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Kepler-Release
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Venus
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Venus_RT
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Config
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TM
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DeviceModelVenus_MF.xml

DeviceModelVenus_MF.xml 28 KB
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  1. <?xml version="1.0" encoding="utf-16"?>
    2. 

  2. <DeviceModelDefine type="TM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
    3. 

  3.     <IoValves>
    4. 

  4. 	<IoValve id="TMValveN2" display="N2 Valve" schematicId="N2" unit="" isNc="true"
    5. 

  5. 	        isDefaultOpen="false" diOpen="" doOpen="DO_N2_Valve" diCloseSensor="" diOpenSensor="" />
    6. 

  6. 		
    7. 

  7. 	<IoValve id="TMSoftPumpValve" display="Soft Pump Valve" schematicId="SoftPump" unit="" isNc="true"
    8. 

  8. 			isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />		
    9. 

  9. 	<IoValve id="TMFastPumpValve" display="Fast Pump Valve" schematicId="FastPump" unit="" isNc="true"
    10. 

  10. 			isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_TM" diCloseSensor="" diOpenSensor="" />
    11. 

  11. 		
    12. 

  12. 	<IoValve id="TMPurgeValve" display="Purge Valve" schematicId="Purge" unit="" isNc="true"
    13. 

  13. 			isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_TM" diCloseSensor="" diOpenSensor="" />
    14. 

  14. 	  <IoValve id="TMVentValve" display="Vent Valve" schematicId="Vent" unit="" isNc="true"
    15. 

  15. 			isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_TM" diCloseSensor="" diOpenSensor="" />
    16. 

  16. 		
    17. 

  17. 	<IoValve id="LLASoftPumpValve" display="LLA Soft Pump Valve" schematicId="SoftPumpLLA" unit="" isNc="true"
    18. 

  18. 			isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    19. 

  19. 	<IoValve id="LLAFastPumpValve" display="LLA Fast Pump Valve" schematicId="FastPumpLLA" unit="" isNc="true"
    20. 

  20. 			isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    21. 

  21. 		
    22. 

  22. 	<IoValve id="LLAPurgeValve" display="LLA Purge Valve" schematicId="PurgeLLA" unit="" isNc="true"
    23. 

  23. 			isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    24. 

  24. 	<IoValve id="LLAVentValve" display="LLA Vent Valve" schematicId="VentLLA" unit="" isNc="true"
    25. 

  25.             isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLA" diCloseSensor="" diOpenSensor="" />
    26. 

  26. 		
    27. 

  27.    
    28. 

  28. 	<IoValve id="LLBSoftPumpValve" display="LLB Soft Pump Valve" schematicId="SoftPumpLLB" unit="" isNc="true"
    29. 

  29. 		isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    30. 

  30. 	<IoValve id="LLBFastPumpValve" display="LLB Fast Pump Valve" schematicId="FastPumpLLB" unit="" isNc="true"
    31. 

  31. 			isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    32. 

  32. 		
    33. 

  33. 	<IoValve id="LLBPurgeValve" display="LLB Purge Valve" schematicId="PurgeLLB" unit="" isNc="true"
    34. 

  34. 			isDefaultOpen="false" diOpen="" doOpen="DO_Purge_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    35. 

  35. 	<IoValve id="LLBVentValve" display="LLB Vent Valve" schematicId="VentLLB" unit="" isNc="true"
    36. 

  36. 			isDefaultOpen="false" diOpen="" doOpen="DO_Vent_Valve_LLB" diCloseSensor="" diOpenSensor="" />
    37. 

  37. 		
    38. 

  38. 	<IoValve id="ValveWaterRelay" display="Water Relay Valve" schematicId="WaterRelay" unit="" isNc="true"
    39. 

  39. 			isDefaultOpen="false" diOpen="" doOpen="DO_Water_Valve_Relay" diCloseSensor="" diOpenSensor="" />
    40. 

  40. 

  41. 	<IoValve id="TMVacAtmMode" display="TM Vacuum/Atm Mode" schematicId="TMVacAtmMode" unit="" isNc="true"
    42. 

  42. 			isDefaultOpen="false" diOpen="" doOpen="DO_TM_VAC_ATM_MODE" diCloseSensor="" diOpenSensor="" />
    43. 

  43.     
    44. 

  44.   </IoValves>
    45. 

  45. 

  46.     <IoMfcs assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoMfc">
    47. 

  47.     <IoMfc id="TM_MFC1" display="MFC1" schematicId="MFC1" unit="sccm"
    48. 

  48.             aiFlow="AI_TM_MFC1_Flow" aoFlow="AO_TM_MFC1_Flow_Setpoint" diOffline="" aoRange=""
    49. 

  49.             diPressureAlarm="DI_N2_Pressure_Switch"/>
    50. 

  50.     </IoMfcs>
    51. 

  51. 

  52.     <IoGasSticks assembly="Venus_RT" classType="Venus_RT.Devices.IoGasStick">
    53. 

  53. 	    <IoGasStick id="GasStickMFC1" display="" mfc ="TM_MFC1" downvalve="TMValveN2" />
    54. 

  54.     </IoGasSticks>
    55. 

  55. 

  56.     <IoSensors>
    57. 

  57.       <IoSensor id="TMPowerOn" display="TM Power On"  schematicId="" unit="" di="DI_TM_Power_On" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="TM Power Off" />
    58. 

  58. 	  <IoSensor id="TMInSafty" display="TM In Safty"  schematicId="" unit="" di="DI_TM_In_Safety" isLowAsNormal="" textOutTrigValue="false"
    59. 

  59. 				infoText="" warningText="" alarmText="TM Safty Alarm" />
    60. 

  60. 	  <IoSensor id="WaferLeakSensor" display="Water Leak Sensor"  schematicId="" unit="" di="DI_Water_Leak_Sensor" isLowAsNormal="" textOutTrigValue="false"
    61. 

  61. 				infoText="" warningText="" alarmText="TM Wafer Leak" />
    62. 

  62. 	  <IoSensor id="EFEMSideDoorClosed" display="EFEM Side Door Closed"  schematicId="" unit="" di="DI_EFEM_Side_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
    63. 

  63. 				infoText="" warningText="" alarmText="EFEM Side Door Not Closed" />
    64. 

  64. 	  <IoSensor id="TMPCWFlowSwitch" display="TM PCW Flow Switch"  schematicId="" unit="" di="DI_TM_CHB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
    65. 

  65. 				infoText="" warningText="TM PCW Flow Switch abnormal" alarmText="" />
    66. 

  66. 	  <IoSensor id="LLAPCWFlowSwitch" display="LLA PCW Flow Switch"  schematicId="" unit="" di="DI_LLA_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
    67. 

  67. 				infoText="" warningText="LLA PCW Flow Switch abnormal" alarmText="" />
    68. 

  68. 	  <IoSensor id="LLBPCWFlowSwitch" display="LLB PCW Flow Switch"  schematicId="" unit="" di="DI_LLB_PCW_Flow_Switch" isLowAsNormal="" textOutTrigValue="false"
    69. 

  69. 				infoText="" warningText="LLB PCW Flow Switch abnormal" alarmText="" />
    70. 

  70. 	  <IoSensor id="TMLidClosed" display="TM Lid Closed"  schematicId="" unit="" di="DI_TM_CHB_Door_Closed" isLowAsNormal="" textOutTrigValue="false"
    71. 

  71. 				infoText="" warningText="" alarmText="TM Lid Not Closed" />
    72. 

  72. 	  <IoSensor id="CDAPressureSwitch" display="CDA pressure Switch"  schematicId="" unit="" di="DI_CDA_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
    73. 

  73. 				infoText="" warningText="" alarmText="TM CDA pressure abnormal" />
    74. 

  74. 	  <IoSensor id="VaccumPressureSwitch" display="Vaccum Pressure Switch"  schematicId="" unit="" di="DI_Vaccum_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false"
    75. 

  75. 			 infoText="" warningText="" alarmText="Vaccum Pressure Switch abnormal" />
    76. 

  76. 	  <IoSensor id="N2PressureSwitch" display="N2 Pressure Switch"  schematicId="" unit="" di="DI_N2_Pressure_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Switch abnormal" />
    77. 

  77. 

  78. 	  <IoSensor id="TMRobotNotExtendPMA" display="TM Robot Not Extend To PMA"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    79. 

  79. 	  <IoSensor id="TMRobotNotExtendPMB" display="TM Robot Not Extend To PMB"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    80. 

  80. 	  <IoSensor id="TMRobotNotExtendPMC" display="TM Robot Not Extend To PMC"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMC" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    81. 

  81. 	  <IoSensor id="TMRobotNotExtendPMD" display="TM Robot Not Extend To PMD"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_PMD" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    82. 

  82. 	  <IoSensor id="TMRobotNotExtendLLA" display="TM Robot Not Extend To LLA"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_LLA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    83. 

  83. 	  <IoSensor id="TMRobotNotExtendLLB" display="TM Robot Not Extend To LLB"  schematicId="" unit="" di="DI_TM_RB_Not_Extend_LLB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    84. 

  84. 	  <IoSensor id="EfemRobotNotExtendLLA" display="EFEM Robot Not Extend To LLA"  schematicId="" unit="" di="DI_EFEM_RB_Not_Extend_LLA" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    85. 

  85. 	  <IoSensor id="EfemRobotNotExtendLLB" display="EFEM Robot Not Extend To LLB"  schematicId="" unit="" di="DI_EFEM_RB_Not_Extend_LLB" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    86. 

  86. 

  87. 	  <IoSensor id="TMVacSwitch" display="TM Vaccum Switch"  schematicId="" unit="" di="DI_TM_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    88. 

  88. 	  <IoSensor id="LLAVacSwitch" display="LLA Vaccum Switch"  schematicId="" unit="" di="DI_LLA_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    89. 

  89. 	  <IoSensor id="LLBVacSwitch" display="LLB Vaccum Switch"  schematicId="" unit="" di="DI_LLB_VAC_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    90. 

  90. 	  <IoSensor id="TMATMSwitch" display="TM ATM Switch"  schematicId="" unit="" di="DI_TM_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    91. 

  91. 	  <IoSensor id="LLAATMSwitch" display="LLA ATM Switch"  schematicId="" unit="" di="DI_LLA_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    92. 

  92. 	  <IoSensor id="LLBATMSwitch" display="LLB ATM Switch"  schematicId="" unit="" di="DI_LLB_ATM_Switch" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="" />
    93. 

  93. 	  
    94. 

  94.   </IoSensors>
    95. 

  95. 	
    96. 

  96.     <IoPressureMeters assembly="Venus_RT" classType="Venus_RT.Devices.IODevices.IoPressureMeter">
    97. 

  97. 	    <IoPressureMeter id="TMProcessGauge" display="TM Pressure" schematicId="" unit="mTorr"
    98. 

  98. 						    aiValue="AI_TM_CHB_Pressure" diGaugeFail="DI_TM_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    99. 

  99. 	    <IoPressureMeter id="TMForelineGauge" display="TM Foreline Pressure" schematicId="" unit="mTorr"
    100. 

  100. 						    aiValue="AI_TM_Foreline_Pressure" diGaugeFail="TMForelineGaugeAlarm" scPrecision="" scOffset=""/>
    101. 

  101. 	    <IoPressureMeter id="LLAPressureGauge" display="LLA Pressure" schematicId="" unit="mTorr"
    102. 

  102. 						    aiValue="AI_LLA_CHB_Pressure" diGaugeFail="DI_LLA_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    103. 

  103. 		<IoPressureMeter id="LLBPressureGauge" display="LLB Pressure" schematicId="" unit="mTorr"
    104. 

  104. 						    aiValue="AI_LLB_CHB_Pressure" diGaugeFail="DI_LLB_Chamber_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    105. 

  105. 		<IoPressureMeter id="LoadlockForelineGauge" display="Loadlock Foreline Pressure" schematicId="" unit="mTorr"
    106. 

  106. 						    aiValue="AI_LLA_LLB_Foreline_Pressure" diGaugeFail="DI_LLA_Foreline_VAC_Gauge_Alarm" scPrecision="" scOffset=""/>
    107. 

  107.     </IoPressureMeters>
    108. 

  108. 

  109. 	<IoTMPressureCtrls assembly="Venus_RT" classType="Venus_RT.Devices.IoTMPressureCtrl">
    110. 

  110. 		<IoTMPressureCtrl id="TMPressureCtrl" display="MFPressureControl" schematicId="MFPressureControl" unit="mTorr"
    111. 

  111. 						   aoMFPressure="AO_TM_CHB_Pressure"
    112. 

  112. 						   MFPressureMeter ="TMProcessGauge" LLAPressureMeter="LLAPressureGauge" LLBPressureMeter="LLBPressureGauge" MFForelineMeter="TMForelineGauge" LLForelineMeter="LoadlockForelineGauge"/>
    113. 

  113. 	</IoTMPressureCtrls>	
    114. 

  114. 

  115.     <IoHeartbeats assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoHeartbeat">
    116. 

  116.     <IoHeartbeat  id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
    117. 

  117.   </IoHeartbeats>
    118. 

  118. 

  119.     <IoPlcDateTimes>
    120. 

  120.     <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
    121. 

  121.                   aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
    122. 

  122.   </IoPlcDateTimes>
    123. 

  123. 

  124.     <IoCylinders assembly="Venus_RT" classType="Venus_RT.Devices.IoCylinder">
    125. 

  125. 

  126.     <IoCylinder id="LLAESlitDoor" display="LLA EFEM Side Door" schematicId="" unit="" doMotorRelay=""
    127. 

  127.                 doON="DO_LLA_Slit_Door_E_Open" doOFF="DO_LLA_Slit_Door_E_Close" diON="DI_LLA_E_Slit_Door_open_Position" diOFF="DI_LLA_E_Slit_Door_close_Position" />
    128. 

  128.     <IoCylinder id="LLBESlitDoor" display="LLB EFEM Side Door" schematicId="" unit="" doMotorRelay=""
    129. 

  129.                 doON="DO_LLB_Slit_Door_E_Open" doOFF="DO_LLB_Slit_Door_E_Close" diON="DI_LLB_E_Slit_Door_open_Position" diOFF="DI_LLB_E_Slit_Door_close_Position" />
    130. 

  130. 	<IoCylinder id="LLATSlitDoor" display="LLA TM Side Door" schematicId="" unit="" doMotorRelay=""
    131. 

  131. 				doON="DO_LLA_Slit_Door_T_Open" doOFF="DO_LLA_Slit_Door_T_Close" diON="DI_LLA_T_Slit_Door_open_Position" diOFF="DI_LLA_T_Slit_Door_close_Position" />
    132. 

  132. 	<IoCylinder id="LLBTSlitDoor" display="LLB TM Side Door" schematicId="" unit="" doMotorRelay=""
    133. 

  133. 				doON="DO_LLB_Slit_Door_T_Open" doOFF="DO_LLB_Slit_Door_T_Close" diON="DI_LLB_T_Slit_Door_open_Position" diOFF="DI_LLB_T_Slit_Door_close_Position" />
    134. 

  134.   </IoCylinders>
    135. 

  135. 

  136.     <IoLids assembly="Venus_RT" classType=" Venus_RT.Devices.IODevices.IoLid">
    137. 

  137.     <IoLid id="TMLid" display="TM Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_TM_CHB_Door_Closed" />
    138. 

  138. 	<IoLid id="LLALid" display="LoadLock A Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLA_Lid_Door_Closed" />
    139. 

  139. 	<IoLid id="LLBLid" display="LoadLock B Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_LLB_Lid_Door_Closed" />
    140. 

  140.   </IoLids>
    141. 

  141. 

  142. 	<IoSwitchs assembly="Venus_RT" classType="Venus_RT.Devices.IoSwitch">
    143. 

  143. 		<IoSwitch id="LLAWaferSizeCheckSwitch" display="LLA Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    144. 

  144.                 do="DO_LLA_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    145. 

  145. 		<IoSwitch id="LLBWaferSizeCheckSwitch" display="LLB Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    146. 

  146.                 do="DO_LLB_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    147. 

  147. 		<IoSwitch id="PMAWaferSizeCheckSwitch" display="PMA Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    148. 

  148.                 do="DO_PMA_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    149. 

  149. 		<IoSwitch id="PMBWaferSizeCheckSwitch" display="PMB Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    150. 

  150.                 do="DO_PMB_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    151. 

  151. 		<IoSwitch id="PMCWaferSizeCheckSwitch" display="PMC Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    152. 

  152.                 do="DO_PMC_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    153. 

  153. 		<IoSwitch id="PMDWaferSizeCheckSwitch" display="PMD Wafer Size Check" schematicId="" unit="" doMotorRelay=""
    154. 

  154.                 do="DO_PMD_BIG_SMALL_SIZE_WAFER_CHECK"  di="" />
    155. 

  155. 		<IoSwitch id="PressureModeSwitch" display="Pressure Mode Switch" schematicId="" unit="" doMotorRelay=""
    156. 

  156.                 do="DO_TM_MFC_FLOW_MODE_PRESSURE_MODE"  di="" />
    157. 

  157. 	</IoSwitchs>
    158. 

  158. 

  159. </DeviceModelDefine>
    160.