| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400 | using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.OperationCenter;using Aitex.Core.Util;using MECF.Framework.Common.Equipment;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using Venus_Core;using Venus_RT.Modules;namespace Venus_RT.Devices{    /// <summary>    /// 变量及类型说明    /// bool类型变量 Is开头代表DI 其余代表DO    /// double类型变量 代表AI AO    /// </summary>    abstract class JetVenusSEPMBase : BaseDevice, IDevice    {        #region DI DO        public abstract bool IsLidClosed { get; }        public abstract bool IsSlitDoorClosed { get; }        public abstract bool IsPumpRunning { get; }        public abstract bool IsTurboPumpRunning { get; }         public abstract bool IsTurboPumpAtSpeed { get; }        public abstract float TurboPumpSpeed { get; }        public abstract bool HasPumpError { get; }        public abstract bool HasTurboPumpError { get; }        public abstract bool IsCDA_OK { get; }        public abstract bool IsFastPumpOpened { get; }        public abstract bool IsSoftPumpOpened { get; }        public abstract bool IsMfc1ValveOpened { get; }        public abstract bool IsMfc2ValveOpened { get; }        public abstract bool IsMfc3ValveOpened { get; }        public abstract bool IsMfc4ValveOpened { get; }        public abstract bool IsMfc5ValveOpened { get; }        public abstract bool IsMfc6ValveOpened { get; }        public abstract bool IsMfc7ValveOpened { get; }        public abstract bool IsMfc8ValveOpened { get; }        public abstract bool IsMfc9ValveOpened { get; }        public abstract bool IsMfc10ValveOpened { get; }        public abstract bool IsMfc11ValveOpened { get; }        public abstract bool IsMfc12ValveOpened { get; }        public abstract bool IsGuageValveOpened { get; }        public abstract bool IsATM { get; }        public abstract bool PVN22ValveIsOpen { get; }        public abstract bool LiftPinIsDown { get; }        public abstract bool LiftPinIsUp { get; }        public abstract bool IsVAC { get; }        public abstract bool IsWaterFlowOk { get; }        public abstract bool IsWLK { get; }        public abstract bool IsRFGInterlockOn { get; }        public abstract bool PMLidClosed { get; }        public abstract bool TurboPumpInterlock { get; }        public abstract bool SourceRFFanInterlock { get; }        public abstract bool SlitDoorClosed { get; } //PM slite door closed        #endregion        #region AI AO        //AI AO        public abstract double ProcessLowPressure { get; }        public abstract double ProcessHighPressure { get; }        public abstract double ProcessPressure { get; }        public abstract double ChamberPressure { get; }        public abstract double ForelinePressure { get; }        public abstract double TargetPressure { get; }        public abstract double ESCHePressure { get; }        public abstract int ESCOutputVoltage { get; }        public abstract double ESCPositiveOutputCurrent { get; }//R+        public abstract double ESCNegativeOutputCurrent { get; }//R-        public abstract bool IsHVOn { get; }        public abstract float CoolantInletTempFB { get; }        public abstract float CoolantOutletTempFB { get; }        public abstract bool ChillerIsRunning { get; }        public abstract float ReflectPower { get; }        public abstract float BiasReflectPower { get; }        #endregion        public abstract bool BackSideHeOutOfRange { get; }        public new ModuleName Module;        public abstract MovementPosition LiftPinPosition { get; }        public abstract bool CheckAtm();        public abstract bool CheckSlitDoorOpen();        public abstract bool CheckSlitDoorClose();        public abstract bool CheckLiftUp();        public abstract bool CheckLiftDown();        public abstract double TotalGasSetpoint { get; }        public abstract bool HasGasOutOfRange { get; }        public abstract bool PendulumValveIsOpen();        public double TMPressure { get { return Singleton<RouteManager>.Instance.TM.TMPressure; } }        public bool IsTMATM { get { return Singleton<RouteManager>.Instance.TM.IsTMATM; } }        public bool IsTMVAC { get { return Singleton<RouteManager>.Instance.TM.IsTMVac; } }        // EndPoint         private readonly JetEPDBase _epdClient;        public List<string> EPDCfgList => _epdClient?.CFGFileList;        public bool EPDCaptured => _epdClient.Captured;        public bool EPDConnected => _epdClient.IsEPDConnected;        public JetVenusSEPMBase(ModuleName module) : base(module.ToString(), module.ToString(), module.ToString(), module.ToString())         {            Module = module;            _epdClient = DEVICE.GetDevice<JetEPDBase>($"{Module}.{VenusDevice.EndPoint}");            DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);            DATA.Subscribe($"{Name}.ProcessHighPressure", () => ProcessHighPressure);            DATA.Subscribe($"{Name}.ProcessLowPressure", () => ProcessLowPressure);            DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);            DATA.Subscribe($"{Name}.IsATM", () => IsATM);            DATA.Subscribe($"{Name}.IsVAC", () => IsVAC);            DATA.Subscribe($"{Name}.LiftPinIsUp", () => LiftPinIsUp);            DATA.Subscribe($"{Name}.LiftPinIsDown", () => LiftPinIsDown);            DATA.Subscribe($"{Name}.PumpIsRunning", () => IsPumpRunning);            DATA.Subscribe($"{Name}.TurboPumpIsRunning", () => IsTurboPumpRunning);            DATA.Subscribe($"{Name}.IsSlitDoorClosed", () => IsSlitDoorClosed);            DATA.Subscribe($"{Name}.IsLidClosed", () => IsLidClosed);            DATA.Subscribe($"{Name}.TurboPumpRotationalSpeed", () => TurboPumpSpeed);            DATA.Subscribe($"{Name}.IsWaterFlowOk", () => IsWaterFlowOk);            DATA.Subscribe($"{Name}.IsWLK", () => IsWLK);            DATA.Subscribe($"{Name}.IsCDA_OK", () => IsCDA_OK);            DATA.Subscribe($"{Name}.SourceRFFanInterlock", () => SourceRFFanInterlock);            DATA.Subscribe($"{Name}.IsTurboPumpInterlock", () => TurboPumpInterlock);            DATA.Subscribe($"{Name}.GetPVPosition", () => GetPVPosition());            DATA.Subscribe($"{Name}.ESCHV.Temp", () => CoolantOutletTempFB);            DATA.Subscribe($"{Name}.Chiller.Temp", () => CoolantInletTempFB);            DATA.Subscribe($"{Name}.Chiller.IsOn", () => ChillerIsRunning);            DATA.Subscribe($"{Name}.IsTurboPumpAtSpeed", () => IsTurboPumpAtSpeed);            DATA.Subscribe($"{Name}.EPDCfgList", () => EPDCfgList);            OP.Subscribe($"{Module}.SetLiftPin", (cmd, args) => {                if ((bool)args[0] == true)                {                    return SetLiftPin(MovementPosition.Up, out _);                }                else                {                    return SetLiftPin(MovementPosition.Down, out _);                }            });            OP.Subscribe($"{Module}.SetSRf", (cmd, args) =>            {                var ison = (bool)args[1];                if (ison == true)                {                    GeneratorPowerOn(true);                    GeneratorSetpower((float)args[0]);                }                else                {                    GeneratorPowerOn(false);                }                return true;            });            OP.Subscribe($"{Module}.SetBRf", (cmd, args) => {                var ison = (bool)args[1];                if (ison == true)                {                    GeneratorBiasPowerOn(true);                    GeneratorBiasSetpower((float)args[0]);                }                else                {                    GeneratorBiasPowerOn(false);                }                return true;            });            OP.Subscribe($"{Module}.SetESCHVIsOn", (cmd, args) => {                OnOffSetESCHV((bool)args[0]);                return true;            });            OP.Subscribe($"{Module}.SetESCHV", (cmd, args) => {                SetESCClampVoltage((int)args[0]);                return true;            });            OP.Subscribe($"{Module}.SetPVPostion", (cmd, args) => {                SetPVPostion((int)args[0]);                return true;            });            OP.Subscribe($"{Module}.SetPVPressure", (cmd, args) => {                SetPVPressure((int)args[0]);                return true;            });            OP.Subscribe($"{Module}.ClosePump", (cmd, args) => {                TurnDryPump(false);                return true;            });            OP.Subscribe($"{Module}.ControlValve", (cmd, args) => {                OpenValve((ValveType)((int)args[0]), (bool)args[1]);                return true;            });            OP.Subscribe($"{Module}.TurnPendulumValve", (cmd, args) => {                TurnPendulumValve((bool)args[0]);                return true;            });            OP.Subscribe($"{Module}.HeatChiller", (cmd, args) => {                var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), args[0].ToString());                HeatChiller(chillerType, (float)args[1], (float)args[2]);                return true;            });            OP.Subscribe($"{Module}.OnOffChiller", (cmd, args) => {                var chillerType = (ChillerType)Enum.Parse(typeof(ChillerType), args[0].ToString());                OnOffChiller(chillerType, (bool)args[1]);                return true;            });            OP.Subscribe($"{Module}.WallChiller", (cmd, args) => {                float value;                float.TryParse(args[0].ToString(), out value);                SetWallTCTemperature(value);                return true;            });            OP.Subscribe($"{Module}.SetBacksideHeFlow", (cmd, args) => {                double value;                double.TryParse(args[0].ToString(), out value);                SetBacksideHeFlow(value);                return true;            });            OP.Subscribe($"{Module}.SetBacksideHePressure", (cmd, args) =>            {                float value;                float.TryParse(args[0].ToString(), out value);                SetBacksideHePressure(value);                return true;            });            OP.Subscribe($"{Module}.EndPoint.SearchCfg", (cmd, args) =>            {                _epdClient?.QueryConfigList();                return true;            });        }        public virtual void Monitor()        {        }        public virtual bool Initialize()        {            return true;        }        public virtual void Terminate()        {        }        public virtual void Reset()        {        }        public abstract void CloseValves();        public abstract void TurnDryPump(bool on);        public abstract void TurnTurboPump(bool on);        public abstract void OpenValve(ValveType vlvType, bool on);        public abstract bool OnOffSetESCHV(bool on);        public abstract bool SetWallTCTemperature(float value);        protected abstract void CheckPermanentInterlock();        public abstract void CheckIdleInterlock();        public abstract void Home();        public abstract bool SetLiftPin(MovementPosition dirt, out string reason);        public abstract bool FlowGas(int gasNum, double val);        public abstract bool StopGas(int gasNum);        public abstract bool FlowN2(double val);        public abstract bool StopN2();        public abstract void StopAllGases();        public abstract bool TurnPendulumValve(bool on);        public abstract bool SetPVPressure(int pressure);        public abstract bool SetPVPostion(int position);        public abstract int GetPVPosition();        public abstract void HeatChiller(ChillerType chillerType, double value, double offset);        public abstract void OnOffChiller(ChillerType chillerType, bool onoff);        public abstract bool CheckChillerStatus();        public abstract void SetGeneratorCommunicationMode(int mode);        public abstract bool GeneratorPowerOn(bool on);        public abstract bool GeneratorSetpower(float val);        public abstract bool GeneratorBiasPowerOn(bool on);        public abstract bool GeneratorBiasSetpower(float val);        public abstract bool GeneratorBiasSetMatchMode(bool val);        public abstract bool SetMatchPosition(float c1, float c2);        public abstract bool SetBiasMatchPosition(float c1, float c2);        public abstract bool SetBiasPulseMode(bool on);        public abstract bool SetBiasPulseRateFreq(int nFreq);        public abstract bool SetDiasPulseDutyCycle(int percentage);        public abstract bool SetESCClampVoltage(int nVoltage);        public abstract bool CheckGeneratorAndHVInterlock(VenusDevice device);        #region EndPoint        public void EPDRecipeStart(string recipe)        {            _epdClient.RecipeStart(recipe);        }        public void EPDRecipeStop()        {            _epdClient.RecipeStop();        }        public void EPDStepStart(string cfgName, int step)        {            _epdClient.StepStart(cfgName, step);        }        public void EPDStepStop()        {            _epdClient.StepStop();        }        #endregion        public abstract void SetBacksideHeFlow(double flow);        public abstract bool SetBacksideHePressure(float mTorr);        public abstract bool SetBacksideHeThreshold(int nMin, int nMax);    }}
 |