12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091 |
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Equipment;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Venus_Core;
- using Venus_RT.Devices;
- using Venus_RT.Modules.PMs;
- namespace Venus_RT.Modules.PMs
- {
-
- class PMControlPressureRoutine : PMRoutineBase, IRoutine
- {
- private enum ControlPressureStep
- {
- Delay1s,
- StartControlPressure,
- End
- }
- private readonly JetPMBase _chamber;
- private int _controlPressureSetPoint = 90;
- private int _controlFlowSetPoint = 90;
- public PMControlPressureRoutine(JetPMBase chamber) : base(chamber)
- {
- _chamber = chamber;
- }
- public RState Start(params object[] objs)
- {
- if (!CheckTurboPump())
- {
- return RState.Failed;
- }
- if (_chamber.GetPVPosition() == 0)
- {
- Stop("钟摆阀没有打开");
- return RState.Failed;
- }
- Reset();
- // open process final valve and flow
- Notify("Open valve and flow mfc");
- _chamber.OpenValve(ValveType.GasFinal, true);
- _controlPressureSetPoint = SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
- _controlFlowSetPoint= SC.GetValue<int>($"{Module}.ControlPressureN2FlowSetPoint");
- return Runner.Start(Module, Name);
- }
- public RState Monitor()
- {
- Runner.Delay(ControlPressureStep.Delay1s, _delay_1s)
- .Run(ControlPressureStep.StartControlPressure, StartControlPressure)
- .End(ControlPressureStep.End, End);
- return Runner.Status;
- }
-
- private bool StartControlPressure()
- {
- _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
- return true;
- }
- private bool End()
- {
- return true;
- }
- public void Abort()
- {
- _chamber.AbortControlPressure();
- }
- }
- }
|