EfemEntity.cs 39 KB

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  1. using System;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.DataCenter;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Fsm;
  6. using Aitex.Core.RT.OperationCenter;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.Utilities;
  9. using Aitex.Sorter.Common;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.Schedulers;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using Venus_Core;
  14. using Venus_RT;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.YASKAWA;
  17. using Venus_RT.Devices.EFEM;
  18. using Venus_RT.Modules.LPs;
  19. namespace Venus_RT.Modules
  20. {
  21. class EfemEntity : Entity, IEntity, IModuleEntity
  22. {
  23. private int _bigWafer = 0;
  24. private int _midWafer = 0;
  25. private int _smallWafer = 0;
  26. public enum STATE
  27. {
  28. Unknown, // 0
  29. Initializing, // 1
  30. Idle, // 2
  31. Error, // 3
  32. Picking, // 4
  33. Placing, // 5
  34. Aligning, // 6
  35. Mapping, // 7
  36. Init, // 8
  37. Orgshing, // 9
  38. Lifting, // 10
  39. InitingAL, // 11
  40. InitingRB, // 12
  41. Extending, // 13
  42. Retracting, // 14
  43. //SettingLamp, // 15
  44. Swapping,
  45. Gotoing,
  46. Gripping,
  47. Ungripping,
  48. Fliping,
  49. }
  50. public enum MSG
  51. {
  52. HomeAll, // 0
  53. Pick, // 1
  54. Place, // 2
  55. Align, // 3
  56. ActionDone, // 4
  57. RecHwMsg, // 5
  58. MoveCmd, // 6
  59. //LED, // 7
  60. Recover, // 8
  61. Goto, // 9
  62. Error, // 10
  63. Online, // 11
  64. CommReady, // 12
  65. Lift, // 13
  66. HomeAL, // 14
  67. HomeRB, // 15
  68. Extend, // 16
  69. Retract, // 17
  70. PMLiftPinUp, // 18
  71. PMLiftPinDown, // 19
  72. TurnOffBuzzer,
  73. //SwitchOnBuzzerAndRed,
  74. Abort,
  75. Map,
  76. ToInit,
  77. Cool,
  78. PickAndPlace,
  79. Grip,
  80. Ungrip,
  81. Flip,
  82. LiftActionDone,
  83. }
  84. public enum EfemType
  85. {
  86. FutureEfem = 1,
  87. JetEfem = 2,
  88. BrooksEFEM = 3,
  89. }
  90. public bool Check(int msg, out string reason, params object[] args)
  91. {
  92. throw new NotImplementedException();
  93. }
  94. // Fields
  95. //
  96. private readonly string Name;
  97. private readonly Efem _efem;
  98. private readonly LoadPortModule[] _lpms = new LoadPortModule[2];
  99. private readonly EfemType _efemType;
  100. public Efem EfemDevice => _efem;
  101. public EfemType EFEMType => _efemType;
  102. // Constructor
  103. //
  104. public EfemEntity()
  105. {
  106. _smallWafer = SC.GetValue<int>($"System.SmallWafer");
  107. _midWafer = SC.GetValue<int>($"System.MidWafer");
  108. _bigWafer = SC.GetValue<int>($"System.BigWafer");
  109. _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");
  110. _efem = new Efem();
  111. Name = ModuleName.EFEM.ToString();
  112. InitFsmMap();
  113. }
  114. public void NotifyLP(ModuleName mod, LoadportEntity.MSG msg)
  115. {
  116. _lpms[mod - ModuleName.LP1].PostMsg(msg);
  117. }
  118. public void NotifyLPError(ModuleName mod )
  119. {
  120. _lpms[mod - ModuleName.LP1].PostMsg(LoadportEntity.MSG.ActionDone);
  121. //_lpms[mod - ModuleName.LP1]..OnError();
  122. }
  123. protected override bool Init()
  124. {
  125. _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);
  126. _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);
  127. _lpms[0].Initialize();
  128. _lpms[1].Initialize();
  129. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; });
  130. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; });
  131. OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.TurnOffBuzzer); return true; });
  132. //OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.SwitchOnBuzzerAndRed}", (cmd, args) => { PostMsg(MSG.SwitchOnBuzzerAndRed); return true; });
  133. OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  134. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { PostMsg(MSG.Pick, args[0], args[1], args[3], args[2]); return true; });
  135. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { PostMsg(MSG.Place, args[0], args[1], args[3], args[2]); return true; });
  136. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Extend}", (cmd, args) => { PostMsg(MSG.Extend, args[0], args[1], args[2]); return true; });
  137. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Retract}", (cmd, args) => { PostMsg(MSG.Retract, args[0], args[1]); return true; });
  138. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  139. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB); return true; });
  140. OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>
  141. {
  142. bool isGrip = ((string)args[0]).ToLower() == "on";
  143. PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]);
  144. return true;
  145. });
  146. //OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });
  147. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });
  148. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner2); return true; });
  149. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling1); return true; });
  150. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Cooling2); return true; });
  151. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner1, args[0]); return true; });
  152. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Aligner2, args[0]); return true; });
  153. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling1, args[0]); return true; });
  154. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Align}", (cmd, args) => { PostMsg(MSG.Align, ModuleName.Cooling2, args[0]); return true; });
  155. OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner1); return true; });
  156. OP.Subscribe($"{ModuleName.Aligner2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Aligner2); return true; });
  157. OP.Subscribe($"{ModuleName.Cooling1}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling1); return true; });
  158. OP.Subscribe($"{ModuleName.Cooling2}.{EfemOperation.Lift}", (cmd, args) => { PostMsg(MSG.Lift, ModuleName.Cooling2); return true; });
  159. DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString());
  160. DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  161. DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage);
  162. DATA.Subscribe($"{Name}.SmallWafer", () => _smallWafer);
  163. DATA.Subscribe($"{Name}.BigWafer", () => _bigWafer);
  164. DATA.Subscribe($"{Name}.MidWafer", () => _midWafer);
  165. return true;
  166. }
  167. private void InitFsmMap()
  168. {
  169. fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);
  170. fsm.EnableRepeatedMsg(true);
  171. AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  172. AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
  173. //AnyStateTransition(MSG.LED, fnSetLED, STATE.SettingLamp);
  174. AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME);
  175. //AnyStateTransition(MSG.SwitchOnBuzzerAndRed, fnSwitchOnBuzzerAndRed, FSM_STATE.SAME);
  176. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  177. AnyStateTransition(MSG.Error, fnError, STATE.Error);
  178. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  179. AnyStateTransition(MSG.Abort, fnAbortRobot, STATE.Idle);
  180. AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init);
  181. EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  182. EnterExitTransition<STATE, FSM_MSG>(STATE.InitingRB, fnEnterExecute, FSM_MSG.NONE, null);
  183. EnterExitTransition<STATE, FSM_MSG>(STATE.InitingAL, fnEnterExecute, FSM_MSG.NONE, null);
  184. EnterExitTransition<STATE, FSM_MSG>(STATE.Picking, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  185. EnterExitTransition<STATE, FSM_MSG>(STATE.Gotoing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  186. EnterExitTransition<STATE, FSM_MSG>(STATE.Placing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  187. EnterExitTransition<STATE, FSM_MSG>(STATE.Swapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  188. EnterExitTransition<STATE, FSM_MSG>(STATE.Extending, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  189. EnterExitTransition<STATE, FSM_MSG>(STATE.Retracting, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  190. EnterExitTransition<STATE, FSM_MSG>(STATE.Lifting, fnEnterExecute, FSM_MSG.NONE, null);
  191. EnterExitTransition<STATE, FSM_MSG>(STATE.Aligning, fnEnterExecute, FSM_MSG.NONE, null);
  192. EnterExitTransition<STATE, FSM_MSG>(STATE.Mapping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  193. EnterExitTransition<STATE, FSM_MSG>(STATE.Gripping, fnEnterExecute, FSM_MSG.NONE, null);
  194. EnterExitTransition<STATE, FSM_MSG>(STATE.Ungripping, fnEnterExecute, FSM_MSG.NONE, null);
  195. EnterExitTransition<STATE, FSM_MSG>(STATE.Fliping, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  196. Transition(STATE.Unknown, MSG.CommReady, null, STATE.Init);
  197. // Home
  198. Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing);
  199. Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing); // 暂时加,出错的时候做 HOME
  200. Transition(STATE.Initializing, MSG.ActionDone, null, STATE.Orgshing);
  201. Transition(STATE.Orgshing, MSG.ActionDone, fnActionDone, STATE.Idle);
  202. Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
  203. Transition(STATE.InitingRB, MSG.ActionDone, null, STATE.Idle);
  204. //Transition(STATE.SettingLamp, MSG.ActionDone, fnSetLampDone, STATE.Idle);
  205. // Pick
  206. Transition(STATE.Idle, MSG.Pick, fnPick, STATE.Picking);
  207. Transition(STATE.Picking, MSG.ActionDone, fnActionDone, STATE.Idle);
  208. Transition(STATE.Picking, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
  209. Transition(STATE.Picking, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
  210. // Place
  211. Transition(STATE.Idle, MSG.Place, fnPlace, STATE.Placing);
  212. Transition(STATE.Placing, MSG.ActionDone, fnActionDone, STATE.Idle);
  213. Transition(STATE.Placing, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
  214. Transition(STATE.Placing, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
  215. // PickAndPlace
  216. Transition(STATE.Idle, MSG.PickAndPlace, fnSwap, STATE.Swapping);
  217. Transition(STATE.Swapping, MSG.ActionDone, fnActionDone, STATE.Idle);
  218. Transition(STATE.Swapping, MSG.PMLiftPinUp, fnPmPinUp, STATE.Idle);
  219. Transition(STATE.Swapping, MSG.PMLiftPinDown, fnPmPinDown, STATE.Idle);
  220. // Goto
  221. Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing);
  222. Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle);
  223. // Extend
  224. Transition(STATE.Idle, MSG.Extend, fnExtend, STATE.Extending);
  225. Transition(STATE.Extending, MSG.ActionDone, fnActionDone, STATE.Idle);
  226. // Retract
  227. Transition(STATE.Idle, MSG.Retract, fnRetract, STATE.Retracting);
  228. Transition(STATE.Retracting, MSG.ActionDone, fnActionDone, STATE.Idle);
  229. // Map
  230. Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping);
  231. Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle);
  232. // Grip
  233. Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping);
  234. Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  235. // Ungrip
  236. Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping);
  237. Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle);
  238. // Aligner
  239. Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL);
  240. Transition(STATE.InitingAL, MSG.ActionDone, fnActionDone, STATE.Idle);
  241. Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting);
  242. Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle);
  243. Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning);
  244. Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle);
  245. EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
  246. EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
  247. }
  248. private bool fnHomeAll(object[] param)
  249. {
  250. _efem.ClearActions();
  251. _efem.HomeAll();
  252. return true;
  253. }
  254. private bool fnHomeRobot(object[] param)
  255. {
  256. _efem.Home(ModuleName.EfemRobot);
  257. return true;
  258. }
  259. private bool fnHomeAligner(object[] param)
  260. {
  261. // module
  262. ModuleName unit = ModuleName.EFEM;
  263. if (param[0] is string s1)
  264. unit = ModuleNameString.ToEnum(s1);
  265. else if (param[0] is ModuleName mod)
  266. unit = mod;
  267. else
  268. throw new ArgumentException("Argument error");
  269. _efem.Home(unit);
  270. return true;
  271. }
  272. private bool fnEnterExecute(object[] param)
  273. {
  274. _efem.ExecuteAction();
  275. return false;
  276. }
  277. private bool fnExitExecute(object[] param)
  278. {
  279. _efem.ExecuteAction();
  280. return false;
  281. }
  282. private bool fnActionDone(object[] param)
  283. {
  284. try
  285. {
  286. EfemOperation actionType = (EfemOperation)param[0];
  287. if ((actionType == EfemOperation.Orgsh || actionType == EfemOperation.Home) && (fsm.State == (int)STATE.Orgshing))
  288. {
  289. if (_efem.HasActions)
  290. {
  291. _efem.ExecuteAction();
  292. return false;
  293. }
  294. }
  295. if (actionType == EfemOperation.Extend)
  296. {
  297. if (fsm.State == (int)STATE.Placing)
  298. {
  299. _efem.ExecuteAction();
  300. return false;
  301. }
  302. else if (fsm.State == (int)STATE.Picking)
  303. {
  304. if (_efem.HasActions)
  305. {
  306. _efem.ExecuteAction();
  307. return false;
  308. }
  309. else
  310. {
  311. return true;
  312. }
  313. }
  314. else if (fsm.State == (int)STATE.Swapping)
  315. {
  316. if (_efem.HasActions)
  317. {
  318. _efem.ExecuteAction();
  319. return false;
  320. }
  321. else
  322. {
  323. return true;
  324. }
  325. }
  326. }
  327. return true;
  328. }
  329. catch (Exception ex)
  330. {
  331. EV.PostAlarmLog(ModuleName.EFEM.ToString(), ex.Message);
  332. return true;
  333. }
  334. }
  335. public bool CheckToPostMessage(int msg, params object[] args)
  336. {
  337. if (!fsm.FindTransition(fsm.State, msg))
  338. {
  339. EV.PostWarningLog(Name, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
  340. return false;
  341. }
  342. Running = true;
  343. fsm.PostMsg(msg, args);
  344. return true;
  345. }
  346. private bool fnRecMsg(object[] param)
  347. {
  348. if (param == null) return false;
  349. string strHwMsg = param[0] as string;
  350. if (_efem is EfemBase device)
  351. {
  352. device.ReceiveMessage(strHwMsg);
  353. return true;
  354. }
  355. return false;
  356. }
  357. private bool fnMonitor(object[] param)
  358. {
  359. STATE curSt = (STATE)fsm.State;
  360. if (curSt == STATE.Initializing || curSt == STATE.Mapping || curSt == STATE.Picking || curSt == STATE.Placing
  361. || curSt == STATE.Orgshing || curSt == STATE.Lifting || curSt == STATE.Extending || curSt == STATE.Retracting
  362. || curSt == STATE.InitingAL || curSt == STATE.InitingRB)
  363. {
  364. int time = SC.GetValue<int>("EFEM.MotionTimeout");
  365. if (fsm.ElapsedTime > time * 1000)
  366. {
  367. EV.PostAlarmLog("EFEM", $"Can not complete motion {curSt} in {time} seconds. ");
  368. PostMsg(MSG.Error);
  369. }
  370. }
  371. if (curSt == STATE.Aligning)
  372. {
  373. if (fsm.ElapsedTime > 10 * 1000)
  374. {
  375. EV.PostAlarmLog(ModuleName.Aligner.ToString(), "Align timeout");
  376. PostMsg(MSG.ActionDone, "alignment timeout");
  377. }
  378. }
  379. return true;
  380. }
  381. private bool fnOnline(object[] param)
  382. {
  383. bool bOnlineFlag = (bool)param[0];
  384. if (_efem is EfemBase efem)
  385. {
  386. efem.SetOnline(bOnlineFlag);
  387. }
  388. return true;
  389. }
  390. private string GetFsmLastMessage()
  391. {
  392. int msg = fsm.LastMsg;
  393. if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)
  394. return ((MSG)msg).ToString();
  395. if (msg == (int)FSM_MSG.TIMER)
  396. return "Timer";
  397. return msg.ToString();
  398. }
  399. private bool fnError(object[] param)
  400. {
  401. return true;
  402. }
  403. private bool fnToInit(object[] param)
  404. {
  405. return true;
  406. }
  407. private bool fnRecover(object[] param)
  408. {
  409. _efem.ClearActions();
  410. _efem.ClearError();
  411. //_efem.ExecuteAction();
  412. return true;
  413. }
  414. private bool fnAbortRobot(object[] param)
  415. {
  416. _efem.ClearActions();
  417. _efem.AbortRobot();
  418. //_efem.ExecuteAction();
  419. return true;
  420. }
  421. private bool fnSetLED(object[] param)
  422. {
  423. LightType light = (LightType)param[0];
  424. LightStatus st = (LightStatus)param[1];
  425. _efem.SetLamp(light, st);
  426. return true;
  427. }
  428. private bool fnTurnOffBuzzer(object[] param)
  429. {
  430. _efem.TurnOffBuzzer();
  431. return false;
  432. }
  433. //private bool fnSwitchOnBuzzerAndRed(object[] param)
  434. //{
  435. // _efem.SwitchOnBuzzerAndRed();
  436. // return false;
  437. //}
  438. //
  439. private bool fnSetLampDone(object[] param)
  440. {
  441. if (_efem.HasActions)
  442. {
  443. _efem.ExecuteAction();
  444. return false;
  445. }
  446. else
  447. {
  448. return true;
  449. }
  450. }
  451. private bool fnPick(object[] param)
  452. {
  453. // module
  454. ModuleName unit = ModuleName.EFEM;
  455. if (param[0] is string s1)
  456. unit = ModuleNameString.ToEnum(s1);
  457. else if (param[0] is ModuleName mod)
  458. unit = mod;
  459. else
  460. throw new ArgumentException("Argument error");
  461. // slot
  462. byte slot = (byte)(int)param[1];
  463. // hand
  464. Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
  465. // wafer size
  466. WaferSize ws1 = WaferSize.WS0;
  467. if (param[3] is string s2)
  468. {
  469. if (Enum.TryParse(s2, out WaferSize p5))
  470. ws1 = p5;
  471. }
  472. else if (param[3] is WaferSize p6)
  473. {
  474. ws1 = p6;
  475. }
  476. MoveParam mp = new MoveParam(unit, slot, ModuleName.EfemRobot, (byte)arm, arm, ws1);
  477. if (!_efem.Pick(mp))
  478. return false;
  479. return true;
  480. }
  481. private bool fnPlace(object[] param)
  482. {
  483. // module
  484. ModuleName unit = ModuleName.EFEM;
  485. if (param[0] is string s1)
  486. unit = ModuleNameString.ToEnum(s1);
  487. else if (param[0] is ModuleName mod)
  488. unit = mod;
  489. else
  490. throw new ArgumentException("Argument error");
  491. // slot
  492. byte slot = (byte)(int)param[1];
  493. // hand
  494. Hand arm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
  495. // wafer size
  496. WaferSize ws1 = WaferSize.WS0;
  497. if (param[3] is string s2)
  498. {
  499. if (Enum.TryParse(s2, out WaferSize p5))
  500. ws1 = p5;
  501. }
  502. else if (param[3] is WaferSize p6)
  503. {
  504. ws1 = p6;
  505. }
  506. MoveParam mp = new MoveParam(ModuleName.EfemRobot, (byte)arm, unit, slot, arm, ws1);
  507. if (!_efem.Place(mp))
  508. return false;
  509. return true;
  510. }
  511. private bool fnGoto(object[] param)
  512. {
  513. // module
  514. ModuleName unit = ModuleName.EFEM;
  515. if (param[0] is string s1)
  516. unit = ModuleNameString.ToEnum(s1);
  517. else if (param[0] is ModuleName mod)
  518. unit = mod;
  519. else
  520. throw new ArgumentException("Argument error");
  521. // slot
  522. byte slot = (byte)(int)param[1];
  523. Hand arm = Hand.Blade1;
  524. WaferSize ws = WaferSize.WS6;
  525. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))
  526. {
  527. arm = Hand.Blade1;
  528. ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 0).Size;
  529. }
  530. else if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  531. {
  532. arm = Hand.Blade2;
  533. ws = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, 1).Size;
  534. }
  535. MoveParam mp = new MoveParam(unit, slot, unit, slot, arm, ws);
  536. _efem.Goto(mp);
  537. return true;
  538. }
  539. private bool fnSwap(object[] param)
  540. {
  541. // module
  542. ModuleName unit = ModuleName.EFEM;
  543. if (param[0] is string s1)
  544. unit = ModuleNameString.ToEnum(s1);
  545. else if (param[0] is ModuleName mod)
  546. unit = mod;
  547. else
  548. throw new ArgumentException("Argument error");
  549. // pickSlot
  550. byte pickSlot = (byte)(int)param[1];
  551. // pick hand
  552. Hand pickArm = (Hand)Enum.Parse(typeof(Hand), param[2].ToString());
  553. // wafer size
  554. WaferSize ws1 = WaferSize.WS0;
  555. if (param[5] is string s2)
  556. {
  557. if (Enum.TryParse(s2, out WaferSize p5))
  558. ws1 = p5;
  559. }
  560. else if (param[5] is WaferSize p6)
  561. {
  562. ws1 = p6;
  563. }
  564. MoveParam pickParam = new MoveParam(unit, pickSlot, ModuleName.EfemRobot, (byte)pickArm, pickArm, ws1);
  565. // place slot
  566. byte placeSlot = (byte)(int)param[4];
  567. // hand
  568. Hand placeArm = (Hand)Enum.Parse(typeof(Hand), param[3].ToString());
  569. MoveParam placeParam = new MoveParam(ModuleName.EfemRobot, (byte)placeArm, unit, placeSlot, placeArm, ws1);
  570. _efem.PickAndPlace(pickParam, placeParam);
  571. return true;
  572. }
  573. private bool fnExtend(object[] param)
  574. {
  575. // module
  576. ModuleName unit = ModuleName.EFEM;
  577. if (param[0] is string s1)
  578. unit = ModuleNameString.ToEnum(s1);
  579. else if (param[0] is ModuleName mod)
  580. unit = mod;
  581. else
  582. throw new ArgumentException("Argument error");
  583. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);
  584. ExtendParam mp = new ExtendParam
  585. {
  586. Module = unit,
  587. Arm = arm,
  588. Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)
  589. };
  590. if (!_efem.Extend(mp))
  591. return false;
  592. return true;
  593. }
  594. private bool fnRetract(object[] param)
  595. {
  596. // module
  597. ModuleName unit = ModuleName.EFEM;
  598. if (param[0] is string s1)
  599. unit = ModuleNameString.ToEnum(s1);
  600. else if (param[0] is ModuleName mod)
  601. unit = mod;
  602. else
  603. throw new ArgumentException("Argument error");
  604. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[2]);
  605. ExtendParam mp = new ExtendParam
  606. {
  607. Module = unit,
  608. Arm = arm,
  609. Pos = (ExtendPos)Enum.Parse(typeof(ExtendPos), param[1] as string)
  610. };
  611. if (!_efem.Retract(mp))
  612. return false;
  613. return true;
  614. }
  615. private bool fnPmPinUp(object[] param)
  616. {
  617. _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);
  618. if (_efem.HasActions)
  619. {
  620. _efem.ExecuteAction();
  621. return false;
  622. }
  623. else
  624. {
  625. return true;
  626. }
  627. }
  628. private bool fnPmPinDown(object[] param)
  629. {
  630. _efem.UpdateStatus((ushort)param[0], ActionStatus.Completed);
  631. if (_efem.HasActions)
  632. {
  633. _efem.ExecuteAction();
  634. return false;
  635. }
  636. else
  637. {
  638. return true;
  639. }
  640. }
  641. private bool fnLift(object[] param)
  642. {
  643. // module
  644. ModuleName unit = ModuleName.EFEM;
  645. if (param[0] is string s1)
  646. unit = ModuleNameString.ToEnum(s1);
  647. else if (param[0] is ModuleName mod)
  648. unit = mod;
  649. else
  650. throw new ArgumentException("Argument error");
  651. bool isUp = true;
  652. if (param.Length > 1)
  653. {
  654. isUp = (bool) param[1];
  655. }
  656. if (isUp)
  657. {
  658. if (!_efem.SetPinUp(unit))
  659. return false;
  660. }
  661. else
  662. {
  663. if (!_efem.SetPinDown(unit))
  664. return false;
  665. }
  666. return true;
  667. }
  668. private bool fnAlign(object[] param)
  669. {
  670. // module
  671. ModuleName unit = ModuleName.EFEM;
  672. if (param[0] is string s1)
  673. unit = ModuleNameString.ToEnum(s1);
  674. else if (param[0] is ModuleName mod)
  675. unit = mod;
  676. else
  677. throw new ArgumentException("Argument error");
  678. // wafer size
  679. WaferSize ws1 = WaferSize.WS0;
  680. if (param[1] is string s2)
  681. {
  682. if (Enum.TryParse(s2, out WaferSize p5))
  683. ws1 = p5;
  684. }
  685. else if (param[1] is WaferSize p6)
  686. {
  687. ws1 = p6;
  688. }
  689. if (!_efem.Align(unit, 1000, ws1))
  690. return false;
  691. return true;
  692. }
  693. private bool fnMap(object[] param)
  694. {
  695. // module
  696. ModuleName unit = ModuleName.EFEM;
  697. if (param[0] is string s1)
  698. unit = ModuleNameString.ToEnum(s1);
  699. else if (param[0] is ModuleName mod)
  700. unit = mod;
  701. else
  702. throw new ArgumentException("Argument error");
  703. if (!_efem.Map(unit))
  704. return false;
  705. return true;
  706. }
  707. private bool fnGrip(object[] param)
  708. {
  709. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  710. if (!_efem.Grip(arm, true))
  711. return false;
  712. return true;
  713. }
  714. private bool fnUngrip(object[] param)
  715. {
  716. Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
  717. if (!_efem.Grip(arm, false))
  718. return false;
  719. return true;
  720. }
  721. public bool IsIdle
  722. {
  723. get { return fsm.State == (int)STATE.Idle; }
  724. }
  725. public bool IsError
  726. {
  727. get { return fsm.State == (int)STATE.Error; }
  728. }
  729. public bool IsInit
  730. {
  731. get { return fsm.State == (int)STATE.Unknown || fsm.State==(int)STATE.Init; }
  732. }
  733. public bool IsBusy
  734. {
  735. get { return !IsInit && !IsError && !IsIdle; }
  736. }
  737. public bool IsOnline { get; internal set; }
  738. public int Invoke(string function, params object[] args)
  739. {
  740. switch (function)
  741. {
  742. case "Home":
  743. CheckToPostMessage((int)MSG.HomeAll);
  744. return (int)MSG.HomeAll;
  745. }
  746. return (int)FSM_MSG.NONE;
  747. }
  748. public bool CheckAcked(int msg)
  749. {
  750. return fsm.CheckExecuted(msg);
  751. }
  752. internal void InvokeReset()
  753. {
  754. if (fsm.State == (int) STATE.Error)
  755. {
  756. PostMsg((int)MSG.Recover);
  757. }
  758. }
  759. public int InvokeAlign(string module, float time)
  760. {
  761. if (CheckToPostMessage((int)MSG.Align, module, time))
  762. return (int)MSG.Align;
  763. return (int)FSM_MSG.NONE;
  764. }
  765. public int InvokeLiftDown(string module)
  766. {
  767. if (CheckToPostMessage((int)MSG.Lift, module, false))
  768. return (int)MSG.Lift;
  769. return (int)FSM_MSG.NONE;
  770. }
  771. public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)
  772. {
  773. if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))
  774. return (int)MSG.Pick;
  775. return (int)FSM_MSG.NONE;
  776. }
  777. public int InvokeGoto(ModuleName source, int slot)
  778. {
  779. if (CheckToPostMessage((int)MSG.Goto, source, slot))
  780. return (int)MSG.Goto;
  781. return (int)FSM_MSG.NONE;
  782. }
  783. public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)
  784. {
  785. if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))
  786. return (int)MSG.Place;
  787. return (int)FSM_MSG.NONE;
  788. }
  789. public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size)
  790. {
  791. if (CheckToPostMessage((int)MSG.PickAndPlace, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))
  792. return (int)MSG.PickAndPlace;
  793. return (int)FSM_MSG.NONE;
  794. }
  795. public int InvokeMap(string target )
  796. {
  797. if (CheckToPostMessage((int)MSG.Map, target ))
  798. return (int)MSG.Map;
  799. return (int)FSM_MSG.NONE;
  800. }
  801. public int InvokeFlip(Hand hand)
  802. {
  803. if (CheckToPostMessage((int)MSG.Flip, hand))
  804. return (int)MSG.Flip;
  805. return (int)FSM_MSG.NONE;
  806. }
  807. public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
  808. {
  809. if (type == EnumTransferType.Pick)
  810. {
  811. //需要补充:判断LP 放好了,而且已经map过。
  812. return _efem[module].HasCassette && _efem[module].IsMapped;
  813. }
  814. else if (type == EnumTransferType.Place)
  815. {
  816. //需要补充:判断LP 放好了,而且已经map过。
  817. return _efem[module].HasCassette && _efem[module].IsMapped;
  818. }
  819. return false;
  820. }
  821. internal bool CheckReadyRunNewJob(ModuleName module)
  822. {
  823. //???
  824. return true;
  825. }
  826. internal bool CheckReadyTransfer(ModuleName module)
  827. {
  828. return _efem[module].HasCassette && _efem[module].IsMapped;
  829. }
  830. internal bool CheckPlaced(ModuleName module)
  831. {
  832. return _efem[module].HasCassette;
  833. }
  834. internal void NoteJobStart(ModuleName module)
  835. {
  836. _efem[module].NoteJobStart();
  837. }
  838. internal void NoteJobComplete(ModuleName module)
  839. {
  840. _efem[module].NoteJobComplete();
  841. }
  842. }
  843. /// <summary>
  844. /// LP entity
  845. /// </summary>
  846. class LoadportEntity : Entity, IEntity
  847. {
  848. private enum STATE
  849. {
  850. Unknown,
  851. Idle, // 1
  852. Initializing, // 2
  853. Initialized, // 3
  854. Mapping, // 4
  855. Mapped, // 5
  856. }
  857. public enum MSG
  858. {
  859. Home, // 0
  860. Map, // 1
  861. ActionDone, // 2
  862. RecHwMsg, // 3
  863. Recover, // 4
  864. Abort, // 5
  865. Online, // 6
  866. Error // 7
  867. }
  868. private readonly Efem _efem;
  869. private ModuleName Module { get; }
  870. public LoadportEntity(ModuleName mod, Efem efem)
  871. {
  872. this.Module = mod;
  873. _efem = efem;
  874. InitFsmMap();
  875. OP.Subscribe($"{Module}.Home", (cmd, args) => { PostMsg(MSG.Home); return true; });
  876. OP.Subscribe($"{Module}.Abort", (cmd, args) => { PostMsg(MSG.Abort); return true; });
  877. //OP.Subscribe($"{Module}.Map", (cmd, args) => { PostMsg(MSG.Map); return true; });
  878. OP.Subscribe($"{Module}.Online", (cmd, args) => { PostMsg(MSG.Online); return true; });
  879. DATA.Subscribe($"{Module}.Status", () => ((STATE)fsm.State).ToString());
  880. DATA.Subscribe($"{Module}.FsmState", () => ((STATE)fsm.State).ToString());
  881. DATA.Subscribe($"{Module}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString());
  882. DATA.Subscribe($"{Module}.FsmLastMessage", GetFsmLastMessage);
  883. }
  884. private string GetFsmLastMessage()
  885. {
  886. int msg = fsm.LastMsg;
  887. if (msg >= (int)MSG.Home && msg <= (int)MSG.Error)
  888. return ((MSG)msg).ToString();
  889. if (msg == (int)FSM_MSG.TIMER)
  890. return "Timer";
  891. return msg.ToString();
  892. }
  893. private void InitFsmMap()
  894. {
  895. fsm = new StateMachine<LoadportEntity>($"LPM_{Module}", (int)STATE.Idle, 500);
  896. AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
  897. //AnyStateTransition(MSG.RecHwMsg, fnRecMsg, FSM_STATE.SAME);
  898. AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
  899. AnyStateTransition(MSG.Recover, fnRecover, STATE.Idle);
  900. AnyStateTransition(MSG.Abort, fnRecover, STATE.Idle);
  901. EnterExitTransition<STATE, FSM_MSG>(STATE.Initializing, fnEnterExecute, FSM_MSG.NONE, fnExitExecute);
  902. // Home
  903. AnyStateTransition(MSG.Home, fnHome, STATE.Initializing);
  904. Transition(STATE.Initializing, MSG.ActionDone, fnActionDone, STATE.Idle);
  905. }
  906. private bool fnOnline(object[] param)
  907. {
  908. bool online = (bool)param[0];
  909. _efem.SetOnline(Module, online);
  910. return true;
  911. }
  912. private bool fnRecover(object[] param)
  913. {
  914. return true;
  915. }
  916. private bool fnMonitor(object[] param)
  917. {
  918. STATE curSt = (STATE)fsm.State;
  919. if (curSt == STATE.Initializing || curSt == STATE.Mapping)
  920. {
  921. if (fsm.ElapsedTime > 20 * 1000)
  922. {
  923. PostMsg(MSG.Recover);
  924. }
  925. }
  926. return true;
  927. }
  928. private bool fnEnterExecute(object[] param)
  929. {
  930. _efem.ExecuteAction();
  931. return true;
  932. }
  933. private bool fnExitExecute(object[] param)
  934. {
  935. return true;
  936. }
  937. private bool fnActionDone(object[] param)
  938. {
  939. return true;
  940. }
  941. private bool fnHome(object[] param)
  942. {
  943. _efem.Home(Module);
  944. return true;
  945. }
  946. public bool Check(int msg, out string reason, params object[] args)
  947. {
  948. throw new NotImplementedException();
  949. }
  950. }
  951. }