JetPM.cs 35 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.RT.Log;
  7. using MECF.Framework.Common.Device.Bases;
  8. using MECF.Framework.Common.Equipment;
  9. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  10. using System;
  11. using System.Collections.Generic;
  12. using Venus_Core;
  13. using Venus_RT.Devices.IODevices;
  14. using Venus_RT.Devices.EPD;
  15. using Aitex.Core.RT.DataCenter;
  16. using Aitex.Core.RT.OperationCenter;
  17. namespace Venus_RT.Devices
  18. {
  19. enum ValveType
  20. {
  21. PVN21,
  22. PVN22,
  23. PV11,
  24. PV12,
  25. PV21,
  26. PV22,
  27. PV31,
  28. PV32,
  29. PV41,
  30. PV42,
  31. N2,
  32. Mfc1,
  33. Mfc2,
  34. Mfc3,
  35. Mfc4,
  36. Mfc5,
  37. Mfc6,
  38. Mfc7,
  39. Mfc8,
  40. PVHe1,
  41. PVHe2,
  42. GasFinal,
  43. SoftPump,
  44. FastPump,
  45. CHBPurge,
  46. TurboPumpPumping,
  47. TurboPumpPurge,
  48. Guage,
  49. LoadlockVent,
  50. LoadlockPumping
  51. }
  52. class JetPM : PM
  53. {
  54. private readonly IoLid _Lid;
  55. private readonly IoLid _LidLoadlock;
  56. private readonly IoCylinder _slitDoor;
  57. private readonly IoCylinder _LiftPin;
  58. private readonly IoCylinder _LoadLockArm;
  59. private readonly IoValve _PVN21Valve;
  60. private readonly IoValve _PVN22Valve;
  61. private readonly IoValve _PV11Valve;
  62. private readonly IoValve _PV12Valve;
  63. private readonly IoValve _PV21Valve;
  64. private readonly IoValve _PV22Valve;
  65. private readonly IoValve _PV31Valve;
  66. private readonly IoValve _PV32Valve;
  67. private readonly IoValve _PV41Valve;
  68. private readonly IoValve _PV42Valve;
  69. private readonly IoValve _N2Valve;
  70. private readonly IoValve _Mfc1Valve;
  71. private readonly IoValve _Mfc2Valve;
  72. private readonly IoValve _Mfc3Valve;
  73. private readonly IoValve _Mfc4Valve;
  74. private readonly IoValve _Mfc5Valve;
  75. private readonly IoValve _Mfc6Valve;
  76. private readonly IoValve _Mfc7Valve;
  77. private readonly IoValve _Mfc8Valve;
  78. private readonly IoValve _PVHe1Valve;
  79. private readonly IoValve _PVHe2Valve;
  80. private readonly IoValve _GasFinalValve;
  81. private readonly IoValve _SoftPumpValve;
  82. private readonly IoValve _FastPumpValve;
  83. private readonly IoValve _TurboPumpPumpingValve;
  84. private readonly IoValve _TurboPumpPurgeValve;
  85. private readonly IoValve _GuageValve;
  86. private readonly IoValve _LoadlockVentValve;
  87. private readonly IoValve _LoadlockPumpingValve;
  88. private readonly IoSensor _ATM_sw;
  89. private readonly IoSensor _CDAPressure;
  90. private readonly IoSensor _ATM_Loadlock_sw;
  91. private readonly IoSensor _N2Pressure_sw;
  92. private readonly IoSensor _VAC_sw;
  93. private readonly IoSensor _WLK_sw;
  94. private readonly IoSensor _Water_Flow;
  95. private readonly IoSensor _RFG_Interlock;
  96. private readonly IoSensor _PM_Lid_Closed;
  97. private readonly IoSensor _Source_RF_Fan;
  98. private readonly IoSensor _PM_SlitDoor_Closed;
  99. private readonly IoSensor _TurboPumpInterlock;
  100. private readonly PumpBase _MainPump;
  101. private readonly ESC5HighVoltage _ESCHV;
  102. private readonly AdixenTurboPump _TurboPump;
  103. private readonly PendulumValve _pendulumValve;
  104. private readonly ChillerBase _Chiller;
  105. private readonly RfPowerBase _Generator;//srf=>AdTecGenerator
  106. private readonly RfPowerBase _GeneratorBias;//brf=>CometRF
  107. private readonly RfMatchBase _Match;
  108. private readonly IoSignalTower _SignalTower;
  109. private readonly IoHeater _ForelineTC;
  110. private readonly IoPressureControl _pressureController;
  111. private readonly IoGasStick[] _gasLines;
  112. private readonly IoGasStick _gasLineN2;
  113. private readonly IoBacksideHe _backsideHe;
  114. // EndPoint
  115. private readonly EPDClient _epdClient;
  116. private readonly double _foreline_interlock_pressure = 750;
  117. public List<string> EPDCfgList => _epdClient.CFGFileList;
  118. public bool EPDCaptured => _epdClient.Captured;
  119. public bool EPDConnected => _epdClient.IsEPDConnected;
  120. // 盖子的状态
  121. public bool IsLidClosed => _Lid.OFFFeedback;
  122. public bool IsLidLoadlockClosed => _LidLoadlock.OFFFeedback;
  123. public bool IsSlitDoorClosed => !_slitDoor.ONFeedback && _slitDoor.OFFFeedback;
  124. public bool IsPumpRunning => _MainPump.IsRunning;
  125. public bool IsTurboPumpRunning => _TurboPump.IsRunning;
  126. public bool IsTurboPumpAtSpeed => _TurboPump.AtSpeed;
  127. public bool HasPumpError => _MainPump.IsError || !_MainPump.IsRunning;
  128. public bool HasTurboPumpError => _TurboPump.IsError || !_TurboPump.IsRunning;
  129. public bool IsCDA_OK => _CDAPressure.Value;
  130. public bool IsFastPumpOpened => _FastPumpValve.Status;
  131. public bool IsSoftPumpOpened => _SoftPumpValve.Status;
  132. public bool IsMfc1ValveOpened => _Mfc1Valve.Status;
  133. public bool IsMfc2ValveOpened => _Mfc2Valve.Status;
  134. public bool IsMfc3ValveOpened => _Mfc3Valve.Status;
  135. public bool IsMfc4ValveOpened => _Mfc4Valve.Status;
  136. public bool IsMfc5ValveOpened => _Mfc5Valve.Status;
  137. public bool IsMfc6ValveOpened => _Mfc6Valve.Status;
  138. public bool IsMfc7ValveOpened => _Mfc7Valve.Status;
  139. public bool IsMfc8ValveOpened => _Mfc8Valve.Status;
  140. // 压力信号
  141. public bool IsATM => _ATM_sw.Value;
  142. public bool LiftPinIsDown => _LiftPin.OFFFeedback;
  143. public bool LiftPinIsUp => _LiftPin.ONFeedback;
  144. public bool IsATMLoadlock => _ATM_Loadlock_sw.Value;
  145. public bool IsVACLoadLock => LoadlockPressure <= 1000;
  146. public bool IsVAC => _VAC_sw.Value;
  147. public bool IsWaterFlowOk => _Water_Flow.Value;
  148. public bool IsWLK => _WLK_sw.Value;
  149. public bool IsRFGInterlockOn => _RFG_Interlock.Value;
  150. public bool PMLidClosed => _PM_Lid_Closed.Value;
  151. public bool TurboPumpInterlock => _TurboPumpInterlock.Value;
  152. public bool SourceRFFanInterlock => _Source_RF_Fan.Value;
  153. public bool SlitDoorClosed => _PM_SlitDoor_Closed.Value;
  154. public double ProcessPressure => _pressureController.ProcessGauge.Value;
  155. public override double ChamberPressure => _pressureController.PressureGauge.Value;
  156. public double ForelinePressure => _pressureController.ForelineGauge.Value;
  157. public double TargetPressure => _pressureController.TargetPressure;
  158. public double LoadlockPressure => _pressureController.LoadLockGauge.Value;
  159. public double ESCHePressure => _pressureController.ESCHeGauge.Value;
  160. public float CoolantInletTempFB => _Chiller.CoolantInletTcFeedback;
  161. public float CoolantOutletTempFB => _Chiller.CoolantOutletTcFeedback;
  162. //Loadlock_Arm
  163. public bool IsLoadlockArmRetract => _LoadLockArm.OFFFeedback;
  164. public bool IsLoadlockArmExtend => _LoadLockArm.ONFeedback;
  165. //Loadlock_Arm DO
  166. public bool LoadlockArmRetract => _LoadLockArm.OFFSetPoint;
  167. public bool LoadlockArmExtend => _LoadLockArm.ONSetPoint;
  168. public float ReflectPower => _Generator.ReflectPower;
  169. public float BiasReflectPower => _GeneratorBias.ReflectPower;
  170. public bool BackSideHeOutOfRange => _backsideHe.OutOfRange;
  171. public new ModuleName Module { get; }
  172. public MovementPosition LiftPinPosition
  173. {
  174. get
  175. {
  176. MovementPosition pos = MovementPosition.Unknown;
  177. if (_LiftPin.ONFeedback && !_LiftPin.OFFFeedback)
  178. {
  179. pos = MovementPosition.Up;
  180. }
  181. else if (!_LiftPin.ONFeedback && _LiftPin.OFFFeedback)
  182. {
  183. pos = MovementPosition.Down;
  184. }
  185. return pos;
  186. }
  187. }
  188. public override bool CheckAtm()
  189. {
  190. return _ATM_sw.Value && ChamberPressure > 700000;
  191. }
  192. public bool CheckSlitDoorOpen()
  193. {
  194. return _slitDoor.State == CylinderState.Open;
  195. }
  196. public bool CheckSlitDoorClose()
  197. {
  198. return _slitDoor.State == CylinderState.Close;
  199. }
  200. public bool CheckLiftUp()
  201. {
  202. return _LiftPin.State == CylinderState.Open;
  203. }
  204. public bool CheckLiftDown()
  205. {
  206. return _LiftPin.State == CylinderState.Close;
  207. }
  208. public double TotalGasSetpoint
  209. {
  210. get
  211. {
  212. double sum = 0;
  213. foreach (var gas in _gasLines)
  214. {
  215. sum += gas.FlowSP;
  216. }
  217. return sum;
  218. }
  219. }
  220. public bool HasGasOutOfRange
  221. {
  222. get
  223. {
  224. foreach (var gas in _gasLines)
  225. {
  226. if (!gas.IsOutOfRange)
  227. return false;
  228. }
  229. return true;
  230. }
  231. }
  232. public JetPM(ModuleName mod) : base(mod.ToString())
  233. {
  234. Module = mod;
  235. _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
  236. _LidLoadlock = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.LidLoadlock}");
  237. _slitDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.SlitDoor}");
  238. _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
  239. _LoadLockArm = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LoadLockArm}");
  240. _PVN21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN21}");
  241. _PVN22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVN22}");
  242. _PV11Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV11}");
  243. _PV12Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV12}");
  244. _PV21Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV21}");
  245. _PV22Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV22}");
  246. _PV31Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV31}");
  247. _PV32Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV32}");
  248. _PV41Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV41}");
  249. _PV42Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePV42}");
  250. _N2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveN2}");
  251. _Mfc1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc1}");
  252. _Mfc2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  253. _Mfc3Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  254. _Mfc4Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  255. _Mfc5Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  256. _Mfc6Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  257. _Mfc7Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  258. _Mfc8Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveMfc2}");
  259. _PVHe1Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe1}");
  260. _PVHe2Valve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValvePVHe2}");
  261. _GasFinalValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGasFinal}");
  262. _SoftPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveSoftPump}");
  263. _FastPumpValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveFastPump}");
  264. _TurboPumpPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPumping}");
  265. _TurboPumpPurgeValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveTurboPumpPurge}");
  266. _GuageValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveGuage}");
  267. _LoadlockVentValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockVent}");
  268. _LoadlockPumpingValve = DEVICE.GetDevice<IoValve>($"{Module}.{VenusDevice.ValveLoadlockPumping}");
  269. _ATM_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorATMSwitch");
  270. _ATM_Loadlock_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorLoadlockATMSwitch");
  271. _N2Pressure_sw = DEVICE.GetDevice<IoSensor>($"{Module}.N2PressureOk");
  272. _VAC_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorVacSwitch");
  273. _Water_Flow = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterFlowOk");
  274. _WLK_sw = DEVICE.GetDevice<IoSensor>($"{Module}.SensorWaterLeakOk");
  275. _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
  276. _RFG_Interlock = DEVICE.GetDevice<IoSensor>($"{Module}.GeneratorInterlock");
  277. _PM_Lid_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorPMLidClosed");
  278. _Source_RF_Fan = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSourceRFFan");
  279. _PM_SlitDoor_Closed = DEVICE.GetDevice<IoSensor>($"{Module}.SensorSlitDoorClosed");
  280. _TurboPumpInterlock = DEVICE.GetDevice<IoSensor>($"{Module}.TurboPumpInterlock");
  281. _ForelineTC = DEVICE.GetDevice<IoHeater>($"{Module}.ForelineHeater");
  282. _SignalTower = DEVICE.GetDevice<IoSignalTower>($"{Module}.SignalTower");
  283. _CDAPressure = DEVICE.GetDevice<IoSensor>($"{Module}.SensorCDAPressureOk");
  284. _pressureController = DEVICE.GetDevice<IoPressureControl>($"{Module}.{VenusDevice.PressureControl}");
  285. _gasLines = new IoGasStick[8];
  286. for (int index = 0; index < 8; index++)
  287. {
  288. _gasLines[index] = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStick{index + 1}");
  289. }
  290. _gasLineN2 = DEVICE.GetDevice<IoGasStick>($"{Module}.GasStickN2");
  291. _backsideHe = DEVICE.GetDevice<IoBacksideHe>($"{Module}.BacksideHelium");
  292. _MainPump = DEVICE.GetDevice<PumpBase>($"{Module}.{VenusDevice.MainPump}");
  293. // RS232 Dry pump, SKY
  294. if (SC.GetValue<int>($"{mod}.DryPump.CommunicationType") == (int)CommunicationType.RS232)
  295. {
  296. if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.SKY)
  297. {
  298. _MainPump = DEVICE.GetDevice<SkyPump>($"{Module}.{VenusDevice.MainPump}");
  299. }
  300. else if (SC.GetValue<int>($"{mod}.DryPump.MFG") == (int)DryPumpMFG.Edwards)
  301. {
  302. _MainPump = DEVICE.GetDevice<EdwardsPump>($"{Module}.{VenusDevice.MainPump}");
  303. }
  304. }
  305. _ESCHV = DEVICE.GetDevice<ESC5HighVoltage>($"{Module}.{VenusDevice.ESCHV}");
  306. _TurboPump = DEVICE.GetDevice<AdixenTurboPump>($"{Module}.{VenusDevice.TurboPump}");
  307. _pendulumValve = DEVICE.GetDevice<PendulumValve>($"{Module}.{VenusDevice.PendulumValve}");
  308. if (SC.GetValue<bool>($"{mod}.Chiller.EnableChiller") &&
  309. SC.GetValue<int>($"{mod}.Chiller.CommunicationType") == (int)CommunicationType.RS232)
  310. {
  311. if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.SMC)
  312. {
  313. _Chiller = DEVICE.GetDevice<SMCChiller>($"{Module}.{VenusDevice.Chiller}");
  314. }
  315. else if (SC.GetValue<int>($"{mod}.Chiller.MFG") == (int)ChillerMFG.AIRSYS)
  316. {
  317. _Chiller = DEVICE.GetDevice<AIRSYSChiller>($"{Module}.{VenusDevice.Chiller}");
  318. }
  319. }
  320. // RS223 AdTec Generator
  321. if (SC.GetValue<int>($"{mod}.Rf.CommunicationType") == (int)CommunicationType.RS232 &&
  322. SC.GetValue<int>($"{mod}.Rf.MFG") == (int)GeneratorMFG.AdTec)
  323. {
  324. _Generator = DEVICE.GetDevice<AdTecGenerator>($"{Module}.{VenusDevice.Rf}");
  325. }
  326. // Ethernet Comet Generator Bias
  327. if (SC.GetValue<bool>($"{mod}.BiasRf.EnableBiasRF") &&
  328. SC.GetValue<int>($"{mod}.BiasRf.CommunicationType") == (int)CommunicationType.Ethernet &&
  329. SC.GetValue<int>($"{mod}.BiasRf.MFG") == (int)GeneratorMFG.Comet)
  330. {
  331. _GeneratorBias = DEVICE.GetDevice<CometRF>($"{Module}.{VenusDevice.BiasRf}");
  332. }
  333. // RS232 AdTec match
  334. if (SC.GetValue<int>($"{mod}.match.CommunicationType") == (int)CommunicationType.RS232 &&
  335. SC.GetValue<int>($"{mod}.match.MFG") == (int)MatchMFG.AdTec)
  336. {
  337. _Match = DEVICE.GetDevice<AdTecMatch>($"{Module}.{VenusDevice.Match}");
  338. }
  339. _epdClient = DEVICE.GetDevice<EPDClient>($"{Module}.{VenusDevice.EndPoint}");
  340. DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);
  341. DATA.Subscribe($"{Name}.ProcessPressure", () => ProcessPressure);
  342. DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);
  343. DATA.Subscribe($"{Name}.LoadlockPressure", () => LoadlockPressure);
  344. DATA.Subscribe($"{Name}.IsATM", () => IsATM);
  345. DATA.Subscribe($"{Name}.IsVAC", () => IsVAC);
  346. DATA.Subscribe($"{Name}.LiftPinIsUp", () => LiftPinIsUp);
  347. DATA.Subscribe($"{Name}.LiftPinIsDown", () => LiftPinIsDown);
  348. DATA.Subscribe($"{Name}.PumpIsRunning", () => IsPumpRunning);
  349. DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => IsTurboPumpRunning);
  350. DATA.Subscribe($"{Name}.IsSlitDoorClosed", () => IsSlitDoorClosed);
  351. DATA.Subscribe($"{Name}.IsLidClosed", () => IsLidClosed);
  352. DATA.Subscribe($"{Name}.SRfIsOn", () => _Generator.IsPowerOn);
  353. DATA.Subscribe($"{Name}.BRfIsOn", () => _GeneratorBias.IsPowerOn);
  354. DATA.Subscribe($"{Name}.TurboPumpRotationalSpeed", () => _TurboPump.RotationalSpeed);
  355. DATA.Subscribe($"{Name}.GetPVPosition", () => GetPVPosition());
  356. //DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => _);
  357. OP.Subscribe($"{Module}.SetLiftPin", (cmd, args) => {
  358. if ((bool)args[0] == true)
  359. {
  360. SetLiftPin(MovementPosition.Up, out _);
  361. }
  362. else
  363. {
  364. SetLiftPin(MovementPosition.Down, out _);
  365. }
  366. return true;
  367. });
  368. OP.Subscribe($"{Module}.SetSRf", (cmd, args) => {
  369. GeneratorPowerOn((bool)args[0]);
  370. return true;
  371. });
  372. OP.Subscribe($"{Module}.SetBRf", (cmd, args) => {
  373. GeneratorBiasPowerOn((bool)args[0]);
  374. return true;
  375. });
  376. OP.Subscribe($"{Module}.SetSlitDoor", (cmd, args) => {
  377. SetSlitDoor((bool)args[0], out _);
  378. return true;
  379. });
  380. OP.Subscribe($"{Module}.SetESCHV", (cmd, args) => {
  381. _ESCHV.SetPowerOnOff((bool)args[0]);
  382. return true;
  383. });
  384. OP.Subscribe($"{Module}.SetPVPostion", (cmd, args) => {
  385. SetPVPostion((int)args[0]);
  386. return true;
  387. });
  388. OP.Subscribe($"{Module}.SetPVPressure", (cmd, args) => {
  389. SetPVPressure((int)args[0]);
  390. return true;
  391. });
  392. _foreline_interlock_pressure = SC.GetValue<double>($"{mod}.ForelineInterlockPressure");
  393. }
  394. public void CloseValves()
  395. {
  396. _PVN21Valve.TurnValve(false, out _);
  397. _PVN22Valve.TurnValve(false, out _);
  398. _PV11Valve.TurnValve(false, out _);
  399. _PV12Valve.TurnValve(false, out _);
  400. _PV21Valve.TurnValve(false, out _);
  401. _PV22Valve.TurnValve(false, out _);
  402. _PV31Valve.TurnValve(false, out _);
  403. _PV32Valve.TurnValve(false, out _);
  404. _PV41Valve.TurnValve(false, out _);
  405. _PV42Valve.TurnValve(false, out _);
  406. _PVHe1Valve.TurnValve(false, out _);
  407. _PVHe2Valve.TurnValve(false, out _);
  408. _GasFinalValve.TurnValve(false, out _);
  409. _SoftPumpValve.TurnValve(false, out _);
  410. _FastPumpValve.TurnValve(false, out _);
  411. _TurboPumpPumpingValve.TurnValve(false, out _);
  412. _TurboPumpPurgeValve.TurnValve(false, out _);
  413. _GuageValve.TurnValve(false, out _);
  414. _LoadlockVentValve.TurnValve(false, out _);
  415. _LoadlockPumpingValve.TurnValve(false, out _);
  416. _N2Valve.TurnValve(false, out _);
  417. _FastPumpValve.TurnValve(false, out _);
  418. _Mfc1Valve.TurnValve(false, out _);
  419. _Mfc2Valve.TurnValve(false, out _);
  420. _Mfc3Valve.TurnValve(false, out _);
  421. _Mfc4Valve.TurnValve(false, out _);
  422. _Mfc5Valve.TurnValve(false, out _);
  423. _Mfc6Valve.TurnValve(false, out _);
  424. _Mfc7Valve.TurnValve(false, out _);
  425. _Mfc8Valve.TurnValve(false, out _);
  426. foreach (var stick in _gasLines)
  427. {
  428. stick.Stop();
  429. }
  430. }
  431. public void TurnDryPump(bool on)
  432. {
  433. //_pressureController.StartPump(on);
  434. _MainPump?.SetPumpOnOff(on);
  435. }
  436. public void TurnTurboPump(bool on)
  437. {
  438. _TurboPump?.SetPumpOnOff(on);
  439. }
  440. public void OpenValve(ValveType vlvType, bool on)
  441. {
  442. switch (vlvType)
  443. {
  444. case ValveType.PVN21:
  445. _PVN21Valve.TurnValve(on, out _);
  446. break;
  447. case ValveType.PVN22:
  448. _PVN22Valve.TurnValve(on, out _);
  449. break;
  450. case ValveType.PV11:
  451. _PV11Valve.TurnValve(on, out _);
  452. break;
  453. case ValveType.PV12:
  454. _PV12Valve.TurnValve(on, out _);
  455. break;
  456. case ValveType.PV21:
  457. _PV21Valve.TurnValve(on, out _);
  458. break;
  459. case ValveType.PV22:
  460. _PV22Valve.TurnValve(on, out _);
  461. break;
  462. case ValveType.PV31:
  463. _PV31Valve.TurnValve(on, out _);
  464. break;
  465. case ValveType.PV32:
  466. _PV32Valve.TurnValve(on, out _);
  467. break;
  468. case ValveType.PV41:
  469. _PV41Valve.TurnValve(on, out _);
  470. break;
  471. case ValveType.PV42:
  472. _PV42Valve.TurnValve(on, out _);
  473. break;
  474. case ValveType.N2:
  475. _N2Valve.TurnValve(on, out _);
  476. break;
  477. case ValveType.PVHe1:
  478. _PVHe1Valve.TurnValve(on, out _);
  479. break;
  480. case ValveType.PVHe2:
  481. _PVHe2Valve.TurnValve(on, out _);
  482. break;
  483. case ValveType.GasFinal:
  484. _GasFinalValve.TurnValve(on, out _);
  485. break;
  486. case ValveType.SoftPump:
  487. _SoftPumpValve.TurnValve(on, out _);
  488. break;
  489. case ValveType.FastPump:
  490. _FastPumpValve.TurnValve(on, out _);
  491. break;
  492. case ValveType.TurboPumpPumping:
  493. _TurboPumpPumpingValve.TurnValve(on, out _);
  494. break;
  495. case ValveType.TurboPumpPurge:
  496. _TurboPumpPurgeValve.TurnValve(on, out _);
  497. break;
  498. case ValveType.Guage:
  499. _GuageValve.TurnValve(on, out _);
  500. break;
  501. case ValveType.LoadlockVent:
  502. _LoadlockVentValve.TurnValve(on, out _);
  503. break;
  504. case ValveType.LoadlockPumping:
  505. _LoadlockPumpingValve.TurnValve(on, out _);
  506. break;
  507. case ValveType.Mfc1:
  508. _Mfc1Valve.TurnValve(on, out _);
  509. break;
  510. case ValveType.Mfc2:
  511. _Mfc2Valve.TurnValve(on, out _);
  512. break;
  513. case ValveType.Mfc3:
  514. _Mfc3Valve.TurnValve(on, out _);
  515. break;
  516. case ValveType.Mfc4:
  517. _Mfc4Valve.TurnValve(on, out _);
  518. break;
  519. case ValveType.Mfc5:
  520. _Mfc5Valve.TurnValve(on, out _);
  521. break;
  522. case ValveType.Mfc6:
  523. _Mfc6Valve.TurnValve(on, out _);
  524. break;
  525. case ValveType.Mfc7:
  526. _Mfc7Valve.TurnValve(on, out _);
  527. break;
  528. case ValveType.Mfc8:
  529. _Mfc8Valve.TurnValve(on, out _);
  530. break;
  531. default:
  532. throw new ArgumentOutOfRangeException($"Argument error {vlvType}-{on}");
  533. }
  534. }
  535. public override void Monitor()
  536. {
  537. foreach (var gas in _gasLines)
  538. {
  539. gas.Monitor();
  540. }
  541. CheckInterlock();
  542. }
  543. private void CheckInterlock()
  544. {
  545. if (ProcessPressure > 100 && _GuageValve.SetPoint)
  546. {
  547. _GuageValve.TurnValve(false, out _);
  548. LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Process pressure:{ProcessPressure} exceed 100 mtorr, Guage Valve (DO-31) closed automaticlly.");
  549. }
  550. if(ForelinePressure > _foreline_interlock_pressure)
  551. {
  552. if(_TurboPumpPumpingValve.SetPoint || _TurboPumpPurgeValve.SetPoint || _pendulumValve.IsOpen)
  553. {
  554. _pendulumValve.TurnValve(false);
  555. _TurboPumpPurgeValve.TurnValve(false, out _);
  556. _TurboPumpPumpingValve.TurnValve(false, out _);
  557. LOG.Write(eEvent.WARN_DEVICE_INFO, Module, $"Foreline pressure:{ForelinePressure} exceed {_foreline_interlock_pressure} mtorr, Pendulum valve & PV6 & PV7 closed automaticlly.");
  558. }
  559. }
  560. }
  561. public void BuzzerBlinking(double time)
  562. {
  563. _SignalTower.BuzzerBlinking(time);
  564. }
  565. public void SwitchOnBuzzerAndRed()
  566. {
  567. _SignalTower.SwitchOnBuzzerAndRed("", null);
  568. }
  569. public override void Home()
  570. {
  571. // 与yp讨论过,PM 初始化不需要
  572. SetLiftPin(MovementPosition.Down, out _);
  573. SetSlitDoor(false, out _);
  574. }
  575. public bool SetLiftPin(MovementPosition dirt, out string reason)
  576. {
  577. reason = string.Empty;
  578. switch (dirt)
  579. {
  580. case MovementPosition.Down:
  581. return _LiftPin.SetCylinder(false, out reason);
  582. case MovementPosition.Up:
  583. return _LiftPin.SetCylinder(true, out reason);
  584. case MovementPosition.Left:
  585. case MovementPosition.Right:
  586. case MovementPosition.Middle:
  587. throw new ArgumentException("Movement argument error");
  588. }
  589. return true;
  590. }
  591. public void SetSlitDoor(bool open, out string reason)
  592. {
  593. reason = string.Empty;
  594. if(open)
  595. {
  596. double maxPressureDifference = SC.GetValue<double>("System.PMLLMaxPressureDifference");
  597. if(Math.Abs(LoadlockPressure - ChamberPressure) > maxPressureDifference)
  598. {
  599. reason = $"{Module} and Loadlock pressure difference exceeds the max limit";
  600. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  601. return;
  602. }
  603. }
  604. _slitDoor.SetCylinder(open, out reason);
  605. }
  606. public bool RetractWafer()
  607. {
  608. return _LoadLockArm.SetCylinder(false, out _);
  609. }
  610. public bool ExtendWafer()
  611. {
  612. return _LoadLockArm.SetCylinder(true, out _);
  613. }
  614. public bool FlowGas(int gasNum, double val)
  615. {
  616. if (_gasLines.Length <= gasNum)
  617. return false;
  618. _gasLines[gasNum].Flow(val);
  619. return true;
  620. }
  621. public bool StopGas(int gasNum)
  622. {
  623. if (_gasLines.Length <= gasNum)
  624. return false;
  625. _gasLines[gasNum].Stop();
  626. return true;
  627. }
  628. public void StopAllGases()
  629. {
  630. foreach (var line in _gasLines)
  631. {
  632. line.Stop();
  633. }
  634. }
  635. public bool TurnPendulumValve(bool on)
  636. {
  637. return _pendulumValve.TurnValve(on);
  638. }
  639. public bool SetPVPressure(int pressure)
  640. {
  641. return _pendulumValve.SetPressure(pressure);
  642. }
  643. public bool SetPVPostion(int position)
  644. {
  645. return _pendulumValve.SetPosition(position);
  646. }
  647. public int GetPVPosition()
  648. {
  649. return _pendulumValve.Position;
  650. }
  651. public void HeatChiller(double value, double offset)
  652. {
  653. _Chiller?.SetChillerTemp((float)value, (float)offset);
  654. _Chiller?.SetChillerOnOff(true);
  655. }
  656. public bool CheckChillerStatus()
  657. {
  658. return _Chiller != null /*&& _Chiller.IsRunning*/ && !_Chiller.IsError;
  659. }
  660. public void SetGeneratorCommunicationMode(int mode)
  661. {
  662. _Generator?.SetCommunicationMode(mode);
  663. }
  664. public bool GeneratorPowerOn(bool on)
  665. {
  666. if (_Generator == null) return false;
  667. if (on && !IsRFGInterlockOn)
  668. {
  669. LOG.Write(eEvent.ERR_RF, Module, "射频电源 Interlock条件不满足");
  670. return false;
  671. }
  672. return _Generator.SetPowerOnOff(on, out _);
  673. }
  674. public bool GeneratorSetpower(float val)
  675. {
  676. if (_Generator == null) return false;
  677. if (Math.Abs(val) > 0.01)
  678. _Generator.SetPower((ushort)val);
  679. return true;
  680. }
  681. public bool GeneratorBiasPowerOn(bool on)
  682. {
  683. if (_GeneratorBias == null) return false;
  684. if (on && !IsRFGInterlockOn)
  685. {
  686. LOG.Write(eEvent.ERR_RF, Module, "Bias射频电源 Interlock条件不满足");
  687. return false;
  688. }
  689. return _GeneratorBias.SetPowerOnOff(on, out _);
  690. }
  691. public bool GeneratorBiasSetpower(float val)
  692. {
  693. if (_GeneratorBias == null) return false;
  694. if (Math.Abs(val) > 0.01)
  695. _GeneratorBias.SetPower((ushort)val);
  696. return true;
  697. }
  698. public bool GeneratorBiasSetMatchMode(bool val)
  699. {
  700. if (_GeneratorBias == null) return false;
  701. string reason = string.Empty;
  702. _GeneratorBias.SetMatchingAutoMode(val, out reason);
  703. return true;
  704. }
  705. public bool SetMatchPosition(float c1, float c2)
  706. {
  707. if (_Match == null) return false;
  708. string reason = string.Empty;
  709. _Match.SetMatchPosition(c1, c2, out reason);
  710. return true;
  711. }
  712. public bool SetBiasMatchPosition(float c1, float c2)
  713. {
  714. if (_GeneratorBias == null) return false;
  715. string reason = string.Empty;
  716. _GeneratorBias.SetMatchPosition(c1, c2, out reason);
  717. return true;
  718. }
  719. public bool SetBiasPulseMode(bool on)
  720. {
  721. if (_GeneratorBias == null) return false;
  722. _GeneratorBias.SetPulseMode(on);
  723. return true;
  724. }
  725. public bool SetBiasPulseRateFreq(int nFreq)
  726. {
  727. if (_GeneratorBias == null) return false;
  728. _GeneratorBias.SetPulseRateFreq(nFreq);
  729. return true;
  730. }
  731. public bool SetDiasPulseDutyCycle(int percentage)
  732. {
  733. if (_GeneratorBias == null) return false;
  734. _GeneratorBias.SetPulseDutyCycle(percentage);
  735. return true;
  736. }
  737. public bool SetESCClampVoltage(int nVoltage)
  738. {
  739. if (_ESCHV == null) return false;
  740. return _ESCHV.SetOutputVoltage(nVoltage);
  741. }
  742. public bool CheckGeneratorAndHVInterlock(VenusDevice device)
  743. {
  744. eEvent evt = device == VenusDevice.Rf ? eEvent.ERR_RF : eEvent.ERR_ESC_HV;
  745. string deviceName = device == VenusDevice.Rf ? "RF Generator" : "ESC HV";
  746. if (!PMLidClosed)
  747. {
  748. LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as PM Lid is Open.");
  749. return false;
  750. }
  751. if (!IsVAC)
  752. {
  753. LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as PM is not Vacuum.");
  754. return false;
  755. }
  756. if(!IsWaterFlowOk)
  757. {
  758. LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Water Flow is OFF.");
  759. return false;
  760. }
  761. if(!IsRFGInterlockOn)
  762. {
  763. LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Generator Interlock is OFF.");
  764. return false;
  765. }
  766. if(!SourceRFFanInterlock)
  767. {
  768. LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Source RF Fan is OFF.");
  769. return false;
  770. }
  771. if(!SlitDoorClosed)
  772. {
  773. LOG.Write(evt, Module, $"Cannot Power ON {deviceName} as Slit Door is open.");
  774. return false;
  775. }
  776. return true;
  777. }
  778. #region EndPoint
  779. public void EPDRecipeStart()
  780. {
  781. _epdClient.RecipeStart();
  782. }
  783. public void EPDRecipeStop()
  784. {
  785. _epdClient.RecipeStop();
  786. }
  787. public void EPDStepStart(string cfgName)
  788. {
  789. _epdClient.StepStart(cfgName);
  790. }
  791. public void EPDStepStop()
  792. {
  793. _epdClient.StepStop();
  794. }
  795. #endregion
  796. public void SetBacksideHeFlow(double flow)
  797. {
  798. if (_backsideHe == null) return ;
  799. _backsideHe.Flow(flow);
  800. }
  801. public bool SetBacksideHePressure(int mTorr)
  802. {
  803. if (_backsideHe == null) return false;
  804. return _backsideHe.SetBacksideHelium(mTorr);
  805. }
  806. public bool SetBacksideHeThreshold(int nMin, int nMax)
  807. {
  808. if (_backsideHe == null) return false;
  809. return _backsideHe.SetFlowThreshold(nMin, nMax);
  810. }
  811. }
  812. }