| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Venus_RT.Devices;using MECF.Framework.Common.Jobs;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using System;using MECF.Framework.Common.DBCore;namespace Venus_RT.Modules.TM{    class MFPickRoutine : ModuleRoutineBase, IRoutine    {        private enum PickStep        {            WaitModuleReady,            ModulePrepare,            WaitPressreDifference,            OpenSlitDoor,            Picking,            QueryAwc,            CloseSlitDoor,            NotifyDone,        }        private readonly JetTM _JetTM;        private readonly ITransferRobot _robot;        private int _pickingTimeout = 120 * 1000;        private ModuleName _targetModule;        private LLEntity _llModule;        int _targetSlot;        Hand _hand;        private DateTime _starttime;        private bool _queryAwc;        private int _autoVentOptInWafer = 0;        private int _autoVentOptOutWafer = 4;        private SequenceLLInOutPath _sequencePattern = SequenceLLInOutPath.DInDOut;        private bool _bAutoMode = true;        double maxPressureDifference;        public MFPickRoutine(JetTM tm, ITransferRobot robot) :base(ModuleName.TMRobot)        {            _JetTM = tm;            _robot = robot;            Name = "Pick";            if (SC.GetValue<int>($"TM.QueryAWCOption") == 1 || SC.GetValue<int>($"TM.QueryAWCOption") == 3)                _queryAwc = true;            else                _queryAwc = false;            maxPressureDifference = SC.GetValue<double>("System.TMLLMaxPressureDifference");        }        public RState Start(params object[] objs)        {            _starttime = DateTime.Now;            if (!_robot.IsHomed)            {                LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");                return RState.Failed;            }            var pickItem = (Queue<MoveItem>)objs[0];            _targetModule = pickItem.Peek().SourceModule;            _targetSlot = pickItem.Peek().SourceSlot;            _hand = pickItem.Peek().RobotHand;            if (ModuleHelper.IsLoadLock(_targetModule) && ModuleHelper.IsInstalled(_targetModule))            {                _llModule = Singleton<RouteManager>.Instance.GetLL(_targetModule);            }            else            {                LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");                return RState.Failed;            }            if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");                return RState.Failed;            }                        if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))            {                LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");                return RState.Failed;            }            Reset();            _pickingTimeout = SC.GetValue<int>("TM.PickTimeout") * 1000;            _autoVentOptInWafer = SC.GetValue<int>("TM.LLAutoVentInWaferOpt");            _autoVentOptOutWafer = SC.GetValue<int>("TM.LLAutoVentOutWaferOpt");            _sequencePattern = Singleton<RouteManager>.Instance.LLInOutPath;            _bAutoMode = Singleton<RouteManager>.Instance.IsAutoMode;            return Runner.Start(Module, $"Pick from {_targetModule}");        }        public RState Monitor()        {            Runner.Wait(PickStep.WaitModuleReady,     () => _llModule.IsIdle,     _delay_60s)                .Run(PickStep.ModulePrepare,          ModulePrepare,              IsModulePrepareReady)                .Wait(PickStep.WaitPressreDifference, TMLLPressureIsOK,           _delay_60s)                .Run(PickStep.OpenSlitDoor,           OpenSlitDoor,               IsSlitDoorOpen)                .Run(PickStep.Picking,                Picking,                    WaitPickDone)                .Run(PickStep.QueryAwc,               QueryAwc,                   WaitQueryDoneAndRecord)                .Run(PickStep.CloseSlitDoor,          CloseSlitDoor,              IsSlitDoorClosed)                .End(PickStep.NotifyDone,             NotifyLLDone,               _delay_50ms);                     return Runner.Status;        }        private bool ModulePrepare()        {            _llModule.PostMsg(LLEntity.MSG.Prepare_TM);            return true;        }        private bool TMLLPressureIsOK()        {            double llPressure=0;            if (_targetModule == ModuleName.LLA)            {                llPressure = _JetTM.LLAPressure;            }            else if(_targetModule == ModuleName.LLB)            {                llPressure = _JetTM.LLBPressure;            }            if (Math.Abs((llPressure - _JetTM.ChamberPressure)) < maxPressureDifference)            {                return true;            }            else            {                return false;            }        }        private bool IsModulePrepareReady()        {            return _llModule.Status == LLEntity.LLStatus.Ready_For_TM;        }        private bool OpenSlitDoor()        {            return _JetTM.TurnMFSlitDoor(_targetModule, true, out _);        }        private bool CloseSlitDoor()        {            return _JetTM.TurnMFSlitDoor(_targetModule, false, out _);        }        private bool IsSlitDoorOpen()        {            if (_targetModule == ModuleName.LLA)                 return _JetTM.IsLLASlitDoorOpen;            else                 return _JetTM.IsLLBSlitDoorOpen;        }        private bool IsSlitDoorClosed()        {            if (_targetModule == ModuleName.LLA)                return _JetTM.IsLLASlitDoorClosed;            else                return _JetTM.IsLLBSlitDoorClosed;        }        private bool Picking()        {            return _robot.Pick(_targetModule, _targetSlot, _hand);        }        private bool WaitPickDone()        {            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                //WaferManager.Instance.WaferMoved(ModuleName.TM, (int)_hand, _targetModule, _targetSlot);                WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);                return true;            }            else            {                Runner.Stop($"TM Robot Picking failed, {_robot.Status}");                return true;            }        }        private bool QueryAwc()        {            if (!_queryAwc)                return true;            if (_robot.QueryAwc())                return true;            else                return false;        }        private bool WaitQueryDoneAndRecord()        {            if (!_queryAwc)                return true;            if (_robot.Status == RState.Running)            {                return false;            }            else if (_robot.Status == RState.End)            {                //已经move后的数据                string _origin_module = $"LP{WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginStation}";                int _origin_slot = WaferManager.Instance.GetWafer(_targetModule, _targetSlot).OriginSlot;                //查询完毕 插入数据                OffsetDataRecorder.RecordOffsetData(                    Guid.NewGuid().ToString(),                    _targetModule, _targetSlot,                    ModuleName.TMRobot, 0,                    _origin_module, _origin_slot,                    _hand, RobotArmPan.None,                    _robot.Offset_X, _robot.Offset_Y, _robot.Offset_D,                    _starttime, DateTime.Now);                return true;            }            else            {                Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");                return true;            }        }        private bool NotifyLLDone()        {            bool bAutoVent = false;            var waferStatus = _llModule.GetWaferProcessStatus();            if (_bAutoMode)            {                if (((_sequencePattern == SequenceLLInOutPath.AInBOut && _targetModule == ModuleName.LLA) ||                     (_sequencePattern == SequenceLLInOutPath.BInAOut && _targetModule == ModuleName.LLB)) &&                      waferStatus.unprocessed <= _autoVentOptInWafer)                {                    bAutoVent = true;                }                else if (((_sequencePattern == SequenceLLInOutPath.AInBOut && _targetModule == ModuleName.LLB) ||                          (_sequencePattern == SequenceLLInOutPath.BInAOut && _targetModule == ModuleName.LLA)) &&                           waferStatus.processed >= _autoVentOptOutWafer)                {                    bAutoVent = true;                }                else if (_sequencePattern == SequenceLLInOutPath.DInDOut &&                    waferStatus.processed >= _autoVentOptOutWafer &&                    waferStatus.unprocessed <= _autoVentOptInWafer)                {                    bAutoVent = true;                }            }            LOG.Write(eEvent.INFO_TM, Module, $"NotifyLLDone() => {_targetModule}, Sequence Pattern{_sequencePattern}, unprocessed wafer:{waferStatus.unprocessed}, processed wafer: {waferStatus.processed},bAutoVent  = {bAutoVent}, Config Option:{_autoVentOptInWafer},{_autoVentOptOutWafer}");            _llModule.PostMsg(bAutoVent ? LLEntity.MSG.AutoVent : LLEntity.MSG.TM_Exchange_Ready);            return true;        }        public void Abort()        {            _robot.Halt();        }    }}
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