LLEntity.cs 14 KB

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  1. using System;
  2. using Aitex.Core.Util;
  3. using Aitex.Core.RT.Fsm;
  4. using Aitex.Core.RT.Log;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.SubstrateTrackings;
  7. using Venus_RT.Modules.TM;
  8. using Venus_RT.Devices;
  9. using Venus_Core;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.OperationCenter;
  12. using Aitex.Core.RT.Device;
  13. using Aitex.Core.RT.SCCore;
  14. namespace Venus_RT.Modules
  15. {
  16. class LLEntity : Entity, IEntity, IModuleEntity
  17. {
  18. public enum LLStatus
  19. {
  20. Not_Ready,
  21. Ready_For_TM,
  22. Ready_For_EFEM,
  23. }
  24. public enum STATE
  25. {
  26. Unknown,
  27. Init,
  28. Initializing,
  29. Idle,
  30. Error,
  31. Pumping,
  32. Venting,
  33. Purging,
  34. LeakCheck,
  35. Prepare_For_TM,
  36. Prepare_For_EFEM,
  37. Ready_For_TM,
  38. Ready_For_EFEM,
  39. }
  40. public enum MSG
  41. {
  42. Home,
  43. Online,
  44. Offline,
  45. Pump,
  46. Vent,
  47. Purge,
  48. CyclePurge,
  49. LeakCheck,
  50. Prepare_TM,
  51. Prepare_EFEM,
  52. TM_Exchange_Ready,
  53. EFEM_Exchange_Ready,
  54. Error,
  55. Abort,
  56. }
  57. public ModuleName Module { get; private set; }
  58. public LLStatus Status { get; private set; }
  59. public bool Check(int msg, out string reason, params object[] args)
  60. {
  61. throw new NotImplementedException();
  62. }
  63. public bool IsIdle
  64. {
  65. get { return fsm.State == (int)STATE.Idle; }
  66. }
  67. public bool IsError
  68. {
  69. get { return fsm.State == (int)STATE.Error; }
  70. }
  71. public bool IsInit
  72. {
  73. get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
  74. }
  75. public bool IsBusy
  76. {
  77. get { return !IsInit && !IsError && !IsIdle; }
  78. }
  79. public bool IsOnline { get; internal set; }
  80. private readonly JetTM _JetTM;
  81. private readonly MFPumpRoutine _pumpingRoutine;
  82. private readonly MFVentRoutine _ventingRoutine;
  83. private readonly MFLeakCheckRoutine _leakCheckRoutine;
  84. private readonly MFPurgeRoutine _purgeRoutine;
  85. public LLEntity(ModuleName module)
  86. {
  87. Module = module;
  88. //_JetTM = Singleton<JetTM>.Instance;
  89. _JetTM= DEVICE.GetDevice<JetTM>("TM");
  90. _pumpingRoutine = new MFPumpRoutine(_JetTM, Module);
  91. _ventingRoutine = new MFVentRoutine(_JetTM, Module);
  92. _leakCheckRoutine = new MFLeakCheckRoutine(_JetTM, Module);
  93. _purgeRoutine = new MFPurgeRoutine(_JetTM, Module);
  94. var soltCount= SC.GetValue<int>($"{module.ToString()}.SlotNumber");
  95. WaferManager.Instance.SubscribeLocation(Module, soltCount);
  96. InitFsmMap();
  97. }
  98. protected override bool Init()
  99. {
  100. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  101. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  102. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  103. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
  104. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  105. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
  106. DATA.Subscribe($"{Module}.FsmState", () => (((STATE)fsm.State).ToString()));
  107. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()));
  108. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()));
  109. return true;
  110. }
  111. private void InitFsmMap()
  112. {
  113. fsm = new StateMachine<LLEntity>(Module.ToString(), (int)STATE.Init, 50);
  114. fsm.EnableRepeatedMsg(true);
  115. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_TM, fnEnterTMReady, FSM_MSG.NONE, fnExitTMReady);
  116. EnterExitTransition<STATE, FSM_MSG>(STATE.Ready_For_EFEM, fnEnterEFEMReady, FSM_MSG.NONE, fnExitEFEMReady);
  117. //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  118. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  119. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  120. AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
  121. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  122. // Home
  123. Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
  124. Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
  125. Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
  126. //vent sequence
  127. Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
  128. Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
  129. Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
  130. //Pump sequence
  131. Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
  132. Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
  133. Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
  134. // Purge sequence
  135. Transition(STATE.Idle, MSG.Purge, FnStartPurge, STATE.Purging);
  136. Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
  137. Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
  138. // Leak check sequence
  139. Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.LeakCheck);
  140. Transition(STATE.LeakCheck, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
  141. Transition(STATE.LeakCheck, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
  142. // Prepare TM Transfer
  143. Transition(STATE.Idle, MSG.Prepare_TM, FnStartPrepareTM, STATE.Prepare_For_TM);
  144. Transition(STATE.Prepare_For_TM, FSM_MSG.TIMER, FnPreparaTMTimeout, STATE.Ready_For_TM);
  145. Transition(STATE.Ready_For_TM, MSG.TM_Exchange_Ready, null, STATE.Idle);
  146. // Prepare EFEM Transfer
  147. Transition(STATE.Idle, MSG.Prepare_EFEM, FnStartPrepareEFEM, STATE.Prepare_For_EFEM);
  148. Transition(STATE.Prepare_For_EFEM, FSM_MSG.TIMER, FnPrepareEFEMTimeout, STATE.Ready_For_EFEM);
  149. Transition(STATE.Ready_For_EFEM, MSG.EFEM_Exchange_Ready, null, STATE.Idle);
  150. Running = true;
  151. }
  152. public int Invoke(string function, params object[] args)
  153. {
  154. switch (function)
  155. {
  156. case "Home":
  157. CheckToPostMessage((int)MSG.Home);
  158. return (int)MSG.Home;
  159. }
  160. return (int)FSM_MSG.NONE;
  161. }
  162. public bool CheckAcked(int msg)
  163. {
  164. return fsm.CheckExecuted(msg);
  165. }
  166. public bool CheckToPostMessage(int msg, params object[] args)
  167. {
  168. if (!fsm.FindTransition(fsm.State, msg))
  169. {
  170. LOG.Write(eEvent.WARN_FSM_WARN, Module, $"{Module} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  171. return false;
  172. }
  173. Running = true;
  174. fsm.PostMsg(msg, args);
  175. return true;
  176. }
  177. private bool fnEnterTMReady(object[] param)
  178. {
  179. Status = LLStatus.Ready_For_TM;
  180. return true;
  181. }
  182. private bool fnExitTMReady(object[] param)
  183. {
  184. Status = LLStatus.Not_Ready;
  185. return true;
  186. }
  187. private bool fnEnterEFEMReady(object[] param)
  188. {
  189. Status = LLStatus.Ready_For_EFEM;
  190. return true;
  191. }
  192. private bool fnExitEFEMReady(object[] param)
  193. {
  194. Status = LLStatus.Not_Ready;
  195. return true;
  196. }
  197. private bool fnMonitor(object[] param)
  198. {
  199. _debugRoutine();
  200. return true;
  201. }
  202. private bool fnError(object[] param)
  203. {
  204. IsOnline = false;
  205. return true;
  206. }
  207. private bool fnOnline(object[] param)
  208. {
  209. IsOnline = true;
  210. return true;
  211. }
  212. private bool fnOffline(object[] param)
  213. {
  214. IsOnline = false;
  215. return true;
  216. }
  217. private bool fnAbort(object[] param)
  218. {
  219. return true;
  220. }
  221. private bool fnHome(object[] param)
  222. {
  223. return true;
  224. }
  225. private bool fnHoming(object[] param)
  226. {
  227. return true;
  228. }
  229. private bool FnStartVent(object[] param)
  230. {
  231. return _ventingRoutine.Start() == RState.Running;
  232. }
  233. private bool FnVentTimeout(object[] param)
  234. {
  235. RState ret = _ventingRoutine.Monitor();
  236. if (ret == RState.Failed || ret == RState.Timeout)
  237. {
  238. PostMsg(MSG.Error);
  239. return false;
  240. }
  241. return ret == RState.End;
  242. }
  243. private bool FnAbortVent(object[] param)
  244. {
  245. _ventingRoutine.Abort();
  246. return true;
  247. }
  248. private bool FnStartPump(object[] param)
  249. {
  250. return _pumpingRoutine.Start() == RState.Running;
  251. }
  252. private bool FnPumpTimeout(object[] param)
  253. {
  254. RState ret = _pumpingRoutine.Monitor();
  255. if (ret == RState.Failed || ret == RState.Timeout)
  256. {
  257. PostMsg(MSG.Error);
  258. return false;
  259. }
  260. return ret == RState.End;
  261. }
  262. private bool FnAbortPump(object[] param)
  263. {
  264. _pumpingRoutine.Abort();
  265. return true;
  266. }
  267. private bool FnStartPurge(object[] param)
  268. {
  269. return _purgeRoutine.Start() == RState.Running;
  270. }
  271. private bool FnPurgeTimeout(object[] param)
  272. {
  273. RState ret = _purgeRoutine.Monitor();
  274. if (ret == RState.Failed || ret == RState.Timeout)
  275. {
  276. PostMsg(MSG.Error);
  277. return false;
  278. }
  279. return ret == RState.End;
  280. }
  281. private bool FnAbortPurge(object[] param)
  282. {
  283. _purgeRoutine.Abort();
  284. return true;
  285. }
  286. private bool FnStartLeakCheck(object[] param)
  287. {
  288. return _leakCheckRoutine.Start() == RState.Running;
  289. }
  290. private bool FnLeakCheckTimeout(object[] param)
  291. {
  292. RState ret = _leakCheckRoutine.Monitor();
  293. if (ret == RState.Failed || ret == RState.Timeout)
  294. {
  295. PostMsg(MSG.Error);
  296. return false;
  297. }
  298. return ret == RState.End;
  299. }
  300. private bool FnAbortLeakCheck(object[] param)
  301. {
  302. _leakCheckRoutine.Abort();
  303. return true;
  304. }
  305. private bool FnStartPrepareTM(object[] param)
  306. {
  307. return _pumpingRoutine.Start() == RState.Running;
  308. }
  309. private bool FnPreparaTMTimeout(object[] param)
  310. {
  311. RState ret = _pumpingRoutine.Monitor();
  312. if (ret == RState.Failed || ret == RState.Timeout)
  313. {
  314. PostMsg(MSG.Error);
  315. return false;
  316. }
  317. return ret == RState.End;
  318. }
  319. private bool FnStartPrepareEFEM(object[] param)
  320. {
  321. return _ventingRoutine.Start() == RState.Running;
  322. }
  323. private bool FnPrepareEFEMTimeout(object[] param)
  324. {
  325. RState ret = _ventingRoutine.Monitor();
  326. if (ret == RState.Failed || ret == RState.Timeout)
  327. {
  328. PostMsg(MSG.Error);
  329. return false;
  330. }
  331. return ret == RState.End;
  332. }
  333. private void _debugRoutine()
  334. {
  335. int flag = 0;
  336. // Test Home routine
  337. if (flag == 1)
  338. {
  339. PostMsg(MSG.Home);
  340. }
  341. else if (flag == 2)
  342. {
  343. PostMsg(MSG.Vent);
  344. }
  345. else if (flag == 3)
  346. {
  347. PostMsg(MSG.Pump);
  348. }
  349. //else if (flag == 4)
  350. //{
  351. // PostMsg(MSG.PumpLoadLock);
  352. //}
  353. //else if (flag == 5)
  354. //{
  355. // PostMsg(MSG.VentLoadLock);
  356. //}
  357. //else if (flag == 6)
  358. //{
  359. // PostMsg(MSG.PurgeLoadLock);
  360. //}
  361. //else if (flag == 7)
  362. //{
  363. // PostMsg(MSG.LaunchPump);
  364. //}
  365. //else if (flag == 8)
  366. //{
  367. // PostMsg(MSG.LaunchTurboPump);
  368. //}
  369. //else if (flag == 9)
  370. //{
  371. // PostMsg(MSG.LoadLockLeakCheck);
  372. //}
  373. else if (flag == 10)
  374. {
  375. PostMsg(MSG.CyclePurge);
  376. }
  377. //else if (flag == 11)
  378. //{
  379. // PostMsg(MSG.GasLinePurge);
  380. //}
  381. //else if (flag == 12)
  382. //{
  383. // PostMsg(MSG.LeakCheck);
  384. //}
  385. //else if (flag == 13)
  386. //{
  387. // PostMsg(MSG.GasLeakCheck);
  388. //}
  389. //else if (flag == 14)
  390. //{
  391. // PostMsg(MSG.LLPlace);
  392. //}
  393. //else if (flag == 15)
  394. //{
  395. // PostMsg(MSG.LLPick);
  396. //}
  397. //else if (flag == 16)
  398. //{
  399. // PostMsg(MSG.RunRecipe, "7777");
  400. //}
  401. //else if (flag == 17)
  402. //{
  403. // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  404. //}
  405. }
  406. }
  407. }