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VenusEntity
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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il y a 1 an |
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MFHomeRoutine.cs
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ed38ed5c95
1.check load function bugs fix
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il y a 1 an |
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MFLeakCheckRoutine.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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il y a 1 an |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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MFPMPickRoutine.cs
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2de3872723
duplicated wafer function.
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il y a 1 an |
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MFPMPlaceRoutine.cs
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2de3872723
duplicated wafer function.
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il y a 1 an |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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MFPMSwapRoutine.cs
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2de3872723
duplicated wafer function.
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il y a 1 an |
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MFPickRoutine.cs
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2de3872723
duplicated wafer function.
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il y a 1 an |
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MFPlaceRoutine.cs
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2de3872723
duplicated wafer function.
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il y a 1 an |
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MFPumpRoutine.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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il y a 1 an |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
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MFSwapRoutine.cs
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2de3872723
duplicated wafer function.
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il y a 1 an |
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MFVentRoutine.cs
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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TMEntity.cs
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af631c4aaa
1.添加RF Calibration功能
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il y a 1 an |
sangwq
2de3872723
duplicated wafer function.