OverViewModel.cs 60 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using MECF.Framework.Common.DataCenter;
  3. using MECF.Framework.Common.OperationCenter;
  4. using Prism.Commands;
  5. using Prism.Mvvm;
  6. using System;
  7. using System.Collections.Generic;
  8. using System.Windows;
  9. using System.Windows.Threading;
  10. using Venus_Core;
  11. using Venus_MainPages.Views;
  12. using System.Linq;
  13. using System.Threading.Tasks;
  14. using Microsoft.Win32;
  15. using System.IO;
  16. using Venus_Themes.CustomControls;
  17. namespace Venus_MainPages.ViewModels
  18. {
  19. internal class OverViewModel : BindableBase
  20. {
  21. #region 私有字段
  22. private bool m_PVN21ValveIsOpen;
  23. private bool m_PVN22ValveIsOpen;
  24. private bool m_N2ValveIsOpen;
  25. private bool m_PV11ValveIsOpen;
  26. private bool m_PV12ValveIsOpen;
  27. private bool m_PV21ValveIsOpen;
  28. private bool m_PV22ValveIsOpen;
  29. private bool m_PV31ValveIsOpen;
  30. private bool m_PV32ValveIsOpen;
  31. private bool m_PV41ValveIsOpen;
  32. private bool m_PV42ValveIsOpen;
  33. private bool m_MFC1ValveIsOpen;
  34. private bool m_MFC2ValveIsOpen;
  35. private bool m_MFC3ValveIsOpen;
  36. private bool m_MFC4ValveIsOpen;
  37. private bool m_MFC5ValveIsOpen;
  38. private bool m_MFC6ValveIsOpen;
  39. private bool m_MFC7ValveIsOpen;
  40. private bool m_MFC8ValveIsOpen;
  41. private bool m_GasFinalValveIsOpen;
  42. private bool m_SoftPumpValveIsOpen;
  43. private bool m_FastPumpValveIsOpen;
  44. private bool m_PVHe1ValveIsOpen;
  45. private bool m_PVHe2ValveIsOpen;
  46. private bool m_TurboPumpPumpingValveIsOpen;
  47. private bool m_TurboPumpPurgeValveIsOpen;
  48. private bool m_GuageValveIsOpen;
  49. private bool m_PendulumValveIsOpen;
  50. private bool m_BRFIsOn;
  51. private bool m_SRFIsOn;
  52. private double m_HeGasSetpoint;
  53. private int m_HePressureSetpoint;
  54. private float m_SRFFwdPowerSetpoint;
  55. private float m_BRFFwdPowerSetpoint;
  56. private float m_SRFMatchC1;
  57. private float m_SRFMatchC2;
  58. private float m_BRFMatchC1;
  59. private float m_BRFMatchC2;
  60. private double m_MFC1SetPoint;
  61. private double m_MFC2SetPoint;
  62. private double m_MFC3SetPoint;
  63. private double m_MFC4SetPoint;
  64. private double m_MFC5SetPoint;
  65. private double m_MFC6SetPoint;
  66. private double m_MFC7SetPoint;
  67. private double m_MFC8SetPoint;
  68. private double m_N2SetPoint;
  69. private AITMfcData m_MFC1Data;
  70. private AITMfcData m_MFC2Data;
  71. private AITMfcData m_MFC3Data;
  72. private AITMfcData m_MFC4Data;
  73. private AITMfcData m_MFC5Data;
  74. private AITMfcData m_MFC6Data;
  75. private AITMfcData m_MFC7Data;
  76. private AITMfcData m_MFC8Data;
  77. private AITMfcData m_MFCHeData;
  78. private AITMfcData m_MFCN2Data;
  79. private AITHeaterData m_ValveHeaterData;
  80. private AITHeaterData m_ForelineHeaterData;
  81. private AITHeaterData m_WallHeaterData;
  82. private PMState m_PMCurrentState;
  83. private bool m_SourceRFFanInterlock;
  84. private bool m_IsWLK;
  85. private bool m_IsWaterFlowOk;
  86. private bool m_IsTurboPumpInterlock;
  87. private bool m_IsCDAOK;
  88. private bool m_SensorGasBoxDoor;
  89. private bool m_SensorGasBoxPressure;
  90. private bool m_PumpIsOpen;
  91. private bool m_TurboIsOpen;
  92. private bool m_IsATM;
  93. private bool m_IsVAC;
  94. private bool m_HVIsOn;
  95. private List<string> m_RtConfigKeys;
  96. private Dictionary<string, object> m_RtConfigValues;
  97. private List<string> m_RtDataKeys;
  98. private Dictionary<string, object> m_RtDataValues;
  99. private int m_PositionValue;
  100. private bool m_IsPositionMode;
  101. private int m_ESCVoltage;
  102. private bool m_GasIsFlowing;
  103. private bool m_IsAutoMode;
  104. private string m_SelectedRecipe;
  105. private float m_ChillerTempSetpoint;
  106. private float m_WallTempSetpoint;
  107. private bool m_HeIsPressureMode;
  108. private bool m_ChillerIsOn;
  109. private float m_ProcessHighPressure;
  110. private float m_ProcessLowPressure;
  111. private float m_ForelinePressurePressure;
  112. private float m_ESCHePressure;
  113. ButterflyValveView butterflyValveMessageBox;
  114. HeaterView heaterView;
  115. private int m_TurboPumpRotationalSpeed;
  116. private bool m_LiftPinIsUp;
  117. private bool m_IsSlitDoorClosed;
  118. private bool m_IsLidClosed;
  119. private float m_ChillerTemperature;
  120. private int m_ESCHVOutputVoltage;
  121. private float m_SRfReflectPower;
  122. private float m_SRfForwardPowerFeedBack;
  123. private float m_BRfReflectPower;
  124. private float m_BRfForwardPowerFeedBack;
  125. private int m_MatchWorkMode;
  126. private int m_BiasMatchWorkMode;
  127. private float m_MatchC1;
  128. private float m_MatchC2;
  129. private float m_BiasMatchC1;
  130. private float m_BiasMatchC2;
  131. private float m_PendulumValvePosition;
  132. private bool m_IsTurboPumpAtSpeed;
  133. private bool m_TurboPumpWaterFlowSwitch;
  134. private bool m_IsHasWafer;
  135. private Recipe m_CurrentRecipe=new Recipe ();
  136. #endregion
  137. #region 属性
  138. public Recipe CurrentRecipe
  139. {
  140. get { return m_CurrentRecipe; }
  141. set { SetProperty(ref m_CurrentRecipe, value); }
  142. }
  143. public bool IsHasWafer
  144. {
  145. get { return m_IsHasWafer; }
  146. set { SetProperty(ref m_IsHasWafer, value); }
  147. }
  148. public bool IsTurboPumpAtSpeed
  149. {
  150. get { return m_IsTurboPumpAtSpeed; }
  151. set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
  152. }
  153. public bool TurboPumpWaterFlowSwitch
  154. {
  155. get { return m_TurboPumpWaterFlowSwitch; }
  156. set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
  157. }
  158. public float PendulumValvePosition
  159. {
  160. get { return m_PendulumValvePosition; }
  161. set{SetProperty(ref m_PendulumValvePosition, value);}
  162. }
  163. public float BiasMatchC1
  164. {
  165. get { return m_BiasMatchC1; }
  166. set
  167. {
  168. SetProperty(ref m_BiasMatchC1, value);
  169. }
  170. }
  171. public float BiasMatchC2
  172. {
  173. get { return m_BiasMatchC2; }
  174. set
  175. {
  176. SetProperty(ref m_BiasMatchC2, value);
  177. }
  178. }
  179. public float MatchC1
  180. {
  181. get { return m_MatchC1; }
  182. set
  183. {
  184. SetProperty(ref m_MatchC1, value);
  185. }
  186. }
  187. public float MatchC2
  188. {
  189. get { return m_MatchC2; }
  190. set
  191. {
  192. SetProperty(ref m_MatchC2, value);
  193. }
  194. }
  195. public int BiasMatchWorkMode
  196. {
  197. get { return m_BiasMatchWorkMode; }
  198. set
  199. {
  200. SetProperty(ref m_BiasMatchWorkMode, value);
  201. }
  202. }
  203. public int MatchWorkMode
  204. {
  205. get { return m_MatchWorkMode; }
  206. set
  207. {
  208. SetProperty(ref m_MatchWorkMode, value);
  209. }
  210. }
  211. public float BRfReflectPower
  212. {
  213. get { return m_BRfReflectPower; }
  214. set
  215. {
  216. SetProperty(ref m_BRfReflectPower, value);
  217. }
  218. }
  219. public float BRfForwardPowerFeedBack
  220. {
  221. get { return m_BRfForwardPowerFeedBack; }
  222. set
  223. {
  224. SetProperty(ref m_BRfForwardPowerFeedBack, value);
  225. }
  226. }
  227. public float SRfReflectPower
  228. {
  229. get { return m_SRfReflectPower; }
  230. set
  231. {
  232. SetProperty(ref m_SRfReflectPower, value);
  233. }
  234. }
  235. public float SRfForwardPowerFeedBack
  236. {
  237. get { return m_SRfForwardPowerFeedBack; }
  238. set
  239. {
  240. SetProperty(ref m_SRfForwardPowerFeedBack, value);
  241. }
  242. }
  243. public int ESCHVOutputVoltage
  244. {
  245. get { return m_ESCHVOutputVoltage; }
  246. set
  247. {
  248. SetProperty(ref m_ESCHVOutputVoltage, value);
  249. }
  250. }
  251. public float ChillerTemperature
  252. {
  253. get { return m_ChillerTemperature; }
  254. set
  255. {
  256. SetProperty(ref m_ChillerTemperature, value);
  257. }
  258. }
  259. public bool IsLidClosed
  260. {
  261. get { return m_IsLidClosed; }
  262. set
  263. {
  264. SetProperty(ref m_IsLidClosed, value);
  265. }
  266. }
  267. public bool IsSlitDoorClosed
  268. {
  269. get { return m_IsSlitDoorClosed; }
  270. set
  271. {
  272. SetProperty(ref m_IsSlitDoorClosed, value);
  273. }
  274. }
  275. public bool LiftPinIsUp
  276. {
  277. get { return m_LiftPinIsUp; }
  278. set
  279. {
  280. SetProperty(ref m_LiftPinIsUp, value);
  281. }
  282. }
  283. public int TurboPumpRotationalSpeed
  284. {
  285. get { return m_TurboPumpRotationalSpeed; }
  286. set
  287. {
  288. SetProperty(ref m_TurboPumpRotationalSpeed, value);
  289. }
  290. }
  291. public float ESCHePressure
  292. {
  293. get { return m_ESCHePressure; }
  294. set
  295. {
  296. SetProperty(ref m_ESCHePressure, value);
  297. }
  298. }
  299. public float ProcessHighPressure
  300. {
  301. get { return m_ProcessHighPressure; }
  302. set
  303. {
  304. SetProperty(ref m_ProcessHighPressure, value);
  305. }
  306. }
  307. public float ProcessLowPressure
  308. {
  309. get { return m_ProcessLowPressure; }
  310. set
  311. {
  312. SetProperty(ref m_ProcessLowPressure, value);
  313. }
  314. }
  315. public float ForelinePressure
  316. {
  317. get { return m_ForelinePressurePressure; }
  318. set
  319. {
  320. SetProperty(ref m_ForelinePressurePressure, value);
  321. }
  322. }
  323. public bool SourceRFFanInterlock
  324. {
  325. get { return m_SourceRFFanInterlock; }
  326. set
  327. {
  328. SetProperty(ref m_SourceRFFanInterlock, value);
  329. }
  330. }
  331. public bool IsWLK
  332. {
  333. get { return m_IsWLK; }
  334. set
  335. {
  336. SetProperty(ref m_IsWLK, value);
  337. }
  338. }
  339. public bool IsWaterFlowOk
  340. {
  341. get { return m_IsWaterFlowOk; }
  342. set
  343. {
  344. SetProperty(ref m_IsWaterFlowOk, value);
  345. }
  346. }
  347. public bool IsCDAOK
  348. {
  349. get { return m_IsCDAOK; }
  350. set
  351. {
  352. SetProperty(ref m_IsCDAOK, value);
  353. }
  354. }
  355. public bool SensorGasBoxDoor
  356. {
  357. get { return m_SensorGasBoxDoor; }
  358. set
  359. {
  360. SetProperty(ref m_SensorGasBoxDoor, value);
  361. }
  362. }
  363. public bool SensorGasBoxPressure
  364. {
  365. get { return m_SensorGasBoxPressure; }
  366. set
  367. {
  368. SetProperty(ref m_SensorGasBoxPressure, value);
  369. }
  370. }
  371. public bool IsTurboPumpInterlock
  372. {
  373. get { return m_IsTurboPumpInterlock; }
  374. set
  375. {
  376. SetProperty(ref m_IsTurboPumpInterlock, value);
  377. }
  378. }
  379. public string ModuleName { get; set; }
  380. public double MFC1SetPoint
  381. {
  382. get { return m_MFC1SetPoint; }
  383. set { SetProperty(ref m_MFC1SetPoint, value); }
  384. }
  385. public double MFC2SetPoint
  386. {
  387. get { return m_MFC2SetPoint; }
  388. set { SetProperty(ref m_MFC2SetPoint, value); }
  389. }
  390. public double MFC3SetPoint
  391. {
  392. get { return m_MFC3SetPoint; }
  393. set { SetProperty(ref m_MFC3SetPoint, value); }
  394. }
  395. public double MFC4SetPoint
  396. {
  397. get { return m_MFC4SetPoint; }
  398. set { SetProperty(ref m_MFC4SetPoint, value); }
  399. }
  400. public double MFC5SetPoint
  401. {
  402. get { return m_MFC5SetPoint; }
  403. set { SetProperty(ref m_MFC5SetPoint, value); }
  404. }
  405. public double MFC6SetPoint
  406. {
  407. get { return m_MFC6SetPoint; }
  408. set { SetProperty(ref m_MFC6SetPoint, value); }
  409. }
  410. public double MFC7SetPoint
  411. {
  412. get { return m_MFC7SetPoint; }
  413. set { SetProperty(ref m_MFC7SetPoint, value); }
  414. }
  415. public double MFC8SetPoint
  416. {
  417. get { return m_MFC8SetPoint; }
  418. set { SetProperty(ref m_MFC8SetPoint, value); }
  419. }
  420. public double N2SetPoint
  421. {
  422. get { return m_N2SetPoint; }
  423. set { SetProperty(ref m_N2SetPoint, value); }
  424. }
  425. public AITMfcData MFC1Data
  426. {
  427. get { return m_MFC1Data; }
  428. set { SetProperty(ref m_MFC1Data, value); }
  429. }
  430. public AITMfcData MFC2Data
  431. {
  432. get { return m_MFC2Data; }
  433. set { SetProperty(ref m_MFC2Data, value); }
  434. }
  435. public AITMfcData MFC3Data
  436. {
  437. get { return m_MFC3Data; }
  438. set { SetProperty(ref m_MFC3Data, value); }
  439. }
  440. public AITMfcData MFC4Data
  441. {
  442. get { return m_MFC4Data; }
  443. set { SetProperty(ref m_MFC4Data, value); }
  444. }
  445. public AITMfcData MFC5Data
  446. {
  447. get { return m_MFC5Data; }
  448. set { SetProperty(ref m_MFC5Data, value); }
  449. }
  450. public AITMfcData MFC6Data
  451. {
  452. get { return m_MFC6Data; }
  453. set { SetProperty(ref m_MFC6Data, value); }
  454. }
  455. public AITMfcData MFC7Data
  456. {
  457. get { return m_MFC7Data; }
  458. set { SetProperty(ref m_MFC7Data, value); }
  459. }
  460. public AITMfcData MFC8Data
  461. {
  462. get { return m_MFC8Data; }
  463. set { SetProperty(ref m_MFC8Data, value); }
  464. }
  465. public AITMfcData MFCHeData
  466. {
  467. get { return m_MFCHeData; }
  468. set { SetProperty(ref m_MFCHeData, value); }
  469. }
  470. public AITMfcData MFCN2Data
  471. {
  472. get { return m_MFCN2Data; }
  473. set { SetProperty(ref m_MFCN2Data, value); }
  474. }
  475. public AITHeaterData ValveHeaterData
  476. {
  477. get { return m_ValveHeaterData; }
  478. set { SetProperty(ref m_ValveHeaterData, value); }
  479. }
  480. public AITHeaterData ForelineHeaterData
  481. {
  482. get { return m_ForelineHeaterData; }
  483. set { SetProperty(ref m_ForelineHeaterData, value); }
  484. }
  485. public AITHeaterData WallHeaterData
  486. {
  487. get { return m_WallHeaterData; }
  488. set { SetProperty(ref m_WallHeaterData, value); }
  489. }
  490. public PMState PMCurrentState
  491. {
  492. get { return m_PMCurrentState; }
  493. set { SetProperty(ref m_PMCurrentState, value); }
  494. }
  495. public Dictionary<string, object> RtConfigValues
  496. {
  497. get { return m_RtConfigValues; }
  498. set { SetProperty(ref m_RtConfigValues, value); }
  499. }
  500. #region 阀
  501. public bool GasFinalValveIsOpen
  502. {
  503. get { return m_GasFinalValveIsOpen; }
  504. set { SetProperty(ref m_GasFinalValveIsOpen, value); }
  505. }
  506. public bool PVN21ValveIsOpen
  507. {
  508. get { return m_PVN21ValveIsOpen; }
  509. set { SetProperty(ref m_PVN21ValveIsOpen, value); }
  510. }
  511. public bool PVN22ValveIsOpen
  512. {
  513. get { return m_PVN22ValveIsOpen; }
  514. set { SetProperty(ref m_PVN22ValveIsOpen, value); }
  515. }
  516. public bool N2ValveIsOpen
  517. {
  518. get { return m_N2ValveIsOpen; }
  519. set { SetProperty(ref m_N2ValveIsOpen, value); }
  520. }
  521. public bool PV11ValveIsOpen
  522. {
  523. get { return m_PV11ValveIsOpen; }
  524. set { SetProperty(ref m_PV11ValveIsOpen, value); }
  525. }
  526. public bool PV12ValveIsOpen
  527. {
  528. get { return m_PV12ValveIsOpen; }
  529. set { SetProperty(ref m_PV12ValveIsOpen, value); }
  530. }
  531. public bool MFC1ValveIsOpen
  532. {
  533. get { return m_MFC1ValveIsOpen; }
  534. set { SetProperty(ref m_MFC1ValveIsOpen, value); }
  535. }
  536. public bool PV21ValveIsOpen
  537. {
  538. get { return m_PV21ValveIsOpen; }
  539. set { SetProperty(ref m_PV21ValveIsOpen, value); }
  540. }
  541. public bool PV22ValveIsOpen
  542. {
  543. get { return m_PV22ValveIsOpen; }
  544. set { SetProperty(ref m_PV22ValveIsOpen, value); }
  545. }
  546. public bool MFC2ValveIsOpen
  547. {
  548. get { return m_MFC2ValveIsOpen; }
  549. set { SetProperty(ref m_MFC2ValveIsOpen, value); }
  550. }
  551. public bool PV31ValveIsOpen
  552. {
  553. get { return m_PV31ValveIsOpen; }
  554. set { SetProperty(ref m_PV31ValveIsOpen, value); }
  555. }
  556. public bool PV32ValveIsOpen
  557. {
  558. get { return m_PV32ValveIsOpen; }
  559. set { SetProperty(ref m_PV32ValveIsOpen, value); }
  560. }
  561. public bool MFC3ValveIsOpen
  562. {
  563. get { return m_MFC3ValveIsOpen; }
  564. set { SetProperty(ref m_MFC3ValveIsOpen, value); }
  565. }
  566. public bool PV41ValveIsOpen
  567. {
  568. get { return m_PV41ValveIsOpen; }
  569. set { SetProperty(ref m_PV41ValveIsOpen, value); }
  570. }
  571. public bool PV42ValveIsOpen
  572. {
  573. get { return m_PV42ValveIsOpen; }
  574. set { SetProperty(ref m_PV42ValveIsOpen, value); }
  575. }
  576. public bool MFC4ValveIsOpen
  577. {
  578. get { return m_MFC4ValveIsOpen; }
  579. set { SetProperty(ref m_MFC4ValveIsOpen, value); }
  580. }
  581. public bool MFC5ValveIsOpen
  582. {
  583. get { return m_MFC5ValveIsOpen; }
  584. set { SetProperty(ref m_MFC5ValveIsOpen, value); }
  585. }
  586. public bool MFC6ValveIsOpen
  587. {
  588. get { return m_MFC6ValveIsOpen; }
  589. set { SetProperty(ref m_MFC6ValveIsOpen, value); }
  590. }
  591. public bool MFC7ValveIsOpen
  592. {
  593. get { return m_MFC7ValveIsOpen; }
  594. set { SetProperty(ref m_MFC7ValveIsOpen, value); }
  595. }
  596. public bool MFC8ValveIsOpen
  597. {
  598. get { return m_MFC8ValveIsOpen; }
  599. set { SetProperty(ref m_MFC8ValveIsOpen, value); }
  600. }
  601. public bool PVHe1ValveIsOpen
  602. {
  603. get { return m_PVHe1ValveIsOpen; }
  604. set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
  605. }
  606. public bool PVHe2ValveIsOpen
  607. {
  608. get { return m_PVHe2ValveIsOpen; }
  609. set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
  610. }
  611. public bool TurboPumpPumpingValveIsOpen
  612. {
  613. get { return m_TurboPumpPumpingValveIsOpen; }
  614. set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
  615. }
  616. public bool TurboPumpPurgeValveIsOpen
  617. {
  618. get { return m_TurboPumpPurgeValveIsOpen; }
  619. set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
  620. }
  621. public bool SoftPumpValveIsOpen
  622. {
  623. get { return m_SoftPumpValveIsOpen; }
  624. set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
  625. }
  626. public bool FastPumpValveIsOpen
  627. {
  628. get { return m_FastPumpValveIsOpen; }
  629. set { SetProperty(ref m_FastPumpValveIsOpen, value); }
  630. }
  631. public bool GuageValveIsOpen
  632. {
  633. get { return m_GuageValveIsOpen; }
  634. set { SetProperty(ref m_GuageValveIsOpen, value); }
  635. }
  636. #endregion
  637. public Dictionary<string, object> RtDataValues
  638. {
  639. get { return m_RtDataValues; }
  640. set { SetProperty(ref m_RtDataValues, value); }
  641. }
  642. public bool PumpIsOpen
  643. {
  644. get { return m_PumpIsOpen; }
  645. set { SetProperty(ref m_PumpIsOpen, value); }
  646. }
  647. public bool PendulumValveIsOpen
  648. {
  649. get { return m_PendulumValveIsOpen; }
  650. set { SetProperty(ref m_PendulumValveIsOpen, value); }
  651. }
  652. public bool TurboIsOpen
  653. {
  654. get { return m_TurboIsOpen; }
  655. set { SetProperty(ref m_TurboIsOpen, value); }
  656. }
  657. public bool IsATM
  658. {
  659. get { return m_IsATM; }
  660. set { SetProperty(ref m_IsATM, value); }
  661. }
  662. public bool IsVAC
  663. {
  664. get { return m_IsVAC; }
  665. set { SetProperty(ref m_IsVAC, value); }
  666. }
  667. public bool BRFIsOn
  668. {
  669. get { return m_BRFIsOn; }
  670. set { SetProperty(ref m_BRFIsOn, value); }
  671. }
  672. public bool SRFIsOn
  673. {
  674. get { return m_SRFIsOn; }
  675. set { SetProperty(ref m_SRFIsOn, value); }
  676. }
  677. public int PositionValue
  678. {
  679. get { return m_PositionValue; }
  680. set { SetProperty(ref m_PositionValue, value); }
  681. }
  682. public bool IsPositionMode
  683. {
  684. get { return m_IsPositionMode; }
  685. set { SetProperty(ref m_IsPositionMode, value); }
  686. }
  687. public double HeGasSetpoint
  688. {
  689. get { return m_HeGasSetpoint; }
  690. set
  691. {
  692. SetProperty(ref m_HeGasSetpoint, value);
  693. }
  694. }
  695. public int HePressureSetpoint
  696. {
  697. get { return m_HePressureSetpoint; }
  698. set
  699. {
  700. SetProperty(ref m_HePressureSetpoint, value);
  701. }
  702. }
  703. public float SRFFwdPowerSetpoint
  704. {
  705. get { return m_SRFFwdPowerSetpoint; }
  706. set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
  707. }
  708. public float BRFFwdPowerSetpoint
  709. {
  710. get { return m_BRFFwdPowerSetpoint; }
  711. set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
  712. }
  713. public int ESCVoltage
  714. {
  715. get { return m_ESCVoltage; }
  716. set { SetProperty(ref m_ESCVoltage, value); }
  717. }
  718. public bool HVIsOn
  719. {
  720. get { return m_HVIsOn; }
  721. set { SetProperty(ref m_HVIsOn, value); }
  722. }
  723. public float SRFMatchC1
  724. {
  725. get { return m_SRFMatchC1; }
  726. set { SetProperty(ref m_SRFMatchC1, value); }
  727. }
  728. public float SRFMatchC2
  729. {
  730. get { return m_SRFMatchC2; }
  731. set { SetProperty(ref m_SRFMatchC2, value); }
  732. }
  733. public float BRFMatchC1
  734. {
  735. get { return m_BRFMatchC1; }
  736. set { SetProperty(ref m_BRFMatchC1, value); }
  737. }
  738. public float BRFMatchC2
  739. {
  740. get { return m_BRFMatchC2; }
  741. set { SetProperty(ref m_BRFMatchC2, value); }
  742. }
  743. public bool GasIsFlowing
  744. {
  745. get { return m_GasIsFlowing; }
  746. set { SetProperty(ref m_GasIsFlowing, value); }
  747. }
  748. public bool IsAutoMode
  749. {
  750. get { return m_IsAutoMode; }
  751. set { SetProperty(ref m_IsAutoMode, value); }
  752. }
  753. public string SelectedRecipe
  754. {
  755. get { return m_SelectedRecipe; }
  756. set { SetProperty(ref m_SelectedRecipe, value); }
  757. }
  758. public float ChillerTempSetpoint
  759. {
  760. get { return m_ChillerTempSetpoint; }
  761. set { SetProperty(ref m_ChillerTempSetpoint, value); }
  762. }
  763. public float WallTempSetpoint
  764. {
  765. get { return m_WallTempSetpoint; }
  766. set { SetProperty(ref m_WallTempSetpoint, value); }
  767. }
  768. public bool HeIsPressureMode
  769. {
  770. get { return m_HeIsPressureMode; }
  771. set { SetProperty(ref m_HeIsPressureMode, value); }
  772. }
  773. public bool ChillerIsOn
  774. {
  775. get { return m_ChillerIsOn; }
  776. set { SetProperty(ref m_ChillerIsOn, value); }
  777. }
  778. #endregion
  779. #region 命令
  780. private DelegateCommand _PMInitCommnad;
  781. public DelegateCommand PMInitCommnad =>
  782. _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
  783. private DelegateCommand _PMAbortCommnad;
  784. public DelegateCommand PMAbortCommnad =>
  785. _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
  786. private DelegateCommand _GasCommand;
  787. public DelegateCommand GasCommand =>
  788. _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  789. private DelegateCommand _HeCommand;
  790. public DelegateCommand HeCommand =>
  791. _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
  792. private DelegateCommand _RfCommand;
  793. public DelegateCommand RfCommand =>
  794. _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
  795. private DelegateCommand _PurgeCommand;
  796. public DelegateCommand PurgeCommand =>
  797. _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
  798. private DelegateCommand _VentCommand;
  799. public DelegateCommand VentCommand =>
  800. _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
  801. private DelegateCommand _PumpCommand;
  802. public DelegateCommand PumpCommand =>
  803. _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
  804. private DelegateCommand _OpenPumpCommand;
  805. public DelegateCommand OpenPumpCommand =>
  806. _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
  807. private DelegateCommand _ClosePumpCommand;
  808. public DelegateCommand ClosePumpCommand =>
  809. _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
  810. private DelegateCommand _OpenTurboPumpCommand;
  811. public DelegateCommand OpenTurboPumpCommand =>
  812. _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
  813. private DelegateCommand _CloseTurboPumpCommand;
  814. public DelegateCommand CloseTurboPumpCommand =>
  815. _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
  816. private DelegateCommand _OpenPendulumValveCommand;
  817. public DelegateCommand OpenPendulumValveCommand =>
  818. _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
  819. private DelegateCommand _ClosePendulumValveCommand;
  820. public DelegateCommand ClosePendulumValveCommand =>
  821. _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
  822. private DelegateCommand<object> _PinUpDownCommand;
  823. public DelegateCommand<object> PinUpDownCommand =>
  824. _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
  825. private DelegateCommand _SetSRfCommand;
  826. public DelegateCommand SetSRfCommand =>
  827. _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
  828. private DelegateCommand _SetBRfCommand;
  829. public DelegateCommand SetBRfCommand =>
  830. _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
  831. private DelegateCommand _OpenButterflyValveViewCommand;
  832. public DelegateCommand OpenButterflyValveViewCommand =>
  833. _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
  834. //private DelegateCommand _GasCommand;
  835. //public DelegateCommand GasCommand =>
  836. // _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
  837. private DelegateCommand _HVCommand;
  838. public DelegateCommand HVCommand =>
  839. _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
  840. private DelegateCommand _HVSetCommand;
  841. public DelegateCommand HVSetCommand =>
  842. _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
  843. //private DelegateCommand<object> _SetMatchModeCommand;
  844. //public DelegateCommand<object> SetMatchModeCommand =>
  845. // _SetMatchModeCommand ?? (_SetMatchModeCommand = new DelegateCommand<object>(OnSetMatchMode));
  846. private DelegateCommand _LoadRecipeCommand;
  847. public DelegateCommand LoadRecipeCommand =>
  848. _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
  849. private DelegateCommand<object> _ControlValveCommand;
  850. public DelegateCommand<object> ControlValveCommand =>
  851. _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
  852. private DelegateCommand<object> _RunRecipeCommand;
  853. public DelegateCommand<object> RunRecipeCommand =>
  854. _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
  855. private DelegateCommand _SetChillerTempCommand;
  856. public DelegateCommand SetChillerTempCommand =>
  857. _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
  858. private DelegateCommand _OnOffChillerCommand;
  859. public DelegateCommand OnOffChillerCommand =>
  860. _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
  861. private DelegateCommand<object> _HeaterCommand;
  862. public DelegateCommand<object> HeaterCommand =>
  863. _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
  864. #endregion
  865. #region 构造函数
  866. public OverViewModel()
  867. {
  868. //RTData.init();
  869. m_RtConfigKeys = new List<string>();
  870. m_RtDataKeys = new List<string>();
  871. m_IsATM = true;
  872. ModuleName = "PMA";
  873. addConfigKeys();
  874. addDataKeys();
  875. DispatcherTimer timer = new DispatcherTimer();
  876. timer.Interval = TimeSpan.FromSeconds(0.5);
  877. timer.Tick += timer_Tick;
  878. timer.Start();
  879. }
  880. #endregion
  881. #region 命令方法
  882. private void OnControlValve(object obj)
  883. {
  884. CommonValveControl commonValveControl = (CommonValveControl)obj;
  885. if (commonValveControl.IsCanEdit == true)
  886. {
  887. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
  888. }
  889. }
  890. private void OnPMInit()
  891. {
  892. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
  893. }
  894. private async void OnGas()
  895. {
  896. await Task.Run(async () =>
  897. {
  898. //if (GasIsFlowing==true)
  899. //{
  900. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  901. //}
  902. //else
  903. //{
  904. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
  905. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
  906. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
  907. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
  908. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
  909. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
  910. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
  911. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
  912. await Task.Delay(1000);
  913. object[] mfc = new object[8];
  914. string[] mfcSetPoint = new string[8];
  915. //for (int index = 0; index < mfc.Length; index++)
  916. //{
  917. // mfc[index] = RtDataValues[$"{ModuleName}.MfcGas{index + 1}.SetPoint"];
  918. //}
  919. mfc[0] = MFC1Data.SetPoint;
  920. mfc[1] = MFC2Data.SetPoint;
  921. mfc[2] = MFC3Data.SetPoint;
  922. mfc[3] = MFC4Data.SetPoint;
  923. mfc[4] = MFC5Data.SetPoint;
  924. mfc[5] = MFC6Data.SetPoint;
  925. mfc[6] = MFC7Data.SetPoint;
  926. mfc[7] = MFC8Data.SetPoint;
  927. //if (((Math.Abs((double)mfc[0] - (double)_oldmfc[0]) < 0.01) && (Math.Abs((double)mfc[1] - (double)_oldmfc[1]) < 0.01) && (Math.Abs((double)mfc[2] - (double)_oldmfc[2])) < 0.01)
  928. // || ((Math.Abs((double)mfc[0]) <= 0.01 && Math.Abs((double)mfc[1]) <= 0.01 && Math.Abs((double)mfc[2]) <= 0.01)))
  929. //{
  930. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  931. // return;
  932. //}
  933. //_oldmfc = mfc;
  934. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
  935. //}
  936. });
  937. }
  938. private void OnHe()
  939. {
  940. if (PVHe1ValveIsOpen == true)
  941. {
  942. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
  943. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
  944. }
  945. else
  946. {
  947. if (HeIsPressureMode)
  948. {
  949. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
  950. }
  951. else
  952. {
  953. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
  954. }
  955. }
  956. }
  957. private void OnRf()
  958. {
  959. if (PMCurrentState == PMState.RfPowering)
  960. {
  961. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  962. }
  963. else
  964. {
  965. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
  966. }
  967. }
  968. private void OnPurge()
  969. {
  970. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
  971. //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
  972. //{
  973. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  974. // await Task.Delay(1000);
  975. // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  976. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  977. //}
  978. //else
  979. //{
  980. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  981. // await Task.Delay(1000);
  982. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  983. //}
  984. if (PMCurrentState == PMState.Purging)
  985. {
  986. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
  987. //await Task.Delay(1000);
  988. ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
  989. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  990. }
  991. else
  992. {
  993. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  994. //await Task.Delay(1000);
  995. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
  996. }
  997. }
  998. private void OnVent()
  999. {
  1000. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
  1001. if (PMCurrentState == PMState.Venting)
  1002. {
  1003. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
  1004. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1005. }
  1006. else
  1007. {
  1008. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
  1009. }
  1010. }
  1011. private void OnPump()
  1012. {
  1013. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
  1014. if (PMCurrentState==PMState.Pumping)
  1015. {
  1016. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1017. return;
  1018. }
  1019. if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "IsPumpingOkForProcess")
  1020. {
  1021. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
  1022. return;
  1023. }
  1024. string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
  1025. //{
  1026. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
  1027. //}
  1028. string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
  1029. //{
  1030. // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
  1031. //}
  1032. // 设置底压
  1033. double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
  1034. if (basePressure <= 0.01 || basePressure >= 1000)
  1035. {
  1036. MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
  1037. return;
  1038. }
  1039. double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
  1040. if (pumpLimit <= 0.01 || pumpLimit >= 1200)
  1041. {
  1042. MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
  1043. return;
  1044. }
  1045. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
  1046. InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
  1047. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
  1048. }
  1049. private void OnOpenPump()
  1050. {
  1051. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
  1052. if (PMCurrentState==PMState.LaunchingPump)
  1053. {
  1054. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1055. return;
  1056. }
  1057. //if (PumpIsOpen == true)
  1058. //{
  1059. // return;
  1060. //}
  1061. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
  1062. }
  1063. private void OnClosePump()
  1064. {
  1065. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
  1066. }
  1067. private void OnOpenTurboPump()
  1068. {
  1069. //TurboIsOpen = true;
  1070. //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
  1071. if (PMCurrentState == PMState.LaunchingTurboPump)
  1072. {
  1073. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
  1074. return;
  1075. }
  1076. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
  1077. }
  1078. private void OnCloseTurboPump()
  1079. {
  1080. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
  1081. }
  1082. private void OnOpenPendulumValve()
  1083. {
  1084. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
  1085. }
  1086. private void OnClosePendulumValve()
  1087. {
  1088. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
  1089. }
  1090. private void OnPinUpDown(object upDown)
  1091. {
  1092. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
  1093. }
  1094. private async void OnSetSRf()
  1095. {
  1096. if (!GasIsFlowing == true) return;
  1097. if (SRFIsOn == true)
  1098. {
  1099. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
  1100. }
  1101. else
  1102. {
  1103. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
  1104. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPositionC2}", SRFMatchC2);
  1105. var t = Task.Run(async delegate
  1106. {
  1107. await Task.Delay(100);
  1108. return 42;
  1109. });
  1110. await t;
  1111. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
  1112. }
  1113. }
  1114. private async void OnSetBRf()
  1115. {
  1116. if (!GasIsFlowing == true) return;
  1117. if (BRFIsOn == true)
  1118. {
  1119. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
  1120. }
  1121. else
  1122. {
  1123. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1,BRFMatchC2);
  1124. //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPositionC2}", BRFMatchC2);
  1125. //Thread.Sleep(100);
  1126. var t = Task.Run(async delegate
  1127. {
  1128. await Task.Delay(100);
  1129. return 42;
  1130. });
  1131. await t;
  1132. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
  1133. }
  1134. }
  1135. private void OnPMAbort()
  1136. {
  1137. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
  1138. }
  1139. private void OnOpenButterflyValveView()
  1140. {
  1141. //if (butterflyValveMessageBox == null)
  1142. //{
  1143. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1144. butterflyValveMessageBox = new ButterflyValveView();
  1145. butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
  1146. butterflyValveMessageBox.Left = 700;
  1147. butterflyValveMessageBox.Top = 600;
  1148. butterflyValveMessageBox.Show();
  1149. butterflyValveMessageBox.Owner = _mainWindow;
  1150. //}
  1151. }
  1152. private void OnLoadRecipe()
  1153. {
  1154. OpenFileDialog dialog = new OpenFileDialog();
  1155. dialog.Filter = ".rcp|*.rcp";
  1156. dialog.InitialDirectory = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes");
  1157. if (dialog.ShowDialog() == false) return;
  1158. SelectedRecipe = dialog.SafeFileName.Split('.')[0];
  1159. }
  1160. private async void OnHV()
  1161. {
  1162. if (HVIsOn == true)
  1163. {
  1164. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
  1165. }
  1166. else
  1167. {
  1168. await Task.Run(async () =>
  1169. {
  1170. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
  1171. await Task.Delay(1000);
  1172. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1173. });
  1174. }
  1175. }
  1176. private void OnHVSet()
  1177. {
  1178. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
  1179. }
  1180. //private void OnSetMatchMode(object obj)
  1181. //{
  1182. // switch (obj.ToString())
  1183. // {
  1184. // case "SRFManual":
  1185. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
  1186. // break;
  1187. // case "SRFAuto":
  1188. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
  1189. // break;
  1190. // case "BRFManual":
  1191. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
  1192. // break;
  1193. // case "BRFAuto":
  1194. // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
  1195. // break;
  1196. // }
  1197. //}
  1198. private void OnRunRecipe(object obj)
  1199. {
  1200. string recipeName = SelectedRecipe;
  1201. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
  1202. }
  1203. private void OnSetChillerTemp()
  1204. {
  1205. var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
  1206. float x;
  1207. float.TryParse(value, out x);
  1208. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
  1209. }
  1210. private void OnOffChiller()
  1211. {
  1212. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
  1213. }
  1214. private void OnHeater(object obj)
  1215. {
  1216. AITHeaterData heaterData = obj as AITHeaterData;
  1217. var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
  1218. heaterView = new HeaterView(heaterData);
  1219. heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
  1220. heaterView.Owner = _mainWindow;
  1221. heaterView.Show();
  1222. }
  1223. #endregion
  1224. #region 私有方法
  1225. void timer_Tick(object sender, EventArgs e)
  1226. {
  1227. RtConfigValues = QueryDataClient.Instance.Service.PollConfig(m_RtConfigKeys);
  1228. RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
  1229. var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
  1230. InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
  1231. PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
  1232. GasFinalValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGasFinal.IsOpen"];
  1233. PV11ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV11.IsOpen"];
  1234. PV12ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV12.IsOpen"];
  1235. PV21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV21.IsOpen"];
  1236. PV22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV22.IsOpen"];
  1237. PV31ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV31.IsOpen"];
  1238. PV32ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV32.IsOpen"];
  1239. PV41ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV41.IsOpen"];
  1240. PV42ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV42.IsOpen"];
  1241. MFC1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc1.IsOpen"];
  1242. MFC2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc2.IsOpen"];
  1243. MFC3ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc3.IsOpen"];
  1244. MFC4ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc4.IsOpen"];
  1245. MFC5ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc5.IsOpen"];
  1246. MFC6ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc6.IsOpen"];
  1247. MFC7ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc7.IsOpen"];
  1248. MFC8ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc8.IsOpen"];
  1249. N2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveN2.IsOpen"];
  1250. SoftPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveSoftPump.IsOpen"];
  1251. FastPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveFastPump.IsOpen"];
  1252. GuageValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGuage.IsOpen"];
  1253. PVHe1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe1.IsOpen"];
  1254. PVHe2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe2.IsOpen"];
  1255. PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
  1256. PVN22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN22.IsOpen"];
  1257. TurboPumpPumpingValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPumping.IsOpen"];
  1258. TurboPumpPurgeValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPurge.IsOpen"];
  1259. HVIsOn = (bool)RtDataValues[$"{ModuleName}.ESCHV.IsOn"];
  1260. PumpIsOpen = (bool)RtDataValues[$"{ModuleName}.PumpIsRunning"];
  1261. TurboIsOpen = (bool)RtDataValues[$"{ModuleName}.TurboPumpIsRunning"];
  1262. BRFIsOn = (bool)RtDataValues[$"{ModuleName}.BRfIsOn"];
  1263. SRFIsOn = (bool)RtDataValues[$"{ModuleName}.SRfIsOn"];
  1264. LiftPinIsUp= (bool)RtDataValues[$"{ModuleName}.LiftPinIsUp"];
  1265. IsSlitDoorClosed = (bool)RtDataValues[$"{ModuleName}.IsSlitDoorClosed"];
  1266. IsLidClosed = (bool)RtDataValues[$"{ModuleName}.IsLidClosed"];
  1267. PendulumValvePosition = float.Parse(RtDataValues[$"{ModuleName}.GetPVPosition"].ToString());
  1268. TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
  1269. PositionValue = -((int)((PendulumValvePosition) * 0.09));
  1270. PMState currentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
  1271. if (PMCurrentState != currentState)
  1272. {
  1273. PMCurrentState = currentState;
  1274. }
  1275. GasIsFlowing = PMCurrentState == PMState.GasFlowing;
  1276. MFC1Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas1"];
  1277. MFC2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas2"];
  1278. MFC3Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas3"];
  1279. MFC4Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas4"];
  1280. MFC5Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas5"];
  1281. MFC6Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas6"];
  1282. MFC7Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas7"];
  1283. MFC8Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas8"];
  1284. MFCHeData= (AITMfcData)RtDataValues[$"{ModuleName}.MfcHe"];
  1285. MFCN2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcN2"];
  1286. ValveHeaterData= (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
  1287. ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
  1288. WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
  1289. ProcessHighPressure= float.Parse(RtDataValues[$"{ModuleName}.ProcessHighPressure"].ToString());
  1290. ProcessLowPressure = float.Parse(RtDataValues[$"{ModuleName}.ProcessLowPressure"].ToString());
  1291. ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
  1292. ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
  1293. ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
  1294. PendulumValveIsOpen = (bool)RtDataValues[$"{ModuleName}.PendulumValve.IsOpen"];
  1295. ChillerIsOn= (bool)RtDataValues[$"{ModuleName}.Chiller.IsOn"];
  1296. SourceRFFanInterlock= (bool)RtDataValues[$"{ModuleName}.SourceRFFanInterlock"];
  1297. IsWLK= (bool)RtDataValues[$"{ModuleName}.IsWLK"];
  1298. IsWaterFlowOk= (bool)RtDataValues[$"{ModuleName}.IsWaterFlowOk"];
  1299. IsTurboPumpInterlock= (bool)RtDataValues[$"{ModuleName}.IsTurboPumpInterlock"];
  1300. IsCDAOK= (bool)RtDataValues[$"{ModuleName}.IsCDA_OK"];
  1301. SensorGasBoxDoor= (bool)RtDataValues[$"{ModuleName}.SensorGasBoxDoor"];
  1302. SensorGasBoxPressure= (bool)RtDataValues[$"{ModuleName}.SensorGasBoxPressure"];
  1303. IsATM= (bool)RtDataValues[$"{ModuleName}.IsATM"];
  1304. IsVAC = (bool)RtDataValues[$"{ModuleName}.IsVAC"];
  1305. ESCHVOutputVoltage= (int)RtDataValues[$"{ModuleName}.ESCHV.OutputVoltage"];
  1306. SRfReflectPower= float.Parse(RtDataValues[$"{ModuleName}.SRfReflectPower"].ToString());
  1307. SRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.SRfForwardPowerFeedBack"].ToString());
  1308. BRfReflectPower = float.Parse(RtDataValues[$"{ModuleName}.BRfReflectPower"].ToString());
  1309. BRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.BRfForwardPowerFeedBack"].ToString());
  1310. MatchWorkMode=RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.WorkMode") ? (int)RtDataValues[$"{ModuleName}.{VenusDevice.Match}.WorkMode"] : 0;
  1311. BiasMatchWorkMode = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode") ? (int)RtDataValues[$"{ ModuleName}.{VenusDevice.BiasMatch}.WorkMode"]:0;
  1312. MatchC1= RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C1"].ToString()):0;
  1313. MatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C2"].ToString()) : 0;
  1314. BiasMatchC1 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C1"].ToString()):0;
  1315. BiasMatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C2"].ToString()) : 0;
  1316. TurboPumpWaterFlowSwitch= ((AITSensorData)RtDataValues[$"{ModuleName}.TurboPumpWaterFlowSwitch"]).Value;
  1317. IsTurboPumpAtSpeed = (bool)RtDataValues[$"{ModuleName}.IsTurboPumpAtSpeed"];
  1318. IsHasWafer= (bool)RtDataValues[$"{ModuleName}.HasWafer"];
  1319. }
  1320. private void addConfigKeys()
  1321. {
  1322. m_RtConfigKeys.Add($"{ModuleName}.Pump.PumpBasePressure");
  1323. m_RtConfigKeys.Add($"{ModuleName}.Pump.PumpTimeLimit");
  1324. }
  1325. private void addDataKeys()
  1326. {
  1327. m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
  1328. m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
  1329. m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
  1330. m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
  1331. m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
  1332. m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
  1333. m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
  1334. m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
  1335. m_RtDataKeys.Add($"{ModuleName}.MfcHe");
  1336. m_RtDataKeys.Add($"{ModuleName}.MfcN2");
  1337. m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
  1338. m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
  1339. m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
  1340. m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
  1341. m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
  1342. m_RtDataKeys.Add($"{ModuleName}.IsATM");
  1343. m_RtDataKeys.Add($"{ModuleName}.IsVAC");
  1344. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
  1345. m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
  1346. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1347. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1348. m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
  1349. m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
  1350. m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
  1351. m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
  1352. m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
  1353. m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
  1354. m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
  1355. m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
  1356. m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
  1357. m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
  1358. m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
  1359. m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
  1360. m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
  1361. m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
  1362. m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
  1363. m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
  1364. m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
  1365. m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
  1366. m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
  1367. m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
  1368. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
  1369. m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
  1370. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
  1371. m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
  1372. m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
  1373. m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
  1374. m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
  1375. m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
  1376. m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
  1377. m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
  1378. m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
  1379. m_RtDataKeys.Add($"{ModuleName}.SRfIsOn");
  1380. m_RtDataKeys.Add($"{ModuleName}.SRfForwardPowerFeedBack");
  1381. m_RtDataKeys.Add($"{ModuleName}.SRfReflectPower");
  1382. m_RtDataKeys.Add($"{ModuleName}.BRfIsOn");
  1383. m_RtDataKeys.Add($"{ModuleName}.BRfForwardPowerFeedBack");
  1384. m_RtDataKeys.Add($"{ModuleName}.BRfReflectPower");
  1385. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
  1386. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
  1387. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
  1388. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
  1389. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
  1390. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode");
  1391. m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.IsOpen");
  1392. m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
  1393. m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
  1394. m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
  1395. m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
  1396. m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
  1397. m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
  1398. m_RtDataKeys.Add($"{ModuleName}.IsWLK");
  1399. m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
  1400. m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
  1401. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
  1402. m_RtDataKeys.Add($"{ModuleName}.SensorGasBoxDoor");
  1403. m_RtDataKeys.Add($"{ModuleName}.SensorGasBoxPressure");
  1404. m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
  1405. m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
  1406. m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
  1407. m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
  1408. m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
  1409. m_RtDataKeys.Add($"{ModuleName}.FsmState");
  1410. m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
  1411. m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch");
  1412. m_RtDataKeys.Add($"{ModuleName}.HasWafer");
  1413. }
  1414. #endregion
  1415. }
  1416. }