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- using System;
- using System.Collections.Generic;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using Venus_Core;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_RT.Devices;
- using Venus_RT.Modules.TM;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.OperationCenter;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.CommonData;
- namespace Venus_RT.Modules
- {
- class TMEntity : Entity, IModuleEntity
- {
- public enum STATE
- {
- Unknown,
- Init,
- Initializing,
- Idle,
- Error,
- Pumping,
- Venting,
- Purging,
- Leakchecking,
- Picking,
- Placing,
- Swaping,
- PMPicking,
- PMPlacing,
- PMSwaping,
- Aligning,
- Mapping,
- Extending,
- Retracting,
- Swapping,
- Gotoing,
- }
- public enum MSG
- {
- Home,
- Online,
- Offline,
- Pump,
- Vent,
- Purge,
- CyclePurge,
- LeakCheck,
- Pick,
- Place,
- Swap,
- DoublePick,
- DoublePlace,
- DoubleSwap,
- PMPick,
- PMPlace,
- PMSwap,
- Extend,
- Retract,
- Error,
- Abort,
- }
- public bool IsIdle
- {
- get { return fsm.State == (int)STATE.Idle; }
- }
- public bool IsError
- {
- get { return fsm.State == (int)STATE.Error; }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- public bool IsOnline { get; internal set; }
- private readonly JetTM _tm;
- private readonly ITransferRobot _robot;
- private readonly MFHomeRoutine _homeRoutine;
- private readonly MFPumpRoutine _pumpingRoutine;
- private readonly MFVentRoutine _ventingRoutine;
- private readonly MFLeakCheckRoutine _leakCheckRoutine;
- private readonly MFPurgeRoutine _purgeRoutine;
- private readonly MFPickRoutine _pickRoutine;
- private readonly MFPlaceRoutine _placeRoutine;
- private readonly MFSwapRoutine _swapRoutine;
- private readonly MFPMPickRoutine _pmPickRoutine;
- private readonly MFPMPlaceRoutine _pmPlaceRoutine;
- private readonly MFPMSwapRoutine _pmSwapRoutine;
- public TMEntity()
- {
- _tm = Singleton<JetTM>.Instance;
- _robot = new SIASUNRobot();
- _homeRoutine = new MFHomeRoutine(_tm, _robot);
- _pickRoutine = new MFPickRoutine(_tm, _robot);
- _placeRoutine = new MFPlaceRoutine(_tm, _robot);
- _swapRoutine = new MFSwapRoutine(_tm, _robot);
- _pmPickRoutine = new MFPMPickRoutine(_tm, _robot);
- _pmPlaceRoutine = new MFPMPlaceRoutine(_tm, _robot);
- _pmSwapRoutine = new MFPMSwapRoutine(_tm, _robot);
- _pumpingRoutine = new MFPumpRoutine(_tm, ModuleName.TM);
- _ventingRoutine = new MFVentRoutine(_tm, ModuleName.TM);
- _leakCheckRoutine = new MFLeakCheckRoutine(_tm, ModuleName.TM);
- _purgeRoutine = new MFPurgeRoutine(_tm, ModuleName.TM);
- WaferManager.Instance.SubscribeLocation(ModuleName.TM, 2);
- InitFsmMap();
- }
- protected override bool Init()
- {
- OP.Subscribe("TM.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
- OP.Subscribe($"TM.{RtOperation.LLPick}", (cmd, args) => CheckToPostMessage((int)MSG.Pick, args));
- OP.Subscribe($"TM.{RtOperation.LLPlace}", (cmd, args) => CheckToPostMessage((int)MSG.Place, args));
- OP.Subscribe($"TM.{RtOperation.PMPick}", (cmd, args) => CheckToPostMessage((int)MSG.PMPick, args));
- OP.Subscribe($"TM.{RtOperation.PMPlace}", (cmd, args) => CheckToPostMessage((int)MSG.PMPlace, args));
- OP.Subscribe($"TM.{RtOperation.Extend}", (cmd, args) => CheckToPostMessage((int)MSG.Extend, args));
- OP.Subscribe($"TM.{RtOperation.Retract}", (cmd, args) => CheckToPostMessage((int)MSG.Retract, args));
- //OP.Subscribe($"TM.{RtOperation.LLPlace}", (cmd, args) => CheckToPostMessage((int)MSG.Place, args));
- OP.Subscribe($"TM.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
- OP.Subscribe($"TM.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
- OP.Subscribe($"TM.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck));
- OP.Subscribe($"TM.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.Purge));
- OP.Subscribe($"TM.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
- DATA.Subscribe("TM.FsmState", () => (((STATE)fsm.State).ToString()));
- DATA.Subscribe("TM.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()));
- DATA.Subscribe("TM.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()));
- DATA.Subscribe("TM.RobotMoveAction.ArmTarget", () => _robot.TMRobotMoveInfo.ArmTarget.ToString()) ;
- DATA.Subscribe("TM.RobotMoveAction.BladeTarget", () => _robot.TMRobotMoveInfo.BladeTarget);
- DATA.Subscribe("TM.RobotMoveAction.RobotAction", () => _robot.TMRobotMoveInfo.Action.ToString());
- return true;
- }
- private void InitFsmMap()
- {
- fsm = new StateMachine<TMEntity>("TM", (int)STATE.Init, 50);
- //AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
- AnyStateTransition(MSG.Error, fnError, STATE.Error);
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Offline, fnOffline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
- // Home
- Transition(STATE.Initializing, FSM_MSG.TIMER, fnHoming, STATE.Idle);
- Transition(STATE.Idle, FSM_MSG.TIMER, fnMonitor, STATE.Idle);
- Transition(STATE.Init, FSM_MSG.TIMER, fnMonitor, STATE.Init);
- // Vent sequence
- Transition(STATE.Idle, MSG.Vent, FnStartVent, STATE.Venting);
- Transition(STATE.Venting, FSM_MSG.TIMER, FnVentTimeout, STATE.Idle);
- Transition(STATE.Venting, MSG.Abort, FnAbortVent, STATE.Idle);
- // Pump sequence
- Transition(STATE.Idle, MSG.Pump, FnStartPump, STATE.Pumping);
- Transition(STATE.Pumping, FSM_MSG.TIMER, FnPumpTimeout, STATE.Idle);
- Transition(STATE.Pumping, MSG.Abort, FnAbortPump, STATE.Idle);
- // Purge sequence
- Transition(STATE.Idle, MSG.CyclePurge, FnStartPurge, STATE.Purging);
- Transition(STATE.Purging, FSM_MSG.TIMER, FnPurgeTimeout, STATE.Idle);
- Transition(STATE.Purging, MSG.Abort, FnAbortPurge, STATE.Idle);
- // Leak check sequence
- Transition(STATE.Idle, MSG.LeakCheck, FnStartLeakCheck, STATE.Leakchecking);
- Transition(STATE.Leakchecking, FSM_MSG.TIMER, FnLeakCheckTimeout, STATE.Idle);
- Transition(STATE.Leakchecking, MSG.Abort, FnAbortLeakCheck, STATE.Idle);
- // Pick wafer from LL sequence
- Transition(STATE.Idle, MSG.Pick, FnStartPick, STATE.Picking);
- Transition(STATE.Picking, FSM_MSG.TIMER, FnPickTimeout, STATE.Idle);
- Transition(STATE.Picking, MSG.Abort, FnAbortPick, STATE.Idle);
- // Place wafer to LL sequence
- Transition(STATE.Idle, MSG.Place, FnStartPlace, STATE.Placing);
- Transition(STATE.Placing, FSM_MSG.TIMER, FnPlaceTimeout, STATE.Idle);
- Transition(STATE.Placing, MSG.Abort, FnAbortPlace, STATE.Idle);
- // Swap wafer with LL sequence
- Transition(STATE.Idle, MSG.Swap, FnStartSwap, STATE.Swaping);
- Transition(STATE.Swaping, FSM_MSG.TIMER, FnSwapTimeout, STATE.Idle);
- Transition(STATE.Swaping, MSG.Abort, FnAbortSwap, STATE.Idle);
- // Pick wafer from PM sequence
- Transition(STATE.Idle, MSG.PMPick, FnStartPMPick, STATE.PMPicking);
- Transition(STATE.PMPicking, FSM_MSG.TIMER, FnPMPickTimeout, STATE.Idle);
- Transition(STATE.PMPicking, MSG.Abort, FnAbortPMPick, STATE.Idle);
- // Place wafer to PM sequence
- Transition(STATE.Idle, MSG.PMPlace, FnStartPMPlace, STATE.PMPlacing);
- Transition(STATE.PMPlacing, FSM_MSG.TIMER, FnPMPlaceTimeout, STATE.Idle);
- Transition(STATE.PMPlacing, MSG.Abort, FnAbortPMPlace, STATE.Idle);
- // Swap wafer with PM sequence
- Transition(STATE.Idle, MSG.PMSwap, FnStartPMSwap, STATE.PMSwaping);
- Transition(STATE.PMSwaping, FSM_MSG.TIMER, FnPMSwapTimeout, STATE.Idle);
- Transition(STATE.PMSwaping, MSG.Abort, FnAbortPMSwap, STATE.Idle);
- Running = true;
- }
- private bool fnMonitor(object[] param)
- {
- _debugRoutine();
- return true;
- }
- private bool fnError(object[] param)
- {
- IsOnline = false;
- return true;
- }
- private bool fnOnline(object[] param)
- {
- return true;
- }
- private bool fnOffline(object[] param)
- {
- IsOnline = false;
- return true;
- }
- private bool fnAbort(object[] param)
- {
- _robot.Halt();
- return true;
- }
- private bool fnHome(object[] param)
- {
- return _homeRoutine.Start() == RState.Running;
- }
- private bool fnHoming(object[] param)
- {
- RState ret = _homeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnStartVent(object[] param)
- {
- return _ventingRoutine.Start() == RState.Running ;
- }
- private bool FnVentTimeout(object[] param)
- {
- RState ret = _ventingRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- _ventingRoutine.Abort();
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortVent(object[] param)
- {
- _ventingRoutine.Abort();
- return true;
- }
- private bool FnStartPump(object[] param)
- {
- return _pumpingRoutine.Start() == RState.Running;
- }
- private bool FnPumpTimeout(object[] param)
- {
- RState ret = _pumpingRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- _pumpingRoutine.Abort();
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPump(object[] param)
- {
- _pumpingRoutine.Abort();
- return true;
- }
- private bool FnStartPurge(object[] param)
- {
- return _purgeRoutine.Start() == RState.Running;
- }
- private bool FnPurgeTimeout(object[] param)
- {
- RState ret = _purgeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPurge(object[] param)
- {
- _purgeRoutine.Abort();
- return true;
- }
- private bool FnStartLeakCheck(object[] param)
- {
- return _leakCheckRoutine.Start() == RState.Running;
- }
- private bool FnLeakCheckTimeout(object[] param)
- {
- RState ret = _leakCheckRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortLeakCheck(object[] param)
- {
- _leakCheckRoutine.Abort();
- return true;
- }
- private bool FnStartPick(object[] param)
- {
- return _pickRoutine.Start(param) == RState.Running;
- }
- private bool FnPickTimeout(object[] param)
- {
- RState ret = _pickRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPick(object[] param)
- {
- _pickRoutine.Abort();
- return true;
- }
- private bool FnStartPlace(object[] param)
- {
- return _placeRoutine.Start(param) == RState.Running;
- }
- private bool FnPlaceTimeout(object[] param)
- {
- RState ret = _placeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPlace(object[] param)
- {
- _placeRoutine.Abort();
- return true;
- }
- private bool FnStartSwap(object[] param)
- {
- return _swapRoutine.Start(param) == RState.Running;
- }
- private bool FnSwapTimeout(object[] param)
- {
- RState ret = _swapRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortSwap(object[] param)
- {
- _swapRoutine.Abort();
- return true;
- }
- private bool FnStartPMPick(object[] param)
- {
- return _pmPickRoutine.Start(param) == RState.Running;
- }
- private bool FnPMPickTimeout(object[] param)
- {
- RState ret = _pmPickRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPMPick(object[] param)
- {
- _pmPickRoutine.Abort();
- return true;
- }
- private bool FnStartPMPlace(object[] param)
- {
- return _pmPlaceRoutine.Start(param) == RState.Running;
- }
- private bool FnPMPlaceTimeout(object[] param)
- {
- RState ret = _pmPlaceRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPMPlace(object[] param)
- {
- _pmPlaceRoutine.Abort();
- return true;
- }
- private bool FnStartPMSwap(object[] param)
- {
- return _pmSwapRoutine.Start(param) == RState.Running;
- }
- private bool FnPMSwapTimeout(object[] param)
- {
- RState ret = _pmSwapRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortPMSwap(object[] param)
- {
- _pmSwapRoutine.Abort();
- return true;
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- reason = "";
- return true;
- }
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "Home":
- CheckToPostMessage((int)MSG.Home);
- return (int)MSG.Home;
- }
- return (int)FSM_MSG.NONE;
- }
- public bool CheckAcked(int msg)
- {
- return fsm.CheckExecuted(msg);
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- LOG.Write(eEvent.WARN_FSM_WARN, ModuleName.TM, $"TM is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- Running = true;
- fsm.PostMsg(msg, args);
- return true;
- }
- private void _debugRoutine()
- {
- int flag = 0;
- // Test Home routine
- if (flag == 1)
- {
- PostMsg(MSG.Home);
- }
- else if (flag == 2)
- {
- PostMsg(MSG.Vent);
- }
- else if (flag == 3)
- {
- PostMsg(MSG.Pump);
- }
- else if(flag == 4)
- {
- PostMsg(MSG.Pick, ModuleName.LLA, 0, 0);
- }
- else if(flag == 5)
- {
- PostMsg(MSG.Place, ModuleName.LLA, 0, 0);
- }
- else if(flag == 6)
- {
- Queue<MoveItem> items = new Queue<MoveItem>();
- items.Enqueue(new MoveItem(ModuleName.TM, 0, ModuleName.LLA, 0, Hand.Blade1));
- items.Enqueue(new MoveItem(ModuleName.TM, 1, ModuleName.LLA, 1, Hand.Blade2));
- items.Enqueue(new MoveItem(ModuleName.LLA, 0, ModuleName.TM, 0, Hand.Blade1));
- items.Enqueue(new MoveItem(ModuleName.LLA, 1, ModuleName.TM, 1, Hand.Blade2));
- PostMsg(MSG.Swap,items);
- }
- else if(flag == 7)
- {
- PostMsg(MSG.PMPick, ModuleName.PMA, 0, 0);
- }
- else if(flag == 8)
- {
- PostMsg(MSG.PMPlace, ModuleName.PMA, 0, 0);
- }
- else if(flag == 9)
- {
- PostMsg(MSG.PMSwap, ModuleName.PMA, 0, 0, 0, 0);
- }
- //else if (flag == 4)
- //{
- // PostMsg(MSG.PumpLoadLock);
- //}
- //else if (flag == 5)
- //{
- // PostMsg(MSG.VentLoadLock);
- //}
- //else if (flag == 6)
- //{
- // PostMsg(MSG.PurgeLoadLock);
- //}
- //else if (flag == 7)
- //{
- // PostMsg(MSG.LaunchPump);
- //}
- //else if (flag == 8)
- //{
- // PostMsg(MSG.LaunchTurboPump);
- //}
- //else if (flag == 9)
- //{
- // PostMsg(MSG.LoadLockLeakCheck);
- //}
- //else if (flag == 10)
- //{
- // PostMsg(MSG.CyclePurge);
- //}
- //else if (flag == 11)
- //{
- // PostMsg(MSG.GasLinePurge);
- //}
- //else if (flag == 12)
- //{
- // PostMsg(MSG.LeakCheck);
- //}
- //else if (flag == 13)
- //{
- // PostMsg(MSG.GasLeakCheck);
- //}
- //else if (flag == 14)
- //{
- // PostMsg(MSG.LLPlace);
- //}
- //else if (flag == 15)
- //{
- // PostMsg(MSG.LLPick);
- //}
- //else if (flag == 16)
- //{
- // PostMsg(MSG.RunRecipe, "7777");
- //}
- //else if (flag == 17)
- //{
- // PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
- //}
- }
- }
- }
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