slit_Door_Close" value="true" tip="Slit Door Close" tip.zh-CN="" tip.en-US="DO-25" >
    223. 

  223. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI PM Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    224. 

  224. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    225. 

  225. 		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
    226. 

  226. 		<Limit di="PMA.DI_Loadlock_Arm_Retract_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-47" />
    227. 

  227. 	</Action>
    228. 

  228. 

  229. 	<Action do="PMA.DO_CHB_Purge_Valve" value="true" tip="CHB Purge Valve" tip.zh-CN="" tip.en-US="DO-28" >
    230. 

  230. 		<Limit di="PMA.DI_CDA_Pressure"    value="true" tip="DI CDA Pressure"     tip.zh-CN="" tip.en-US="DI-12" />
    231. 

  231. 		<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI PN2 Pressure SW"  tip.zh-CN="" tip.en-US="DI-34" />
    232. 

  232. 		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DO CHB Purge Valve" tip.zh-CN="" tip.en-US="DO-22" />
    233. 

  233. 		<Limit do="PMA.DO_CHB_Vent_Valve"  value="false" tip="DO CHB Vent Valve"  tip.zh-CN="" tip.en-US="DO-23" />
    234. 

  234. 	</Action>
    235. 

  235. 	
    236. 

  236. 	<Action do="PMA.DO_CHB_Vent_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-29" >
    237. 

  237. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    238. 

  238. 		<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
    239. 

  239. 		<Limit do="PMA.DO_CHB_Purge_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-22" />
    240. 

  240. 		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-23" />
    241. 

  241. 	</Action>
    242. 

  242. 

  243. 	<Action do="PMA.DO_Loadlock_Pumping_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-42" >
    244. 

  244. 		<Limit do="PMA.DO_Loadlock_Pumping_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-42" />
    245. 

  245. 	</Action>
    246. 

  246. 

  247. 	<Action do="PMA.DO_Loadlock_Vent_Valve" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-43" >
    248. 

  248. 		<Limit do="PMA.DO_CHB_Vent_Valve" value="false" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DO-29" />
    249. 

  249. 	</Action>
    250. 

  250. 

  251. 	<Action do="PMA.DO_Loadlock_Arm_Extend" value="true" tip="Process gas final valve" tip.zh-CN="" tip.en-US="DO-44" >
    252. 

  252. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    253. 

  253. 		<Limit di="PMA.DI_Slit_Door_Open_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-10" />
    254. 

  254. 		<Limit di="PMA.DI_Loadlock_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-45" />
    255. 

  255. 	</Action>
    256. 

  256. 

  257. 	<!--<Action ao="PMA.AO_MFC1_Flow_Setpoint" value="true" tip="AO_MFC1_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-0" >
    258. 

  258. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    259. 

  259. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    260. 

  260. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    261. 

  261. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    262. 

  262. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    263. 

  263. 		<Limit di="PMA.DI_MFC1_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-35" />
    264. 

  264. 	</Action>
    265. 

  265. 

  266. 	<Action ao="PMA.AO_MFC2_Flow_Setpoint" value="true" tip="AO_MFC2_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-1" >
    267. 

  267. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    268. 

  268. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    269. 

  269. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    270. 

  270. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    271. 

  271. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    272. 

  272. 		<Limit di="PMA.DI_MFC2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-36" />
    273. 

  273. 	</Action>
    274. 

  274. 

  275. 	<Action ao="PMA.AO_MFC3_Flow_Setpoint" value="true" tip="AO_MFC3_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-2" >
    276. 

  276. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    277. 

  277. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    278. 

  278. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    279. 

  279. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    280. 

  280. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    281. 

  281. 		<Limit di="PMA.DI_MFC3_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-37" />
    282. 

  282. 	</Action>
    283. 

  283. 

  284. 	<Action ao="PMA.AO_MFC4_Flow_Setpoint" value="true" tip="AO_MFC4_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-3" >
    285. 

  285. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    286. 

  286. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    287. 

  287. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    288. 

  288. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    289. 

  289. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    290. 

  290. 		<Limit di="PMA.DI_MFC4_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-38" />
    291. 

  291. 	</Action>
    292. 

  292. 

  293. 	<Action ao="PMA.AO_MFC5_Flow_Setpoint" value="true" tip="AO_MFC5_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-4" >
    294. 

  294. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    295. 

  295. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    296. 

  296. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    297. 

  297. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    298. 

  298. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    299. 

  299. 		<Limit di="PMA.DI_MFC5_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-39" />
    300. 

  300. 	</Action>
    301. 

  301. 

  302. 	<Action ao="PMA.AO_MFC6_Flow_Setpoint" value="true" tip="AO_MFC6_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-5" >
    303. 

  303. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    304. 

  304. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    305. 

  305. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    306. 

  306. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    307. 

  307. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    308. 

  308. 		<Limit di="PMA.DI_MFC6_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-40" />
    309. 

  309. 	</Action>
    310. 

  310. 

  311. 	<Action ao="PMA.AO_MFC7_Flow_Setpoint" value="true" tip="AO_MFC7_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-6" >
    312. 

  312. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    313. 

  313. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    314. 

  314. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    315. 

  315. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    316. 

  316. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    317. 

  317. 		<Limit di="PMA.DI_MFC7_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-41" />
    318. 

  318. 	</Action>
    319. 

  319. 

  320. 	<Action ao="PMA.AO_MFC8_Flow_Setpoint" value="true" tip="AO_MFC8_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-7" >
    321. 

  321. 		<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    322. 

  322. 		<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    323. 

  323. 		<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    324. 

  324. 		<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    325. 

  325. 		<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    326. 

  326. 		<Limit di="PMA.DI_MFC8_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-42" />
    327. 

  327. 	</Action>
    328. 

  328. 	
    329. 

  329. 		<Action ao="PMA.AO_He_Flow_Setpoint" value="true" tip="AO_He_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-8" >
    330. 

  330. 			<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    331. 

  331. 			<Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    332. 

  332. 			<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    333. 

  333. 			<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    334. 

  334. 			<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    335. 

  335. 			<Limit di="PMA.DI_He_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-43" />
    336. 

  336. 		</Action>
    337. 

  337. 

  338. 		<Action ao="PMA.AO_Turbo_Pump_N2_Flow_Setpoint" value="true" tip="AO_Turbo_Pump_N2_Flow_Setpoint" tip.zh-CN="" tip.en-US="AO-9" >
    339. 

  339. 			<Limit di="PMA.DI_PM_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
    340. 

  340. 		    <Limit di="PMA.DI_PM_VAC_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-2" />
    341. 

  341. 			<Limit di="PMA.DI_Slit_Door_Close_POS" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-11" />
    342. 

  342. 			<Limit di="PMA.DI_CDA_Pressure" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-12" />
    343. 

  343. 			<Limit di="PMA.DI_GB_Interlock" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-33" />
    344. 

  344. 			<Limit di="PMA.DI_PN2_Pressure_SW" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-34" />
    345. 

  345. 		</Action>-->
    346. 

  346. 	
    347. 

  347. </Interlock>
    348.