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Backends
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60e9a04892
Simulator LP3 Update
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1 year ago |
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Config
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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10 months ago |
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Devices
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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10 months ago |
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Instances
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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10 months ago |
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Modules
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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9 months ago |
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Properties
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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Resources
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a5245356d0
source files
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2 years ago |
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App.config
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 months ago |
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RT2.ico
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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Venus_RT.csproj
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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10 months ago |
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defaultrt.ico
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bad0bb7282
icon
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2 years ago |
sangwq
3b1932fced
Add Loadport loaded check while manual transfer wafer.