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TMInterlock.xml

TMInterlock.xml 15 KB
History Raw

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
    3. 

  3. 

  4. 

  5. 	<!--TM-->
    6. 

  6. 	<Action do="DO_N2_Valve"					value="true" tip="N2 Valve"	tip.zh-CN="" tip.en-US="DO-00" >
    7. 

  7. 		<Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
    8. 

  8. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    9. 

  9. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    10. 

  10. 	</Action>
    11. 

  11. 

  12. 	<Action do="DO_Soft_Pumping_Valve_TM"					value="true" tip="Soft Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-01" >
    13. 

  13. 		<Limit di="DI_TM_CHB_Door_Closed"			value="true" tip="TM CHB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-17" />
    14. 

  14. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    15. 

  15. 		<Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    16. 

  16. 		<Limit di="DI_LLA_T_Slit_Door_close_Position"			value="true" tip="LLA Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-25" />
    17. 

  17. 		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    18. 

  18. 		<Limit di="DI_LLB_E_Slit_Door_close_Position"			value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
    19. 

  19. 		<Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
    20. 

  20. 		<Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
    21. 

  21. 	</Action>
    22. 

  22. 

  23. 	<Action do="DO_Fast_Pumping_Valve_TM"					value="true" tip="Fast Pumping Valve TM"	tip.zh-CN="" tip.en-US="DO-02" >
    24. 

  24. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    25. 

  25. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    26. 

  26. 		<Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    27. 

  27. 		<Limit di="DI_LLA_T_Slit_Door_close_Position"			value="true" tip="LLA Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-25" />
    28. 

  28. 		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    29. 

  29. 		<Limit di="DI_LLB_E_Slit_Door_close_Position"			value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
    30. 

  30. 		<Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
    31. 

  31. 		<Limit di="DI_LLB_Lid_Door_Closed"			value="true" tip="LLB Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-31" />
    32. 

  32. 	</Action>
    33. 

  33. 

  34. 	<Action do="DO_Purge_Valve_TM"					value="true" tip="Purge Valve TM"	tip.zh-CN="" tip.en-US="DO-03" >
    35. 

  35. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    36. 

  36. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    37. 

  37. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />	
    38. 

  38. 	</Action>
    39. 

  39. 

  40. 	<Action do="DO_Vent_Valve_TM"					value="true" tip="Soft Vent Valve TM"	tip.zh-CN="" tip.en-US="DO-04" >
    41. 

  41. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    42. 

  42. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    43. 

  43. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    44. 

  44. 	</Action>
    45. 

  45. 

  46. 	<Action do="DO_Soft_Pumping_Valve_LLA"					value="true" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" >
    47. 

  47. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    48. 

  48. 		<Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    49. 

  49. 		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    50. 

  50. 		<Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
    51. 

  51. 		<Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
    52. 

  52. 		<Limit do="DO_Soft_Pumping_Valve_LLB"	value="false" tip="Soft Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-16" />
    53. 

  53. 		<Limit do="DO_Fast_Pumping_Valve_LLB"				value="false" tip="Fast Pumping Valve LLB"			tip.zh-CN="" tip.en-US="DO-17" />
    54. 

  54. 	</Action>
    55. 

  55. 

  56. 	<Action do="DO_Fast_Pumping_Valve_LLA"					value="true" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" >
    57. 

  57. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    58. 

  58. 		<Limit di="DI_LLA_E_Slit_Door_close_Position"			value="true" tip="LLA In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-23" />
    59. 

  59. 		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    60. 

  60. 		<Limit do="DO_Purge_Valve_LLA"					value="false" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" />
    61. 

  61. 		<Limit do="DO_Vent_Valve_LLA"					value="false" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" />
    62. 

  62. 		<Limit do="DO_Soft_Pumping_Valve_LLB"					value="false" tip="Soft Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-16" />
    63. 

  63. 		<Limit do="DO_Fast_Pumping_Valve_LLB"					value="false" tip="Fast Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-17" />
    64. 

  64. 	</Action>
    65. 

  65. 

  66. 	<Action do="DO_Purge_Valve_LLA"					value="true" tip="Purge Valve LLA"	tip.zh-CN="" tip.en-US="DO-08" >
    67. 

  67. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    68. 

  68. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    69. 

  69. 		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    70. 

  70. 	</Action>
    71. 

  71. 

  72. 	<Action do="DO_Vent_Valve_LLA"					value="true" tip="Vent Valve LLA"	tip.zh-CN="" tip.en-US="DO-09" >
    73. 

  73. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    74. 

  74. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    75. 

  75. 		<Limit di="DI_LLA_Lid_Door_Closed"			value="true" tip="LLA Lid Door Closed"		tip.zh-CN="" tip.en-US="DI-26" />
    76. 

  76. 	</Action>
    77. 

  77. 

  78. 	<Action do="DO_LLA_Slit_Door_E_Open"					value="true" tip="LLA Slit Door/I Open"	tip.zh-CN="" tip.en-US="DO-11" >
    79. 

  79. 		<Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    80. 

  80. 		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    81. 

  81. 		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    82. 

  82. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    83. 

  83. 		<Limit di="DI_LLA_T_Slit_Door_close_Position"	value="true" tip="LLA TM Side Door Closed"			tip.zh-CN="" tip.en-US="DI-25" />
    84. 

  84. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    85. 

  85. 		<Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
    86. 

  86. 	</Action>
    87. 

  87. 

  88. 	<Action do="DO_LLA_Slit_Door_E_Close"				value="true" tip="LLA Slit Door/I Close"	tip.zh-CN="" tip.en-US="DO-12" >
    89. 

  89. 		<Limit di="DI_TM_RB_Not_Extend_LLA"			value="true" tip="TM RB Not Extend LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    90. 

  90. 		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    91. 

  91. 		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    92. 

  92. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    93. 

  93. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    94. 

  94. 	</Action>
    95. 

  95. 

  96. 

  97. 

  98. 	<Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
    99. 

  99. 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    100. 

  100. 		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    101. 

  101. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    102. 

  102. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    103. 

  103. 		<Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
    104. 

  104. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    105. 

  105. 	</Action>
    106. 

  106. 

  107. 

  108. 	<Action do="DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
    109. 

  109. 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
    110. 

  110. 		<Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
    111. 

  111. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    112. 

  112. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    113. 

  113. 		<Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
    114. 

  114. 	</Action>
    115. 

  115. 

  116. 	<Action do="DO_Soft_Pumping_Valve_LLB"				value="true" tip="Soft Pumping Valve LLB"	tip.zh-CN="" tip.en-US="DO-16" >
    117. 

  117. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    118. 

  118. 		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB In Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-28" />
    119. 

  119. 		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-31" />
    120. 

  120. 		<Limit do="DO_Soft_Pumping_Valve_LLA"					value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
    121. 

  121. 		<Limit do="DO_Fast_Pumping_Valve_LLA"					value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
    122. 

  122. 	</Action>
    123. 

  123. 

  124. 	<Action do="DO_Fast_Pumping_Valve_LLB"			value="true"  tip="Fast Pumping Valve LLB"		tip.zh-CN="" tip.en-US="DO-17" >
    125. 

  125. 		<Limit di="DI_CDA_Pressure_Switch"			    value="true"  tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    126. 

  126. 		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true"  tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    127. 

  127. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true"  tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    128. 

  128. 		<Limit do="DO_Soft_Pumping_Valve_LLA"			value="false" tip="Soft Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-06" />
    129. 

  129. 		<Limit do="DO_Fast_Pumping_Valve_LLA"			value="false" tip="Fast Pumping Valve LLA"	tip.zh-CN="" tip.en-US="DO-07" />
    130. 

  130. 	</Action>
    131. 

  131. 

  132. 	<Action do="DO_Purge_Valve_LLB"					value="true" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" >
    133. 

  133. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    134. 

  134. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    135. 

  135. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    136. 

  136. 	</Action>
    137. 

  137. 

  138. 	<Action do="DO_Vent_Valve_LLB"					value="true" tip="Vent Valve LLB"		tip.zh-CN="" tip.en-US="DO-19" >
    139. 

  139. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    140. 

  140. 		<Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
    141. 

  141. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    142. 

  142. 	</Action>
    143. 

  143. 

  144. 	<Action do="DO_LLB_Slit_Door_E_Open"					value="true" tip="LLB Slit Door/I Open"		tip.zh-CN="" tip.en-US="DO-21" >
    145. 

  145. 		<Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
    146. 

  146. 		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    147. 

  147. 		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    148. 

  148. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    149. 

  149. 		<Limit di="DI_LLB_T_Slit_Door_close_Position"			value="true" tip="LLB Out Slit Door close Position"		tip.zh-CN="" tip.en-US="DI-30" />
    150. 

  150. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    151. 

  151. 		<Limit di="DI_LLB_ATM_Switch"	value="true" tip="LLB ATM Switch"		tip.zh-CN="" tip.en-US="DI-37" />
    152. 

  152. 	</Action>
    153. 

  153. 

  154. 	<Action do="DO_LLB_Slit_Door_E_Close"					value="true" tip="LLB Slit Door/I Close"		tip.zh-CN="" tip.en-US="DO-22" >
    155. 

  155. 		<Limit di="DI_TM_RB_Not_Extend_LLB"			value="true" tip="TM RB Not Extend LLB"		tip.zh-CN="" tip.en-US="DI-09" />
    156. 

  156. 		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    157. 

  157. 		<Limit di="DI_EFEM_Side_Door_Closed"				value="true" tip="EFEM Side Panel Closed"			tip.zh-CN="" tip.en-US="DI-13" />
    158. 

  158. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    159. 

  159. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    160. 

  160. 	</Action>
    161. 

  161. 

  162. 	<Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="LLB Slit Door/O Open"		tip.zh-CN="" tip.en-US="DO-23" >
    163. 

  163. 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    164. 

  164. 		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    165. 

  165. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    166. 

  166. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    167. 

  167. 		<Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
    168. 

  168. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    169. 

  169. 	</Action>
    170. 

  170. 

  171. 

  172. 	<Action do="DO_LLB_Slit_Door_T_Close"				value="true" tip="LLB Slit Door/O Close"	tip.zh-CN="" tip.en-US="DO-24" >
    173. 

  173. 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
    174. 

  174. 		<Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
    175. 

  175. 		<Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
    176. 

  176. 		<Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
    177. 

  177. 		<Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
    178. 

  178. 	</Action>
    179. 

  179. 

  180. 	<Action do="DO_Water_Valve_Relay"				value="true" tip="Water Valve Relay"	tip.zh-CN="" tip.en-US="DO-26" >
    181. 

  181. 		<Limit di="DI_Water_Leak_Sensor"				value="true" tip="Water Leak Sensor"		tip.zh-CN="" tip.en-US="DI-3" />
    182. 

  182. 	</Action>
    183. 

  183. 

  184. </Interlock>
    185.