| .. |
|
EFEM
|
e806a46292
Enhance the EFEMM design for thread safe and throughput issues.
|
1 year ago |
|
LLs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
|
LPs
|
9e9459c927
efem界面按钮功能优化
|
1 year ago |
|
PMs
|
c671c999c0
ui界面优化
|
1 year ago |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 year ago |
|
Schedulers
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
1 year ago |
|
TM
|
34958e5963
swap 压差计算log测试
|
1 year ago |
|
VCE
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
1 year ago |
|
AutoCycle.cs
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 year ago |
|
Autotransfer_LP_FA.cs
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
1 year ago |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 year ago |
|
EntityErrorRaiseTrigger.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
ManualTransfer.cs
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
1 year ago |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 year ago |
|
RouteManager.cs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
|
SEManualTransfer.cs
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
1 year ago |
|
SETMCycle.cs
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
1 year ago |
|
SystemDispatcher.cs
|
1ff7394c30
Fix the ATM cycle blocking bug.
|
1 year ago |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
lixiang
34958e5963
swap 压差计算log测试