VenusDEInterlock.xml 30 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  3. <Action do="DO_Magnets_ON" value="true" tip="Magnets ON" tip.zh-CN="" tip.en-US="DO-80" >
  4. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  5. <Limit di="DI_Magnets_Coils_OT_Switch_Alarm" value="true" tip="Magnets Coils OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-90" />
  6. </Action>
  7. <Action do="DO_Slit_Door_Open_Enable" value="true" tip="Magnets ON" tip.zh-CN="" tip.en-US="DO-47" >
  8. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  9. </Action>
  10. <Action do="DO_PVN21" value="true" tip="PVN21" tip.zh-CN="" tip.en-US="DO-0" >
  11. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  12. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  13. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  14. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  15. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  16. </Action>
  17. <Action do="DO_PVN22" value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
  18. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  19. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  20. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  21. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  22. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  23. </Action>
  24. <Action do="DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
  25. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  26. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  27. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  28. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  29. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  30. </Action>
  31. <Action do="DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
  32. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  33. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  34. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  35. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  36. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  37. </Action>
  38. <Action do="DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
  39. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  40. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  41. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  42. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  43. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  44. </Action>
  45. <Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
  46. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  47. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  48. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  49. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  50. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  51. </Action>
  52. <Action do="DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
  53. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  54. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  55. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  56. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  57. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  58. </Action>
  59. <Action do="DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
  60. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  61. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  62. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  63. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  64. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  65. </Action>
  66. <Action do="DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
  67. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  68. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  69. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  70. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  71. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  72. </Action>
  73. <Action do="DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
  74. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  75. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  76. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  77. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  78. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  79. </Action>
  80. <Action do="DO_PV51" value="true" tip="PV51" tip.zh-CN="" tip.en-US="DO-57" >
  81. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  82. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  83. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  84. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  85. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  86. </Action>
  87. <Action do="DO_PV52" value="true" tip="PV52" tip.zh-CN="" tip.en-US="DO-58" >
  88. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  89. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  90. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  91. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  92. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  93. </Action>
  94. <Action do="DO_PV61" value="true" tip="PV61" tip.zh-CN="" tip.en-US="DO-59" >
  95. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  96. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  97. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  98. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  99. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  100. </Action>
  101. <Action do="DO_PV62" value="true" tip="PV62" tip.zh-CN="" tip.en-US="DO-60" >
  102. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  103. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  104. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  105. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  106. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  107. </Action>
  108. <Action do="DO_PV71" value="true" tip="PV71" tip.zh-CN="" tip.en-US="DO-61" >
  109. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  110. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  111. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  112. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  113. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  114. </Action>
  115. <Action do="DO_PV72" value="true" tip="PV72" tip.zh-CN="" tip.en-US="DO-62" >
  116. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  117. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  118. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  119. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  120. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  121. </Action>
  122. <Action do="DO_PV81" value="true" tip="PV81" tip.zh-CN="" tip.en-US="DO-63" >
  123. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  124. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  125. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  126. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  127. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  128. </Action>
  129. <Action do="DO_PV82" value="true" tip="PV82" tip.zh-CN="" tip.en-US="DO-64" >
  130. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  131. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  132. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  133. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  134. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  135. </Action>
  136. <Action do="DO_PV91" value="true" tip="PV91" tip.zh-CN="" tip.en-US="DO-65" >
  137. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  138. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  139. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  140. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  141. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  142. </Action>
  143. <Action do="DO_PV92" value="true" tip="PV92" tip.zh-CN="" tip.en-US="DO-66" >
  144. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  145. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  146. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  147. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  148. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  149. </Action>
  150. <Action do="DO_PVA1" value="true" tip="PVA1" tip.zh-CN="" tip.en-US="DO-67" >
  151. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  152. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  153. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  154. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  155. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  156. </Action>
  157. <Action do="DO_PVA2" value="true" tip="PVA2" tip.zh-CN="" tip.en-US="DO-68" >
  158. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  159. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  160. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  161. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  162. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  163. </Action>
  164. <Action do="DO_PVB1" value="true" tip="PVB1" tip.zh-CN="" tip.en-US="DO-69" >
  165. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  166. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  167. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  168. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  169. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  170. </Action>
  171. <Action do="DO_PVB2" value="true" tip="PVB2" tip.zh-CN="" tip.en-US="DO-70" >
  172. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  173. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  174. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  175. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  176. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  177. </Action>
  178. <Action do="DO_PVC1" value="true" tip="PVC1" tip.zh-CN="" tip.en-US="DO-71" >
  179. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  180. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  181. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  182. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  183. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  184. </Action>
  185. <Action do="DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
  186. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  187. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  188. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  189. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  190. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  191. <Limit do="DO_Fast_Pumping_Valve" value="false" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" />
  192. </Action>
  193. <Action do="DO_PVC2" value="true" tip="PVC2" tip.zh-CN="" tip.en-US="DO-72" >
  194. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  195. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  196. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  197. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  198. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  199. </Action>
  200. <Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
  201. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  202. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  203. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  204. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  205. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  206. </Action>
  207. <Action do="DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
  208. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  209. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  210. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  211. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  212. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  213. </Action>
  214. <Action do="DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
  215. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  216. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  217. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  218. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  219. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  220. </Action>
  221. <Action do="DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
  222. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  223. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  224. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  225. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  226. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  227. </Action>
  228. <Action do="DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
  229. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  230. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  231. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  232. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  233. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  234. </Action>
  235. <Action do="DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
  236. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  237. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  238. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  239. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  240. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  241. </Action>
  242. <Action do="DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
  243. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  244. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  245. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  246. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  247. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  248. </Action>
  249. <Action do="DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
  250. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  251. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  252. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  253. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  254. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  255. </Action>
  256. <Action do="DO_MFC9_Valve" value="true" tip="MFC9 Valve" tip.zh-CN="" tip.en-US="DO-52" >
  257. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  258. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  259. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  260. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  261. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  262. </Action>
  263. <Action do="DO_MFC10_Valve" value="true" tip="MFC10 Valve" tip.zh-CN="" tip.en-US="DO-53" >
  264. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  265. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  266. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  267. <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
  268. <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
  269. </Action>
  270. <Action do="DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
  271. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  272. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  273. </Action>
  274. <Action do="DO_PVHe2" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-20" >
  275. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  276. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  277. </Action>
  278. <Action do="DO_PVHe3" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-48" >
  279. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  280. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  281. </Action>
  282. <Action do="DO_PVHe4" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-74" >
  283. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  284. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  285. </Action>
  286. <Action do="DO_PVHe5" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-75" >
  287. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  288. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  289. </Action>
  290. <!--<Action do="DO_PVHe6" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-76" >
  291. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  292. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  293. </Action>-->
  294. <Action do="DO_Gas_Final_Valve" value="true" tip="Gas final valve" tip.zh-CN="" tip.en-US="DO-21" >
  295. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  296. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  297. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  298. </Action>
  299. <Action do="DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-21" >
  300. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  301. <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
  302. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  303. <Limit do="DO_N2_Valve" value="false" tip="N2 Valve" tip.zh-CN="" tip.en-US="DI-12" />
  304. </Action>
  305. <Action do="DO_PM_Liner_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
  306. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  307. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  308. <Limit di="DI_TM_ROB_NOT_EXTEND_TO_PM" value="true" tip="TM ARM NOT EXTEND TO PM" tip.zh-CN="" tip.en-US="DI-58" />
  309. <Limit di="DI_Lid_Closed" value="true" tip="TM Slit Door Closed" tip.zh-CN="" tip.en-US="DI-0" />
  310. </Action>
  311. <Action do="DO_PM_Liner_Door_Close" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-25" >
  312. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  313. <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
  314. <Limit di="DI_TM_ROB_NOT_EXTEND_TO_PM" value="true" tip="TM ARM NOT EXTEND TO PM" tip.zh-CN="" tip.en-US="DI-58" />
  315. <Limit di="DI_Lid_Closed" value="true" tip="TM Slit Door Closed" tip.zh-CN="" tip.en-US="DI-0" />
  316. </Action>
  317. <Action do="DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
  318. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  319. </Action>
  320. <Action do="DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
  321. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  322. </Action>
  323. <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-29" >
  324. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  325. </Action>
  326. <Action do="DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
  327. <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
  328. </Action>
  329. <Action do="DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
  330. <Limit di="DI_PM_VAC_Switch" value="true" tip="DI PM Vacuum SW" tip.zh-CN="" tip.en-US="DI-2" />
  331. </Action>
  332. </Interlock>