PMLeakCheckRoutine.cs 5.9 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using System.Diagnostics;
  6. using Venus_Core;
  7. using System;
  8. using Venus_Unity;
  9. using MECF.Framework.Common.DBCore;
  10. namespace Venus_RT.Modules.PMs
  11. {
  12. class PMLeakCheckRoutine : PMRoutineBase, IRoutine
  13. {
  14. private enum LeakCheckStep
  15. {
  16. kPumpToBasePressure,
  17. kPumpingDelay,
  18. kLeakCheckDelay,
  19. kEnd,
  20. }
  21. public double LeakRate { get; private set; }
  22. private int _basePressure = 100;
  23. private int _leakcheckPumpTime = 180;
  24. private int _leakcheckHoldTime = 300;
  25. private double _startPressure = 0;
  26. private double _endPressure = 0;
  27. private double _leakRate = 30.0;
  28. private double _leakCheckBasePressure = 1;
  29. public string CurrentStep;
  30. Stopwatch _leakCheckTimer = new Stopwatch();
  31. PMLeakCheckResult pMLeakCheckResult;
  32. Stopwatch _routineTimer=new Stopwatch();
  33. public PMLeakCheckRoutine(JetPMBase chamber) : base(chamber)
  34. {
  35. Name = "PM Leakcheck";
  36. }
  37. public RState Start(params object[] objs)
  38. {
  39. if (CheckLid() &&
  40. CheckSlitDoor() &&
  41. CheckTurboPump())
  42. {
  43. Reset();
  44. _basePressure = SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  45. //_leakcheckPumpTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckPumpingTime");
  46. //_leakcheckHoldTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckHoldTime");
  47. //_leakRate = SC.GetValue<double>($"{Module}.Pump.LeakRate");
  48. _leakcheckPumpTime = (int)(objs[0]);
  49. _leakcheckHoldTime = (int)(objs[1]);
  50. _leakRate = (double)(objs[2]);
  51. _leakCheckBasePressure = SC.GetValue<double>($"{Module}.Pump.LeakCheckBasePressure");
  52. PreSetValves();
  53. pMLeakCheckResult = new PMLeakCheckResult();
  54. pMLeakCheckResult.CheckDate = DateTime.Now.ToString("yyyyMMddHHmm");
  55. pMLeakCheckResult.CheckMode = "ChamberOnly";
  56. _routineTimer.Restart();
  57. return Runner.Start(Module, Name);
  58. }
  59. return RState.Failed;
  60. }
  61. public RState Monitor()
  62. {
  63. Runner.Wait((int)LeakCheckStep.kPumpToBasePressure, PumpingToBasePressure)
  64. .Run((int)LeakCheckStep.kPumpingDelay, StartPumpDelay, PumpingDelay)
  65. .Run((int)LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckHoldTime * 1000)
  66. .End((int)LeakCheckStep.kEnd, CalcLeakCheckResult, _delay_50ms);
  67. return Runner.Status;
  68. }
  69. public void Abort()
  70. {
  71. CloseAllValves();
  72. }
  73. private bool PumpingToBasePressure()
  74. {
  75. if (_chamber.ChamberPressure <= _basePressure)
  76. {
  77. _leakCheckTimer.Restart();
  78. return true;
  79. }
  80. else
  81. return false;
  82. }
  83. private bool PumpingDelay()
  84. {
  85. if(_leakCheckTimer.ElapsedMilliseconds >= _leakcheckPumpTime * 1000)
  86. {
  87. if (_chamber.ChamberPressure <= _leakCheckBasePressure)
  88. return true;
  89. else
  90. {
  91. Runner.Stop($"PM Leakcheck失败, 腔体压力 [{_chamber.ChamberPressure}]mTor, 高于LeakCheck Base Pressure: [{_leakCheckBasePressure}] mTor");
  92. }
  93. }
  94. return false;
  95. }
  96. private bool StartPumpDelay()
  97. {
  98. _chamber.OpenValve(ValveType.GasFinal, false);
  99. CurrentStep = "Check Pump";
  100. return true;
  101. }
  102. private bool StartLeakCheck()
  103. {
  104. CurrentStep = "Leak Check";
  105. _startPressure = _chamber.ChamberPressure;
  106. pMLeakCheckResult.StartPressure = _startPressure;
  107. Notify($"PM 压力开始值 {_startPressure} mt");
  108. _chamber.TurnPendulumValve(false);
  109. return true;
  110. }
  111. private bool CalcLeakCheckResult()
  112. {
  113. _endPressure = _chamber.ChamberPressure;
  114. pMLeakCheckResult.EndPressure = _endPressure;
  115. LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckHoldTime;
  116. pMLeakCheckResult.LeakRate = LeakRate;
  117. if (LeakRate < _leakRate)
  118. {
  119. Notify($"PM Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
  120. pMLeakCheckResult.Result = "Success";
  121. }
  122. else
  123. {
  124. Stop($"PM Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
  125. pMLeakCheckResult.Result = "Fail";
  126. }
  127. LeakCheckDataRecorder.Add(_leakcheckHoldTime, (int)_startPressure, (int)_endPressure, LeakRate, pMLeakCheckResult.Result, "ChamberOnly",_chamber.Name);
  128. _chamber.OpenValve(ValveType.GasFinal, true);
  129. _chamber.TurnPendulumValve(true);
  130. pMLeakCheckResult.LeakCheckTime = (int)_routineTimer.ElapsedMilliseconds / 1000;
  131. //SerializeHelper.Instance.WriteToJsonFile<PMLeakCheckResult>(pMLeakCheckResult, $"LeakCheck/PM/{DateTime.Now.ToString("yyyyMMddHHmm")}.json");
  132. return true;
  133. }
  134. private void PreSetValves()
  135. {
  136. _chamber.OpenValve(ValveType.FastPump, false);
  137. _chamber.OpenValve(ValveType.SoftPump, false);
  138. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  139. _chamber.OpenValve(ValveType.Guage, true);
  140. _chamber.OpenValve(ValveType.GasFinal, true);
  141. _chamber.TurnPendulumValve(true);
  142. }
  143. }
  144. }