IoPressureControl.cs 9.5 KB

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  1. using System;
  2. using System.Xml;
  3. using Aitex.Core.Common.DeviceData;
  4. using Aitex.Core.RT.Device;
  5. using Aitex.Core.RT.Event;
  6. using Aitex.Core.RT.IOCore;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.RT.Tolerance;
  10. using Aitex.Core.Util;
  11. using Venus_RT.Devices.IODevices;
  12. using Aitex.Core.RT.Log;
  13. using Venus_Core;
  14. using Venus_RT.Modules;
  15. namespace Venus_RT.Devices
  16. {
  17. public class IoPressureControl : BaseDevice, IDevice
  18. {
  19. private bool _enableTolerance;
  20. public bool EnableTolerance
  21. {
  22. get
  23. {
  24. return _enableTolerance;
  25. }
  26. set
  27. {
  28. if (_enableTolerance != value)
  29. {
  30. LOG.Write(eEvent.EV_DEVICE_INFO, Module, value ? "Start monitor pressure stability" : "Stop monitor pressure stability");
  31. if (value)
  32. {
  33. _tolerance.Reset(_scAlarmTime.DoubleValue);
  34. }
  35. }
  36. _enableTolerance = value;
  37. }
  38. }
  39. public bool IsIndependentControl
  40. {
  41. get
  42. {
  43. if (_scIsIndependentControl != null)
  44. return _scIsIndependentControl.BoolValue;
  45. return false;
  46. }
  47. }
  48. public bool IsTvInstalled
  49. {
  50. get
  51. {
  52. if (_scTvInstalled != null)
  53. return _scTvInstalled.BoolValue;
  54. return false;
  55. }
  56. }
  57. public bool IsBoostPumpInstalled
  58. {
  59. get
  60. {
  61. if (_scIsBoostPumpInstalled != null)
  62. return _scIsBoostPumpInstalled.BoolValue;
  63. return false;
  64. }
  65. }
  66. public bool EnableBoostControl
  67. {
  68. get
  69. {
  70. return _diLogicProcessGasFlowing == null || _diLogicProcessGasFlowing.Value;
  71. }
  72. }
  73. //public readonly IoThrottleValve ThrottleValve;
  74. public readonly IoPressureMeter PressureGauge;
  75. public readonly IoPressureMeter ProcessGauge;
  76. public readonly IoPressureMeter ForelineGauge;
  77. public readonly IoPressureMeter LoadLockGauge;
  78. public readonly IoPressureMeter ESCHeGauge;
  79. public readonly IoPressureMeter ProcessHigh;
  80. public readonly IoPressureMeter ProcessLow;
  81. //public readonly IoBoostPump _boost;
  82. //public readonly IoPump DryPump;
  83. private readonly ToleranceChecker _tolerance = new ToleranceChecker();
  84. private readonly SCConfigItem _scAlarmRange;
  85. private readonly SCConfigItem _scAlarmTime;
  86. private readonly SCConfigItem _scIsIndependentControl;
  87. private readonly SCConfigItem _scIsBoostPumpInstalled;
  88. private readonly SCConfigItem _scTvInstalled;
  89. private readonly DIAccessor _diLogicProcessGasFlowing;
  90. private readonly R_TRIG _trigPressureGauge = new R_TRIG();
  91. private readonly R_TRIG _trigProcessGauge = new R_TRIG();
  92. private readonly R_TRIG _trigForelineGauge = new R_TRIG();
  93. private readonly R_TRIG _trigProcessHighGauge = new R_TRIG();
  94. private readonly R_TRIG _trigProcessLowGauge = new R_TRIG();
  95. private readonly R_TRIG _trigESCHePressureGauge = new R_TRIG();
  96. private readonly R_TRIG _trigLoadLockGaugePressureGauge = new R_TRIG();
  97. private readonly AOAccessor _aoMFPressureSP;
  98. // Properties
  99. //
  100. public double TargetPressure { get; set; }
  101. private string PressureOutOfTolerance = "PressureOutOfTolerance";
  102. // Constructor
  103. //
  104. public IoPressureControl(string module, XmlElement node, string ioModule = "")
  105. {
  106. base.Module = module;
  107. base.Name = node.GetAttribute("id");
  108. base.Display = node.GetAttribute("display");
  109. base.DeviceID = node.GetAttribute("schematicId");
  110. _diLogicProcessGasFlowing = ParseDiNode("diLogicProcessGasFlowing", node, ioModule);
  111. _scAlarmRange = SC.GetConfigItem($"{Module}.GasFlowPressureAlarmRange");
  112. _scAlarmTime = SC.GetConfigItem($"{Module}.GasFlowPressureAlarmTime");
  113. _scIsIndependentControl = SC.GetConfigItem($"{Module}.IsIndependentControl");
  114. _scIsBoostPumpInstalled = SC.GetConfigItem($"{Module}.EnableBoosterPump");
  115. _scTvInstalled = SC.GetConfigItem($"{Module}.EnableThrottleValve");
  116. //_enableTolerance = true;
  117. PressureGauge = ParseDeviceNode<IoPressureMeter>(Module, "pressureMeter", node);
  118. ProcessGauge = ParseDeviceNode<IoPressureMeter>(Module, "processMeter", node);
  119. ForelineGauge = ParseDeviceNode<IoPressureMeter>(Module, "forelineMeter", node);
  120. LoadLockGauge = ParseDeviceNode<IoPressureMeter>(Module, "loadlockMeter", node);
  121. ESCHeGauge = ParseDeviceNode<IoPressureMeter>(Module, "escHeGauge", node);
  122. ProcessHigh = ParseDeviceNode<IoPressureMeter>(Module, "processPressureHigh", node);
  123. ProcessLow = ParseDeviceNode<IoPressureMeter>(Module, "processPressureLow", node);
  124. _aoMFPressureSP = ParseAoNode("tmPressureSetPoint", node, ioModule);
  125. //DryPump = ParseDeviceNode<IoPump>(Module, "drypump", node);
  126. }
  127. public bool Initialize()
  128. {
  129. //DEVICE.Register($"{Module}.{Name}.{AITPressureControlOperation.SetBoostPressure}", _setBoostPressure);
  130. DEVICE.Register($"{Module}.{Name}.{AITPressureControlOperation.SetChamberPressure}", _setChamberPressure);
  131. OP.Subscribe($"{Module}.{Name}.{AITPressureControlOperation.SetChamberPressure}", (out string reason, int time, object[] param) =>
  132. {
  133. _setChamberPressure(out reason, 0, param);
  134. return true;
  135. });
  136. EV.Subscribe(new EventItem("Event", PressureOutOfTolerance, "Pressure Out Of Tolerance", EventLevel.Alarm, EventType.HostNotification));
  137. return true;
  138. }
  139. //public void StartPump(bool on)
  140. //{
  141. // this.DryPump?.Start(on);
  142. //}
  143. private bool? _setChamberPressure(out string reason, int time, object[] param)
  144. {
  145. double setpoint = Convert.ToDouble((string)param[0]);
  146. TargetPressure = setpoint;
  147. reason = $"Chamber pressure set to {setpoint} mTorr";
  148. return true;
  149. }
  150. public void Terminate()
  151. {
  152. }
  153. public void Monitor()
  154. {
  155. CheckTolerance();
  156. //JetChamber jetChamber = (JetChamber)(SC.GetValue<int>("System.ChamberSelect"));//Venus or Kepler
  157. //if (RtInstance.CurrentChamber == JetChamber.Venus)
  158. //{
  159. // _trigPressureGauge.CLK = PressureGauge.GaugeAlarm;
  160. // if (_trigPressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Chamber pressure gauge Alarm");
  161. // _trigLoadLockGaugePressureGauge.CLK = LoadLockGauge.GaugeAlarm;
  162. // if (_trigLoadLockGaugePressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "LoadLock Pressure Gauge Alarm");
  163. //}
  164. _trigProcessGauge.CLK = ProcessGauge.GaugeAlarm;
  165. if (_trigProcessGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process pressure gauge Alarm");
  166. _trigForelineGauge.CLK = ForelineGauge.GaugeAlarm;
  167. if (_trigForelineGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Foreline pressure gauge Alarm");
  168. _trigProcessHighGauge.CLK = ProcessHigh.GaugeAlarm;
  169. if (_trigProcessHighGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process High Gauge Alarm");
  170. _trigProcessLowGauge.CLK = ProcessLow.GaugeAlarm;
  171. if (_trigProcessLowGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "Process Low Gauge Alarm");
  172. if (ESCHeGauge != null)
  173. {
  174. _trigESCHePressureGauge.CLK = ESCHeGauge.GaugeAlarm;
  175. if (_trigESCHePressureGauge.Q) LOG.Write(eEvent.ERR_DEVICE_INFO, Module, "ESC He Pressure Gauge Alarm");
  176. }
  177. //MFPressureWrite();
  178. }
  179. public void CheckTolerance()
  180. {
  181. if (!EnableTolerance)
  182. return;
  183. //if (ThrottleValve != null && IsTvInstalled && ThrottleValve.PressureMode == PressureCtrlMode.TVPositionCtrl)
  184. // return;
  185. _tolerance.Monitor(PressureGauge.Value,
  186. TargetPressure - Math.Abs(_scAlarmRange.DoubleValue),
  187. TargetPressure + Math.Abs(_scAlarmRange.DoubleValue), _scAlarmTime.DoubleValue);
  188. if (_tolerance.Trig)
  189. {
  190. EV.Notify(PressureOutOfTolerance);
  191. LOG.Write(eEvent.ERR_DEVICE_INFO, Module, $"Gas Flow Pressure Alarm Out of range in {_scAlarmTime.Value:0} seconds");
  192. }
  193. }
  194. public void Reset()
  195. {
  196. _trigProcessGauge.RST = true;
  197. _trigPressureGauge.RST = true;
  198. _trigForelineGauge.RST = true;
  199. if (_scAlarmTime != null)
  200. {
  201. _tolerance.Reset(_scAlarmTime.DoubleValue);
  202. }
  203. }
  204. private void MFPressureWrite()
  205. {
  206. if (_aoMFPressureSP == null)
  207. return;
  208. _SetRealFloat(_aoMFPressureSP, 100);
  209. }
  210. }
  211. }