AutoCycle.cs 54 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using Venus_Core;
  20. using Venus_RT.Modules.Schedulers;
  21. using Venus_RT.Scheduler;
  22. namespace Venus_RT.Modules
  23. {
  24. enum ModulePriority
  25. {
  26. High,
  27. Middle,
  28. Low,
  29. Stop,
  30. }
  31. enum MovingStatus
  32. {
  33. Staying,
  34. Waiting,
  35. Moving,
  36. }
  37. class ModuleFlag
  38. {
  39. public ModulePriority Priority { get; set; }
  40. public MovingStatus MovingStatus { get; set; }
  41. public ModuleFlag(ModulePriority _priority)
  42. {
  43. Priority = _priority;
  44. MovingStatus = MovingStatus.Staying;
  45. }
  46. }
  47. class AutoCycle : IRoutine
  48. {
  49. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  50. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  51. private RState _cycleState = RState.Init;
  52. Dictionary<ModuleName, SchedulerModule> _atmSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  53. Dictionary<ModuleName, ModuleFlag> _atmModules = new Dictionary<ModuleName, ModuleFlag>();
  54. Dictionary<ModuleName, SchedulerModule> _vacSchedulers = new Dictionary<ModuleName, SchedulerModule>();
  55. Dictionary<ModuleName, ModuleFlag> _vacModules = new Dictionary<ModuleName, ModuleFlag>();
  56. SchedulerTMRobot _tmRobot = new SchedulerTMRobot();
  57. SchedulerEfemRobot _efemRobot = new SchedulerEfemRobot();
  58. List<SlotItem> _vacReadyOutSlots = new List<SlotItem>();
  59. List<SlotItem> _vacReadyInSlots = new List<SlotItem>();
  60. List<SlotItem> _atmReadyOutSlots = new List<SlotItem>();
  61. List<SlotItem> _atmReadyInSlots = new List<SlotItem>();
  62. List<int> _LLAInSlot = new List<int> { 0, 1, 2, 3 };
  63. List<int> _LLAOutSlot = new List<int> { 0, 1, 2, 3 };
  64. List<int> _LLBInSlot = new List<int> { 0, 1, 2, 3 };
  65. List<int> _LLBOutSlot = new List<int> { 0, 1, 2, 3 };
  66. int _LLASlotNumber = 4;
  67. int _LLBSlotNumber = 4;
  68. List<MoveItem> _movingItems = new List<MoveItem>();
  69. List<MoveItem> _efemMovingItems = new List<MoveItem>();
  70. Dictionary<SlotItem, Guid> _vacWaferTargets = new Dictionary<SlotItem, Guid>();
  71. Dictionary<SlotItem, Guid> _atmWaferTargets = new Dictionary<SlotItem, Guid>();
  72. private SchedulerFACallback _faCallback;
  73. private SchedulerDBCallback _dbCallback;
  74. private bool _isCycleMode;
  75. private int _cycleSetPoint = 0;
  76. private int _cycledCount = 0;
  77. private int _cycledWafer = 0;
  78. public bool HasJobRunning => _lstControlJobs.Count > 0;
  79. #region public interface
  80. public AutoCycle()
  81. {
  82. _faCallback = new SchedulerFACallback();
  83. _dbCallback = new SchedulerDBCallback();
  84. InitModules();
  85. _LLASlotNumber = SC.GetValue<int>("LLA.SlotNumber");
  86. _LLBSlotNumber = SC.GetValue<int>("LLB.SlotNumber");
  87. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  88. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  89. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  90. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  91. }
  92. public RState Start(params object[] objs)
  93. {
  94. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  95. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  96. _cycledWafer = 0;
  97. _cycledCount = 0;
  98. return RState.Running;
  99. }
  100. public RState Monitor()
  101. {
  102. prelude();
  103. driveAtmSystem();
  104. driveVacSystem();
  105. epilogue();
  106. return _cycleState;
  107. }
  108. public void Abort()
  109. {
  110. }
  111. public void CreateJob(Dictionary<string, object> param)
  112. {
  113. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  114. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  115. string[] slotSequence = (string[])param["SlotSequence"];
  116. string jobId = (string)param["JobId"];
  117. string module = (string)param["Module"];
  118. //bool autoStart = (bool)param["AutoStart"];
  119. string lotId = jobId;
  120. if (param.ContainsKey("LotId"))
  121. lotId = (string)param["LotId"];
  122. if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
  123. {
  124. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}");
  125. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  126. return;
  127. }
  128. if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
  129. {
  130. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} should be LoadPort");
  131. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  132. return;
  133. }
  134. if (string.IsNullOrEmpty(jobId))
  135. {
  136. jobId = "CJ_Local_" + module;
  137. }
  138. if (_lstControlJobs.Exists(x => x.Name == jobId))
  139. {
  140. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{jobId} already created");
  141. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  142. return;
  143. }
  144. SchedulerLoadPort lp = _atmSchedulers[ModuleHelper.Converter(module)] as SchedulerLoadPort;
  145. if (!lp.CheckReadyRunJob())
  146. {
  147. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} not ready");
  148. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  149. return;
  150. }
  151. ControlJobInfo cj = new ControlJobInfo();
  152. cj.Name = jobId;
  153. cj.Module = module;
  154. cj.LotName = lotId;
  155. cj.LotInnerId = Guid.NewGuid();
  156. cj.LotWafers = new List<WaferInfo>();
  157. cj.SetState(EnumControlJobState.WaitingForStart);
  158. Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
  159. Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
  160. Dictionary<string, string> indexSequence = new Dictionary<string, string>();
  161. bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
  162. for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
  163. {
  164. if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
  165. continue;
  166. string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
  167. indexSequence[groupName] = slotSequence[i];
  168. if (!seqSlot.ContainsKey(groupName))
  169. {
  170. seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
  171. }
  172. if (!seqSlotWafers.ContainsKey(groupName))
  173. {
  174. seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
  175. }
  176. seqSlot[groupName][i] = true;
  177. if (!WaferManager.Instance.CheckHasWafer(module, i))
  178. {
  179. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
  180. return;
  181. }
  182. if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
  183. {
  184. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}");
  185. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  186. return;
  187. }
  188. if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
  189. {
  190. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}");
  191. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  192. return;
  193. }
  194. cj.LotWafers.Add(WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i));
  195. WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).SequenceName = slotSequence[i];
  196. seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
  197. cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
  198. LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
  199. }
  200. if (seqSlotWafers.Count == 0)
  201. {
  202. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job has not assign wafer");
  203. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  204. return;
  205. }
  206. List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
  207. string[] seqs = seqSlot.Keys.ToArray();
  208. for (int i = 0; i < seqs.Length; i++)
  209. {
  210. ProcessJobInfo pj = new ProcessJobInfo();
  211. pj.Name = jobId + "_" + (i + 1);
  212. pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
  213. pj.ControlJobName = cj.Name;
  214. pj.LotName = lotId;
  215. pj.SlotWafers = seqSlotWafers[seqs[i]];
  216. pj.SetState(EnumProcessJobState.Queued);
  217. if (!CheckSequencePmReady(pj.Sequence, null, out _, out string reason))
  218. {
  219. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
  220. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  221. return;
  222. }
  223. if (!SC.GetValue<bool>("System.IsATMMode") && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
  224. {
  225. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
  226. _faCallback.JobCreateFailed(module, lotId, jobId, "");
  227. return;
  228. }
  229. pjs.Add(pj);
  230. }
  231. _dbCallback.LotUpdate(cj);
  232. foreach (var pj in pjs)
  233. {
  234. cj.ProcessJobNameList.Add(pj.Name);
  235. _lstProcessJobs.Add(pj);
  236. }
  237. _lstControlJobs.Add(cj);
  238. //AssociatedPMWithLP(cj);
  239. _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
  240. }
  241. public bool CheckAllJobDone()
  242. {
  243. foreach (var cj in _lstControlJobs)
  244. {
  245. if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
  246. return false;
  247. }
  248. return true;
  249. }
  250. public bool CheckJobJustDone(out string sJobName)
  251. {
  252. foreach (var cj in _lstControlJobs)
  253. {
  254. if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
  255. {
  256. //LP;WaferSize;Lot;Number;Start;End;
  257. sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
  258. cj.BeenPosted = true;
  259. return true;
  260. }
  261. }
  262. sJobName = "NULL";
  263. return false;
  264. }
  265. public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
  266. {
  267. foreach (var pj in _lstProcessJobs)
  268. {
  269. if (pj.ControlJobName == cj.Name)
  270. return pj;
  271. }
  272. return null;
  273. }
  274. public void AbortJob(string jobName)
  275. {
  276. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  277. if (cj == null)
  278. {
  279. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"abort job rejected, not found job with id {jobName}");
  280. return;
  281. }
  282. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  283. foreach (var pj in _lstProcessJobs)
  284. {
  285. if (pj.ControlJobName == cj.Name)
  286. {
  287. pj.SetState(EnumProcessJobState.Aborting);
  288. pjAbortList.Add(pj);
  289. int unprocessed = 0;
  290. int aborted = 0;
  291. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  292. foreach (var waferInfo in wafers)
  293. {
  294. waferInfo.ProcessJob = null;
  295. waferInfo.NextSequenceStep = 0;
  296. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  297. unprocessed++;
  298. }
  299. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  300. }
  301. }
  302. _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
  303. _dbCallback.LotFinished(cj);
  304. foreach (var pj in pjAbortList)
  305. {
  306. _lstProcessJobs.Remove(pj);
  307. }
  308. _lstControlJobs.Remove(cj);
  309. }
  310. public void StopJob(string jobName)
  311. {
  312. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  313. if (cj == null)
  314. {
  315. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"stop job rejected, not found job with id {jobName}");
  316. return;
  317. }
  318. foreach (var pj in _lstProcessJobs)
  319. {
  320. if (pj.ControlJobName == cj.Name)
  321. {
  322. pj.SetState(EnumProcessJobState.Stopping);
  323. }
  324. }
  325. _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
  326. _dbCallback.LotFinished(cj);
  327. }
  328. public void ResumeJob(string jobName)
  329. {
  330. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  331. if (cj == null)
  332. {
  333. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
  334. return;
  335. }
  336. if (cj.State == EnumControlJobState.Paused)
  337. {
  338. cj.SetState(EnumControlJobState.Executing);
  339. }
  340. _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
  341. }
  342. public void PauseJob(string jobName)
  343. {
  344. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  345. if (cj == null)
  346. {
  347. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
  348. return;
  349. }
  350. if (cj.State == EnumControlJobState.Executing)
  351. {
  352. cj.SetState(EnumControlJobState.Paused);
  353. }
  354. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  355. }
  356. public void StartJob(string jobName)
  357. {
  358. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  359. if (cj == null)
  360. {
  361. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"start job rejected, not found job with id {jobName}");
  362. return;
  363. }
  364. if (cj.State == EnumControlJobState.WaitingForStart)
  365. {
  366. cj.SetState(EnumControlJobState.Executing);
  367. //PreJobClean(cj);
  368. (_atmSchedulers[ModuleHelper.Converter(cj.Module)] as SchedulerLoadPort).NoteJobStart();
  369. cj.StartTime = DateTime.Now;
  370. _dbCallback.LotCreated(cj);
  371. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  372. //if (!_blockingWatcher.IsRunning)
  373. // _blockingWatcher.Restart();
  374. //ResetTraceFlag();
  375. }
  376. }
  377. public void Clear()
  378. {
  379. _efemRobot.ResetTask();
  380. foreach (var module in _vacSchedulers)
  381. {
  382. module.Value.ResetTask();
  383. }
  384. foreach (var module in _atmSchedulers)
  385. {
  386. module.Value.ResetTask();
  387. }
  388. _lstControlJobs.Clear();
  389. _lstProcessJobs.Clear();
  390. //_mapTarget.Clear();
  391. //queMoveAction.Clear();
  392. //_curAction.state = ActionState.Done;
  393. }
  394. #endregion
  395. private void InitModules()
  396. {
  397. foreach(var module in new ModuleName[]{ ModuleName.LP1, ModuleName.LP2, ModuleName.LP3,
  398. ModuleName.Aligner1, ModuleName.Aligner2, ModuleName.Cooling1, ModuleName.Cooling2})
  399. {
  400. if(ModuleHelper.IsInstalled(module))
  401. {
  402. if(ModuleHelper.IsLoadPort(module))
  403. {
  404. _atmSchedulers[module] = new SchedulerLoadPort(module);
  405. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  406. }
  407. else if(ModuleHelper.IsAligner(module) || ModuleHelper.IsCooling(module))
  408. {
  409. _atmSchedulers[module] = new SchedulerAligner(module);
  410. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  411. }
  412. }
  413. }
  414. foreach (var module in new ModuleName[] { ModuleName.PMA, ModuleName.PMB, ModuleName.PMC,
  415. ModuleName.PMD, ModuleName.PME, ModuleName.PMF})
  416. {
  417. if (ModuleHelper.IsInstalled(module))
  418. {
  419. _vacSchedulers[module] = new SchedulerPM(module);
  420. _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
  421. }
  422. }
  423. foreach (var module in new ModuleName[] { ModuleName.LLA, ModuleName.LLB })
  424. {
  425. if (ModuleHelper.IsInstalled(module))
  426. {
  427. var llScheduler = new SchedulerLoadLock(module);
  428. _vacSchedulers[module] = llScheduler;
  429. _vacModules[module] = new ModuleFlag(ModulePriority.Middle);
  430. _atmSchedulers[module] = llScheduler;
  431. _atmModules[module] = new ModuleFlag(ModulePriority.Middle);
  432. }
  433. }
  434. }
  435. private void prelude()
  436. {
  437. }
  438. private void epilogue()
  439. {
  440. foreach(var mod in _vacSchedulers)
  441. {
  442. if(mod.Value.IsAvailable)
  443. {
  444. var tars = _vacWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
  445. foreach(var tar in tars)
  446. {
  447. var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
  448. if (wafer.IsEmpty)
  449. continue;
  450. if(wafer.InnerId == tar.Value)
  451. {
  452. // wafer arrive
  453. _vacWaferTargets.Remove(tar.Key);
  454. wafer.NextSequenceStep++;
  455. }
  456. }
  457. }
  458. }
  459. foreach(var mod in _atmSchedulers)
  460. {
  461. if (mod.Value.IsAvailable)
  462. {
  463. var tars = _atmWaferTargets.Where(item => item.Key.Module == mod.Key).ToArray();
  464. foreach (var tar in tars)
  465. {
  466. var wafer = WaferManager.Instance.GetWafer(tar.Key.Module, tar.Key.Slot);
  467. if (wafer.IsEmpty)
  468. continue;
  469. if (wafer.InnerId == tar.Value)
  470. {
  471. // wafer arrive
  472. _atmWaferTargets.Remove(tar.Key);
  473. if (!ModuleHelper.IsLoadPort(tar.Key.Module))
  474. wafer.NextSequenceStep++;
  475. }
  476. }
  477. }
  478. }
  479. StartNewJob();
  480. }
  481. private void driveVacSystem()
  482. {
  483. PumpingTMRobotTask();
  484. ProcessTMRobotTask();
  485. RuningTMRobotTask();
  486. }
  487. #region Vacuum System
  488. private void PumpingTMRobotTask()
  489. {
  490. foreach(var mod in _vacSchedulers)
  491. {
  492. if (mod.Value.IsAvailable && _vacModules[mod.Key].MovingStatus == MovingStatus.Staying)
  493. {
  494. if(ModuleHelper.IsLoadLock(mod.Key))
  495. {
  496. var inSlots = mod.Key == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  497. foreach(var slot in inSlots)
  498. {
  499. if(WaferManager.Instance.CheckHasWafer(mod.Key, slot) && IsVacWaferReadyOut(mod.Key, slot))
  500. {
  501. _vacReadyOutSlots.Add(new SlotItem(mod.Key, slot));
  502. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  503. }
  504. }
  505. var outSlots = mod.Key == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
  506. foreach(var slot in outSlots)
  507. {
  508. if(WaferManager.Instance.CheckNoWafer(mod.Key, slot))
  509. {
  510. _vacReadyInSlots.Add(new SlotItem(mod.Key, slot));
  511. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  512. }
  513. }
  514. }
  515. else
  516. {
  517. if(WaferManager.Instance.CheckHasWafer(mod.Key, 0) && IsVacWaferReadyOut(mod.Key, 0)) // processed?
  518. {
  519. _vacReadyOutSlots.Add(new SlotItem(mod.Key, 0));
  520. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  521. }
  522. else
  523. {
  524. _vacReadyInSlots.Add(new SlotItem(mod.Key, 0));
  525. _vacModules[mod.Key].MovingStatus = MovingStatus.Waiting;
  526. }
  527. }
  528. }
  529. }
  530. }
  531. bool SearchWaferDestination(SlotItem outSlot, out SlotItem destSlot)
  532. {
  533. destSlot = new SlotItem(ModuleName.System, -1);
  534. var wafer = WaferManager.Instance.GetWafer(outSlot.Module, outSlot.Slot);
  535. foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  536. {
  537. var validSlots = GetModuleValidSlots(next_module);
  538. foreach (var nSlot in validSlots)
  539. {
  540. if (_movingItems.Exists(mItem => mItem.DestinationModule == next_module && mItem.DestinationSlot == nSlot))
  541. continue;
  542. var ready_in = _vacReadyInSlots.Find(item => item.Module == next_module && item.Slot == nSlot);
  543. if (ready_in != null)
  544. {
  545. destSlot.Module = ready_in.Module;
  546. destSlot.Slot = nSlot;
  547. return true;
  548. }
  549. }
  550. }
  551. return false;
  552. }
  553. List<int> GetModuleValidSlots(ModuleName mod)
  554. {
  555. var validSlot = new List<int>();
  556. if(ModuleHelper.IsLoadLock(mod))
  557. {
  558. var inSlots = mod == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  559. foreach (var slot in inSlots)
  560. {
  561. if (WaferManager.Instance.CheckNoWafer(mod, slot) && !_movingItems.Exists(item => item.DestinationModule == mod && item.DestinationSlot == slot))
  562. validSlot.Add(slot);
  563. if (WaferManager.Instance.CheckHasWafer(mod, slot) && _movingItems.Exists(item => item.SourceModule == mod && item.SourceSlot == slot))
  564. validSlot.Add(slot);
  565. }
  566. }
  567. else if(ModuleHelper.IsPm(mod))
  568. {
  569. if (WaferManager.Instance.CheckNoWafer(mod, 0) && !_movingItems.Exists(item => item.DestinationModule == mod))
  570. validSlot.Add(0);
  571. if (WaferManager.Instance.CheckHasWafer(mod, 0) && _movingItems.Exists(item => item.SourceModule == mod))
  572. validSlot.Add(0);
  573. }
  574. return validSlot.Distinct().ToList();
  575. }
  576. List<MoveItem> SearchWaitInSlots(ModuleName inModule)
  577. {
  578. List<MoveItem> inSlots = new List<MoveItem>();
  579. var validSlots = GetModuleValidSlots(inModule);
  580. foreach(var slot in _vacReadyOutSlots)
  581. {
  582. if (slot.Module == inModule)
  583. continue;
  584. var wafer = WaferManager.Instance.GetWafer(slot.Module, slot.Slot);
  585. foreach (var next_module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  586. {
  587. if(next_module == inModule && validSlots.Count > 0)
  588. {
  589. inSlots.Add(new MoveItem(slot.Module, slot.Slot, inModule, validSlots.First(), Hand.None) );
  590. validSlots.RemoveAt(0);
  591. }
  592. }
  593. }
  594. return inSlots;
  595. }
  596. private void ProcessTMRobotTask()
  597. {
  598. if(_tmRobot.IsAvailable)
  599. {
  600. if(WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) || WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1))
  601. {
  602. return;
  603. }
  604. foreach(var slot in _vacReadyOutSlots)
  605. {
  606. if(ModuleHelper.IsLoadLock(slot.Module))
  607. {
  608. if(SearchWaferDestination(slot, out SlotItem destSlot))
  609. {
  610. _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));
  611. // check whether match double pick pattern
  612. var out_slot_2 = _vacReadyOutSlots.Find(item => item.Module == slot.Module && item.Slot != slot.Slot);
  613. if (out_slot_2 != null)
  614. {
  615. if(SearchWaferDestination(out_slot_2, out SlotItem destSlot_2))
  616. {
  617. _movingItems.Add(new MoveItem(out_slot_2.Module, out_slot_2.Slot, destSlot_2.Module, destSlot_2.Slot, Hand.None));
  618. }
  619. }
  620. // check whether match swap pattern
  621. var in_slots = SearchWaitInSlots(slot.Module);
  622. foreach(var in_slot in in_slots)
  623. {
  624. _movingItems.Add(in_slot);
  625. }
  626. return;
  627. }
  628. }
  629. else // PM
  630. {
  631. if(SearchWaferDestination(slot, out SlotItem destSlot))
  632. {
  633. _movingItems.Add(new MoveItem(slot.Module, slot.Slot, destSlot.Module, destSlot.Slot, Hand.None));
  634. // check whether match swap pattern
  635. var in_slots = SearchWaitInSlots(slot.Module);
  636. if(in_slots.Count >= 1)
  637. {
  638. _movingItems.Add(in_slots.First());
  639. }
  640. else
  641. {
  642. // check whether match double move pattern
  643. var same_dest = SearchWaitInSlots(destSlot.Module);
  644. foreach (var item in same_dest)
  645. {
  646. _movingItems.Add(item);
  647. }
  648. }
  649. return;
  650. }
  651. }
  652. }
  653. }
  654. }
  655. private void RuningTMRobotTask()
  656. {
  657. if(_tmRobot.IsAvailable)
  658. {
  659. if(_tmRobot.PostMoveItems(_movingItems.ToArray()))
  660. {
  661. foreach(var item in _movingItems)
  662. {
  663. var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
  664. if (wafer.IsEmpty)
  665. {
  666. // post alarm
  667. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run TM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
  668. return;
  669. }
  670. var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
  671. _vacWaferTargets[slot] = wafer.InnerId;
  672. }
  673. _movingItems.Clear();
  674. }
  675. }
  676. }
  677. private Hand GetTMRobotFreeHand()
  678. {
  679. var blade1HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0);
  680. var blade2HasWafer = WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1);
  681. if (blade1HasWafer && blade2HasWafer)
  682. return Hand.None;
  683. else if (!blade1HasWafer && !blade2HasWafer)
  684. return Hand.Both;
  685. else if (blade1HasWafer)
  686. return Hand.Blade2;
  687. else
  688. return Hand.Blade1;
  689. }
  690. private bool IsVacWaferReadyOut(ModuleName mod, int slot)
  691. {
  692. var wafer = WaferManager.Instance.GetWafer(mod, slot);
  693. if (wafer.IsEmpty)
  694. return false;
  695. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  696. return false;
  697. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  698. {
  699. // should not go here
  700. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  701. return false;
  702. }
  703. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  704. return false;
  705. foreach(var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  706. {
  707. if (ModuleHelper.IsLoadLock(module) || ModuleHelper.IsPm(module))
  708. return true;
  709. }
  710. return false;
  711. }
  712. #endregion Vacuum System
  713. #region Atm System
  714. private void driveAtmSystem()
  715. {
  716. PumpingEFEMRobotTask();
  717. RuningEFEMRobotTask();
  718. }
  719. private void PumpingEFEMRobotTask()
  720. {
  721. if (!_efemRobot.IsAvailable)
  722. return;
  723. foreach(var scheduler in _atmSchedulers)
  724. {
  725. if (!scheduler.Value.IsAvailable)
  726. continue;
  727. if(ModuleHelper.IsLoadLock(scheduler.Key))
  728. {
  729. if (ProcessLLEFEMRobotTask(scheduler.Key))
  730. return;
  731. }
  732. else if(ModuleHelper.IsAligner(scheduler.Key))
  733. {
  734. if (ProcessAlignerEFEMRobotTask(scheduler.Key))
  735. return;
  736. }
  737. else if(ModuleHelper.IsCooling(scheduler.Key))
  738. {
  739. if (ProcessCoolingEFEMRobotTask(scheduler.Key))
  740. return;
  741. }
  742. else if (ModuleHelper.IsLoadPort(scheduler.Key))
  743. {
  744. if (ProcessLPEFEMRobotTask(scheduler.Key))
  745. return;
  746. }
  747. else
  748. {
  749. // should not go here
  750. LOG.Write(eEvent.ERR_ROUTER, $"Wrong Module: {scheduler.Key} in ATM System");
  751. }
  752. }
  753. }
  754. List<int> GetEfemRobotWaferReadyInHands(ModuleName mod)
  755. {
  756. var slots = new List<int>();
  757. for(int i = 0; i < 2; i++)
  758. {
  759. var wafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
  760. if (wafer.IsEmpty)
  761. continue;
  762. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  763. continue;
  764. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  765. {
  766. // should not go here
  767. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  768. continue;
  769. }
  770. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  771. {
  772. slots.Add(i);
  773. }
  774. }
  775. return slots;
  776. }
  777. bool IsAtmWaferReadyOut(ModuleName mod, int slot)
  778. {
  779. var wafer = WaferManager.Instance.GetWafer(mod, slot);
  780. if (wafer.IsEmpty)
  781. return false;
  782. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  783. return false;
  784. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  785. {
  786. // should not go here
  787. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Wafer:{wafer.WaferOrigin} NextSequenceStep {wafer.NextSequenceStep} exceeds {wafer.ProcessJob.Sequence.Name} max steps number");
  788. return false;
  789. }
  790. if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod))
  791. return false;
  792. if(ModuleHelper.IsLoadLock(mod))
  793. {
  794. foreach (var module in wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules)
  795. {
  796. if (ModuleHelper.IsPm(module))
  797. return false;
  798. }
  799. }
  800. return true;
  801. }
  802. private bool ProcessLLEFEMRobotTask(ModuleName ll)
  803. {
  804. var robotSlots = GetEfemRobotWaferReadyInHands(ll);
  805. var inSlots = ll == ModuleName.LLA ? _LLAInSlot : _LLBInSlot;
  806. foreach(var slot in inSlots)
  807. {
  808. if(robotSlots.Count >= 1)
  809. {
  810. if(WaferManager.Instance.CheckNoWafer(ll, slot))
  811. {
  812. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), ll, slot, (Hand)robotSlots.First()));
  813. robotSlots.RemoveAt(0);
  814. }
  815. }
  816. }
  817. var outSlots = ll == ModuleName.LLA ? _LLAOutSlot : _LLBOutSlot;
  818. foreach(var slot in outSlots)
  819. {
  820. if(IsAtmWaferReadyOut(ll, slot))
  821. {
  822. var robotHand = GetEFEMRobotFreeHand();
  823. if(robotHand != Hand.None)
  824. {
  825. _efemMovingItems.Add(new MoveItem(ll, slot, ModuleName.EfemRobot, (int)robotHand, robotHand));
  826. }
  827. }
  828. }
  829. return _efemMovingItems.Count > 0;
  830. }
  831. private Tuple<int, int> GetPMWaferExistence()
  832. {
  833. int exist = 0;
  834. int empty = 0;
  835. foreach (var atmModule in _atmModules)
  836. {
  837. if (ModuleHelper.IsPm(atmModule.Key))
  838. {
  839. if (WaferManager.Instance.CheckHasWafer(atmModule.Key, 0))
  840. exist++;
  841. else
  842. empty++;
  843. }
  844. }
  845. return new Tuple<int, int>(exist, empty);
  846. }
  847. private int GetTMRobotWaferCount()
  848. {
  849. return (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
  850. }
  851. private int GetEfemRoborWaferCount()
  852. {
  853. return (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1) ? 1 : 0);
  854. }
  855. private Tuple<int, int> GetLLProcessStatusCount(ModuleName ll)
  856. {
  857. int processedCount = 0;
  858. int unprocessCount = 0;
  859. int slotCount = ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber;
  860. if(ModuleHelper.IsLoadLock(ll))
  861. {
  862. for(int i = 0; i < slotCount;i++)
  863. {
  864. if(WaferManager.Instance.CheckHasWafer(ll, i))
  865. {
  866. if(CheckWaferNeedProcessAndPMAvailable(ll, i))
  867. unprocessCount++;
  868. else
  869. processedCount++;
  870. }
  871. }
  872. }
  873. return new Tuple<int, int>(processedCount, unprocessCount);
  874. }
  875. private int GetAtmInerWaferCount()
  876. {
  877. int nCount = 0;
  878. foreach(var atmModule in _atmModules)
  879. {
  880. if (!ModuleHelper.IsEFEMRobot(atmModule.Key) && WaferManager.Instance.CheckHasWafer(atmModule.Key, 0))
  881. nCount++;
  882. }
  883. return nCount;
  884. }
  885. private bool IsReadyPushWaferIn()
  886. {
  887. var llaWaferStatus = GetLLProcessStatusCount(ModuleName.LLA);
  888. var llbWaferStatus = GetLLProcessStatusCount(ModuleName.LLB);
  889. var pmWaferStatus = GetPMWaferExistence();
  890. if (pmWaferStatus.Item2 <= (llaWaferStatus.Item2 + llbWaferStatus.Item2))
  891. return false;
  892. if (GetEfemRoborWaferCount() >= 1 && GetAtmInerWaferCount() > 0)
  893. return false;
  894. return true;
  895. }
  896. private bool ProcessLPEFEMRobotTask(ModuleName lp)
  897. {
  898. // check return
  899. for(int i = 0; i < 2; i++)
  900. {
  901. if(WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i))
  902. {
  903. var returnWafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
  904. if (returnWafer.IsEmpty)
  905. continue;
  906. if (returnWafer.ProcessJob == null || returnWafer.ProcessJob.Sequence == null)
  907. continue;
  908. if (returnWafer.NextSequenceStep >= returnWafer.ProcessJob.Sequence.Steps.Count && lp == (ModuleName)returnWafer.OriginStation) // need return
  909. {
  910. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, i, lp, returnWafer.OriginSlot, (Hand)i));
  911. }
  912. }
  913. }
  914. if(_efemMovingItems.Count == 0 && IsReadyPushWaferIn())
  915. {
  916. var outSlots = GetNextWaferInJobQueue(lp);
  917. foreach (var slot in outSlots)
  918. {
  919. var hand = GetEFEMRobotFreeHand();
  920. if (hand != Hand.None)
  921. {
  922. _efemMovingItems.Add(new MoveItem(lp, slot, ModuleName.EfemRobot, (int)hand, hand));
  923. }
  924. }
  925. }
  926. return _efemMovingItems.Count > 0;
  927. }
  928. private List<int> GetNextWaferInJobQueue(ModuleName lp)
  929. {
  930. var inSlots = new List<int>();
  931. foreach (var cj in _lstControlJobs)
  932. {
  933. if (lp != ModuleName.System && (cj.Module != lp.ToString()))
  934. continue;
  935. if (cj.State == EnumControlJobState.Executing)
  936. {
  937. foreach (var pj in _lstProcessJobs)
  938. {
  939. if (pj.ControlJobName == cj.Name && pj.State == EnumProcessJobState.Processing)
  940. {
  941. foreach (var pjSlotWafer in pj.SlotWafers)
  942. {
  943. if (CheckWaferNeedProcessAndPMAvailable(pjSlotWafer.Item1, pjSlotWafer.Item2))
  944. {
  945. //return new SlotItem(pjSlotWafer.Item1, pjSlotWafer.Item2);
  946. inSlots.Add(pjSlotWafer.Item2);
  947. }
  948. }
  949. }
  950. }
  951. }
  952. }
  953. return inSlots;
  954. }
  955. private bool ProcessAlignerEFEMRobotTask(ModuleName aligner)
  956. {
  957. if(WaferManager.Instance.CheckHasWafer(aligner, 0) && IsAtmWaferReadyOut(aligner, 0))
  958. {
  959. var hand = GetEFEMRobotFreeHand();
  960. if(hand != Hand.None)
  961. {
  962. _efemMovingItems.Add(new MoveItem(aligner, 0, ModuleName.EfemRobot, (int)hand, hand));
  963. }
  964. //// check with whether another robot arm wafer wait go to aligner
  965. //var robotSlots = GetEfemRobotWaferReadyInHands(aligner);
  966. //if (robotSlots.Count > 0)
  967. //{
  968. // _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), aligner, 0, (Hand)robotSlots.First()));
  969. //}
  970. }
  971. else if(WaferManager.Instance.CheckNoWafer(aligner, 0))
  972. {
  973. var robotSlots = GetEfemRobotWaferReadyInHands(aligner);
  974. if(robotSlots.Count > 0)
  975. {
  976. _efemMovingItems.Add(new MoveItem(ModuleName.EfemRobot, robotSlots.First(), aligner, 0, (Hand)robotSlots.First()));
  977. }
  978. }
  979. return _efemMovingItems.Count > 0;
  980. }
  981. private bool ProcessCoolingEFEMRobotTask(ModuleName cooling)
  982. {
  983. if (WaferManager.Instance.CheckHasWafer(cooling, 0) && IsAtmWaferReadyOut(cooling, 0))
  984. {
  985. var hand = GetEFEMRobotFreeHand();
  986. if (hand != Hand.None)
  987. {
  988. _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, (int)hand, hand));
  989. }
  990. }
  991. else
  992. {
  993. var robotSlots = GetEfemRobotWaferReadyInHands(cooling);
  994. if (robotSlots.Count > 0)
  995. {
  996. _efemMovingItems.Add(new MoveItem(cooling, 0, ModuleName.EfemRobot, robotSlots.First(), (Hand)robotSlots.First()));
  997. }
  998. }
  999. return _efemMovingItems.Count > 0;
  1000. }
  1001. private void RuningEFEMRobotTask()
  1002. {
  1003. if (_efemRobot.IsAvailable && _efemMovingItems.Count > 0)
  1004. {
  1005. if (_efemRobot.PostMoveItems(_efemMovingItems.ToArray()))
  1006. {
  1007. foreach (var item in _efemMovingItems)
  1008. {
  1009. var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
  1010. if (wafer.IsEmpty)
  1011. {
  1012. // post alarm
  1013. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run EFEM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
  1014. return;
  1015. }
  1016. var slot = new SlotItem(item.DestinationModule, item.DestinationSlot);
  1017. _atmWaferTargets[slot] = wafer.InnerId;
  1018. }
  1019. _efemMovingItems.Clear();
  1020. }
  1021. }
  1022. }
  1023. private Hand GetEFEMRobotFreeHand()
  1024. {
  1025. for(int i = 0; i < 2; i++)
  1026. {
  1027. if ((WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, i) && !_efemMovingItems.Exists(item => item.DestinationModule == ModuleName.EfemRobot && item.DestinationSlot == i)) ||
  1028. (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, i) && _efemMovingItems.Exists(item => item.SourceModule == ModuleName.EfemRobot && item.SourceSlot == i)))
  1029. return (Hand)i;
  1030. }
  1031. return Hand.None;
  1032. }
  1033. #endregion Atm System
  1034. #region Sequence validation
  1035. private bool CheckSequencePmReady(SequenceInfo seq, List<ModuleName> pmOccupied, out List<ModuleName> pmUsed, out string reason)
  1036. {
  1037. pmUsed = new List<ModuleName>();
  1038. reason = "";
  1039. bool pmIsReady = true;
  1040. for (int i = 0; i < seq.Steps.Count; i++)
  1041. {
  1042. SequenceStepInfo stepInfo = seq.Steps[i];
  1043. bool hasPm = false;
  1044. foreach (var module in stepInfo.StepModules)
  1045. {
  1046. if (!ModuleHelper.IsPm(module))
  1047. {
  1048. hasPm = true;
  1049. break;
  1050. }
  1051. if (ModuleHelper.IsInstalled(module) && (pmOccupied == null || !pmOccupied.Contains(module)))
  1052. {
  1053. hasPm = true;
  1054. }
  1055. if (!pmUsed.Contains(module))
  1056. pmUsed.Add(module);
  1057. }
  1058. if (pmIsReady && !hasPm)
  1059. {
  1060. reason = $"Step {i + 1} no valid PM, " + string.Join("|", stepInfo.StepModules);
  1061. pmIsReady = false;
  1062. }
  1063. }
  1064. return pmIsReady;
  1065. }
  1066. private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
  1067. {
  1068. for (int i = 0; i < seq.Steps.Count; i++)
  1069. {
  1070. SequenceStepInfo stepInfo = seq.Steps[i];
  1071. foreach (var module in stepInfo.StepModules)
  1072. {
  1073. if (ModuleHelper.IsPm(module))
  1074. {
  1075. string attr = $"{module}Recipe";
  1076. if (stepInfo.StepParameter.ContainsKey(attr)
  1077. && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
  1078. {
  1079. var recipeName = (string)stepInfo.StepParameter[attr];
  1080. if (!string.IsNullOrEmpty(recipeName))
  1081. {
  1082. var recipeContent =
  1083. RecipeFileManager.Instance.LoadRecipe($"", recipeName, false);
  1084. if (string.IsNullOrEmpty(recipeContent))
  1085. {
  1086. reason = $"Can not find recipe file{recipeName}";
  1087. return false;
  1088. }
  1089. }
  1090. }
  1091. }
  1092. }
  1093. }
  1094. reason = "";
  1095. return true;
  1096. }
  1097. private bool CheckWaferNeedProcessAndPMAvailable(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  1098. {
  1099. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  1100. if (wafer.IsEmpty)
  1101. return false;
  1102. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  1103. return false;
  1104. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  1105. return false;
  1106. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  1107. {
  1108. var hasPmAvailable = false;
  1109. foreach (var stepModule in wafer.ProcessJob.Sequence.Steps[i].StepModules)
  1110. {
  1111. if (!ModuleHelper.IsPm(stepModule))
  1112. break;
  1113. var pm = _vacSchedulers[stepModule] as SchedulerPM;
  1114. if (pm != null)
  1115. {
  1116. if (pm.IsAvailable || (pm.IsOnline && pm.Task != SchedulerModule.TaskType.PreJobProcess))
  1117. {
  1118. hasPmAvailable = true;
  1119. break;
  1120. }
  1121. }
  1122. }
  1123. if (!hasPmAvailable)
  1124. continue;
  1125. if (processIn == ModuleName.System)
  1126. return true;
  1127. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  1128. .Contains(processIn))
  1129. return true;
  1130. }
  1131. return false;
  1132. }
  1133. private List<ModuleName> GetPmUsedInRunningPj()
  1134. {
  1135. var pmUsed = new List<ModuleName>();
  1136. foreach (var cj in _lstControlJobs)
  1137. {
  1138. if (cj.State != EnumControlJobState.Executing && cj.State != EnumControlJobState.Paused)
  1139. continue;
  1140. foreach (var pj in _lstProcessJobs)
  1141. {
  1142. if (pj.ControlJobName == cj.Name && (pj.State == EnumProcessJobState.Processing || pj.State == EnumProcessJobState.Paused))
  1143. {
  1144. for (int i = 0; i < pj.Sequence.Steps.Count; i++)
  1145. {
  1146. SequenceStepInfo stepInfo = pj.Sequence.Steps[i];
  1147. foreach (var module in stepInfo.StepModules)
  1148. {
  1149. if (ModuleHelper.IsPm(module) && !pmUsed.Contains(module))
  1150. pmUsed.Add(module);
  1151. }
  1152. }
  1153. }
  1154. }
  1155. }
  1156. return pmUsed;
  1157. }
  1158. private List<SchedulerPM> GetPmNeeded(ControlJobInfo cj)
  1159. {
  1160. List<SchedulerPM> result = new List<SchedulerPM>();
  1161. foreach (var pj in _lstProcessJobs)
  1162. {
  1163. if (pj.ControlJobName != cj.Name)
  1164. continue;
  1165. var seq = pj.Sequence;
  1166. for (int i = 0; i < seq.Steps.Count; i++)
  1167. {
  1168. SequenceStepInfo stepInfo = seq.Steps[i];
  1169. foreach (var module in stepInfo.StepModules)
  1170. {
  1171. if (ModuleHelper.IsPm(module))
  1172. {
  1173. var pm = _vacSchedulers[module] as SchedulerPM;
  1174. if (pm != null && !result.Contains(pm))
  1175. {
  1176. result.Add(pm);
  1177. }
  1178. }
  1179. }
  1180. }
  1181. }
  1182. return result;
  1183. }
  1184. private void PreJobClean(ControlJobInfo cj)
  1185. {
  1186. if (cj.IsPreJobCleanDone)
  1187. return;
  1188. cj.IsPreJobCleanDone = true;
  1189. List<SchedulerPM> pms = GetPmNeeded(cj);
  1190. foreach (var pm in pms)
  1191. {
  1192. pm.PreJobClean();
  1193. }
  1194. }
  1195. private bool ActiveProcessJob(ProcessJobInfo pj)
  1196. {
  1197. foreach (var pjSlotWafer in pj.SlotWafers)
  1198. {
  1199. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  1200. wafer.ProcessJob = pj;
  1201. wafer.NextSequenceStep = 0;
  1202. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  1203. }
  1204. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);
  1205. CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
  1206. JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);
  1207. pj.SetState(EnumProcessJobState.Processing);
  1208. PreJobClean(cj);
  1209. return true;
  1210. }
  1211. private void StartNewJob()
  1212. {
  1213. ControlJobInfo cjActived = null;
  1214. List<ModuleName> pmOccupied = GetPmUsedInRunningPj();
  1215. foreach (var cj in _lstControlJobs)
  1216. {
  1217. if (cj.State != EnumControlJobState.Executing)
  1218. continue;
  1219. cjActived = cj;
  1220. foreach (var pjName in cjActived.ProcessJobNameList)
  1221. {
  1222. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  1223. if (pj == null)
  1224. {
  1225. LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cjActived.Name}");
  1226. continue;
  1227. }
  1228. if (pj.State == EnumProcessJobState.Queued)
  1229. {
  1230. if (CheckSequencePmReady(pj.Sequence, pmOccupied, out var pmUsed, out string reason))
  1231. {
  1232. ActiveProcessJob(pj);
  1233. foreach (var moduleName in pmUsed)
  1234. {
  1235. if (!pmOccupied.Contains(moduleName))
  1236. pmOccupied.Add(moduleName);
  1237. }
  1238. }
  1239. break;
  1240. }
  1241. }
  1242. }
  1243. }
  1244. #endregion
  1245. }
  1246. }