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- <?xml version="1.0" encoding="utf-8"?>
- <Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
- <Action do="DO_Magnets_ON" value="true" tip="Magnets ON" tip.zh-CN="" tip.en-US="DO-80" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Magnets_Coils_OT_Switch_Alarm" value="true" tip="Magnets Coils OT Switch Alarm" tip.zh-CN="" tip.en-US="DI-90" />
- </Action>
- <Action do="DO_Slit_Door_Open_Enable" value="true" tip="Magnets ON" tip.zh-CN="" tip.en-US="DO-47" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- </Action>
-
- <Action do="DO_PVN21" value="true" tip="PVN21" tip.zh-CN="" tip.en-US="DO-0" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVN22" value="true" tip="PVN22" tip.zh-CN="" tip.en-US="DO-1" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV11" value="true" tip="PV11" tip.zh-CN="" tip.en-US="DO-2" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV12" value="true" tip="PV12" tip.zh-CN="" tip.en-US="DO-3" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV21" value="true" tip="PV21" tip.zh-CN="" tip.en-US="DO-4" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV22" value="true" tip="PV22" tip.zh-CN="" tip.en-US="DO-5" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV31" value="true" tip="PV31" tip.zh-CN="" tip.en-US="DO-6" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV32" value="true" tip="PV32" tip.zh-CN="" tip.en-US="DO-7" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV41" value="true" tip="PV41" tip.zh-CN="" tip.en-US="DO-8" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV42" value="true" tip="PV42" tip.zh-CN="" tip.en-US="DO-9" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV51" value="true" tip="PV51" tip.zh-CN="" tip.en-US="DO-57" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV52" value="true" tip="PV52" tip.zh-CN="" tip.en-US="DO-58" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV61" value="true" tip="PV61" tip.zh-CN="" tip.en-US="DO-59" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV62" value="true" tip="PV62" tip.zh-CN="" tip.en-US="DO-60" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV71" value="true" tip="PV71" tip.zh-CN="" tip.en-US="DO-61" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV72" value="true" tip="PV72" tip.zh-CN="" tip.en-US="DO-62" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV81" value="true" tip="PV81" tip.zh-CN="" tip.en-US="DO-63" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV82" value="true" tip="PV82" tip.zh-CN="" tip.en-US="DO-64" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV91" value="true" tip="PV91" tip.zh-CN="" tip.en-US="DO-65" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PV92" value="true" tip="PV92" tip.zh-CN="" tip.en-US="DO-66" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVA1" value="true" tip="PVA1" tip.zh-CN="" tip.en-US="DO-67" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVA2" value="true" tip="PVA2" tip.zh-CN="" tip.en-US="DO-68" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVB1" value="true" tip="PVB1" tip.zh-CN="" tip.en-US="DO-69" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVB2" value="true" tip="PVB2" tip.zh-CN="" tip.en-US="DO-70" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVC1" value="true" tip="PVC1" tip.zh-CN="" tip.en-US="DO-71" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_N2_Valve" value="true" tip="N2 Valve" tip.zh-CN="" tip.en-US="DO-10" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- <Limit do="DO_Fast_Pumping_Valve" value="false" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-23" />
- </Action>
- <Action do="DO_PVC2" value="true" tip="PVC2" tip.zh-CN="" tip.en-US="DO-72" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC1_Valve" value="true" tip="MFC1 Valve" tip.zh-CN="" tip.en-US="DO-11" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC2_Valve" value="true" tip="MFC2 Valve" tip.zh-CN="" tip.en-US="DO-12" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC3_Valve" value="true" tip="MFC3 Valve" tip.zh-CN="" tip.en-US="DO-13" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC4_Valve" value="true" tip="MFC4 Valve" tip.zh-CN="" tip.en-US="DO-14" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC5_Valve" value="true" tip="MFC5 Valve" tip.zh-CN="" tip.en-US="DO-15" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC6_Valve" value="true" tip="MFC6 Valve" tip.zh-CN="" tip.en-US="DO-16" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC7_Valve" value="true" tip="MFC7 Valve" tip.zh-CN="" tip.en-US="DO-17" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC8_Valve" value="true" tip="MFC8 Valve" tip.zh-CN="" tip.en-US="DO-18" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC9_Valve" value="true" tip="MFC9 Valve" tip.zh-CN="" tip.en-US="DO-52" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_MFC10_Valve" value="true" tip="MFC10 Valve" tip.zh-CN="" tip.en-US="DO-53" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Gas_Box_Door_Switch" value="true" tip="DI Gas Box Door SW" tip.zh-CN="" tip.en-US="DI-51" />
- <Limit di="DI_Gas_Box_Pressure_Switch" value="true" tip="DI Gas Box Pressure SW" tip.zh-CN="" tip.en-US="DI-52" />
- </Action>
- <Action do="DO_PVHe1" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-19" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_PVHe2" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-20" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_PVHe3" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-48" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_PVHe4" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-74" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_PVHe5" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-75" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
-
- <!--<Action do="DO_PVHe6" value="true" tip="PVHe1" tip.zh-CN="" tip.en-US="DO-76" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>-->
- <Action do="DO_Gas_Final_Valve" value="true" tip="Gas final valve" tip.zh-CN="" tip.en-US="DO-21" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_Fast_Pumping_Valve" value="true" tip="Fast Pumping Valve" tip.zh-CN="" tip.en-US="DO-21" >
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_Liner_Door_Open_Position" value="true" tip="DI Slit Door Close POS" tip.zh-CN="" tip.en-US="DI-11" />
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit do="DO_N2_Valve" value="false" tip="N2 Valve" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
-
- <Action do="DO_PM_Liner_Door_Open" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-24" >
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_TM_ROB_NOT_EXTEND_TO_PM" value="true" tip="TM ARM NOT EXTEND TO PM" tip.zh-CN="" tip.en-US="DI-58" />
- <Limit di="DI_Lid_Closed" value="true" tip="TM Slit Door Closed" tip.zh-CN="" tip.en-US="DI-0" />
- </Action>
- <Action do="DO_PM_Liner_Door_Close" value="true" tip="Slit Door Open" tip.zh-CN="" tip.en-US="DO-25" >
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- <Limit di="DI_Lid_Closed" value="true" tip="DI Lid Closed" tip.zh-CN="" tip.en-US="DI-0" />
- <Limit di="DI_TM_ROB_NOT_EXTEND_TO_PM" value="true" tip="TM ARM NOT EXTEND TO PM" tip.zh-CN="" tip.en-US="DI-58" />
- <Limit di="DI_Lid_Closed" value="true" tip="TM Slit Door Closed" tip.zh-CN="" tip.en-US="DI-0" />
- </Action>
-
- <Action do="DO_Lift_Pin_Up" value="true" tip="Lift Pin Up" tip.zh-CN="" tip.en-US="DO-26" >
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_Lift_Pin_Down" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-27" >
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_Turbo_Pump_Pumping_Valve" value="true" tip="Lift Pin Down" tip.zh-CN="" tip.en-US="DO-29" >
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
-
- <Action do="DO_Turbo_Pump_Purge_Valve" value="true" tip="Turbo Pump Purge Valve" tip.zh-CN="" tip.en-US="DO-30" >
- <Limit di="DI_CDA_Pressure_Switch" value="true" tip="DI CDA Pressure" tip.zh-CN="" tip.en-US="DI-12" />
- </Action>
- <Action do="DO_Guage_Valve" value="true" tip="Guage Valve" tip.zh-CN="" tip.en-US="DO-31" >
- <Limit di="DI_PM_VAC_Switch" value="true" tip="DI PM Vacuum SW" tip.zh-CN="" tip.en-US="DI-2" />
- </Action>
- </Interlock>
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