SimulatorSystem.cs 143 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. using System.Configuration;
  17. namespace Venus_Simulator.Instances
  18. {
  19. public class SimulatorSystem : Singleton<SimulatorSystem>
  20. {
  21. private PeriodicJob _thread;
  22. private Random _rd = new Random();
  23. ConfigType type;
  24. private RD_TRIG _trigATM = new RD_TRIG();
  25. private RD_TRIG _trigVAC = new RD_TRIG();
  26. private R_TRIG _trigLLExtend = new R_TRIG();
  27. private R_TRIG _trigLLRetract = new R_TRIG();
  28. private static int count = 0;
  29. private readonly float ATM_THRESHOLD = 750000;
  30. private readonly float ATM_PRESSURE = 760000;
  31. private readonly float ATM_LoadLock_PRESSURE = 760000;
  32. private readonly uint VAC_SW_PRESSURE = 9500;
  33. private readonly uint PROCESS_GAUGE = 10000;
  34. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  35. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  36. public SimulatorSystem()
  37. {
  38. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  40. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  41. // TODO
  42. var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
  43. type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
  44. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  45. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  46. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  47. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  48. }
  49. ~SimulatorSystem()
  50. {
  51. _thread?.Stop();
  52. }
  53. public void Initialize()
  54. {
  55. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  56. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  57. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  58. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  59. if (type == ConfigType.Kepler2200)
  60. {
  61. SetKepler2200TMDefaultValue();
  62. }
  63. else if (type == ConfigType.Kepler2300)
  64. {
  65. SetKepler2300TMDefaultValue();
  66. }
  67. else if (type == ConfigType.VenusSE)
  68. {
  69. SetSETMDefaultValue();
  70. }
  71. else if (type == ConfigType.VenusDE)
  72. {
  73. SetDETMDefaultValue();
  74. }
  75. Singleton<DataManager>.Instance.Initialize(false);
  76. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  77. }
  78. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  79. {
  80. switch (jetChamber)
  81. {
  82. case JetChamber.VenusSE:
  83. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  84. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  85. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  86. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  87. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  88. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  91. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  92. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  93. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  94. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  95. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  103. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  107. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  108. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  128. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  129. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  134. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  137. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  138. //// pressure
  139. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  140. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  141. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  142. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  143. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  144. //// Temperature
  145. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  146. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  147. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  148. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  150. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  151. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  152. // Datetime
  153. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  154. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  155. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  156. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  157. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  158. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  159. break;
  160. case JetChamber.VenusDE:
  161. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  162. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  163. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  165. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  167. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  168. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  169. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  170. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  171. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  172. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  174. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  175. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  182. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  191. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  192. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  206. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  211. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  212. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  214. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  215. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  216. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  220. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  224. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  225. //// pressure
  226. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  227. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  228. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  229. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  230. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  231. //// Temperature
  232. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  233. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  234. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  235. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  236. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  238. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  240. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  241. // Datetime
  242. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  243. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  244. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  245. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  246. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  247. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  248. break;
  249. case JetChamber.Kepler2300:
  250. // chamber
  251. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  252. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  254. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  256. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  258. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  259. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  260. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  261. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  262. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  275. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  276. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  287. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  290. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  292. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  293. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  295. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  296. //// pressure
  297. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  298. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  299. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  300. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  301. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  302. //// Temperature
  303. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  306. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  307. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  308. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  309. // Datetime
  310. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  311. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  312. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  313. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  314. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  315. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  316. break;
  317. case JetChamber.Kepler2200A:
  318. case JetChamber.Kepler2200B:
  319. if (jetChamber == JetChamber.Kepler2200B)
  320. {
  321. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  322. }
  323. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  324. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  325. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  326. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  327. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  328. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  329. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  330. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  331. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  332. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  333. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  335. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  336. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  337. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  338. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  350. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  351. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  352. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  353. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  354. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  355. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  356. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  357. //// pressure
  358. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  359. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  360. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  361. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  362. //// Temperature
  363. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  364. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  365. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  366. // Datetime
  367. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  368. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  369. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  370. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  371. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  372. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  373. break;
  374. }
  375. }
  376. private void SetKepler2200TMDefaultValue()
  377. {
  378. ModuleName mod = ModuleName.TM;
  379. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  380. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  381. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  383. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  385. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  388. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  389. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  390. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  391. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  392. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  393. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  394. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  395. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  396. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  397. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  398. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  399. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  400. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  401. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  402. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  403. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  404. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  405. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  406. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  407. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  408. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  409. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  410. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  411. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  412. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  413. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  414. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  415. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  417. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  418. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  419. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  420. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  421. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  422. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  423. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  424. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  425. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  426. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  427. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  428. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  429. // Datetime
  430. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  431. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  432. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  433. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  434. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  435. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  436. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  437. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  438. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  439. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  440. {
  441. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  442. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  443. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  444. }
  445. else
  446. {
  447. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  448. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  449. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  450. }
  451. }
  452. private void SetKepler2300TMDefaultValue()
  453. {
  454. ModuleName mod = ModuleName.TM;
  455. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  456. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  457. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  458. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  459. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  464. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  465. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  466. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  467. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  468. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  469. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  470. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  471. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  472. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  473. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  474. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  475. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  476. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  477. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  478. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  479. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  480. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  481. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  482. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  483. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  484. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  485. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  486. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  487. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  488. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  489. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  490. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  491. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  492. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  493. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  494. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  495. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  496. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  497. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  498. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  499. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  500. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  501. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  502. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  503. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  504. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  505. // Datetime
  506. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  507. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  508. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  509. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  510. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  511. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  512. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  513. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  514. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  515. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  516. {
  517. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  518. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  519. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  520. }
  521. else
  522. {
  523. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  524. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  525. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  526. }
  527. }
  528. private void SetSETMDefaultValue()
  529. {
  530. string mod = "SETM";
  531. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  532. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  533. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  534. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  535. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  537. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  538. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  539. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  540. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  541. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  542. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  543. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  544. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  545. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  546. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  547. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  548. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  549. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  550. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  551. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  552. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  553. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  554. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  555. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  556. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  557. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  558. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  559. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  560. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  561. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  562. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  563. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  564. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  565. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  566. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  567. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  568. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  569. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  570. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  571. }
  572. private void SetDETMDefaultValue()
  573. {
  574. string mod = "DETM";
  575. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  576. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  577. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  578. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  579. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  580. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  581. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  582. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  583. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  584. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  585. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  586. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  587. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  588. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  589. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  590. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  591. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  592. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  593. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  594. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  595. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  596. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  597. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  598. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  599. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  600. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  601. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  603. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  604. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  605. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  606. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  607. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  608. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  609. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  610. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  611. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  612. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  613. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  615. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  616. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  617. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  618. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  619. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  620. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  621. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  622. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  623. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  624. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  625. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  626. IO.DI[$"{mod}.DI_EMO"].Value = false;
  627. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  628. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  629. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  630. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  631. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  632. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  633. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  634. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  635. }
  636. private bool OnMonitor()
  637. {
  638. try
  639. {
  640. foreach (var item in jetChambers)
  641. {
  642. switch (item.Value)
  643. {
  644. case JetChamber.Kepler2300:
  645. MonitorSlitDoorInTM(item.Key);
  646. MonitorPin(item.Key);
  647. MonitorPressure_Kepler(item.Key);
  648. //MonitorTemperature(item.Key);
  649. MonitorGas(item.Key);
  650. this.SimulateHe(item.Key);
  651. //MonitorRF(item.Key);
  652. ChangeTime(item.Key);
  653. //MonitorIOPumpCtrl(item.Key);
  654. MonitorLid(item.Key);
  655. break;
  656. case JetChamber.Kepler2200A:
  657. case JetChamber.Kepler2200B:
  658. MonitorSlitDoorInTM(item.Key);
  659. MonitorPressure_Kepler2200(item.Key);
  660. //MonitorTemperature(item.Key);
  661. MonitorGas(item.Key);
  662. // MonitorRF(item.Key);
  663. ChangeTime(item.Key);
  664. //MonitorIOPumpCtrl(item.Key);
  665. MonitorLid(item.Key);
  666. MonitorIOHighTemperatureHeater(item.Key);
  667. MonitorKepler2200Heater(item.Key);
  668. break;
  669. case JetChamber.VenusSE:
  670. MonitorPin(item.Key);
  671. //MonitorVenuSESlitDoor(item.Key);
  672. MonitorSEPressure(item.Key);
  673. MonitorSEGas(item.Key);
  674. ChangeTime(item.Key);
  675. this.SimulateSEHe(item.Key);
  676. break;
  677. case JetChamber.VenusDE:
  678. MonitorPin(item.Key);
  679. MonitorDEGas(item.Key);
  680. //MonitorVenuDESlitDoor(item.Key);
  681. MonitorDEPressure(item.Key);
  682. ChangeTime(item.Key);
  683. MonitorLinerDoor(item.Key);
  684. this.SimulateDEHe(item.Key);
  685. break;
  686. }
  687. }
  688. //ChangeTime(ModuleName.TM);
  689. if (type == ConfigType.Kepler2200)
  690. {
  691. ChangeTime(ModuleName.TM);
  692. MonitorMFSlitDoor();
  693. MonitorMFKepler2200Pressure();
  694. }
  695. else if (type == ConfigType.Kepler2300)
  696. {
  697. ChangeTime(ModuleName.TM);
  698. MonitorMFSlitDoor();
  699. MonitorMFKepler2300Pressure();
  700. }
  701. else if (type == ConfigType.VenusSE)
  702. {
  703. MonitorSEMFSlitDoor();
  704. MonitorSEMFPressure();
  705. //MonitorDEMFSlitDoor();
  706. //MonitorDEMFPressure();
  707. }
  708. else if (type == ConfigType.VenusDE)
  709. {
  710. MonitorDEMFSlitDoor();
  711. MonitorDEMFPressure();
  712. }
  713. }
  714. catch (Exception e)
  715. {
  716. LOG.WriteExeption(e);
  717. }
  718. return true;
  719. }
  720. private void ChangeTime(ModuleName mod)
  721. {
  722. // Heartbeat with PLC
  723. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  724. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  725. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  726. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  727. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  728. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  729. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  730. }
  731. //void MonitorVenuSESlitDoor(ModuleName mod)
  732. //{
  733. //}
  734. void MonitorSlitDoorInPM(ModuleName mod)
  735. {
  736. // slit door open
  737. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  738. {
  739. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  740. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  741. }
  742. // slit door close
  743. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  744. {
  745. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  746. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  747. }
  748. }
  749. void MonitorLinerDoor(ModuleName mod)
  750. {
  751. // slit door open
  752. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  753. {
  754. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  755. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  756. }
  757. // slit door close
  758. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  759. {
  760. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  761. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  762. }
  763. }
  764. void MonitorSlitDoorInTM(ModuleName mod)
  765. {
  766. // slit door open
  767. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  768. {
  769. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  770. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  771. }
  772. // slit door close
  773. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  774. {
  775. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  776. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  777. }
  778. }
  779. void MonitorMFSlitDoor()
  780. {
  781. ModuleName mod = ModuleName.TM;
  782. // LLA T door open
  783. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  784. {
  785. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  786. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  787. }
  788. // LLB T door open
  789. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  790. {
  791. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  792. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  793. }
  794. // LLA E door open
  795. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  796. {
  797. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  798. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  799. }
  800. // LLB E door open
  801. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  802. {
  803. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  804. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  805. }
  806. // LLA T door close
  807. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  808. {
  809. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  810. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  811. }
  812. // LLB T door close
  813. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  814. {
  815. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  816. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  817. }
  818. // LLA E door close
  819. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  820. {
  821. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  822. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  823. }
  824. // LLB E door close
  825. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  826. {
  827. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  828. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  829. }
  830. // PMA slitdoor door close/open
  831. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  832. {
  833. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  834. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  835. }
  836. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  837. {
  838. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  839. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  840. }
  841. // PMB slitdoor door close/open
  842. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  843. {
  844. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  845. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  846. }
  847. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  848. {
  849. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  850. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  851. }
  852. // PMC slitdoor door close/open
  853. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  854. {
  855. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  856. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  857. }
  858. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  859. {
  860. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  861. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  862. }
  863. // PMD slitdoor door close/open
  864. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  865. {
  866. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  867. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  868. }
  869. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  870. {
  871. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  872. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  873. }
  874. }
  875. void MonitorSEMFSlitDoor()
  876. {
  877. string mod = "SETM";
  878. // VCE T door open
  879. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  880. {
  881. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  882. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  883. }
  884. // VCE T door Close
  885. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  886. {
  887. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  888. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  889. }
  890. //pma
  891. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  892. {
  893. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  894. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  895. }
  896. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  897. {
  898. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  899. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  900. }
  901. //pmb
  902. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  903. {
  904. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  905. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  906. }
  907. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  908. {
  909. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  910. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  911. }
  912. //pmc
  913. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  914. {
  915. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  916. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  917. }
  918. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  919. {
  920. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  921. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  922. }
  923. }
  924. void MonitorDEMFSlitDoor()
  925. {
  926. string mod = "DETM";
  927. // VCE L door open
  928. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  929. {
  930. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  931. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  932. }
  933. // VCE R door open
  934. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  935. {
  936. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  937. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  938. }
  939. // VCE L door Close
  940. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  941. {
  942. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  943. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  944. }
  945. // VCE R door Close
  946. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  947. {
  948. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  949. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  950. }
  951. //pma
  952. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  953. {
  954. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  955. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  956. }
  957. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  958. {
  959. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  960. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  961. }
  962. //pmb
  963. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  964. {
  965. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  966. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  967. }
  968. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  969. {
  970. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  971. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  972. }
  973. //pmc
  974. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  975. {
  976. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  977. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  978. }
  979. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  980. {
  981. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  982. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  983. }
  984. if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
  985. {
  986. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  987. }
  988. else
  989. {
  990. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
  991. }
  992. if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
  993. {
  994. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
  995. }
  996. else
  997. {
  998. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
  999. }
  1000. if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
  1001. {
  1002. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  1003. }
  1004. else
  1005. {
  1006. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
  1007. }
  1008. }
  1009. void MonitorPin(ModuleName mod)
  1010. {
  1011. // lift pin up
  1012. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  1013. {
  1014. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  1015. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  1016. }
  1017. }
  1018. void MonitorLid(ModuleName mod)
  1019. {
  1020. // lift pin up
  1021. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  1022. {
  1023. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  1024. }
  1025. }
  1026. void MonitorExtendAndRetract(ModuleName mod)
  1027. {
  1028. // Extend
  1029. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1030. if (_trigLLExtend.Q)
  1031. {
  1032. _trigLLRetract.RST = true;
  1033. Thread.Sleep(500);
  1034. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1035. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1036. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1037. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1038. }
  1039. // Retract
  1040. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1041. if (_trigLLRetract.Q)
  1042. {
  1043. count++;
  1044. _trigLLExtend.RST = true;
  1045. Thread.Sleep(500);
  1046. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1047. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1048. if (count == 1)
  1049. {
  1050. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1051. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1052. }
  1053. else if (count == 2)
  1054. {
  1055. count = 0;
  1056. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1057. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1058. }
  1059. }
  1060. }
  1061. void MonitorPressure(ModuleName mod)
  1062. {
  1063. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1064. // Loadlock pressure
  1065. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1066. // Foreline
  1067. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1068. {
  1069. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1070. }
  1071. else
  1072. {
  1073. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1074. }
  1075. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1076. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1077. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1078. //float chamber_pressure = GetMockChamberPressure(mod);
  1079. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1080. // soft pump & fast pump
  1081. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1082. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1083. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1084. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1085. {
  1086. //任意泵打开
  1087. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1088. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1089. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1090. {//开双泵
  1091. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1092. {
  1093. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1094. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1095. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1096. }
  1097. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1098. {
  1099. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1100. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1101. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1102. }
  1103. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1104. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1105. }
  1106. else if (fast_pump_vlv.Value)//开
  1107. {
  1108. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1109. {
  1110. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1111. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1112. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1113. }
  1114. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1115. {
  1116. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1117. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1118. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1119. }
  1120. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1121. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1122. }
  1123. else if (soft_pump_vlv.Value)
  1124. {
  1125. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1126. {
  1127. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1128. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1129. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1130. }
  1131. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1132. {
  1133. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1134. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1135. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1136. }
  1137. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1138. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1139. }
  1140. else if (turbo_pump_vlv.Value)
  1141. {
  1142. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1143. if ((getAiValue_ChamberPressure - 500) >= 0)
  1144. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1145. else
  1146. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1147. if ((getAiValue_ProcessPressure - 500) >= 0)
  1148. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1149. else
  1150. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1151. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1152. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1153. }
  1154. }
  1155. // fast vent & purge
  1156. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1157. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1158. //if (vent_vlv.Value || purge_vlv.Value)
  1159. //{
  1160. // if (vent_vlv.Value && purge_vlv.Value)
  1161. // {
  1162. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1163. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1164. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1165. // {
  1166. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1167. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1168. // }
  1169. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1170. // {
  1171. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1172. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1173. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1174. // }
  1175. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1176. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1177. // }
  1178. // else
  1179. //
  1180. if (vent_vlv.Value)
  1181. {
  1182. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1183. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1184. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1185. {
  1186. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1187. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1188. }
  1189. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1190. {
  1191. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1192. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1193. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1194. }
  1195. else
  1196. {
  1197. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1198. }
  1199. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1200. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1201. }
  1202. // Loadlock Pumping Valve
  1203. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1204. if (Loadlock_pump_vlv.Value)
  1205. {
  1206. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1207. }
  1208. // Loadlock vent
  1209. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1210. if (Loadlock_vent_vlv.Value)
  1211. {
  1212. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1213. }
  1214. // 压力值越界,复位
  1215. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1216. if (chamber_pressure1 > ATM_PRESSURE)
  1217. {
  1218. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1219. }
  1220. else if (chamber_pressure1 < 20)
  1221. {
  1222. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1223. }
  1224. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1225. if (process_pressure1 > PROCESS_GAUGE)
  1226. {
  1227. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1228. }
  1229. else if (process_pressure1 < 20)
  1230. {
  1231. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1232. }
  1233. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1234. if (foreline_pressure > 10000)
  1235. {
  1236. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1237. }
  1238. else if (foreline_pressure < 150)
  1239. {
  1240. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1241. }
  1242. // 模拟压力计漂移
  1243. //int p1 = (int)GetMockChamberPressure(mod);
  1244. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1245. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1246. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1247. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1248. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1249. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1250. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1251. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1252. // 根据当前压力值设定信号
  1253. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1254. // ATM switch
  1255. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1256. // VAC switch
  1257. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1258. // Throttle valve
  1259. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1260. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1261. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1262. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1263. // 压力值
  1264. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1265. //{
  1266. // short increase = (short)_rd.Next(20, 30);
  1267. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1268. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1269. // {
  1270. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1271. // }
  1272. //}
  1273. //else
  1274. //{
  1275. // short increase = (short)_rd.Next(20, 30);
  1276. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1277. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1278. // {
  1279. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1280. // }
  1281. //}
  1282. //// 位置值
  1283. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1284. //{
  1285. // short increase = (short)_rd.Next(20, 30);
  1286. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1287. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1288. // {
  1289. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1290. // }
  1291. //}
  1292. //else
  1293. //{
  1294. // short increase = (short)_rd.Next(20, 30);
  1295. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1296. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1297. // {
  1298. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1299. // }
  1300. //}
  1301. }
  1302. void MonitorSEPressure(ModuleName mod)
  1303. {
  1304. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1305. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1306. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1307. // Foreline
  1308. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1309. {
  1310. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1311. }
  1312. else
  1313. {
  1314. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1315. }
  1316. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1317. // soft pump & fast pump
  1318. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1319. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1320. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1321. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1322. {
  1323. //任意泵打开
  1324. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1325. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1326. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1327. {//开双泵
  1328. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1329. {
  1330. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1331. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1332. }
  1333. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1334. {
  1335. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1336. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1337. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1338. }
  1339. }
  1340. else if (fast_pump_vlv.Value)//开
  1341. {
  1342. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1343. {
  1344. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1345. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1346. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1347. }
  1348. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1349. {
  1350. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1351. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1352. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1353. }
  1354. }
  1355. else if (soft_pump_vlv.Value)
  1356. {
  1357. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1358. {
  1359. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1360. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1361. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1362. }
  1363. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1364. {
  1365. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1366. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1367. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1368. }
  1369. }
  1370. else if (turbo_pump_vlv.Value)
  1371. {
  1372. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1373. if ((getAiValue_ChamberPressure - 500) >= 0)
  1374. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1375. else
  1376. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1377. if ((getAiValue_ProcessPressure - 500) >= 0)
  1378. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1379. else
  1380. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1381. }
  1382. }
  1383. // fast vent & purge
  1384. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1385. if (vent_vlv.Value)
  1386. {
  1387. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1388. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1389. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1390. {
  1391. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1392. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1393. }
  1394. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1395. {
  1396. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1397. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1398. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1399. }
  1400. else
  1401. {
  1402. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1403. }
  1404. }
  1405. // Loadlock Pumping Valve
  1406. // 压力值越界,复位
  1407. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1408. if (chamber_pressure1 > ATM_PRESSURE)
  1409. {
  1410. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1411. }
  1412. else if (chamber_pressure1 < 20)
  1413. {
  1414. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1415. }
  1416. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1417. if (process_pressure1 > PROCESS_GAUGE)
  1418. {
  1419. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1420. }
  1421. else if (process_pressure1 < 20)
  1422. {
  1423. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1424. }
  1425. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1426. if (foreline_pressure > 1999)
  1427. {
  1428. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1429. }
  1430. else if (foreline_pressure < 150)
  1431. {
  1432. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1433. }
  1434. // ATM switch
  1435. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1436. // VAC switch
  1437. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1438. }
  1439. void MonitorDEPressure(ModuleName mod)
  1440. {
  1441. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1442. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1443. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1444. // Foreline
  1445. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1446. {
  1447. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1448. }
  1449. else
  1450. {
  1451. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1452. }
  1453. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1454. // soft pump & fast pump
  1455. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1456. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1457. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1458. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1459. {
  1460. //任意泵打开
  1461. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1462. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1463. if (fast_pump_vlv.Value)
  1464. {//开双泵
  1465. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1466. {
  1467. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1468. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1469. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1470. }
  1471. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1472. {
  1473. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1474. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1475. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1476. }
  1477. }
  1478. else if (turbo_pump_vlv.Value)
  1479. {
  1480. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1481. if ((getAiValue_ChamberPressure - 500) >= 0)
  1482. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1483. else
  1484. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1485. if ((getAiValue_ProcessPressure - 500) >= 0)
  1486. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1487. else
  1488. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1489. }
  1490. }
  1491. // fast vent & purge
  1492. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1493. if (vent_vlv.Value)
  1494. {
  1495. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1496. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1497. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1498. {
  1499. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1500. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1501. }
  1502. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1503. {
  1504. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1505. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1506. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1507. }
  1508. else
  1509. {
  1510. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1511. }
  1512. }
  1513. // Loadlock Pumping Valve
  1514. // 压力值越界,复位
  1515. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1516. if (chamber_pressure1 > ATM_PRESSURE)
  1517. {
  1518. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1519. }
  1520. else if (chamber_pressure1 < 20)
  1521. {
  1522. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1523. }
  1524. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1525. if (process_pressure1 > PROCESS_GAUGE)
  1526. {
  1527. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1528. }
  1529. else if (process_pressure1 < 20)
  1530. {
  1531. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1532. }
  1533. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1534. if (foreline_pressure > 10000)
  1535. {
  1536. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1537. }
  1538. else if (foreline_pressure < 150)
  1539. {
  1540. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1541. }
  1542. // ATM switch
  1543. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1544. // VAC switch
  1545. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1546. }
  1547. void MonitorPressure_Kepler(ModuleName mod)
  1548. {
  1549. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1550. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1551. {
  1552. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1553. }
  1554. else
  1555. {
  1556. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1557. }
  1558. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1559. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1560. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1561. //float chamber_pressure = GetMockChamberPressure(mod);
  1562. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1563. // soft pump & fast pump
  1564. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1565. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1566. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1567. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1568. {
  1569. //任意泵打开
  1570. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1571. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1572. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1573. {//开双泵
  1574. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1575. {
  1576. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1577. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1578. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1579. }
  1580. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1581. {
  1582. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1583. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1584. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1585. }
  1586. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1587. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1588. }
  1589. else if (fast_pump_vlv.Value)//开
  1590. {
  1591. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1592. {
  1593. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1594. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1595. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1596. }
  1597. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1598. {
  1599. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1600. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1601. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1602. }
  1603. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1604. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1605. }
  1606. else if (soft_pump_vlv.Value)
  1607. {
  1608. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1609. {
  1610. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1611. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1612. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1613. }
  1614. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1615. {
  1616. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1617. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1618. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1619. }
  1620. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1621. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1622. }
  1623. else if (turbo_pump_vlv.Value)
  1624. {
  1625. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1626. if ((getAiValue_ChamberPressure - 500) >= 0)
  1627. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1628. else
  1629. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1630. if ((getAiValue_ProcessPressure - 500) >= 0)
  1631. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1632. else
  1633. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1634. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1635. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1636. }
  1637. }
  1638. // fast vent & purge
  1639. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1640. if (vent_vlv.Value)
  1641. {
  1642. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1643. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1644. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1645. {
  1646. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1647. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1648. }
  1649. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1650. {
  1651. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1652. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1653. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1654. }
  1655. else
  1656. {
  1657. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1658. }
  1659. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1660. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1661. }
  1662. // Loadlock Pumping Valve
  1663. // 压力值越界,复位
  1664. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1665. if (chamber_pressure1 > ATM_PRESSURE)
  1666. {
  1667. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1668. }
  1669. else if (chamber_pressure1 < 20)
  1670. {
  1671. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1672. }
  1673. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1674. if (process_pressure1 > PROCESS_GAUGE)
  1675. {
  1676. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1677. }
  1678. else if (process_pressure1 < 20)
  1679. {
  1680. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1681. }
  1682. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1683. if (foreline_pressure > 10000)
  1684. {
  1685. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1686. }
  1687. else if (foreline_pressure < 150)
  1688. {
  1689. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1690. }
  1691. // ATM switch
  1692. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1693. // VAC switch
  1694. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1695. }
  1696. void MonitorPressure_Kepler2200(ModuleName mod)
  1697. {
  1698. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1699. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1700. {
  1701. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1702. }
  1703. else
  1704. {
  1705. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1706. }
  1707. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1708. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1709. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1710. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1711. //float chamber_pressure = GetMockChamberPressure(mod);
  1712. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1713. // soft pump & fast pump
  1714. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1715. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1716. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1717. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1718. {
  1719. //任意泵打开
  1720. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1721. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1722. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1723. {
  1724. //开双泵
  1725. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1726. {
  1727. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1728. }
  1729. else
  1730. {
  1731. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1732. }
  1733. //if (getAiValue_ChamberPressure > 1000)
  1734. //{
  1735. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1736. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1737. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1738. //}
  1739. //else if ( getAiValue_ChamberPressure <= 1000)
  1740. //{
  1741. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1742. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1743. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1744. //}
  1745. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1746. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1747. }
  1748. else if (fast_pump_vlv.Value)//开
  1749. {
  1750. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1751. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1752. else
  1753. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1754. }
  1755. else if (soft_pump_vlv.Value)
  1756. {
  1757. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1758. {
  1759. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1760. }
  1761. else
  1762. {
  1763. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1764. }
  1765. //if (getAiValue_ChamberPressure > 5000)
  1766. //{
  1767. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1768. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1769. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1770. //}
  1771. //else if (getAiValue_ChamberPressure <= 1000)
  1772. //{
  1773. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1774. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1775. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1776. //}
  1777. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1778. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1779. }
  1780. else if (turbo_pump_vlv.Value)
  1781. {
  1782. if ((getAiValue_ChamberPressure - 50) >= 0)
  1783. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1784. else
  1785. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1786. }
  1787. }
  1788. // fast vent & purge
  1789. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1790. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1791. if (vent_vlv.Value && gas_final_vlv.Value)
  1792. {
  1793. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1794. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1795. if (getAiValue_ChamberPressure > 1000)
  1796. {
  1797. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1798. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1799. }
  1800. else if (getAiValue_ChamberPressure <= 1000)
  1801. {
  1802. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1803. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1804. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1805. }
  1806. else
  1807. {
  1808. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1809. }
  1810. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1811. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1812. }
  1813. // Loadlock Pumping Valve
  1814. // 压力值越界,复位
  1815. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1816. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1817. {
  1818. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1819. }
  1820. else if (chamber_pressure1 < 20)
  1821. {
  1822. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1823. }
  1824. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1825. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1826. //{
  1827. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1828. //}
  1829. //else if (process_pressure1 < 20)
  1830. //{
  1831. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1832. //}
  1833. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1834. if (foreline_pressure > 1000)
  1835. {
  1836. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1837. }
  1838. else if (foreline_pressure < 15)
  1839. {
  1840. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1841. }
  1842. // ATM switch
  1843. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1844. // VAC switch
  1845. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1846. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1847. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1848. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1849. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1850. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1851. }
  1852. void MonitorSEMFPressure()
  1853. {
  1854. string mod = "SETM";
  1855. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1856. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1857. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1858. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1859. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1860. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1861. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1862. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1863. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1864. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1865. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1866. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1867. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1868. {
  1869. if (getAiValue_TM_ChamberPressure > 10000)
  1870. {
  1871. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1872. }
  1873. else if (getAiValue_TM_ChamberPressure <= 10000)
  1874. {
  1875. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1876. }
  1877. }
  1878. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1879. {
  1880. if (getAiValue_TM_ChamberPressure > 10000)
  1881. {
  1882. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1883. }
  1884. else if (getAiValue_TM_ChamberPressure <= 10000)
  1885. {
  1886. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1887. }
  1888. }
  1889. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1890. {
  1891. if (getAiValue_VCE_ChamberPressure > 10000)
  1892. {
  1893. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1894. }
  1895. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1896. {
  1897. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1898. }
  1899. }
  1900. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1901. {
  1902. if (getAiValue_VCE_ChamberPressure > 10000)
  1903. {
  1904. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1905. }
  1906. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1907. {
  1908. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1909. }
  1910. }
  1911. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1912. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1913. {
  1914. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1915. }
  1916. else if (getAiValue_VCE_ChamberPressure < 20)
  1917. {
  1918. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1919. }
  1920. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1921. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1922. {
  1923. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1924. }
  1925. else if (getAiValue_TM_ChamberPressure < 20)
  1926. {
  1927. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1928. }
  1929. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1930. // VAC switch
  1931. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1932. }
  1933. void MonitorDEMFPressure()
  1934. {
  1935. string mod = "DETM";
  1936. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1937. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1938. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1939. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1940. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1941. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1942. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1943. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1944. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1945. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1946. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1947. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1948. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1949. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1950. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1951. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1952. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1953. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1954. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1955. {
  1956. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1957. {
  1958. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1959. }
  1960. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1961. {
  1962. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1963. }
  1964. }
  1965. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1966. {
  1967. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1968. {
  1969. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1970. }
  1971. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1972. {
  1973. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1974. }
  1975. }
  1976. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1977. {
  1978. if (getAiValue_TM_ChamberPressure > 10000)
  1979. {
  1980. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1981. }
  1982. else if (getAiValue_TM_ChamberPressure <= 10000)
  1983. {
  1984. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1985. }
  1986. }
  1987. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  1988. {
  1989. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1990. {
  1991. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  1992. }
  1993. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1994. {
  1995. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  1996. }
  1997. }
  1998. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  1999. {
  2000. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  2001. {
  2002. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  2003. }
  2004. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  2005. {
  2006. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  2007. }
  2008. }
  2009. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2010. {
  2011. if (getAiValue_TM_ChamberPressure > 10000)
  2012. {
  2013. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2014. }
  2015. else if (getAiValue_TM_ChamberPressure <= 10000)
  2016. {
  2017. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2018. }
  2019. }
  2020. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  2021. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  2022. {
  2023. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  2024. }
  2025. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  2026. {
  2027. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  2028. }
  2029. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2030. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2031. {
  2032. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2033. }
  2034. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2035. {
  2036. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2037. }
  2038. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2039. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2040. {
  2041. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2042. }
  2043. else if (getAiValue_TM_ChamberPressure < 20)
  2044. {
  2045. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2046. }
  2047. // ATM switch
  2048. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2049. // VAC switch
  2050. // ATM switch
  2051. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2052. // ATM switch
  2053. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2054. }
  2055. void MonitorMFKepler2200Pressure()
  2056. {
  2057. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2058. //{
  2059. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2060. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2061. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2062. ModuleName mod = ModuleName.TM;
  2063. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2064. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2065. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2066. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2067. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2068. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2069. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2070. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2071. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2072. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2073. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2074. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2075. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2076. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2077. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2078. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2079. {
  2080. if (getAiValue_LLA_ChamberPressure > 10000)
  2081. {
  2082. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2083. }
  2084. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2085. {
  2086. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2087. }
  2088. }
  2089. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2090. {
  2091. if (getAiValue_LLB_ChamberPressure > 10000)
  2092. {
  2093. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2094. }
  2095. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2096. {
  2097. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2098. }
  2099. }
  2100. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2101. {
  2102. if (getAiValue_TM_ChamberPressure > 10000)
  2103. {
  2104. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2105. }
  2106. else if (getAiValue_TM_ChamberPressure <= 10000)
  2107. {
  2108. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2109. }
  2110. }
  2111. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2112. {
  2113. if (getAiValue_LLA_ChamberPressure > 10000)
  2114. {
  2115. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2116. }
  2117. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2118. {
  2119. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2120. }
  2121. }
  2122. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2123. {
  2124. if (getAiValue_LLB_ChamberPressure > 10000)
  2125. {
  2126. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2127. }
  2128. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2129. {
  2130. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2131. }
  2132. }
  2133. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2134. {
  2135. if (getAiValue_TM_ChamberPressure > 10000)
  2136. {
  2137. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2138. }
  2139. else if (getAiValue_TM_ChamberPressure <= 10000)
  2140. {
  2141. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2142. }
  2143. }
  2144. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2145. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2146. {
  2147. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2148. }
  2149. else if (getAiValue_LLA_ChamberPressure < 3)
  2150. {
  2151. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 3);
  2152. }
  2153. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2154. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2155. {
  2156. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2157. }
  2158. else if (getAiValue_LLB_ChamberPressure < 3)
  2159. {
  2160. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 3);
  2161. }
  2162. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2163. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2164. {
  2165. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2166. }
  2167. else if (getAiValue_TM_ChamberPressure < 3)
  2168. {
  2169. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2170. }
  2171. // ATM switch
  2172. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2173. // VAC switch
  2174. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2175. // ATM switch
  2176. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2177. // VAC switch
  2178. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2179. // ATM switch
  2180. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2181. // VAC switch
  2182. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2183. }
  2184. void MonitorMFKepler2300Pressure()
  2185. {
  2186. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2187. //{
  2188. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2189. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2190. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2191. ModuleName mod = ModuleName.TM;
  2192. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2193. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2194. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2195. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2196. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2197. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2198. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2199. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2200. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2201. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2202. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2203. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2204. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2205. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2206. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2207. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2208. {
  2209. if (getAiValue_LLA_ChamberPressure > 10000)
  2210. {
  2211. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2212. }
  2213. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2214. {
  2215. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2216. }
  2217. }
  2218. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2219. {
  2220. if (getAiValue_LLB_ChamberPressure > 10000)
  2221. {
  2222. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2223. }
  2224. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2225. {
  2226. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2227. }
  2228. }
  2229. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2230. {
  2231. if (getAiValue_TM_ChamberPressure > 10000)
  2232. {
  2233. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2234. }
  2235. else if (getAiValue_TM_ChamberPressure <= 10000)
  2236. {
  2237. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2238. }
  2239. }
  2240. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2241. {
  2242. if (getAiValue_LLA_ChamberPressure > 10000)
  2243. {
  2244. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2245. }
  2246. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2247. {
  2248. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2249. }
  2250. }
  2251. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2252. {
  2253. if (getAiValue_LLB_ChamberPressure > 10000)
  2254. {
  2255. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2256. }
  2257. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2258. {
  2259. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2260. }
  2261. }
  2262. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2263. {
  2264. if (getAiValue_TM_ChamberPressure > 10000)
  2265. {
  2266. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2267. }
  2268. else if (getAiValue_TM_ChamberPressure <= 10000)
  2269. {
  2270. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2271. }
  2272. }
  2273. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2274. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2275. {
  2276. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2277. }
  2278. else if (getAiValue_LLA_ChamberPressure < 20)
  2279. {
  2280. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2281. }
  2282. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2283. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2284. {
  2285. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2286. }
  2287. else if (getAiValue_LLB_ChamberPressure < 20)
  2288. {
  2289. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2290. }
  2291. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2292. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2293. {
  2294. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2295. }
  2296. else if (getAiValue_TM_ChamberPressure < 20)
  2297. {
  2298. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2299. }
  2300. // ATM switch
  2301. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2302. // VAC switch
  2303. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2304. // ATM switch
  2305. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2306. // VAC switch
  2307. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2308. // ATM switch
  2309. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2310. // VAC switch
  2311. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2312. // }
  2313. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2314. //{
  2315. // ModuleName mod = ModuleName.TM;
  2316. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2317. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2318. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2319. //}
  2320. }
  2321. void SetAiValue(string name, float value)
  2322. {
  2323. byte[] flow = BitConverter.GetBytes(value);
  2324. short high1 = BitConverter.ToInt16(flow, 0);
  2325. short low1 = BitConverter.ToInt16(flow, 2);
  2326. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2327. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2328. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2329. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2330. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2331. }
  2332. float GetAiValue(string name)
  2333. {
  2334. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2335. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2336. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2337. return flow;
  2338. }
  2339. float GetAoValue(string name)
  2340. {
  2341. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2342. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2343. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2344. return flow;
  2345. }
  2346. void MonitorTemperature(ModuleName mod)
  2347. {
  2348. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2349. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2350. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2351. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2352. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2353. // 底座
  2354. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2355. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2356. //{
  2357. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2358. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2359. //}
  2360. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2361. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2362. //{
  2363. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2364. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2365. //}
  2366. // Foreline
  2367. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2368. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2369. {
  2370. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2371. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2372. }
  2373. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2374. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2375. {
  2376. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2377. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2378. }
  2379. // Wall
  2380. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2381. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2382. {
  2383. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2384. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2385. }
  2386. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2387. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2388. {
  2389. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2390. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2391. }
  2392. }
  2393. void MonitorGas(ModuleName mod)
  2394. {
  2395. // gas
  2396. this.SimulateMFC(mod, 1);
  2397. this.SimulateMFC(mod, 2);
  2398. this.SimulateMFC(mod, 3);
  2399. this.SimulateMFC(mod, 4);
  2400. this.SimulateMFC(mod, 5);
  2401. this.SimulateMFC(mod, 6);
  2402. this.SimulateMFC(mod, 7);
  2403. this.SimulateMFC(mod, 8);
  2404. this.SimulateN2(mod);
  2405. }
  2406. void MonitorSEGas(ModuleName mod)
  2407. {
  2408. SimulateMFC(mod, 1);
  2409. SimulateMFC(mod, 2);
  2410. SimulateMFC(mod, 3);
  2411. SimulateMFC(mod, 4);
  2412. SimulateMFC(mod, 5);
  2413. SimulateMFC(mod, 6);
  2414. SimulateMFC(mod, 7);
  2415. SimulateMFC(mod, 8);
  2416. SimulateMFC(mod, 9);
  2417. SimulateMFC(mod, 10);
  2418. SimulateMFC(mod, 11);
  2419. SimulateMFC(mod, 12);
  2420. }
  2421. void MonitorDEGas(ModuleName mod)
  2422. {
  2423. SimulateMFC(mod, 1);
  2424. SimulateMFC(mod, 2);
  2425. SimulateMFC(mod, 3);
  2426. SimulateMFC(mod, 4);
  2427. SimulateMFC(mod, 5);
  2428. SimulateMFC(mod, 6);
  2429. SimulateMFC(mod, 7);
  2430. SimulateMFC(mod, 8);
  2431. SimulateMFC(mod, 9);
  2432. SimulateMFC(mod, 10);
  2433. SimulateMFC(mod, 11);
  2434. SimulateMFC(mod, 12);
  2435. }
  2436. private void SimulateMFC(ModuleName mod, byte gasNum)
  2437. {
  2438. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2439. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2440. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2441. }
  2442. private void SimulateN2(ModuleName mod)
  2443. {
  2444. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2445. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2446. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2447. }
  2448. private void SimulateSEHe(ModuleName mod)
  2449. {
  2450. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2451. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2452. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2453. }
  2454. private void SimulateDEHe(ModuleName mod)
  2455. {
  2456. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2457. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2458. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2459. }
  2460. private void SimulateHe(ModuleName mod)
  2461. {
  2462. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2463. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2464. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2465. }
  2466. void MonitorRF(ModuleName mod)
  2467. {
  2468. // RF generator
  2469. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2470. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2471. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2472. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2473. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2474. }
  2475. void MonitorIOPumpCtrl(ModuleName mod)
  2476. {
  2477. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2478. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2479. }
  2480. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2481. {
  2482. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2483. {
  2484. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2485. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2486. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2487. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2488. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2489. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2490. }
  2491. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2492. {
  2493. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2494. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2495. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2496. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2497. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2498. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2499. }
  2500. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2501. {
  2502. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2503. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2504. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2505. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2506. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2507. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2508. }
  2509. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2510. {
  2511. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2512. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2513. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2514. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2515. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2516. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2517. }
  2518. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2519. {
  2520. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2521. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2522. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2523. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2524. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2525. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2526. }
  2527. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2528. {
  2529. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2530. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2531. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2532. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2533. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2534. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2535. }
  2536. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2537. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2538. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2539. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2540. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2541. }
  2542. void MonitorKepler2200Heater(ModuleName mod)
  2543. {
  2544. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2545. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2546. }
  2547. public void Terminate()
  2548. {
  2549. _thread.Stop();
  2550. }
  2551. public void SetCoolantOutletTemp(string module, int Temp)
  2552. {
  2553. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2554. //{
  2555. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2556. //}
  2557. }
  2558. }
  2559. }