PMLeakCheckRoutine.cs 5.6 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using System.Diagnostics;
  6. using Venus_Core;
  7. using System;
  8. using Venus_Unity;
  9. namespace Venus_RT.Modules.PMs
  10. {
  11. class PMLeakCheckRoutine : PMRoutineBase, IRoutine
  12. {
  13. private enum LeakCheckStep
  14. {
  15. kPumpToBasePressure,
  16. kPumpingDelay,
  17. kLeakCheckDelay,
  18. kEnd,
  19. }
  20. public double LeakRate { get; private set; }
  21. private int _basePressure = 100;
  22. private int _leakcheckPumpTime = 180;
  23. private int _leakcheckHoldTime = 300;
  24. private double _startPressure = 0;
  25. private double _endPressure = 0;
  26. private double _leakRate = 30.0;
  27. private double _leakCheckBasePressure = 1;
  28. Stopwatch _leakCheckTimer = new Stopwatch();
  29. PMLeakCheckResult pMLeakCheckResult;
  30. Stopwatch _routineTimer=new Stopwatch();
  31. public PMLeakCheckRoutine(JetPM chamber) : base(chamber)
  32. {
  33. Name = "PM Leakcheck";
  34. }
  35. public RState Start(params object[] objs)
  36. {
  37. if (CheckLidLoadLock() &&
  38. CheckSlitDoor() &&
  39. CheckTurboPump())
  40. {
  41. Reset();
  42. _basePressure = SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  43. //_leakcheckPumpTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckPumpingTime");
  44. //_leakcheckHoldTime = SC.GetValue<int>($"{Module}.Pump.LeakCheckHoldTime");
  45. //_leakRate = SC.GetValue<double>($"{Module}.Pump.LeakRate");
  46. _leakcheckPumpTime = (int)(objs[0]);
  47. _leakcheckHoldTime = (int)(objs[1]);
  48. _leakRate = (double)(objs[2]);
  49. _leakCheckBasePressure = SC.GetValue<double>($"{Module}.Pump.LeakCheckBasePressure");
  50. PreSetValves();
  51. pMLeakCheckResult = new PMLeakCheckResult();
  52. pMLeakCheckResult.CheckDate = DateTime.Now.ToString("yyyyMMddHHmm");
  53. pMLeakCheckResult.CheckMode = "ChamberOnly";
  54. _routineTimer.Restart();
  55. return Runner.Start(Module, Name);
  56. }
  57. return RState.Failed;
  58. }
  59. public RState Monitor()
  60. {
  61. Runner.Wait((int)LeakCheckStep.kPumpToBasePressure, PumpingToBasePressure)
  62. .Run((int)LeakCheckStep.kPumpingDelay, HOFs.WrapAction(_chamber.OpenValve, ValveType.GasFinal, false), PumpingDelay)
  63. .Run((int)LeakCheckStep.kLeakCheckDelay, StartLeakCheck, _leakcheckHoldTime * 1000)
  64. .End((int)LeakCheckStep.kEnd, CalcLeakCheckResult, _delay_50ms);
  65. return Runner.Status;
  66. }
  67. public void Abort()
  68. {
  69. CloseAllValves();
  70. }
  71. private bool PumpingToBasePressure()
  72. {
  73. if (_chamber.ChamberPressure <= _basePressure)
  74. {
  75. _leakCheckTimer.Restart();
  76. return true;
  77. }
  78. else
  79. return false;
  80. }
  81. private bool PumpingDelay()
  82. {
  83. if(_leakCheckTimer.ElapsedMilliseconds >= _leakcheckPumpTime * 1000)
  84. {
  85. if (_chamber.ChamberPressure <= _leakCheckBasePressure)
  86. return true;
  87. else
  88. {
  89. Runner.Stop($"PM Leakcheck失败, 腔体压力 [{_chamber.ChamberPressure}]mTor, 高于LeakCheck Base Pressure: [{_leakCheckBasePressure}] mTor");
  90. }
  91. }
  92. return false;
  93. }
  94. private bool StartLeakCheck()
  95. {
  96. _startPressure = _chamber.ChamberPressure;
  97. pMLeakCheckResult.StartPressure = _startPressure;
  98. Notify($"PM 压力开始值 {_startPressure} mt");
  99. _chamber.TurnPendulumValve(false);
  100. return true;
  101. }
  102. private bool CalcLeakCheckResult()
  103. {
  104. _endPressure = _chamber.ChamberPressure;
  105. pMLeakCheckResult.EndPressure = _endPressure;
  106. LeakRate = (_endPressure - _startPressure) * 60.0 / _leakcheckHoldTime;
  107. pMLeakCheckResult.LeakRate = LeakRate;
  108. if (LeakRate < _leakRate)
  109. {
  110. Notify($"PM Leakcheck完成, 压力结束值: {_startPressure} mt, 漏率:{LeakRate} mt/min");
  111. pMLeakCheckResult.Result = "Success";
  112. }
  113. else
  114. {
  115. Stop($"PM Leakcheck失败, 腔体漏率 [{LeakRate}] mt/min, 高于 [{_leakRate}] mt/min");
  116. pMLeakCheckResult.Result = "Fail";
  117. }
  118. _chamber.OpenValve(ValveType.GasFinal, true);
  119. _chamber.TurnPendulumValve(true);
  120. pMLeakCheckResult.LeakCheckTime = (int)_routineTimer.ElapsedMilliseconds / 1000;
  121. SerializeHelper.Instance.WriteToJsonFile<PMLeakCheckResult>(pMLeakCheckResult, $"LeakCheck/PM/{DateTime.Now.ToString("yyyyMMddHHmm")}.json");
  122. return true;
  123. }
  124. private void PreSetValves()
  125. {
  126. _chamber.OpenValve(ValveType.FastPump, false);
  127. _chamber.OpenValve(ValveType.SoftPump, false);
  128. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  129. _chamber.OpenValve(ValveType.Guage, true);
  130. _chamber.OpenValve(ValveType.GasFinal, true);
  131. _chamber.TurnPendulumValve(true);
  132. }
  133. }
  134. }