| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260 | using Aitex.Core.RT.Routine;using Aitex.Core.RT.SCCore;using Aitex.Sorter.Common;using Venus_RT.Devices;using MECF.Framework.Common.Jobs;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using Venus_Core;using Aitex.Core.RT.Log;using Aitex.Core.Util;using MECF.Framework.Common.Schedulers;using System.Collections.Generic;using Venus_RT.Devices.EFEM;namespace Venus_RT.Modules.EFEM{    class EfemSwapRoutine : ModuleRoutineBase, IRoutine    {        private enum SwapStep        {            WaitModuleReady,            ModulePrepare,            OpenSlitDoor,            WaitEFEMIdle,            MoveWafer,            WaferMoved,            WaitPLCReady,            CloseSlitDoor,            NotifyDone,        }        private readonly EfemBase _efem;        private int _moveTimeout = 20 * 1000;        private ModuleName _targetModule;        private LLEntity _llModule;        private TMEntity _tmModule;        Queue<MoveItem> _actionList = new Queue<MoveItem>();        MoveItem _currentAction;        private int _actionCount = 0;        private int _autoPumpOptInWafer = 4;        private int _autoPumpOptOutWafer = 0;        private SequenceLLInOutPath _sequencePattern = SequenceLLInOutPath.DInDOut;        private bool _bAutoMode = true;        public EfemSwapRoutine(EfemBase efem) : base(ModuleName.EfemRobot)        {            _efem = efem;            Name = "Swap";        }        public RState Start(params object[] objs)        {            if (!_efem.IsHomed)            {                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"EFEM is not homed, please home it first");                return RState.Failed;            }            _actionList.Clear();            foreach (var item in (Queue<MoveItem>)objs[0])            {                _actionList.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, item.DestinationModule, item.DestinationSlot, item.RobotHand));            }            if (!WaferManager.Instance.CheckDuplicatedWafersBeforeMove(_actionList))                return RState.Failed;            var firtItem = _actionList.Peek();            if (ModuleHelper.IsLoadLock(firtItem.SourceModule))                _targetModule = firtItem.SourceModule;            else if (ModuleHelper.IsLoadLock(firtItem.DestinationModule))                _targetModule = firtItem.DestinationModule;            else            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Invalid move parameter: {firtItem.SourceModule},{firtItem.SourceSlot + 1} => {firtItem.DestinationModule},{firtItem.DestinationSlot + 1} ");                return RState.Failed;            }            _llModule = Singleton<RouteManager>.Instance.GetLL(_targetModule);            if (_llModule == null)            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Invalid Loadlock: {_targetModule}, maybe not installed");                return RState.Failed;            }            _tmModule = Singleton<RouteManager>.Instance.GetTM();            if (_tmModule == null)            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Get TM Entity failed.");                return RState.Failed;            }            _moveTimeout = SC.GetValue<int>("EFEM.MotionTimeout") * 1000;            _autoPumpOptInWafer = SC.GetValue<int>("EFEM.LLAutoPumpInWaferOpt");            _autoPumpOptOutWafer = SC.GetValue<int>("EFEM.LLAutoPumpOutWaferOpt");            _sequencePattern = Singleton<RouteManager>.Instance.LLInOutPath;            _bAutoMode = Singleton<RouteManager>.Instance.IsAutoMode;            _actionCount = _actionList.Count;            return Runner.Start(Module, $"EFEM Swap with {_targetModule}");        }        public RState Monitor()        {            Runner.Wait(SwapStep.WaitModuleReady,   () => _llModule.IsIdle,        _delay_3m)                .Run(SwapStep.ModulePrepare,        ModulePrepare,                 IsModulePrepareReady)                .Run(SwapStep.OpenSlitDoor,         OpenSlitDoor,                  IsSlitDoorOpen,       _delay_30s)                .LoopStart(SwapStep.WaitEFEMIdle,   loopName(),                    _actionCount, NullFun, WaitRobotReady, _delay_60s)                .LoopRun(SwapStep.MoveWafer,        MoveWafer,                     WaitWaferMoved, _moveTimeout + _delay_1s)                .LoopEnd(SwapStep.WaferMoved,       NullFun,                       _delay_5ms)                .Wait(SwapStep.WaitPLCReady,        PLCIsReadyOK)                .Run(SwapStep.CloseSlitDoor,        CloseSlitDoor,                 IsSlitDoorClosed, _delay_30s)                .End(SwapStep.NotifyDone,           NotifyLLDone,                  _delay_50ms);            return Runner.Status;        }        private bool ModulePrepare()        {            _llModule.PostMsg(LLEntity.MSG.Prepare_EFEM);            return true;        }        private string loopName()        {            return "EFEM Swap";        }        private bool IsModulePrepareReady()        {            return _llModule.Status == LLEntity.LLStatus.Ready_For_EFEM && _llModule.IsATM;        }        private bool OpenSlitDoor()        {            return _tmModule.TurnEFEMSlitDoor(_targetModule, true, out _);        }        private bool CloseSlitDoor()        {            return _tmModule.TurnEFEMSlitDoor(_targetModule, false, out _);        }        private bool IsSlitDoorOpen()        {            return _tmModule.IsLLSlitDoorOpen(_targetModule);        }        private bool IsSlitDoorClosed()        {            return _tmModule.IsLLSlitDoorClosed(_targetModule);        }        private bool WaitRobotReady()        {            return _efem.Status == RState.End;        }        private bool VerifyWaferExistence(MoveItem item)        {            if (WaferManager.Instance.CheckHasWafer(item.DestinationModule, item.DestinationSlot))            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Cannot move wafer as desitination {item.DestinationModule},{item.DestinationSlot} already a wafer: ");                return false;            }            if (WaferManager.Instance.CheckNoWafer(item.SourceModule, item.SourceSlot))            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Cannot move wafer as source {item.SourceModule}, {item.SourceSlot} has no wafer");                return false;            }            return true;        }        private bool MoveWafer()        {            if (_actionList.Count <= 0)            {                Runner.Stop("no action");                return true;            }            _currentAction = _actionList.Dequeue();            if (!VerifyWaferExistence(_currentAction))                return false;            var wafer = WaferManager.Instance.GetWafer(_currentAction.SourceModule, _currentAction.SourceSlot);            LOG.Write(eEvent.EV_EFEM_ROBOT, ModuleName.EfemRobot, $"{wafer.WaferOrigin} will be move from {_currentAction.SourceModule} {_currentAction.SourceSlot + 1}  to {_currentAction.DestinationModule} {_currentAction.DestinationSlot + 1}");            if (ModuleHelper.IsLoadLock(_currentAction.SourceModule) && ModuleHelper.IsEFEMRobot(_currentAction.DestinationModule))            {                //if (ModuleHelper.IsLoadLock(_targetModule))                //{                //    _llModule.PostMsg(LLEntity.MSG.Transfer_EFEM_SlotInfo, _currentAction.DestinationSlot);                //}                return _efem.Pick(_currentAction.SourceModule, _currentAction.SourceSlot, (Hand)_currentAction.DestinationSlot);            }            else if (ModuleHelper.IsEFEMRobot(_currentAction.SourceModule) && ModuleHelper.IsLoadLock(_currentAction.DestinationModule))            {                return _efem.Place(_currentAction.DestinationModule, _currentAction.DestinationSlot, (Hand)_currentAction.SourceSlot);            }            else            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, ModuleName.EfemRobot, $"Invalid move parameter, source:{_currentAction.SourceModule},{_currentAction.SourceSlot}, destination: {_currentAction.DestinationModule}, {_currentAction.DestinationSlot}");                return false;            }        }        private bool WaitWaferMoved()        {            if (_efem.Status == RState.Running)            {                if (Runner.StepElapsedMS > _moveTimeout)                {                    WaferManager.Instance.CreateDuplicatedWafer(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);                    Runner.Stop($"EFEM Robot moving wafer from {_currentAction.SourceModule}.{_currentAction.SourceSlot + 1} to {_currentAction.DestinationModule}.{_currentAction.DestinationSlot + 1}, {_moveTimeout}ms");                    return true;                }                return false;            }            else if (_efem.Status == RState.End)            {                WaferManager.Instance.WaferMoved(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);                return true;            }            else            {                WaferManager.Instance.CreateDuplicatedWafer(_currentAction.SourceModule, _currentAction.SourceSlot, _currentAction.DestinationModule, _currentAction.DestinationSlot);                Runner.Stop($"EFEM Robot moving wafer failed, {_efem.Status}");                return true;            }        }        private bool PLCIsReadyOK()        {            return ModuleHelper.IsLoadLock(_targetModule) ? _tmModule.EFEMRobotNotExtendModule(_targetModule) : true;        }        private bool NotifyLLDone()        {            _llModule.PostMsg(LLEntity.MSG.EFEM_Exchange_Ready);            return true;        }        public void Abort()        {            //_efem.Halt();        }    }}
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