PumpDownRoutine.cs 4.3 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class PumpDownRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum PumpStep
  12. {
  13. kDelay_2s,
  14. kCloseISOValve,
  15. kSoftPump,
  16. kFastPump,
  17. kPVHe2,
  18. kISOValve,
  19. kTurboN2Purge,
  20. kVATValve,
  21. kOpenTurboPumpPurgeGasFinal,
  22. kFinalStep,
  23. kEnd,
  24. }
  25. //private int _ventTime;
  26. private int _pump_delay = 5000;
  27. private int _roughPumpPressure = 75000;
  28. private int _vHe2FlowPressure = 200;
  29. private int _basePressure = 10;
  30. public PumpDownRoutine(JetPM chamber) : base(chamber)
  31. {
  32. Name = "PumpDown";
  33. }
  34. public RState Start(params object[] objs)
  35. {
  36. if (CheckLid() &&
  37. CheckSlitDoor())
  38. {
  39. Reset();
  40. _chamber.CloseValves();
  41. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.RoughPumpDownPressure") * 1000;
  42. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  43. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  44. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  45. _chamber.OpenValve(ValveType.PVN22, true);
  46. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  47. _chamber.TurnPendulumValve(false);
  48. return Runner.Start(Module, Name);
  49. }
  50. return RState.Failed;
  51. }
  52. public RState Monitor()
  53. {
  54. Runner.Delay((int)PumpStep.kDelay_2s, _delay_2s)
  55. .Run((int)PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  56. .Run((int)PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  57. .Run((int)PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  58. .Run((int)PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  59. .Run((int)PumpStep.kISOValve, OpenISOValve, _delay_2s)
  60. .Run((int)PumpStep.kVATValve, OpenVATValve, _delay_5s)
  61. .Run((int)PumpStep.kOpenTurboPumpPurgeGasFinal, () =>
  62. {
  63. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  64. _chamber.OpenValve(ValveType.GasFinal, true);
  65. return true;
  66. }, 3000)
  67. .Run((int)PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  68. .End((int)PumpStep.kEnd, NullFun, _delay_1s);
  69. return Runner.Status;
  70. }
  71. private bool OpenFastPump()
  72. {
  73. _chamber.OpenValve(ValveType.SoftPump, false);
  74. _chamber.OpenValve(ValveType.FastPump, true);
  75. return true;
  76. }
  77. private bool OpenHe2Valve()
  78. {
  79. _chamber.OpenValve(ValveType.FastPump, false);
  80. _chamber.OpenValve(ValveType.PVHe2, true);
  81. return true;
  82. }
  83. private bool OpenISOValve()
  84. {
  85. _chamber.OpenValve(ValveType.PVHe2, false);
  86. // ISO Valve
  87. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  88. _chamber.OpenValve(ValveType.Guage, true);
  89. return true;
  90. }
  91. private bool OpenVATValve()
  92. {
  93. return _chamber.TurnPendulumValve(true);
  94. }
  95. private bool FinalStep()
  96. {
  97. _chamber.OpenValve(ValveType.Guage, true);
  98. //2023/04/25修改
  99. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  100. //_chamber.OpenValve(ValveType.GasFinal, true);
  101. return true;
  102. }
  103. public void Abort()
  104. {
  105. CloseAllValves();
  106. }
  107. }
  108. }