OverKepler2200AViewModel.cs 69 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using System.IO;
  15. using Venus_Themes.CustomControls;
  16. using Venus_MainPages.Unity;
  17. using MECF.Framework.Common.CommonData.DeviceData;
  18. using Path = System.IO.Path;
  19. using System.Windows.Controls;
  20. namespace Venus_MainPages.ViewModels
  21. {
  22. internal class OverKepler2200AViewModel : BindableBase
  23. {
  24. #region 私有字段
  25. private double m_TurboN2FlowSetPoint;
  26. private List<string> m_CurrentModuleRecipes=new List<string>();
  27. private bool m_PVN21ValveIsOpen;
  28. private bool m_PVN22ValveIsOpen;
  29. private bool m_N2ValveIsOpen;
  30. private bool m_PV11ValveIsOpen;
  31. private bool m_PV12ValveIsOpen;
  32. private bool m_PV21ValveIsOpen;
  33. private bool m_PV22ValveIsOpen;
  34. private bool m_PV31ValveIsOpen;
  35. private bool m_PV32ValveIsOpen;
  36. private bool m_PV41ValveIsOpen;
  37. private bool m_PV42ValveIsOpen;
  38. private bool m_MFC1ValveIsOpen;
  39. private bool m_MFC2ValveIsOpen;
  40. private bool m_MFC3ValveIsOpen;
  41. private bool m_MFC4ValveIsOpen;
  42. private bool m_MFC5ValveIsOpen;
  43. private bool m_MFC6ValveIsOpen;
  44. private bool m_MFC7ValveIsOpen;
  45. private bool m_MFC8ValveIsOpen;
  46. private bool m_GasFinalValveIsOpen;
  47. private bool m_SoftPumpValveIsOpen;
  48. private bool m_FastPumpValveIsOpen;
  49. private bool m_PVHe1ValveIsOpen;
  50. private bool m_PVHe2ValveIsOpen;
  51. private bool m_TurboPumpPumpingValveIsOpen;
  52. private bool m_TurboPumpPurgeValveIsOpen;
  53. private bool m_GuageValveIsOpen;
  54. private bool m_PendulumValveIsOpen;
  55. private bool m_PurgeValveIsOpen;
  56. private double m_HeGasSetpoint;
  57. private int m_HePressureSetpoint;
  58. private float m_SRFFwdPowerSetpoint;
  59. private float m_BRFFwdPowerSetpoint;
  60. private float m_SRFMatchC1;
  61. private float m_SRFMatchC2;
  62. private float m_BRFMatchC1;
  63. private float m_BRFMatchC2;
  64. private double m_MFC1SetPoint;
  65. private double m_MFC2SetPoint;
  66. private double m_MFC3SetPoint;
  67. private double m_MFC4SetPoint;
  68. private double m_MFC5SetPoint;
  69. private double m_MFC6SetPoint;
  70. private double m_MFC7SetPoint;
  71. private double m_MFC8SetPoint;
  72. private double m_N2SetPoint;
  73. private AITMfcData m_MFC1Data;
  74. private AITMfcData m_MFC2Data;
  75. private AITMfcData m_MFC3Data;
  76. private AITMfcData m_MFC4Data;
  77. private AITMfcData m_MFC5Data;
  78. private AITMfcData m_MFC6Data;
  79. private AITMfcData m_MFC7Data;
  80. private AITMfcData m_MFC8Data;
  81. private AITMfcData m_MFCHeData;
  82. private AITMfcData m_MFCN2Data;
  83. private AITHeaterData m_PendulumHeaterData;
  84. private AITRfData m_SRFData;
  85. private AITRfData m_BRFData;
  86. private AITPendulumValveData m_PendulumValveData;
  87. //private AITHVData m_ESCHVData;
  88. private PMState m_PMCurrentState;
  89. private bool m_SourceRFMatchInterlock;
  90. private bool m_IsWLK;
  91. private bool m_IsWaterFlowOk;
  92. private bool m_IsTurboPumpInterlock;
  93. private bool m_IsCDAOK;
  94. private bool m_SensorGasBoxDoor;
  95. private bool m_SensorGasBoxPressure;
  96. private bool m_PumpIsOpen;
  97. private bool m_TurboIsOpen;
  98. private bool m_IsATM;
  99. private bool m_IsVAC;
  100. private List<string> m_RtDataKeys;
  101. private Dictionary<string, object> m_RtDataValues;
  102. private int m_PositionValue;
  103. private bool m_IsPositionMode;
  104. private int m_ESCVoltage;
  105. private bool m_GasIsFlowing;
  106. private bool m_IsProcessing;
  107. private bool m_IsAutoMode;
  108. private string m_SelectedRecipe;
  109. //private float m_ChillerTempSetpoint;
  110. private float m_WallTempSetpoint;
  111. private bool m_HeIsPressureMode=true;
  112. //private bool m_ChillerIsOn;
  113. private float m_ProcessHighPressure;
  114. private float m_ProcessLowPressure;
  115. private float m_ForelinePressurePressure;
  116. private float m_ESCHePressure;
  117. ButterflyValveView butterflyValveMessageBox;
  118. HeaterView heaterView;
  119. private int m_TurboPumpRotationalSpeed;
  120. private bool m_LiftPinIsUp;
  121. private bool m_IsSlitDoorClosed;
  122. private bool m_IsLidClosed;
  123. private float m_ChillerTemperature;
  124. //private float m_HVTemperature;
  125. private int m_ESCHVOutputVoltage;
  126. //private float m_SRfReflectPower;
  127. //private float m_SRfForwardPowerFeedBack;
  128. //private float m_BRfReflectPower;
  129. //private float m_BRfForwardPowerFeedBack;
  130. //private int m_MatchWorkMode;
  131. //private int m_BiasMatchWorkMode;
  132. private float m_MatchC1;
  133. private float m_MatchC2;
  134. private string m_MatchWorkMode;
  135. private float m_BiasMatchC1;
  136. private float m_BiasMatchC2;
  137. private float m_PendulumValvePosition;
  138. private bool m_IsTurboPumpAtSpeed;
  139. private bool m_TurboPumpWaterFlowSwitch;
  140. private bool m_IsHasWafer;
  141. private Recipe m_CurrentRecipe=new Recipe ();
  142. private RecipeResult m_CurrentRecipeResult=new RecipeResult ();
  143. private RecipeStep m_CurrentRecipeStep = new RecipeStep();
  144. private double m_ChamberPressureFeedBack;
  145. private string m_WaferID;
  146. private string m_ModuleName;
  147. private int? currentRecipeNumber;
  148. private AITHighTemperatureHeaterData m_HighTemperatureHeaterData;
  149. private ComboBoxItem m_SelectedPosition;
  150. private int m_HighTemperatureHeaterTemperatureSetpoint;
  151. private int m_HighTemperatureHeaterRateSetpoint;
  152. #endregion
  153. #region 属性
  154. public double TurboN2FlowSetPoint
  155. {
  156. get { return m_TurboN2FlowSetPoint; }
  157. set
  158. {
  159. if (value != m_TurboN2FlowSetPoint)
  160. {
  161. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", value);
  162. }
  163. SetProperty(ref m_TurboN2FlowSetPoint, value);
  164. }
  165. }
  166. public List<string> CurrentModuleRecipes
  167. {
  168. get { return m_CurrentModuleRecipes; }
  169. set { SetProperty(ref m_CurrentModuleRecipes, value); }
  170. }
  171. public Recipe CurrentRecipe
  172. {
  173. get { return m_CurrentRecipe; }
  174. set { SetProperty(ref m_CurrentRecipe, value); }
  175. }
  176. public RecipeResult CurrentRecipeResult
  177. {
  178. get { return m_CurrentRecipeResult; }
  179. set { SetProperty(ref m_CurrentRecipeResult, value); }
  180. }
  181. public RecipeStep CurrentRecipeStep
  182. {
  183. get { return m_CurrentRecipeStep; }
  184. set { SetProperty(ref m_CurrentRecipeStep, value); }
  185. }
  186. public bool IsHasWafer
  187. {
  188. get { return m_IsHasWafer; }
  189. set { SetProperty(ref m_IsHasWafer, value); }
  190. }
  191. public bool IsTurboPumpAtSpeed
  192. {
  193. get { return m_IsTurboPumpAtSpeed; }
  194. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  195. }
  196. public bool TurboPumpWaterFlowSwitch
  197. {
  198. get { return m_TurboPumpWaterFlowSwitch; }
  199. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  200. }
  201. public float PendulumValvePosition
  202. {
  203. get { return m_PendulumValvePosition; }
  204. set{SetProperty(ref m_PendulumValvePosition, value);}
  205. }
  206. public float BiasMatchC1
  207. {
  208. get { return m_BiasMatchC1; }
  209. set
  210. {
  211. SetProperty(ref m_BiasMatchC1, value);
  212. }
  213. }
  214. public float BiasMatchC2
  215. {
  216. get { return m_BiasMatchC2; }
  217. set
  218. {
  219. SetProperty(ref m_BiasMatchC2, value);
  220. }
  221. }
  222. public float MatchC1
  223. {
  224. get { return m_MatchC1; }
  225. set
  226. {
  227. SetProperty(ref m_MatchC1, value);
  228. }
  229. }
  230. public float MatchC2
  231. {
  232. get { return m_MatchC2; }
  233. set
  234. {
  235. SetProperty(ref m_MatchC2, value);
  236. }
  237. }
  238. public AITPendulumValveData PendulumValveData
  239. {
  240. get { return m_PendulumValveData; }
  241. set
  242. {
  243. SetProperty(ref m_PendulumValveData, value);
  244. }
  245. }
  246. //public AITHVData ESCHVData
  247. //{
  248. // get { return m_ESCHVData; }
  249. // set
  250. // {
  251. // SetProperty(ref m_ESCHVData, value);
  252. // }
  253. //}
  254. public int ESCHVOutputVoltage
  255. {
  256. get { return m_ESCHVOutputVoltage; }
  257. set
  258. {
  259. SetProperty(ref m_ESCHVOutputVoltage, value);
  260. }
  261. }
  262. public float ChillerTemperature
  263. {
  264. get { return m_ChillerTemperature; }
  265. set
  266. {
  267. SetProperty(ref m_ChillerTemperature, value);
  268. }
  269. }
  270. //public float HVTemperature
  271. //{
  272. // get { return m_HVTemperature; }
  273. // set
  274. // {
  275. // SetProperty(ref m_HVTemperature, value);
  276. // }
  277. //}
  278. public bool IsLidClosed
  279. {
  280. get { return m_IsLidClosed; }
  281. set
  282. {
  283. SetProperty(ref m_IsLidClosed, value);
  284. }
  285. }
  286. public bool IsSlitDoorClosed
  287. {
  288. get { return m_IsSlitDoorClosed; }
  289. set
  290. {
  291. SetProperty(ref m_IsSlitDoorClosed, value);
  292. }
  293. }
  294. public bool LiftPinIsUp
  295. {
  296. get { return m_LiftPinIsUp; }
  297. set
  298. {
  299. SetProperty(ref m_LiftPinIsUp, value);
  300. }
  301. }
  302. public int TurboPumpRotationalSpeed
  303. {
  304. get { return m_TurboPumpRotationalSpeed; }
  305. set
  306. {
  307. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  308. }
  309. }
  310. public float ESCHePressure
  311. {
  312. get { return m_ESCHePressure; }
  313. set
  314. {
  315. SetProperty(ref m_ESCHePressure, value);
  316. }
  317. }
  318. public float ProcessHighPressure
  319. {
  320. get { return m_ProcessHighPressure; }
  321. set
  322. {
  323. SetProperty(ref m_ProcessHighPressure, value);
  324. }
  325. }
  326. public float ProcessLowPressure
  327. {
  328. get { return m_ProcessLowPressure; }
  329. set
  330. {
  331. SetProperty(ref m_ProcessLowPressure, value);
  332. }
  333. }
  334. public float ForelinePressure
  335. {
  336. get { return m_ForelinePressurePressure; }
  337. set
  338. {
  339. SetProperty(ref m_ForelinePressurePressure, value);
  340. }
  341. }
  342. public bool SourceRFMatchInterlock
  343. {
  344. get { return m_SourceRFMatchInterlock; }
  345. set
  346. {
  347. SetProperty(ref m_SourceRFMatchInterlock, value);
  348. }
  349. }
  350. public bool IsWLK
  351. {
  352. get { return m_IsWLK; }
  353. set
  354. {
  355. SetProperty(ref m_IsWLK, value);
  356. }
  357. }
  358. public bool IsWaterFlowOk
  359. {
  360. get { return m_IsWaterFlowOk; }
  361. set
  362. {
  363. SetProperty(ref m_IsWaterFlowOk, value);
  364. }
  365. }
  366. public bool IsCDAOK
  367. {
  368. get { return m_IsCDAOK; }
  369. set
  370. {
  371. SetProperty(ref m_IsCDAOK, value);
  372. }
  373. }
  374. public bool SensorGasBoxDoor
  375. {
  376. get { return m_SensorGasBoxDoor; }
  377. set
  378. {
  379. SetProperty(ref m_SensorGasBoxDoor, value);
  380. }
  381. }
  382. public bool SensorGasBoxPressure
  383. {
  384. get { return m_SensorGasBoxPressure; }
  385. set
  386. {
  387. SetProperty(ref m_SensorGasBoxPressure, value);
  388. }
  389. }
  390. public bool IsTurboPumpInterlock
  391. {
  392. get { return m_IsTurboPumpInterlock; }
  393. set
  394. {
  395. SetProperty(ref m_IsTurboPumpInterlock, value);
  396. }
  397. }
  398. public string ModuleName
  399. {
  400. get { return m_ModuleName; }
  401. set
  402. {
  403. SetProperty(ref m_ModuleName, value);
  404. }
  405. }
  406. public double MFC1SetPoint
  407. {
  408. get { return m_MFC1SetPoint; }
  409. set { SetProperty(ref m_MFC1SetPoint, value); }
  410. }
  411. public double MFC2SetPoint
  412. {
  413. get { return m_MFC2SetPoint; }
  414. set { SetProperty(ref m_MFC2SetPoint, value); }
  415. }
  416. public double MFC3SetPoint
  417. {
  418. get { return m_MFC3SetPoint; }
  419. set { SetProperty(ref m_MFC3SetPoint, value); }
  420. }
  421. public double MFC4SetPoint
  422. {
  423. get { return m_MFC4SetPoint; }
  424. set { SetProperty(ref m_MFC4SetPoint, value); }
  425. }
  426. public double MFC5SetPoint
  427. {
  428. get { return m_MFC5SetPoint; }
  429. set { SetProperty(ref m_MFC5SetPoint, value); }
  430. }
  431. public double MFC6SetPoint
  432. {
  433. get { return m_MFC6SetPoint; }
  434. set { SetProperty(ref m_MFC6SetPoint, value); }
  435. }
  436. public double MFC7SetPoint
  437. {
  438. get { return m_MFC7SetPoint; }
  439. set { SetProperty(ref m_MFC7SetPoint, value); }
  440. }
  441. public double MFC8SetPoint
  442. {
  443. get { return m_MFC8SetPoint; }
  444. set { SetProperty(ref m_MFC8SetPoint, value); }
  445. }
  446. public double N2SetPoint
  447. {
  448. get { return m_N2SetPoint; }
  449. set { SetProperty(ref m_N2SetPoint, value); }
  450. }
  451. public AITMfcData MFC1Data
  452. {
  453. get { return m_MFC1Data; }
  454. set { SetProperty(ref m_MFC1Data, value); }
  455. }
  456. public AITMfcData MFC2Data
  457. {
  458. get { return m_MFC2Data; }
  459. set { SetProperty(ref m_MFC2Data, value); }
  460. }
  461. public AITMfcData MFC3Data
  462. {
  463. get { return m_MFC3Data; }
  464. set { SetProperty(ref m_MFC3Data, value); }
  465. }
  466. public AITMfcData MFC4Data
  467. {
  468. get { return m_MFC4Data; }
  469. set { SetProperty(ref m_MFC4Data, value); }
  470. }
  471. public AITMfcData MFC5Data
  472. {
  473. get { return m_MFC5Data; }
  474. set { SetProperty(ref m_MFC5Data, value); }
  475. }
  476. public AITMfcData MFC6Data
  477. {
  478. get { return m_MFC6Data; }
  479. set { SetProperty(ref m_MFC6Data, value); }
  480. }
  481. public AITMfcData MFC7Data
  482. {
  483. get { return m_MFC7Data; }
  484. set { SetProperty(ref m_MFC7Data, value); }
  485. }
  486. public AITMfcData MFC8Data
  487. {
  488. get { return m_MFC8Data; }
  489. set { SetProperty(ref m_MFC8Data, value); }
  490. }
  491. public AITMfcData MFCHeData
  492. {
  493. get { return m_MFCHeData; }
  494. set { SetProperty(ref m_MFCHeData, value); }
  495. }
  496. public AITMfcData MFCN2Data
  497. {
  498. get { return m_MFCN2Data; }
  499. set { SetProperty(ref m_MFCN2Data, value); }
  500. }
  501. //public AITHeaterData ValveHeaterData
  502. //{
  503. // get { return m_ValveHeaterData; }
  504. // set { SetProperty(ref m_ValveHeaterData, value); }
  505. //}
  506. //public AITHeaterData ForelineHeaterData
  507. //{
  508. // get { return m_ForelineHeaterData; }
  509. // set { SetProperty(ref m_ForelineHeaterData, value); }
  510. //}
  511. //public AITHeaterData WallHeaterData
  512. //{
  513. // get { return m_WallHeaterData; }
  514. // set { SetProperty(ref m_WallHeaterData, value); }
  515. //}
  516. public AITRfData SRFData
  517. {
  518. get { return m_SRFData; }
  519. set { SetProperty(ref m_SRFData, value); }
  520. }
  521. public AITRfData BRFData
  522. {
  523. get { return m_BRFData; }
  524. set { SetProperty(ref m_BRFData, value); }
  525. }
  526. public PMState PMCurrentState
  527. {
  528. get { return m_PMCurrentState; }
  529. set { SetProperty(ref m_PMCurrentState, value); }
  530. }
  531. #region 阀
  532. public bool GasFinalValveIsOpen
  533. {
  534. get { return m_GasFinalValveIsOpen; }
  535. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  536. }
  537. public bool PVN21ValveIsOpen
  538. {
  539. get { return m_PVN21ValveIsOpen; }
  540. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  541. }
  542. public bool PVN22ValveIsOpen
  543. {
  544. get { return m_PVN22ValveIsOpen; }
  545. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  546. }
  547. public bool N2ValveIsOpen
  548. {
  549. get { return m_N2ValveIsOpen; }
  550. set { SetProperty(ref m_N2ValveIsOpen, value); }
  551. }
  552. public bool PV11ValveIsOpen
  553. {
  554. get { return m_PV11ValveIsOpen; }
  555. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  556. }
  557. public bool PV12ValveIsOpen
  558. {
  559. get { return m_PV12ValveIsOpen; }
  560. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  561. }
  562. public bool MFC1ValveIsOpen
  563. {
  564. get { return m_MFC1ValveIsOpen; }
  565. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  566. }
  567. public bool PV21ValveIsOpen
  568. {
  569. get { return m_PV21ValveIsOpen; }
  570. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  571. }
  572. public bool PV22ValveIsOpen
  573. {
  574. get { return m_PV22ValveIsOpen; }
  575. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  576. }
  577. public bool MFC2ValveIsOpen
  578. {
  579. get { return m_MFC2ValveIsOpen; }
  580. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  581. }
  582. public bool PV31ValveIsOpen
  583. {
  584. get { return m_PV31ValveIsOpen; }
  585. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  586. }
  587. public bool PV32ValveIsOpen
  588. {
  589. get { return m_PV32ValveIsOpen; }
  590. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  591. }
  592. public bool MFC3ValveIsOpen
  593. {
  594. get { return m_MFC3ValveIsOpen; }
  595. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  596. }
  597. public bool PV41ValveIsOpen
  598. {
  599. get { return m_PV41ValveIsOpen; }
  600. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  601. }
  602. public bool PV42ValveIsOpen
  603. {
  604. get { return m_PV42ValveIsOpen; }
  605. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  606. }
  607. public bool MFC4ValveIsOpen
  608. {
  609. get { return m_MFC4ValveIsOpen; }
  610. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  611. }
  612. public bool MFC5ValveIsOpen
  613. {
  614. get { return m_MFC5ValveIsOpen; }
  615. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  616. }
  617. public bool MFC6ValveIsOpen
  618. {
  619. get { return m_MFC6ValveIsOpen; }
  620. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  621. }
  622. public bool MFC7ValveIsOpen
  623. {
  624. get { return m_MFC7ValveIsOpen; }
  625. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  626. }
  627. public bool MFC8ValveIsOpen
  628. {
  629. get { return m_MFC8ValveIsOpen; }
  630. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  631. }
  632. public bool PVHe1ValveIsOpen
  633. {
  634. get { return m_PVHe1ValveIsOpen; }
  635. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  636. }
  637. public bool PVHe2ValveIsOpen
  638. {
  639. get { return m_PVHe2ValveIsOpen; }
  640. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  641. }
  642. public bool TurboPumpPumpingValveIsOpen
  643. {
  644. get { return m_TurboPumpPumpingValveIsOpen; }
  645. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  646. }
  647. public bool TurboPumpPurgeValveIsOpen
  648. {
  649. get { return m_TurboPumpPurgeValveIsOpen; }
  650. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  651. }
  652. public bool SoftPumpValveIsOpen
  653. {
  654. get { return m_SoftPumpValveIsOpen; }
  655. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  656. }
  657. public bool FastPumpValveIsOpen
  658. {
  659. get { return m_FastPumpValveIsOpen; }
  660. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  661. }
  662. public bool GuageValveIsOpen
  663. {
  664. get { return m_GuageValveIsOpen; }
  665. set { SetProperty(ref m_GuageValveIsOpen, value); }
  666. }
  667. #endregion
  668. public Dictionary<string, object> RtDataValues
  669. {
  670. get { return m_RtDataValues; }
  671. set { SetProperty(ref m_RtDataValues, value); }
  672. }
  673. public bool PumpIsOpen
  674. {
  675. get { return m_PumpIsOpen; }
  676. set { SetProperty(ref m_PumpIsOpen, value); }
  677. }
  678. public bool PendulumValveIsOpen
  679. {
  680. get { return m_PendulumValveIsOpen; }
  681. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  682. }
  683. public bool PurgeValveIsOpen
  684. {
  685. get { return m_PurgeValveIsOpen; }
  686. set { SetProperty(ref m_PurgeValveIsOpen, value); }
  687. }
  688. public bool TurboIsOpen
  689. {
  690. get { return m_TurboIsOpen; }
  691. set { SetProperty(ref m_TurboIsOpen, value); }
  692. }
  693. public bool IsATM
  694. {
  695. get { return m_IsATM; }
  696. set { SetProperty(ref m_IsATM, value); }
  697. }
  698. public bool IsVAC
  699. {
  700. get { return m_IsVAC; }
  701. set { SetProperty(ref m_IsVAC, value); }
  702. }
  703. //public bool BRFIsOn
  704. //{
  705. // get { return m_BRFIsOn; }
  706. // set { SetProperty(ref m_BRFIsOn, value); }
  707. //}
  708. //public bool SRFIsOn
  709. //{
  710. // get { return m_SRFIsOn; }
  711. // set { SetProperty(ref m_SRFIsOn, value); }
  712. //}
  713. public int PositionValue
  714. {
  715. get { return m_PositionValue; }
  716. set { SetProperty(ref m_PositionValue, value); }
  717. }
  718. public bool IsPositionMode
  719. {
  720. get { return m_IsPositionMode; }
  721. set { SetProperty(ref m_IsPositionMode, value); }
  722. }
  723. public double HeGasSetpoint
  724. {
  725. get { return m_HeGasSetpoint; }
  726. set
  727. {
  728. SetProperty(ref m_HeGasSetpoint, value);
  729. }
  730. }
  731. public int HePressureSetpoint
  732. {
  733. get { return m_HePressureSetpoint; }
  734. set
  735. {
  736. SetProperty(ref m_HePressureSetpoint, value);
  737. }
  738. }
  739. public float SRFFwdPowerSetpoint
  740. {
  741. get { return m_SRFFwdPowerSetpoint; }
  742. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  743. }
  744. public float BRFFwdPowerSetpoint
  745. {
  746. get { return m_BRFFwdPowerSetpoint; }
  747. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  748. }
  749. public int ESCVoltage
  750. {
  751. get { return m_ESCVoltage; }
  752. set { SetProperty(ref m_ESCVoltage, value); }
  753. }
  754. public float SRFMatchC1
  755. {
  756. get { return m_SRFMatchC1; }
  757. set { SetProperty(ref m_SRFMatchC1, value); }
  758. }
  759. public float SRFMatchC2
  760. {
  761. get { return m_SRFMatchC2; }
  762. set { SetProperty(ref m_SRFMatchC2, value); }
  763. }
  764. public string MatchWorkMode
  765. {
  766. get { return m_MatchWorkMode; }
  767. set
  768. {
  769. SetProperty(ref m_MatchWorkMode, value);
  770. }
  771. }
  772. public float BRFMatchC1
  773. {
  774. get { return m_BRFMatchC1; }
  775. set { SetProperty(ref m_BRFMatchC1, value); }
  776. }
  777. public float BRFMatchC2
  778. {
  779. get { return m_BRFMatchC2; }
  780. set { SetProperty(ref m_BRFMatchC2, value); }
  781. }
  782. public bool GasIsFlowing
  783. {
  784. get { return m_GasIsFlowing; }
  785. set { SetProperty(ref m_GasIsFlowing, value); }
  786. }
  787. public bool IsProcessing
  788. {
  789. get { return m_IsProcessing; }
  790. set { SetProperty(ref m_IsProcessing, value); }
  791. }
  792. public bool IsAutoMode
  793. {
  794. get { return m_IsAutoMode; }
  795. set { SetProperty(ref m_IsAutoMode, value); }
  796. }
  797. public string SelectedRecipe
  798. {
  799. get { return m_SelectedRecipe; }
  800. set { SetProperty(ref m_SelectedRecipe, value); }
  801. }
  802. //public float ChillerTempSetpoint
  803. //{
  804. // get { return m_ChillerTempSetpoint; }
  805. // set { SetProperty(ref m_ChillerTempSetpoint, value); }
  806. //}
  807. public float WallTempSetpoint
  808. {
  809. get { return m_WallTempSetpoint; }
  810. set { SetProperty(ref m_WallTempSetpoint, value); }
  811. }
  812. public bool HeIsPressureMode
  813. {
  814. get { return m_HeIsPressureMode; }
  815. set { SetProperty(ref m_HeIsPressureMode, value); }
  816. }
  817. //public bool ChillerIsOn
  818. //{
  819. // get { return m_ChillerIsOn; }
  820. // set { SetProperty(ref m_ChillerIsOn, value); }
  821. //}
  822. public double ChamberPressureFeedBack
  823. {
  824. get { return m_ChamberPressureFeedBack; }
  825. set { SetProperty(ref m_ChamberPressureFeedBack, value); }
  826. }
  827. public string WaferID
  828. {
  829. get { return m_WaferID; }
  830. set { SetProperty(ref m_WaferID, value); }
  831. }
  832. public AITHighTemperatureHeaterData HighTemperatureHeaterData
  833. {
  834. get { return m_HighTemperatureHeaterData; }
  835. set { SetProperty(ref m_HighTemperatureHeaterData, value); }
  836. }
  837. public ComboBoxItem SelectedPosition
  838. {
  839. get { return m_SelectedPosition; }
  840. set { SetProperty(ref m_SelectedPosition, value); }
  841. }
  842. public int HighTemperatureHeaterTemperatureSetpoint
  843. {
  844. get { return m_HighTemperatureHeaterTemperatureSetpoint; }
  845. set { SetProperty(ref m_HighTemperatureHeaterTemperatureSetpoint, value); }
  846. }
  847. public int HighTemperatureHeaterRateSetpoint
  848. {
  849. get { return m_HighTemperatureHeaterRateSetpoint; }
  850. set { SetProperty(ref m_HighTemperatureHeaterRateSetpoint, value); }
  851. }
  852. public AITHeaterData PendulumHeaterData
  853. {
  854. get { return m_PendulumHeaterData; }
  855. set { SetProperty(ref m_PendulumHeaterData, value); }
  856. }
  857. #endregion
  858. #region 命令
  859. private DelegateCommand _PMInitCommnad;
  860. public DelegateCommand PMInitCommnad =>
  861. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  862. private DelegateCommand _PMAbortCommnad;
  863. public DelegateCommand PMAbortCommnad =>
  864. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  865. private DelegateCommand _GasCommand;
  866. public DelegateCommand GasCommand =>
  867. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  868. private DelegateCommand _HeCommand;
  869. public DelegateCommand HeCommand =>
  870. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  871. private DelegateCommand _RfCommand;
  872. public DelegateCommand RfCommand =>
  873. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  874. private DelegateCommand _PurgeCommand;
  875. public DelegateCommand PurgeCommand =>
  876. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  877. private DelegateCommand _VentCommand;
  878. public DelegateCommand VentCommand =>
  879. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  880. private DelegateCommand _PumpCommand;
  881. public DelegateCommand PumpCommand =>
  882. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  883. private DelegateCommand _OpenPumpCommand;
  884. public DelegateCommand OpenPumpCommand =>
  885. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  886. private DelegateCommand _ClosePumpCommand;
  887. public DelegateCommand ClosePumpCommand =>
  888. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  889. private DelegateCommand _OpenTurboPumpCommand;
  890. public DelegateCommand OpenTurboPumpCommand =>
  891. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  892. private DelegateCommand _CloseTurboPumpCommand;
  893. public DelegateCommand CloseTurboPumpCommand =>
  894. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  895. private DelegateCommand _OpenPendulumValveCommand;
  896. public DelegateCommand OpenPendulumValveCommand =>
  897. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  898. private DelegateCommand _ClosePendulumValveCommand;
  899. public DelegateCommand ClosePendulumValveCommand =>
  900. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  901. private DelegateCommand<object> _PinUpDownCommand;
  902. public DelegateCommand<object> PinUpDownCommand =>
  903. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  904. private DelegateCommand<object> _LidUpDownCommand;
  905. public DelegateCommand<object> LidUpDownCommand =>
  906. _LidUpDownCommand ?? (_LidUpDownCommand = new DelegateCommand<object>(OnLidUpDown));
  907. private DelegateCommand _SetSRfCommand;
  908. public DelegateCommand SetSRfCommand =>
  909. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  910. private DelegateCommand _SetBRfCommand;
  911. public DelegateCommand SetBRfCommand =>
  912. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  913. private DelegateCommand _OpenButterflyValveViewCommand;
  914. public DelegateCommand OpenButterflyValveViewCommand =>
  915. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  916. //private DelegateCommand _HVCommand;
  917. //public DelegateCommand HVCommand =>
  918. // _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  919. private DelegateCommand _HVSetCommand;
  920. public DelegateCommand HVSetCommand =>
  921. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  922. private DelegateCommand _LoadRecipeCommand;
  923. public DelegateCommand LoadRecipeCommand =>
  924. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  925. private DelegateCommand<object> _ControlValveCommand;
  926. public DelegateCommand<object> ControlValveCommand =>
  927. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  928. private DelegateCommand<object> _RunRecipeCommand;
  929. public DelegateCommand<object> RunRecipeCommand =>
  930. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  931. private DelegateCommand _SetChillerTempCommand;
  932. public DelegateCommand SetChillerTempCommand =>
  933. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  934. private DelegateCommand _SetHeaterRateCommand;
  935. public DelegateCommand SetHeaterRateCommand =>
  936. _SetHeaterRateCommand ?? (_SetHeaterRateCommand = new DelegateCommand(OnSetHeaterRate));
  937. //private DelegateCommand _OnOffChillerCommand;
  938. //public DelegateCommand OnOffChillerCommand =>
  939. // _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  940. private DelegateCommand<object> _HeaterCommand;
  941. public DelegateCommand<object> HeaterCommand =>
  942. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  943. private DelegateCommand _EndStepCommand;
  944. public DelegateCommand EndStepCommand =>
  945. _EndStepCommand ?? (_EndStepCommand = new DelegateCommand(OnEndStep));
  946. private DelegateCommand _GotoPositionCommand;
  947. public DelegateCommand GotoPositionCommand =>
  948. _GotoPositionCommand ?? (_GotoPositionCommand = new DelegateCommand(OnGotoPosition));
  949. private DelegateCommand _SwitchHighTemperatureHeaterCommand;
  950. public DelegateCommand SwitchHighTemperatureHeaterCommand =>
  951. _SwitchHighTemperatureHeaterCommand ?? (_SwitchHighTemperatureHeaterCommand = new DelegateCommand(OnSwitchHighTemperatureHeater));
  952. private DelegateCommand<object> _AbortRecipeCommnad;
  953. public DelegateCommand<object> AbortRecipeCommnad =>
  954. _AbortRecipeCommnad ?? (_AbortRecipeCommnad = new DelegateCommand<object>(OnAbortRecipe));
  955. #endregion
  956. #region 构造函数
  957. public OverKepler2200AViewModel()
  958. {
  959. m_RtDataKeys = new List<string>();
  960. m_IsATM = true;
  961. ModuleName = "PMA";
  962. //CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName)).ToList();
  963. DispatcherTimer timer = new DispatcherTimer();
  964. timer.Interval = TimeSpan.FromSeconds(0.1);
  965. timer.Tick += timer_Tick;
  966. timer.Start();
  967. }
  968. #endregion
  969. #region 命令方法
  970. private void OnControlValve(object obj)
  971. {
  972. CommonValveControl commonValveControl = (CommonValveControl)obj;
  973. if (commonValveControl.IsCanEdit == true)
  974. {
  975. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  976. }
  977. }
  978. private void OnPMInit()
  979. {
  980. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  981. }
  982. private async void OnGas()
  983. {
  984. await Task.Run(async () =>
  985. {
  986. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  987. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  988. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  989. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  990. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  991. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  992. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  993. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  994. await Task.Delay(1000);
  995. object[] mfc = new object[8];
  996. string[] mfcSetPoint = new string[8];
  997. mfc[0] = MFC1Data.SetPoint;
  998. mfc[1] = MFC2Data.SetPoint;
  999. mfc[2] = MFC3Data.SetPoint;
  1000. mfc[3] = MFC4Data.SetPoint;
  1001. mfc[4] = MFC5Data.SetPoint;
  1002. mfc[5] = MFC6Data.SetPoint;
  1003. mfc[6] = MFC7Data.SetPoint;
  1004. mfc[7] = MFC8Data.SetPoint;
  1005. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  1006. });
  1007. }
  1008. private void OnHe()
  1009. {
  1010. if (PVHe1ValveIsOpen == true)
  1011. {
  1012. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  1013. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  1014. }
  1015. else
  1016. {
  1017. if (HeIsPressureMode)
  1018. {
  1019. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  1020. }
  1021. else
  1022. {
  1023. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  1024. }
  1025. }
  1026. }
  1027. private void OnRf()
  1028. {
  1029. if (PMCurrentState == PMState.RfPowering)
  1030. {
  1031. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1032. }
  1033. else
  1034. {
  1035. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  1036. }
  1037. }
  1038. private void OnPurge()
  1039. {
  1040. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  1041. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  1042. //{
  1043. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1044. // await Task.Delay(1000);
  1045. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1046. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1047. //}
  1048. //else
  1049. //{
  1050. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1051. // await Task.Delay(1000);
  1052. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1053. //}
  1054. if (PMCurrentState == PMState.Purging)
  1055. {
  1056. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  1057. //await Task.Delay(1000);
  1058. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  1059. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1060. }
  1061. else
  1062. {
  1063. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1064. //await Task.Delay(1000);
  1065. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  1066. }
  1067. }
  1068. private void OnVent()
  1069. {
  1070. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1071. if (PMCurrentState == PMState.Venting)
  1072. {
  1073. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1074. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1075. }
  1076. else
  1077. {
  1078. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1079. }
  1080. }
  1081. private void OnPump()
  1082. {
  1083. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1084. if (PMCurrentState==PMState.Pumping)
  1085. {
  1086. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1087. return;
  1088. }
  1089. //if (PMCurrentState == PMState.pum)
  1090. //{
  1091. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1092. // return;
  1093. //}
  1094. //string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1095. //{
  1096. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1097. //}
  1098. //string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1099. //{
  1100. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1101. //}
  1102. string BasePressureSetPoint = QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpBasePressure").ToString();
  1103. string PumpLimitSetPoint= QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Pump.PumpTimeLimit").ToString();
  1104. // 设置底压
  1105. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1106. if (basePressure <= 0.01 || basePressure >= 1000)
  1107. {
  1108. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1109. return;
  1110. }
  1111. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1112. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1113. {
  1114. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1115. return;
  1116. }
  1117. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1118. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1120. }
  1121. private void OnOpenPump()
  1122. {
  1123. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1124. if (PMCurrentState==PMState.LaunchingPump)
  1125. {
  1126. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1127. return;
  1128. }
  1129. //if (PumpIsOpen == true)
  1130. //{
  1131. // return;
  1132. //}
  1133. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1134. }
  1135. private void OnClosePump()
  1136. {
  1137. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1138. }
  1139. private void OnOpenTurboPump()
  1140. {
  1141. //TurboIsOpen = true;
  1142. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1143. if (PMCurrentState == PMState.LaunchingTurboPump)
  1144. {
  1145. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1146. return;
  1147. }
  1148. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1149. }
  1150. private void OnCloseTurboPump()
  1151. {
  1152. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1153. }
  1154. private void OnOpenPendulumValve()
  1155. {
  1156. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1157. }
  1158. private void OnClosePendulumValve()
  1159. {
  1160. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1161. }
  1162. private void OnPinUpDown(object upDown)
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1165. }
  1166. private void OnLidUpDown(object upDown)
  1167. {
  1168. //var value = (bool)upDown;
  1169. if (upDown.ToString()== "Up")
  1170. {
  1171. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Open}");
  1172. }
  1173. else
  1174. {
  1175. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Lid}.{AITCylinderOperation.Close}");
  1176. }
  1177. }
  1178. private void OnSetSRf()
  1179. {
  1180. if (SRFData.IsRfOn == true)
  1181. {
  1182. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1183. }
  1184. else
  1185. {
  1186. if (GasIsFlowing == true)
  1187. {
  1188. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1189. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1190. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1191. }
  1192. }
  1193. }
  1194. private void OnSetBRf()
  1195. {
  1196. if (BRFData.IsRfOn == true)
  1197. {
  1198. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1199. }
  1200. else
  1201. {
  1202. if (GasIsFlowing == true)
  1203. {
  1204. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1, BRFMatchC2);
  1205. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1206. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchProcessMode}", "Auto");
  1207. }
  1208. }
  1209. }
  1210. private void OnPMAbort()
  1211. {
  1212. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1213. }
  1214. private void OnOpenButterflyValveView()
  1215. {
  1216. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1217. if (butterflyValveMessageBox == null || butterflyValveMessageBox.IsVisible == false)
  1218. {
  1219. butterflyValveMessageBox = new ButterflyValveView(ModuleName.ToString());
  1220. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1221. butterflyValveMessageBox.Left = 700;
  1222. butterflyValveMessageBox.Top = 600;
  1223. butterflyValveMessageBox.Show();
  1224. butterflyValveMessageBox.Owner = _mainWindow;
  1225. }
  1226. }
  1227. private void OnLoadRecipe()
  1228. {
  1229. CurrentModuleRecipes = GetFilesNames(Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process")).ToList();
  1230. }
  1231. //private async void OnHV()
  1232. //{
  1233. // if (ESCHVData.IsOn == true)
  1234. // {
  1235. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1236. // }
  1237. // else
  1238. // {
  1239. // await Task.Run(async () =>
  1240. // {
  1241. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1242. // await Task.Delay(1000);
  1243. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1244. // });
  1245. // }
  1246. //}
  1247. private void OnHVSet()
  1248. {
  1249. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1250. }
  1251. private void OnRunRecipe(object obj)
  1252. {
  1253. string recipeName = SelectedRecipe;
  1254. if (recipeName == null)
  1255. {
  1256. return;
  1257. }
  1258. ClearData();
  1259. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName, "Process", recipeName + ".rcp");
  1260. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1261. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName, ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].WaferID, "Process");
  1262. }
  1263. //private void OnOffChiller()
  1264. //{
  1265. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", ChillerType.Chiller.ToString(),!ChillerIsOn);
  1266. //}
  1267. private void OnHeater(object obj)
  1268. {
  1269. if (IsAutoMode == true)
  1270. {
  1271. return;
  1272. }
  1273. AITHeaterData heaterData = obj as AITHeaterData;
  1274. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1275. if (heaterView == null || heaterView.IsVisible == false)
  1276. {
  1277. heaterView = new HeaterView(heaterData, ModuleName);
  1278. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1279. heaterView.Owner = _mainWindow;
  1280. heaterView.Show();
  1281. }
  1282. }
  1283. private void OnOnline()
  1284. {
  1285. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOnline}");
  1286. }
  1287. private void OnOffline()
  1288. {
  1289. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.PmOffline}");
  1290. }
  1291. private void OnEndStep()
  1292. {
  1293. if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber != CurrentRecipeResult?.RecipeStepCount)
  1294. {
  1295. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ManualEndStep");
  1296. }
  1297. else if (CurrentRecipeResult?.RecipeStepNumber != null && CurrentRecipeResult?.RecipeStepNumber == CurrentRecipeResult?.RecipeStepCount)
  1298. {
  1299. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1300. }
  1301. }
  1302. private void OnGotoPosition()
  1303. {
  1304. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.GotoPosition", SelectedPosition.Content);
  1305. }
  1306. private void OnSwitchHighTemperatureHeater()
  1307. {
  1308. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SwitchHighTemperatureHeater", !HighTemperatureHeaterData.HighTemperatureHeaterIson);
  1309. }
  1310. private void OnSetChillerTemp()
  1311. {
  1312. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterTemperature", HighTemperatureHeaterTemperatureSetpoint);
  1313. }
  1314. private void OnSetHeaterRate()
  1315. {
  1316. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HighTemperatureHeater.SetHighTemperatureHeaterRate", HighTemperatureHeaterRateSetpoint);
  1317. }
  1318. private DelegateCommand _OnlineCommand;
  1319. public DelegateCommand OnlineCommand =>
  1320. _OnlineCommand ?? (_OnlineCommand = new DelegateCommand(OnOnline));
  1321. private DelegateCommand _OfflineCommand;
  1322. public DelegateCommand OfflineCommand =>
  1323. _OfflineCommand ?? (_OfflineCommand = new DelegateCommand(OnOffline));
  1324. private async void OnAbortRecipe(object obj)
  1325. {
  1326. if (PMCurrentState != PMState.Processing)
  1327. {
  1328. return;
  1329. }
  1330. switch (obj.ToString())
  1331. {
  1332. case "0":
  1333. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1334. break;
  1335. case "1":
  1336. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1337. //if (ESCHVData.IsOn == true)
  1338. //{
  1339. // await Task.Delay(3000);
  1340. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1341. //}
  1342. break;
  1343. case "2":
  1344. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1345. await Task.Delay(3000);
  1346. InvokeClient.Instance.Service.DoOperation("ReturnWafer", ModuleName, 0);
  1347. break;
  1348. }
  1349. }
  1350. #endregion
  1351. #region 私有方法
  1352. private void ClearData()
  1353. {
  1354. ESCVoltage = 0;
  1355. SRFFwdPowerSetpoint = 0;
  1356. SRFMatchC1 = 0;
  1357. SRFMatchC2 = 0;
  1358. BRFFwdPowerSetpoint = 0;
  1359. BRFMatchC1 = 0;
  1360. BRFMatchC2 = 0;
  1361. HeGasSetpoint = 0;
  1362. MFC1SetPoint = 0;
  1363. MFC2SetPoint = 0;
  1364. MFC3SetPoint = 0;
  1365. MFC4SetPoint = 0;
  1366. MFC5SetPoint = 0;
  1367. MFC6SetPoint = 0;
  1368. MFC7SetPoint = 0;
  1369. MFC8SetPoint = 0;
  1370. }
  1371. private IEnumerable<string> GetFilesNames(string path)
  1372. {
  1373. if (Directory.Exists(path))
  1374. {
  1375. return Directory.GetFiles(path, "*.rcp")?
  1376. .Select(Path.GetFileNameWithoutExtension);
  1377. }
  1378. else
  1379. {
  1380. return new List<string>();
  1381. }
  1382. }
  1383. void timer_Tick(object sender, EventArgs e)
  1384. {
  1385. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1386. if (RtDataValues==null)
  1387. {
  1388. return;
  1389. }
  1390. //var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1391. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1392. TurboN2FlowSetPoint = Convert.ToInt32(QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.TurboN2FlowSetPoint"));
  1393. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1394. GasFinalValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGasFinal.IsOpen");
  1395. PV11ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV11.IsOpen");
  1396. PV12ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV12.IsOpen");
  1397. PV21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV21.IsOpen");
  1398. PV22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV22.IsOpen");
  1399. PV31ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV31.IsOpen");
  1400. PV32ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV32.IsOpen");
  1401. PV41ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV41.IsOpen");
  1402. PV42ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePV42.IsOpen");
  1403. MFC1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc1.IsOpen");
  1404. MFC2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc2.IsOpen");
  1405. MFC3ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc3.IsOpen");
  1406. MFC4ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc4.IsOpen");
  1407. MFC5ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc5.IsOpen");
  1408. MFC6ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc6.IsOpen");
  1409. MFC7ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc7.IsOpen");
  1410. MFC8ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveMfc8.IsOpen");
  1411. N2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveN2.IsOpen");
  1412. SoftPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveSoftPump.IsOpen");
  1413. FastPumpValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveFastPump.IsOpen");
  1414. GuageValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveGuage.IsOpen");
  1415. PVHe1ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe1.IsOpen");
  1416. PVHe2ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVHe2.IsOpen");
  1417. PVN21ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN21.IsOpen");
  1418. PVN22ValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePVN22.IsOpen");
  1419. TurboPumpPumpingValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1420. TurboPumpPurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1421. PurgeValveIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.ValvePurge.IsOpen");
  1422. PumpIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.PumpIsRunning");
  1423. TurboIsOpen = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpIsRunning");
  1424. LiftPinIsUp= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.LiftPinIsUp");
  1425. IsSlitDoorClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsSlitDoorClosed");
  1426. IsLidClosed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsLidClosed");
  1427. PendulumValvePosition = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.GetPVPosition");
  1428. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1429. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1430. PMCurrentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1431. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1432. IsProcessing=PMCurrentState == PMState.Processing;
  1433. MFC1Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas1");
  1434. MFC2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas2");
  1435. MFC3Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas3");
  1436. MFC4Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas4");
  1437. MFC5Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas5");
  1438. MFC6Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas6");
  1439. MFC7Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas7");
  1440. MFC8Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcGas8");
  1441. MFCHeData = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcHe");
  1442. MFCN2Data = CommonFunction.GetValue<AITMfcData>(RtDataValues, $"{ModuleName}.MfcN2");
  1443. SRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1444. BRFData = CommonFunction.GetValue<AITRfData>(RtDataValues, $"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1445. PendulumValveData = CommonFunction.GetValue<AITPendulumValveData>(RtDataValues, $"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1446. //ESCHVData= CommonFunction.GetValue<AITHVData>(RtDataValues, $"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1447. //ValveHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1448. //ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1449. //WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1450. PendulumHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.PendulumHeater.DeviceData"];
  1451. ProcessHighPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessHighPressure");
  1452. ProcessLowPressure = CommonFunction.GetValue<float>(RtDataValues, $"{ModuleName}.ProcessLowPressure");
  1453. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1454. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1455. //ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1456. //HVTemperature = float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.ESCHV}.Temp"].ToString());
  1457. //ChillerIsOn = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.Chiller.IsOn");
  1458. SourceRFMatchInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.SourceRFMatchInterlock");
  1459. IsWLK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWLK");
  1460. IsWaterFlowOk= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsWaterFlowOk");
  1461. IsTurboPumpInterlock= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpInterlock");
  1462. IsCDAOK= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsCDA_OK");
  1463. SensorGasBoxDoor= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxDoorSW.Value");
  1464. SensorGasBoxPressure= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.GasBoxPressureSW.Value");
  1465. IsATM= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsATM");
  1466. IsVAC = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsVAC");
  1467. ESCHVOutputVoltage= CommonFunction.GetValue<int>(RtDataValues, $"{ModuleName}.ESCHV.OutputVoltage");
  1468. MatchC1 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C1");
  1469. MatchC2 = CommonFunction.GetValue<float>(RtDataValues,$"{ModuleName}.{VenusDevice.Match}.C2");
  1470. MatchWorkMode= CommonFunction.GetValue<string>(RtDataValues, $"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1471. TurboPumpWaterFlowSwitch = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1472. IsTurboPumpAtSpeed = CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.IsTurboPumpAtSpeed");
  1473. IsHasWafer= CommonFunction.GetValue<bool>(RtDataValues, $"{ModuleName}.HasWafer");
  1474. WaferID = IsHasWafer ? ModuleManager.ModuleInfos[ModuleName].WaferManager.Wafers[0].SourceName : "";
  1475. if (PMCurrentState == PMState.Processing || PMCurrentState == PMState.Clean)
  1476. {
  1477. CurrentRecipeResult = CommonFunction.GetValue<RecipeResult>(RtDataValues, $"{ModuleName}.CurrentRecipeResult");
  1478. if (CurrentRecipeResult.RecipeStepNumber != null && CurrentRecipeResult.RecipeStepNumber != currentRecipeNumber)
  1479. {
  1480. var recipePath = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes", ModuleName,"Process", CurrentRecipeResult.RecipeName + ".rcp");
  1481. CurrentRecipe = Recipe.Load(File.ReadAllText(recipePath));
  1482. CurrentRecipeStep = CurrentRecipe.Steps[Convert.ToInt32(CurrentRecipeResult.RecipeStepNumber) - 1];
  1483. }
  1484. currentRecipeNumber = CurrentRecipeResult.RecipeStepNumber;
  1485. }
  1486. else
  1487. {
  1488. CurrentRecipeResult = null;
  1489. CurrentRecipeStep = null;
  1490. }
  1491. if (Math.Abs(100 - ProcessLowPressure) > 1 && ProcessLowPressure<100)
  1492. {
  1493. ChamberPressureFeedBack = ProcessLowPressure;
  1494. }
  1495. else
  1496. {
  1497. ChamberPressureFeedBack = ProcessHighPressure;
  1498. }
  1499. HighTemperatureHeaterData = CommonFunction.GetValue<AITHighTemperatureHeaterData>(RtDataValues, $"{ModuleName}.HighTemperatureHeater.DeviceData");
  1500. }
  1501. public void addDataKeys()
  1502. {
  1503. m_RtDataKeys.Clear();
  1504. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1505. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1506. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1507. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1508. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1509. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1510. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1511. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1512. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1513. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1514. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1515. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1516. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1517. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1518. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1519. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1520. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1521. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1522. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1523. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1524. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1525. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1526. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1527. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1528. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1529. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1530. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1531. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1532. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1533. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1534. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1535. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1536. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1537. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1538. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1539. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1540. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1541. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1542. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1543. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1544. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1545. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1546. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1547. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1548. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1549. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1550. m_RtDataKeys.Add($"{ModuleName}.ValvePurge.IsOpen");
  1551. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1552. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1553. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1554. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1555. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Rf}.DeviceData");
  1556. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasRf}.DeviceData");
  1557. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1558. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1559. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1560. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.DeviceData");
  1561. //m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.ESCHV}.DeviceData");
  1562. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1563. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1564. //m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1565. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1566. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1567. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1568. m_RtDataKeys.Add($"{ModuleName}.SourceRFMatchInterlock");
  1569. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1570. m_RtDataKeys.Add($"{ModuleName}.GasBoxDoorSW.Value");
  1571. m_RtDataKeys.Add($"{ModuleName}.GasBoxPressureSW.Value");
  1572. //m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1573. //m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1574. //m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1575. //m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1576. //m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1577. m_RtDataKeys.Add($"{ModuleName}.PendulumHeater.DeviceData");
  1578. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1579. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1580. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch.Value");
  1581. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1582. m_RtDataKeys.Add($"{ModuleName}.CurrentRecipeResult");
  1583. m_RtDataKeys.Add($"{ModuleName}.HighTemperatureHeater.DeviceData");
  1584. }
  1585. #endregion
  1586. }
  1587. }