123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641 |
- using Aitex.Core.Common.DeviceData;
- using MECF.Framework.Common.DataCenter;
- using MECF.Framework.Common.OperationCenter;
- using Prism.Commands;
- using Prism.Mvvm;
- using System;
- using System.Collections.Generic;
- using System.Windows;
- using System.Windows.Threading;
- using Venus_Core;
- using Venus_MainPages.Views;
- using System.Linq;
- using System.Threading.Tasks;
- using Microsoft.Win32;
- using System.IO;
- using Venus_Themes.CustomControls;
- namespace Venus_MainPages.ViewModels
- {
- internal class OverViewModel : BindableBase
- {
- #region 私有字段
- private bool m_PVN21ValveIsOpen;
- private bool m_PVN22ValveIsOpen;
- private bool m_N2ValveIsOpen;
- private bool m_PV11ValveIsOpen;
- private bool m_PV12ValveIsOpen;
- private bool m_PV21ValveIsOpen;
- private bool m_PV22ValveIsOpen;
- private bool m_PV31ValveIsOpen;
- private bool m_PV32ValveIsOpen;
- private bool m_PV41ValveIsOpen;
- private bool m_PV42ValveIsOpen;
- private bool m_MFC1ValveIsOpen;
- private bool m_MFC2ValveIsOpen;
- private bool m_MFC3ValveIsOpen;
- private bool m_MFC4ValveIsOpen;
- private bool m_MFC5ValveIsOpen;
- private bool m_MFC6ValveIsOpen;
- private bool m_MFC7ValveIsOpen;
- private bool m_MFC8ValveIsOpen;
- private bool m_GasFinalValveIsOpen;
- private bool m_SoftPumpValveIsOpen;
- private bool m_FastPumpValveIsOpen;
- private bool m_PVHe1ValveIsOpen;
- private bool m_PVHe2ValveIsOpen;
- private bool m_TurboPumpPumpingValveIsOpen;
- private bool m_TurboPumpPurgeValveIsOpen;
- private bool m_GuageValveIsOpen;
- private bool m_PendulumValveIsOpen;
- private bool m_BRFIsOn;
- private bool m_SRFIsOn;
- private double m_HeGasSetpoint;
- private int m_HePressureSetpoint;
- private float m_SRFFwdPowerSetpoint;
- private float m_BRFFwdPowerSetpoint;
- private float m_SRFMatchC1;
- private float m_SRFMatchC2;
- private float m_BRFMatchC1;
- private float m_BRFMatchC2;
- private double m_MFC1SetPoint;
- private double m_MFC2SetPoint;
- private double m_MFC3SetPoint;
- private double m_MFC4SetPoint;
- private double m_MFC5SetPoint;
- private double m_MFC6SetPoint;
- private double m_MFC7SetPoint;
- private double m_MFC8SetPoint;
- private double m_N2SetPoint;
- private AITMfcData m_MFC1Data;
- private AITMfcData m_MFC2Data;
- private AITMfcData m_MFC3Data;
- private AITMfcData m_MFC4Data;
- private AITMfcData m_MFC5Data;
- private AITMfcData m_MFC6Data;
- private AITMfcData m_MFC7Data;
- private AITMfcData m_MFC8Data;
- private AITMfcData m_MFCHeData;
- private AITMfcData m_MFCN2Data;
- private AITHeaterData m_ValveHeaterData;
- private AITHeaterData m_ForelineHeaterData;
- private AITHeaterData m_WallHeaterData;
- private PMState m_PMCurrentState;
- private bool m_SourceRFFanInterlock;
- private bool m_IsWLK;
- private bool m_IsWaterFlowOk;
- private bool m_IsTurboPumpInterlock;
- private bool m_IsCDAOK;
- private bool m_SensorGasBoxDoor;
- private bool m_SensorGasBoxPressure;
- private bool m_PumpIsOpen;
- private bool m_TurboIsOpen;
- private bool m_IsATM;
- private bool m_IsVAC;
- private bool m_HVIsOn;
- private List<string> m_RtConfigKeys;
- private Dictionary<string, object> m_RtConfigValues;
- private List<string> m_RtDataKeys;
- private Dictionary<string, object> m_RtDataValues;
- private int m_PositionValue;
- private bool m_IsPositionMode;
- private int m_ESCVoltage;
- private bool m_GasIsFlowing;
- private bool m_IsAutoMode;
- private string m_SelectedRecipe;
- private float m_ChillerTempSetpoint;
- private float m_WallTempSetpoint;
- private bool m_HeIsPressureMode;
- private bool m_ChillerIsOn;
- private float m_ProcessHighPressure;
- private float m_ProcessLowPressure;
- private float m_ForelinePressurePressure;
- private float m_ESCHePressure;
- ButterflyValveView butterflyValveMessageBox;
- HeaterView heaterView;
- private int m_TurboPumpRotationalSpeed;
- private bool m_LiftPinIsUp;
- private bool m_IsSlitDoorClosed;
- private bool m_IsLidClosed;
- private float m_ChillerTemperature;
- private int m_ESCHVOutputVoltage;
- private float m_SRfReflectPower;
- private float m_SRfForwardPowerFeedBack;
- private float m_BRfReflectPower;
- private float m_BRfForwardPowerFeedBack;
- private int m_MatchWorkMode;
- private int m_BiasMatchWorkMode;
- private float m_MatchC1;
- private float m_MatchC2;
- private float m_BiasMatchC1;
- private float m_BiasMatchC2;
- private float m_PendulumValvePosition;
- private bool m_IsTurboPumpAtSpeed;
- private bool m_TurboPumpWaterFlowSwitch;
- private bool m_IsHasWafer;
- private Recipe m_CurrentRecipe=new Recipe ();
- #endregion
- #region 属性
- public Recipe CurrentRecipe
- {
- get { return m_CurrentRecipe; }
- set { SetProperty(ref m_CurrentRecipe, value); }
- }
- public bool IsHasWafer
- {
- get { return m_IsHasWafer; }
- set { SetProperty(ref m_IsHasWafer, value); }
- }
- public bool IsTurboPumpAtSpeed
- {
- get { return m_IsTurboPumpAtSpeed; }
- set { SetProperty(ref m_IsTurboPumpAtSpeed, value); }
- }
- public bool TurboPumpWaterFlowSwitch
- {
- get { return m_TurboPumpWaterFlowSwitch; }
- set { SetProperty(ref m_TurboPumpWaterFlowSwitch, value); }
- }
- public float PendulumValvePosition
- {
- get { return m_PendulumValvePosition; }
- set{SetProperty(ref m_PendulumValvePosition, value);}
- }
- public float BiasMatchC1
- {
- get { return m_BiasMatchC1; }
- set
- {
- SetProperty(ref m_BiasMatchC1, value);
- }
- }
- public float BiasMatchC2
- {
- get { return m_BiasMatchC2; }
- set
- {
- SetProperty(ref m_BiasMatchC2, value);
- }
- }
- public float MatchC1
- {
- get { return m_MatchC1; }
- set
- {
- SetProperty(ref m_MatchC1, value);
- }
- }
- public float MatchC2
- {
- get { return m_MatchC2; }
- set
- {
- SetProperty(ref m_MatchC2, value);
- }
- }
- public int BiasMatchWorkMode
- {
- get { return m_BiasMatchWorkMode; }
- set
- {
- SetProperty(ref m_BiasMatchWorkMode, value);
- }
- }
- public int MatchWorkMode
- {
- get { return m_MatchWorkMode; }
- set
- {
- SetProperty(ref m_MatchWorkMode, value);
- }
- }
- public float BRfReflectPower
- {
- get { return m_BRfReflectPower; }
- set
- {
- SetProperty(ref m_BRfReflectPower, value);
- }
- }
- public float BRfForwardPowerFeedBack
- {
- get { return m_BRfForwardPowerFeedBack; }
- set
- {
- SetProperty(ref m_BRfForwardPowerFeedBack, value);
- }
- }
- public float SRfReflectPower
- {
- get { return m_SRfReflectPower; }
- set
- {
- SetProperty(ref m_SRfReflectPower, value);
- }
- }
- public float SRfForwardPowerFeedBack
- {
- get { return m_SRfForwardPowerFeedBack; }
- set
- {
- SetProperty(ref m_SRfForwardPowerFeedBack, value);
- }
- }
- public int ESCHVOutputVoltage
- {
- get { return m_ESCHVOutputVoltage; }
- set
- {
- SetProperty(ref m_ESCHVOutputVoltage, value);
- }
- }
- public float ChillerTemperature
- {
- get { return m_ChillerTemperature; }
- set
- {
- SetProperty(ref m_ChillerTemperature, value);
- }
- }
- public bool IsLidClosed
- {
- get { return m_IsLidClosed; }
- set
- {
- SetProperty(ref m_IsLidClosed, value);
- }
- }
- public bool IsSlitDoorClosed
- {
- get { return m_IsSlitDoorClosed; }
- set
- {
- SetProperty(ref m_IsSlitDoorClosed, value);
- }
- }
- public bool LiftPinIsUp
- {
- get { return m_LiftPinIsUp; }
- set
- {
- SetProperty(ref m_LiftPinIsUp, value);
- }
- }
- public int TurboPumpRotationalSpeed
- {
- get { return m_TurboPumpRotationalSpeed; }
- set
- {
- SetProperty(ref m_TurboPumpRotationalSpeed, value);
- }
- }
- public float ESCHePressure
- {
- get { return m_ESCHePressure; }
- set
- {
- SetProperty(ref m_ESCHePressure, value);
- }
- }
- public float ProcessHighPressure
- {
- get { return m_ProcessHighPressure; }
- set
- {
- SetProperty(ref m_ProcessHighPressure, value);
- }
- }
- public float ProcessLowPressure
- {
- get { return m_ProcessLowPressure; }
- set
- {
- SetProperty(ref m_ProcessLowPressure, value);
- }
- }
- public float ForelinePressure
- {
- get { return m_ForelinePressurePressure; }
- set
- {
- SetProperty(ref m_ForelinePressurePressure, value);
- }
- }
- public bool SourceRFFanInterlock
- {
- get { return m_SourceRFFanInterlock; }
- set
- {
- SetProperty(ref m_SourceRFFanInterlock, value);
- }
- }
- public bool IsWLK
- {
- get { return m_IsWLK; }
- set
- {
- SetProperty(ref m_IsWLK, value);
- }
- }
- public bool IsWaterFlowOk
- {
- get { return m_IsWaterFlowOk; }
- set
- {
- SetProperty(ref m_IsWaterFlowOk, value);
- }
- }
- public bool IsCDAOK
- {
- get { return m_IsCDAOK; }
- set
- {
- SetProperty(ref m_IsCDAOK, value);
- }
- }
- public bool SensorGasBoxDoor
- {
- get { return m_SensorGasBoxDoor; }
- set
- {
- SetProperty(ref m_SensorGasBoxDoor, value);
- }
- }
- public bool SensorGasBoxPressure
- {
- get { return m_SensorGasBoxPressure; }
- set
- {
- SetProperty(ref m_SensorGasBoxPressure, value);
- }
- }
- public bool IsTurboPumpInterlock
- {
- get { return m_IsTurboPumpInterlock; }
- set
- {
- SetProperty(ref m_IsTurboPumpInterlock, value);
- }
- }
- public string ModuleName { get; set; }
- public double MFC1SetPoint
- {
- get { return m_MFC1SetPoint; }
- set { SetProperty(ref m_MFC1SetPoint, value); }
- }
- public double MFC2SetPoint
- {
- get { return m_MFC2SetPoint; }
- set { SetProperty(ref m_MFC2SetPoint, value); }
- }
- public double MFC3SetPoint
- {
- get { return m_MFC3SetPoint; }
- set { SetProperty(ref m_MFC3SetPoint, value); }
- }
- public double MFC4SetPoint
- {
- get { return m_MFC4SetPoint; }
- set { SetProperty(ref m_MFC4SetPoint, value); }
- }
- public double MFC5SetPoint
- {
- get { return m_MFC5SetPoint; }
- set { SetProperty(ref m_MFC5SetPoint, value); }
- }
- public double MFC6SetPoint
- {
- get { return m_MFC6SetPoint; }
- set { SetProperty(ref m_MFC6SetPoint, value); }
- }
- public double MFC7SetPoint
- {
- get { return m_MFC7SetPoint; }
- set { SetProperty(ref m_MFC7SetPoint, value); }
- }
- public double MFC8SetPoint
- {
- get { return m_MFC8SetPoint; }
- set { SetProperty(ref m_MFC8SetPoint, value); }
- }
- public double N2SetPoint
- {
- get { return m_N2SetPoint; }
- set { SetProperty(ref m_N2SetPoint, value); }
- }
- public AITMfcData MFC1Data
- {
- get { return m_MFC1Data; }
- set { SetProperty(ref m_MFC1Data, value); }
- }
- public AITMfcData MFC2Data
- {
- get { return m_MFC2Data; }
- set { SetProperty(ref m_MFC2Data, value); }
- }
- public AITMfcData MFC3Data
- {
- get { return m_MFC3Data; }
- set { SetProperty(ref m_MFC3Data, value); }
- }
- public AITMfcData MFC4Data
- {
- get { return m_MFC4Data; }
- set { SetProperty(ref m_MFC4Data, value); }
- }
- public AITMfcData MFC5Data
- {
- get { return m_MFC5Data; }
- set { SetProperty(ref m_MFC5Data, value); }
- }
- public AITMfcData MFC6Data
- {
- get { return m_MFC6Data; }
- set { SetProperty(ref m_MFC6Data, value); }
- }
- public AITMfcData MFC7Data
- {
- get { return m_MFC7Data; }
- set { SetProperty(ref m_MFC7Data, value); }
- }
- public AITMfcData MFC8Data
- {
- get { return m_MFC8Data; }
- set { SetProperty(ref m_MFC8Data, value); }
- }
- public AITMfcData MFCHeData
- {
- get { return m_MFCHeData; }
- set { SetProperty(ref m_MFCHeData, value); }
- }
- public AITMfcData MFCN2Data
- {
- get { return m_MFCN2Data; }
- set { SetProperty(ref m_MFCN2Data, value); }
- }
- public AITHeaterData ValveHeaterData
- {
- get { return m_ValveHeaterData; }
- set { SetProperty(ref m_ValveHeaterData, value); }
- }
- public AITHeaterData ForelineHeaterData
- {
- get { return m_ForelineHeaterData; }
- set { SetProperty(ref m_ForelineHeaterData, value); }
- }
- public AITHeaterData WallHeaterData
- {
- get { return m_WallHeaterData; }
- set { SetProperty(ref m_WallHeaterData, value); }
- }
- public PMState PMCurrentState
- {
- get { return m_PMCurrentState; }
- set { SetProperty(ref m_PMCurrentState, value); }
- }
- public Dictionary<string, object> RtConfigValues
- {
- get { return m_RtConfigValues; }
- set { SetProperty(ref m_RtConfigValues, value); }
- }
- #region 阀
- public bool GasFinalValveIsOpen
- {
- get { return m_GasFinalValveIsOpen; }
- set { SetProperty(ref m_GasFinalValveIsOpen, value); }
- }
- public bool PVN21ValveIsOpen
- {
- get { return m_PVN21ValveIsOpen; }
- set { SetProperty(ref m_PVN21ValveIsOpen, value); }
- }
- public bool PVN22ValveIsOpen
- {
- get { return m_PVN22ValveIsOpen; }
- set { SetProperty(ref m_PVN22ValveIsOpen, value); }
- }
- public bool N2ValveIsOpen
- {
- get { return m_N2ValveIsOpen; }
- set { SetProperty(ref m_N2ValveIsOpen, value); }
- }
- public bool PV11ValveIsOpen
- {
- get { return m_PV11ValveIsOpen; }
- set { SetProperty(ref m_PV11ValveIsOpen, value); }
- }
- public bool PV12ValveIsOpen
- {
- get { return m_PV12ValveIsOpen; }
- set { SetProperty(ref m_PV12ValveIsOpen, value); }
- }
- public bool MFC1ValveIsOpen
- {
- get { return m_MFC1ValveIsOpen; }
- set { SetProperty(ref m_MFC1ValveIsOpen, value); }
- }
- public bool PV21ValveIsOpen
- {
- get { return m_PV21ValveIsOpen; }
- set { SetProperty(ref m_PV21ValveIsOpen, value); }
- }
- public bool PV22ValveIsOpen
- {
- get { return m_PV22ValveIsOpen; }
- set { SetProperty(ref m_PV22ValveIsOpen, value); }
- }
- public bool MFC2ValveIsOpen
- {
- get { return m_MFC2ValveIsOpen; }
- set { SetProperty(ref m_MFC2ValveIsOpen, value); }
- }
- public bool PV31ValveIsOpen
- {
- get { return m_PV31ValveIsOpen; }
- set { SetProperty(ref m_PV31ValveIsOpen, value); }
- }
- public bool PV32ValveIsOpen
- {
- get { return m_PV32ValveIsOpen; }
- set { SetProperty(ref m_PV32ValveIsOpen, value); }
- }
- public bool MFC3ValveIsOpen
- {
- get { return m_MFC3ValveIsOpen; }
- set { SetProperty(ref m_MFC3ValveIsOpen, value); }
- }
- public bool PV41ValveIsOpen
- {
- get { return m_PV41ValveIsOpen; }
- set { SetProperty(ref m_PV41ValveIsOpen, value); }
- }
- public bool PV42ValveIsOpen
- {
- get { return m_PV42ValveIsOpen; }
- set { SetProperty(ref m_PV42ValveIsOpen, value); }
- }
- public bool MFC4ValveIsOpen
- {
- get { return m_MFC4ValveIsOpen; }
- set { SetProperty(ref m_MFC4ValveIsOpen, value); }
- }
- public bool MFC5ValveIsOpen
- {
- get { return m_MFC5ValveIsOpen; }
- set { SetProperty(ref m_MFC5ValveIsOpen, value); }
- }
- public bool MFC6ValveIsOpen
- {
- get { return m_MFC6ValveIsOpen; }
- set { SetProperty(ref m_MFC6ValveIsOpen, value); }
- }
- public bool MFC7ValveIsOpen
- {
- get { return m_MFC7ValveIsOpen; }
- set { SetProperty(ref m_MFC7ValveIsOpen, value); }
- }
- public bool MFC8ValveIsOpen
- {
- get { return m_MFC8ValveIsOpen; }
- set { SetProperty(ref m_MFC8ValveIsOpen, value); }
- }
- public bool PVHe1ValveIsOpen
- {
- get { return m_PVHe1ValveIsOpen; }
- set { SetProperty(ref m_PVHe1ValveIsOpen, value); }
- }
- public bool PVHe2ValveIsOpen
- {
- get { return m_PVHe2ValveIsOpen; }
- set { SetProperty(ref m_PVHe2ValveIsOpen, value); }
- }
- public bool TurboPumpPumpingValveIsOpen
- {
- get { return m_TurboPumpPumpingValveIsOpen; }
- set { SetProperty(ref m_TurboPumpPumpingValveIsOpen, value); }
- }
- public bool TurboPumpPurgeValveIsOpen
- {
- get { return m_TurboPumpPurgeValveIsOpen; }
- set { SetProperty(ref m_TurboPumpPurgeValveIsOpen, value); }
- }
- public bool SoftPumpValveIsOpen
- {
- get { return m_SoftPumpValveIsOpen; }
- set { SetProperty(ref m_SoftPumpValveIsOpen, value); }
- }
- public bool FastPumpValveIsOpen
- {
- get { return m_FastPumpValveIsOpen; }
- set { SetProperty(ref m_FastPumpValveIsOpen, value); }
- }
- public bool GuageValveIsOpen
- {
- get { return m_GuageValveIsOpen; }
- set { SetProperty(ref m_GuageValveIsOpen, value); }
- }
- #endregion
- public Dictionary<string, object> RtDataValues
- {
- get { return m_RtDataValues; }
- set { SetProperty(ref m_RtDataValues, value); }
- }
-
-
- public bool PumpIsOpen
- {
- get { return m_PumpIsOpen; }
- set { SetProperty(ref m_PumpIsOpen, value); }
- }
- public bool PendulumValveIsOpen
- {
- get { return m_PendulumValveIsOpen; }
- set { SetProperty(ref m_PendulumValveIsOpen, value); }
- }
- public bool TurboIsOpen
- {
- get { return m_TurboIsOpen; }
- set { SetProperty(ref m_TurboIsOpen, value); }
- }
- public bool IsATM
- {
- get { return m_IsATM; }
- set { SetProperty(ref m_IsATM, value); }
- }
- public bool IsVAC
- {
- get { return m_IsVAC; }
- set { SetProperty(ref m_IsVAC, value); }
- }
-
- public bool BRFIsOn
- {
- get { return m_BRFIsOn; }
- set { SetProperty(ref m_BRFIsOn, value); }
- }
- public bool SRFIsOn
- {
- get { return m_SRFIsOn; }
- set { SetProperty(ref m_SRFIsOn, value); }
- }
- public int PositionValue
- {
- get { return m_PositionValue; }
- set { SetProperty(ref m_PositionValue, value); }
- }
- public bool IsPositionMode
- {
- get { return m_IsPositionMode; }
- set { SetProperty(ref m_IsPositionMode, value); }
- }
-
- public double HeGasSetpoint
- {
- get { return m_HeGasSetpoint; }
- set
- {
- SetProperty(ref m_HeGasSetpoint, value);
- }
- }
- public int HePressureSetpoint
- {
- get { return m_HePressureSetpoint; }
- set
- {
- SetProperty(ref m_HePressureSetpoint, value);
- }
- }
- public float SRFFwdPowerSetpoint
- {
- get { return m_SRFFwdPowerSetpoint; }
- set { SetProperty(ref m_SRFFwdPowerSetpoint, value); }
- }
- public float BRFFwdPowerSetpoint
- {
- get { return m_BRFFwdPowerSetpoint; }
- set { SetProperty(ref m_BRFFwdPowerSetpoint, value); }
- }
- public int ESCVoltage
- {
- get { return m_ESCVoltage; }
- set { SetProperty(ref m_ESCVoltage, value); }
- }
- public bool HVIsOn
- {
- get { return m_HVIsOn; }
- set { SetProperty(ref m_HVIsOn, value); }
- }
- public float SRFMatchC1
- {
- get { return m_SRFMatchC1; }
- set { SetProperty(ref m_SRFMatchC1, value); }
- }
- public float SRFMatchC2
- {
- get { return m_SRFMatchC2; }
- set { SetProperty(ref m_SRFMatchC2, value); }
- }
- public float BRFMatchC1
- {
- get { return m_BRFMatchC1; }
- set { SetProperty(ref m_BRFMatchC1, value); }
- }
- public float BRFMatchC2
- {
- get { return m_BRFMatchC2; }
- set { SetProperty(ref m_BRFMatchC2, value); }
- }
- public bool GasIsFlowing
- {
- get { return m_GasIsFlowing; }
- set { SetProperty(ref m_GasIsFlowing, value); }
- }
- public bool IsAutoMode
- {
- get { return m_IsAutoMode; }
- set { SetProperty(ref m_IsAutoMode, value); }
- }
- public string SelectedRecipe
- {
- get { return m_SelectedRecipe; }
- set { SetProperty(ref m_SelectedRecipe, value); }
- }
- public float ChillerTempSetpoint
- {
- get { return m_ChillerTempSetpoint; }
- set { SetProperty(ref m_ChillerTempSetpoint, value); }
- }
- public float WallTempSetpoint
- {
- get { return m_WallTempSetpoint; }
- set { SetProperty(ref m_WallTempSetpoint, value); }
- }
- public bool HeIsPressureMode
- {
- get { return m_HeIsPressureMode; }
- set { SetProperty(ref m_HeIsPressureMode, value); }
- }
- public bool ChillerIsOn
- {
- get { return m_ChillerIsOn; }
- set { SetProperty(ref m_ChillerIsOn, value); }
- }
- #endregion
- #region 命令
- private DelegateCommand _PMInitCommnad;
- public DelegateCommand PMInitCommnad =>
- _PMInitCommnad ?? (_PMInitCommnad = new DelegateCommand(OnPMInit));
- private DelegateCommand _PMAbortCommnad;
- public DelegateCommand PMAbortCommnad =>
- _PMAbortCommnad ?? (_PMAbortCommnad = new DelegateCommand(OnPMAbort));
- private DelegateCommand _GasCommand;
- public DelegateCommand GasCommand =>
- _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
- private DelegateCommand _HeCommand;
- public DelegateCommand HeCommand =>
- _HeCommand ?? (_HeCommand = new DelegateCommand(OnHe));
- private DelegateCommand _RfCommand;
- public DelegateCommand RfCommand =>
- _RfCommand ?? (_RfCommand = new DelegateCommand(OnRf));
- private DelegateCommand _PurgeCommand;
- public DelegateCommand PurgeCommand =>
- _PurgeCommand ?? (_PurgeCommand = new DelegateCommand(OnPurge));
- private DelegateCommand _VentCommand;
- public DelegateCommand VentCommand =>
- _VentCommand ?? (_VentCommand = new DelegateCommand(OnVent));
- private DelegateCommand _PumpCommand;
- public DelegateCommand PumpCommand =>
- _PumpCommand ?? (_PumpCommand = new DelegateCommand(OnPump));
- private DelegateCommand _OpenPumpCommand;
- public DelegateCommand OpenPumpCommand =>
- _OpenPumpCommand ?? (_OpenPumpCommand = new DelegateCommand(OnOpenPump));
- private DelegateCommand _ClosePumpCommand;
- public DelegateCommand ClosePumpCommand =>
- _ClosePumpCommand ?? (_ClosePumpCommand = new DelegateCommand(OnClosePump));
- private DelegateCommand _OpenTurboPumpCommand;
- public DelegateCommand OpenTurboPumpCommand =>
- _OpenTurboPumpCommand ?? (_OpenTurboPumpCommand = new DelegateCommand(OnOpenTurboPump));
- private DelegateCommand _CloseTurboPumpCommand;
- public DelegateCommand CloseTurboPumpCommand =>
- _CloseTurboPumpCommand ?? (_CloseTurboPumpCommand = new DelegateCommand(OnCloseTurboPump));
- private DelegateCommand _OpenPendulumValveCommand;
- public DelegateCommand OpenPendulumValveCommand =>
- _OpenPendulumValveCommand ?? (_OpenPendulumValveCommand = new DelegateCommand(OnOpenPendulumValve));
- private DelegateCommand _ClosePendulumValveCommand;
- public DelegateCommand ClosePendulumValveCommand =>
- _ClosePendulumValveCommand ?? (_ClosePendulumValveCommand = new DelegateCommand(OnClosePendulumValve));
- private DelegateCommand<object> _PinUpDownCommand;
- public DelegateCommand<object> PinUpDownCommand =>
- _PinUpDownCommand ?? (_PinUpDownCommand = new DelegateCommand<object>(OnPinUpDown));
- private DelegateCommand _SetSRfCommand;
- public DelegateCommand SetSRfCommand =>
- _SetSRfCommand ?? (_SetSRfCommand = new DelegateCommand(OnSetSRf));
- private DelegateCommand _SetBRfCommand;
- public DelegateCommand SetBRfCommand =>
- _SetBRfCommand ?? (_SetBRfCommand = new DelegateCommand(OnSetBRf));
- private DelegateCommand _OpenButterflyValveViewCommand;
- public DelegateCommand OpenButterflyValveViewCommand =>
- _OpenButterflyValveViewCommand ?? (_OpenButterflyValveViewCommand = new DelegateCommand(OnOpenButterflyValveView));
- //private DelegateCommand _GasCommand;
- //public DelegateCommand GasCommand =>
- // _GasCommand ?? (_GasCommand = new DelegateCommand(OnGas));
- private DelegateCommand _HVCommand;
- public DelegateCommand HVCommand =>
- _HVCommand ?? (_HVCommand = new DelegateCommand(OnHV));
- private DelegateCommand _HVSetCommand;
- public DelegateCommand HVSetCommand =>
- _HVSetCommand ?? (_HVSetCommand = new DelegateCommand(OnHVSet));
- //private DelegateCommand<object> _SetMatchModeCommand;
- //public DelegateCommand<object> SetMatchModeCommand =>
- // _SetMatchModeCommand ?? (_SetMatchModeCommand = new DelegateCommand<object>(OnSetMatchMode));
- private DelegateCommand _LoadRecipeCommand;
- public DelegateCommand LoadRecipeCommand =>
- _LoadRecipeCommand ?? (_LoadRecipeCommand = new DelegateCommand(OnLoadRecipe));
- private DelegateCommand<object> _ControlValveCommand;
- public DelegateCommand<object> ControlValveCommand =>
- _ControlValveCommand ?? (_ControlValveCommand = new DelegateCommand<object>(OnControlValve));
- private DelegateCommand<object> _RunRecipeCommand;
- public DelegateCommand<object> RunRecipeCommand =>
- _RunRecipeCommand ?? (_RunRecipeCommand = new DelegateCommand<object>(OnRunRecipe));
- private DelegateCommand _SetChillerTempCommand;
- public DelegateCommand SetChillerTempCommand =>
- _SetChillerTempCommand ?? (_SetChillerTempCommand = new DelegateCommand(OnSetChillerTemp));
- private DelegateCommand _OnOffChillerCommand;
- public DelegateCommand OnOffChillerCommand =>
- _OnOffChillerCommand ?? (_OnOffChillerCommand = new DelegateCommand(OnOffChiller));
- private DelegateCommand<object> _HeaterCommand;
- public DelegateCommand<object> HeaterCommand =>
- _HeaterCommand ?? (_HeaterCommand = new DelegateCommand<object>(OnHeater));
- #endregion
- #region 构造函数
- public OverViewModel()
- {
- //RTData.init();
- m_RtConfigKeys = new List<string>();
- m_RtDataKeys = new List<string>();
- m_IsATM = true;
- ModuleName = "PMA";
- addConfigKeys();
- addDataKeys();
- DispatcherTimer timer = new DispatcherTimer();
- timer.Interval = TimeSpan.FromSeconds(0.5);
- timer.Tick += timer_Tick;
- timer.Start();
- }
- #endregion
- #region 命令方法
- private void OnControlValve(object obj)
- {
- CommonValveControl commonValveControl = (CommonValveControl)obj;
- if (commonValveControl.IsCanEdit == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ControlValve",Convert.ToInt32( commonValveControl.Tag.ToString()), !commonValveControl.Status);
- }
- }
- private void OnPMInit()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Home");
- }
- private async void OnGas()
- {
- await Task.Run(async () =>
- {
- //if (GasIsFlowing==true)
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- //}
- //else
- //{
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas1.SetPoint", MFC1SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas2.SetPoint", MFC2SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas3.SetPoint", MFC3SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas4.SetPoint", MFC4SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas5.SetPoint", MFC5SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas6.SetPoint", MFC6SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas7.SetPoint", MFC7SetPoint);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcGas8.SetPoint", MFC8SetPoint);
- await Task.Delay(1000);
- object[] mfc = new object[8];
- string[] mfcSetPoint = new string[8];
- //for (int index = 0; index < mfc.Length; index++)
- //{
- // mfc[index] = RtDataValues[$"{ModuleName}.MfcGas{index + 1}.SetPoint"];
- //}
- mfc[0] = MFC1Data.SetPoint;
- mfc[1] = MFC2Data.SetPoint;
- mfc[2] = MFC3Data.SetPoint;
- mfc[3] = MFC4Data.SetPoint;
- mfc[4] = MFC5Data.SetPoint;
- mfc[5] = MFC6Data.SetPoint;
- mfc[6] = MFC7Data.SetPoint;
- mfc[7] = MFC8Data.SetPoint;
- //if (((Math.Abs((double)mfc[0] - (double)_oldmfc[0]) < 0.01) && (Math.Abs((double)mfc[1] - (double)_oldmfc[1]) < 0.01) && (Math.Abs((double)mfc[2] - (double)_oldmfc[2])) < 0.01)
- // || ((Math.Abs((double)mfc[0]) <= 0.01 && Math.Abs((double)mfc[1]) <= 0.01 && Math.Abs((double)mfc[2]) <= 0.01)))
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- // return;
- //}
- //_oldmfc = mfc;
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.GasFlow}", mfc);
- //}
- });
-
-
- }
- private void OnHe()
- {
- if (PVHe1ValveIsOpen == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", 0.0d);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", 0);
- }
- else
- {
- if (HeIsPressureMode)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHePressure", HeGasSetpoint);
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBacksideHeFlow", HeGasSetpoint);
- }
- }
- }
- private void OnRf()
- {
- if (PMCurrentState == PMState.RfPowering)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RfPower}");
- }
- }
- private void OnPurge()
- {
- //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() ==PMState.Purge.ToString())
- //if (PMCurrentState == PMState.Purging || N2SetPoint<=0)
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
- // await Task.Delay(1000);
- // //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- //}
- //else
- //{
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
- // await Task.Delay(1000);
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
- //}
- if (PMCurrentState == PMState.Purging)
- {
- //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", 0);
- //await Task.Delay(1000);
- ////InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPurge");
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- }
- else
- {
- //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
- //await Task.Delay(1000);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Purge");
- }
- }
- private void OnVent()
- {
- //if (RtDataValues[$"{ModuleName}.FsmState"].ToString()==PMState.Venting.ToString())
- if (PMCurrentState == PMState.Venting)
- {
- //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopVent");
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Vent");
- }
- }
- private void OnPump()
- {
- //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == PMState.Pumping.ToString())
- if (PMCurrentState==PMState.Pumping)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- return;
- }
- if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "IsPumpingOkForProcess")
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StopPump");
- return;
- }
- string BasePressureSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); ;
- //{
- // get { return RtConfigValues[$"{ModuleName}.Pump.PumpBasePressure"].ToString(); }
- //}
- string PumpLimitSetPoint= RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString();
- //{
- // get { return RtConfigValues[$"{ModuleName}.Pump.PumpTimeLimit"].ToString(); }
- //}
- // 设置底压
- double basePressure = string.IsNullOrEmpty(BasePressureSetPoint) ? 0 : Convert.ToDouble(BasePressureSetPoint);
- if (basePressure <= 0.01 || basePressure >= 1000)
- {
- MessageBox.Show($"基准压力设定值 {basePressure} 无效,应该在0到1000毫托之间");
- return;
- }
- double pumpLimit = string.IsNullOrEmpty(PumpLimitSetPoint) ? 0 : Convert.ToDouble(PumpLimitSetPoint);
- if (pumpLimit <= 0.01 || pumpLimit >= 1200)
- {
- MessageBox.Show($"抽气时间应该在0到1200之间,当前设定值{pumpLimit}");
- return;
- }
- InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpBasePressure", basePressure.ToString());
- InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"{ModuleName}.Pump.PumpTimeLimit", pumpLimit.ToString());
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Pump");
- }
- private void OnOpenPump()
- {
- //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingPump")
- if (PMCurrentState==PMState.LaunchingPump)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- return;
- }
- //if (PumpIsOpen == true)
- //{
- // return;
- //}
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartPump");
- }
- private void OnClosePump()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.ClosePump");
- }
- private void OnOpenTurboPump()
- {
- //TurboIsOpen = true;
- //if (RtDataValues[$"{ModuleName}.FsmState"].ToString() == "LaunchingTurbo")
- if (PMCurrentState == PMState.LaunchingTurboPump)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.Abort}");
- return;
- }
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.StartTurboPump");
- }
- private void OnCloseTurboPump()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.CloseTurboPump");
- }
- private void OnOpenPendulumValve()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",true);
- }
- private void OnClosePendulumValve()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.TurnPendulumValve",false);
- }
- private void OnPinUpDown(object upDown)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetLiftPin", Convert.ToBoolean(upDown));
- }
- private async void OnSetSRf()
- {
- if (!GasIsFlowing == true) return;
- if (SRFIsOn == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, false);
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPosition}", SRFMatchC1, SRFMatchC2);
- //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match}.{AITRfOperation.SetMatchPositionC2}", SRFMatchC2);
- var t = Task.Run(async delegate
- {
- await Task.Delay(100);
- return 42;
- });
- await t;
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetSRf", SRFFwdPowerSetpoint, true);
- }
- }
- private async void OnSetBRf()
- {
- if (!GasIsFlowing == true) return;
- if (BRFIsOn == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, false);
- }
- else
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPosition}", BRFMatchC1,BRFMatchC2);
- //InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch}.{AITRfOperation.SetMatchPositionC2}", BRFMatchC2);
- //Thread.Sleep(100);
- var t = Task.Run(async delegate
- {
- await Task.Delay(100);
- return 42;
- });
- await t;
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetBRf", BRFFwdPowerSetpoint, true);
- }
-
- }
- private void OnPMAbort()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.Abort");
- }
- private void OnOpenButterflyValveView()
- {
- //if (butterflyValveMessageBox == null)
- //{
- var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
- butterflyValveMessageBox = new ButterflyValveView();
- butterflyValveMessageBox.WindowStartupLocation = WindowStartupLocation.Manual;
- butterflyValveMessageBox.Left = 700;
- butterflyValveMessageBox.Top = 600;
- butterflyValveMessageBox.Show();
- butterflyValveMessageBox.Owner = _mainWindow;
- //}
-
- }
- private void OnLoadRecipe()
- {
- OpenFileDialog dialog = new OpenFileDialog();
- dialog.Filter = ".rcp|*.rcp";
- dialog.InitialDirectory = Path.Combine(QueryDataClient.Instance.Service.GetData("GetRTPath").ToString(), "Recipes");
- if (dialog.ShowDialog() == false) return;
- SelectedRecipe = dialog.SafeFileName.Split('.')[0];
- }
- private async void OnHV()
- {
- if (HVIsOn == true)
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", false);
- }
- else
- {
- await Task.Run(async () =>
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHVIsOn", true);
- await Task.Delay(1000);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
- });
- }
-
-
- }
- private void OnHVSet()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.SetESCHV", ESCVoltage);
- }
- //private void OnSetMatchMode(object obj)
- //{
- // switch (obj.ToString())
- // {
- // case "SRFManual":
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
- // break;
- // case "SRFAuto":
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.Match.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
- // break;
- // case "BRFManual":
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Manual.ToString());
- // break;
- // case "BRFAuto":
- // InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{VenusDevice.BiasMatch.ToString()}.{AITRfOperation.SetMatchProcessMode}", EnumRfMatchTuneMode.Auto.ToString());
- // break;
- // }
- //}
- private void OnRunRecipe(object obj)
- {
- string recipeName = SelectedRecipe;
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.{RtOperation.RunRecipe}",recipeName);
- }
- private void OnSetChillerTemp()
- {
- var value = (QueryDataClient.Instance.Service.GetConfig($"{ModuleName}.Chiller.ChillerTemperatureOffset").ToString());
- float x;
- float.TryParse(value, out x);
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.HeatChiller", ChillerTempSetpoint, x);
- }
- private void OnOffChiller()
- {
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.OnOffChiller", !ChillerIsOn);
- }
- private void OnHeater(object obj)
- {
- AITHeaterData heaterData = obj as AITHeaterData;
- var _mainWindow = Application.Current.Windows.Cast<Window>().FirstOrDefault(window => window is Window) as Window;
- heaterView = new HeaterView(heaterData);
- heaterView.WindowStartupLocation = WindowStartupLocation.CenterScreen;
- heaterView.Owner = _mainWindow;
- heaterView.Show();
- }
- #endregion
- #region 私有方法
- void timer_Tick(object sender, EventArgs e)
- {
- RtConfigValues = QueryDataClient.Instance.Service.PollConfig(m_RtConfigKeys);
- RtDataValues = QueryDataClient.Instance.Service.PollData(m_RtDataKeys);
- var N2SetPoint =Convert.ToInt32( QueryDataClient.Instance.Service.GetConfig("System.TurboN2FlowSetPoint"));
- InvokeClient.Instance.Service.DoOperation($"{ModuleName}.MfcN2.SetPoint", N2SetPoint);
- PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
- GasFinalValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGasFinal.IsOpen"];
- PV11ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV11.IsOpen"];
- PV12ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV12.IsOpen"];
- PV21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV21.IsOpen"];
- PV22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV22.IsOpen"];
- PV31ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV31.IsOpen"];
- PV32ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV32.IsOpen"];
- PV41ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV41.IsOpen"];
- PV42ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePV42.IsOpen"];
- MFC1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc1.IsOpen"];
- MFC2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc2.IsOpen"];
- MFC3ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc3.IsOpen"];
- MFC4ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc4.IsOpen"];
- MFC5ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc5.IsOpen"];
- MFC6ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc6.IsOpen"];
- MFC7ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc7.IsOpen"];
- MFC8ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveMfc8.IsOpen"];
- N2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveN2.IsOpen"];
- SoftPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveSoftPump.IsOpen"];
- FastPumpValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveFastPump.IsOpen"];
- GuageValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveGuage.IsOpen"];
- PVHe1ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe1.IsOpen"];
- PVHe2ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVHe2.IsOpen"];
- PVN21ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN21.IsOpen"];
- PVN22ValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValvePVN22.IsOpen"];
- TurboPumpPumpingValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPumping.IsOpen"];
- TurboPumpPurgeValveIsOpen = (bool)RtDataValues[$"{ModuleName}.ValveTurboPumpPurge.IsOpen"];
- HVIsOn = (bool)RtDataValues[$"{ModuleName}.ESCHV.IsOn"];
- PumpIsOpen = (bool)RtDataValues[$"{ModuleName}.PumpIsRunning"];
- TurboIsOpen = (bool)RtDataValues[$"{ModuleName}.TurboPumpIsRunning"];
- BRFIsOn = (bool)RtDataValues[$"{ModuleName}.BRfIsOn"];
- SRFIsOn = (bool)RtDataValues[$"{ModuleName}.SRfIsOn"];
- LiftPinIsUp= (bool)RtDataValues[$"{ModuleName}.LiftPinIsUp"];
- IsSlitDoorClosed = (bool)RtDataValues[$"{ModuleName}.IsSlitDoorClosed"];
- IsLidClosed = (bool)RtDataValues[$"{ModuleName}.IsLidClosed"];
- PendulumValvePosition = float.Parse(RtDataValues[$"{ModuleName}.GetPVPosition"].ToString());
- TurboPumpRotationalSpeed = Convert.ToInt32( RtDataValues[$"{ModuleName}.TurboPumpRotationalSpeed"].ToString());
- PositionValue = -((int)((PendulumValvePosition) * 0.09));
- PMState currentState = (PMState)Enum.Parse(typeof(PMState), RtDataValues[$"{ModuleName}.FsmState"].ToString());
- if (PMCurrentState != currentState)
- {
- PMCurrentState = currentState;
- }
- GasIsFlowing = PMCurrentState == PMState.GasFlowing;
- MFC1Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas1"];
- MFC2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas2"];
- MFC3Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas3"];
- MFC4Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas4"];
- MFC5Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas5"];
- MFC6Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas6"];
- MFC7Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas7"];
- MFC8Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcGas8"];
- MFCHeData= (AITMfcData)RtDataValues[$"{ModuleName}.MfcHe"];
- MFCN2Data = (AITMfcData)RtDataValues[$"{ModuleName}.MfcN2"];
-
- ValveHeaterData= (AITHeaterData)RtDataValues[$"{ModuleName}.ValveHeater.DeviceData"];
- ForelineHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.ForelineHeater.DeviceData"];
- WallHeaterData = (AITHeaterData)RtDataValues[$"{ModuleName}.WallHeater.DeviceData"];
- ProcessHighPressure= float.Parse(RtDataValues[$"{ModuleName}.ProcessHighPressure"].ToString());
- ProcessLowPressure = float.Parse(RtDataValues[$"{ModuleName}.ProcessLowPressure"].ToString());
- ForelinePressure = float.Parse(RtDataValues[$"{ModuleName}.ForelinePressure"].ToString());
- ESCHePressure = float.Parse(RtDataValues[$"{ModuleName}.ESCHePressure"].ToString());
- ChillerTemperature = float.Parse(RtDataValues[$"{ModuleName}.Chiller.Temp"].ToString());
- PendulumValveIsOpen = (bool)RtDataValues[$"{ModuleName}.PendulumValve.IsOpen"];
- ChillerIsOn= (bool)RtDataValues[$"{ModuleName}.Chiller.IsOn"];
- SourceRFFanInterlock= (bool)RtDataValues[$"{ModuleName}.SourceRFFanInterlock"];
- IsWLK= (bool)RtDataValues[$"{ModuleName}.IsWLK"];
- IsWaterFlowOk= (bool)RtDataValues[$"{ModuleName}.IsWaterFlowOk"];
- IsTurboPumpInterlock= (bool)RtDataValues[$"{ModuleName}.IsTurboPumpInterlock"];
- IsCDAOK= (bool)RtDataValues[$"{ModuleName}.IsCDA_OK"];
- SensorGasBoxDoor= (bool)RtDataValues[$"{ModuleName}.SensorGasBoxDoor"];
- SensorGasBoxPressure= (bool)RtDataValues[$"{ModuleName}.SensorGasBoxPressure"];
- IsATM= (bool)RtDataValues[$"{ModuleName}.IsATM"];
- IsVAC = (bool)RtDataValues[$"{ModuleName}.IsVAC"];
- ESCHVOutputVoltage= (int)RtDataValues[$"{ModuleName}.ESCHV.OutputVoltage"];
- SRfReflectPower= float.Parse(RtDataValues[$"{ModuleName}.SRfReflectPower"].ToString());
- SRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.SRfForwardPowerFeedBack"].ToString());
- BRfReflectPower = float.Parse(RtDataValues[$"{ModuleName}.BRfReflectPower"].ToString());
- BRfForwardPowerFeedBack = float.Parse(RtDataValues[$"{ModuleName}.BRfForwardPowerFeedBack"].ToString());
- MatchWorkMode=RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.WorkMode") ? (int)RtDataValues[$"{ModuleName}.{VenusDevice.Match}.WorkMode"] : 0;
- BiasMatchWorkMode = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode") ? (int)RtDataValues[$"{ ModuleName}.{VenusDevice.BiasMatch}.WorkMode"]:0;
- MatchC1= RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C1"].ToString()):0;
- MatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.Match}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.Match}.C2"].ToString()) : 0;
- BiasMatchC1 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C1") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C1"].ToString()):0;
- BiasMatchC2 = RtDataValues.Keys.Contains($"{ModuleName}.{VenusDevice.BiasMatch}.C2") ? float.Parse(RtDataValues[$"{ModuleName}.{VenusDevice.BiasMatch}.C2"].ToString()) : 0;
- TurboPumpWaterFlowSwitch= ((AITSensorData)RtDataValues[$"{ModuleName}.TurboPumpWaterFlowSwitch"]).Value;
- IsTurboPumpAtSpeed = (bool)RtDataValues[$"{ModuleName}.IsTurboPumpAtSpeed"];
- IsHasWafer= (bool)RtDataValues[$"{ModuleName}.HasWafer"];
- }
- private void addConfigKeys()
- {
- m_RtConfigKeys.Add($"{ModuleName}.Pump.PumpBasePressure");
- m_RtConfigKeys.Add($"{ModuleName}.Pump.PumpTimeLimit");
- }
- private void addDataKeys()
- {
- m_RtDataKeys.Add($"{ModuleName}.MfcGas1");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas2");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas3");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas4");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas5");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas6");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas7");
- m_RtDataKeys.Add($"{ModuleName}.MfcGas8");
- m_RtDataKeys.Add($"{ModuleName}.MfcHe");
- m_RtDataKeys.Add($"{ModuleName}.MfcN2");
-
- m_RtDataKeys.Add($"{ModuleName}.ForelinePressure");
- m_RtDataKeys.Add($"{ModuleName}.ProcessHighPressure");
- m_RtDataKeys.Add($"{ModuleName}.ProcessLowPressure");
- m_RtDataKeys.Add($"{ModuleName}.ChamberPressure");
- m_RtDataKeys.Add($"{ModuleName}.ESCHePressure");
- m_RtDataKeys.Add($"{ModuleName}.IsATM");
- m_RtDataKeys.Add($"{ModuleName}.IsVAC");
- m_RtDataKeys.Add($"{ModuleName}.LiftPinIsUp");
- m_RtDataKeys.Add($"{ModuleName}.LiftPinIsDown");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV11.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV12.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV21.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV22.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV31.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV32.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV41.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePV42.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc1.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc2.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc3.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc4.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc5.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc6.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc7.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveMfc8.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveGasFinal.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveSoftPump.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveFastPump.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveN2.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVHe1.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVHe2.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPumping.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveTurboPumpPurge.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN21.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValvePVN22.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.ValveGuage.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.TurboPumpIsRunning");
- m_RtDataKeys.Add($"{ModuleName}.PumpIsRunning");
- m_RtDataKeys.Add($"{ModuleName}.IsSlitDoorClosed");
- m_RtDataKeys.Add($"{ModuleName}.IsLidClosed");
- m_RtDataKeys.Add($"{ModuleName}.SRfIsOn");
- m_RtDataKeys.Add($"{ModuleName}.SRfForwardPowerFeedBack");
- m_RtDataKeys.Add($"{ModuleName}.SRfReflectPower");
- m_RtDataKeys.Add($"{ModuleName}.BRfIsOn");
- m_RtDataKeys.Add($"{ModuleName}.BRfForwardPowerFeedBack");
- m_RtDataKeys.Add($"{ModuleName}.BRfReflectPower");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C1");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.C2");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.Match}.WorkMode");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C1");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.C2");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.BiasMatch}.WorkMode");
- m_RtDataKeys.Add($"{ModuleName}.{VenusDevice.PendulumValve}.IsOpen");
- m_RtDataKeys.Add($"{ModuleName}.TurboPumpRotationalSpeed");
- m_RtDataKeys.Add($"{ModuleName}.GetPVPosition");
- m_RtDataKeys.Add($"{ModuleName}.Chiller.Temp");
- m_RtDataKeys.Add($"{ModuleName}.ESCHV.OutputVoltage");
- m_RtDataKeys.Add($"{ModuleName}.ESCHV.IsOn");
- m_RtDataKeys.Add($"{ModuleName}.IsWaterFlowOk");
- m_RtDataKeys.Add($"{ModuleName}.IsWLK");
- m_RtDataKeys.Add($"{ModuleName}.IsCDA_OK");
- m_RtDataKeys.Add($"{ModuleName}.SourceRFFanInterlock");
- m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpInterlock");
- m_RtDataKeys.Add($"{ModuleName}.SensorGasBoxDoor");
- m_RtDataKeys.Add($"{ModuleName}.SensorGasBoxPressure");
- m_RtDataKeys.Add($"{ModuleName}.WallTempFeedBack");
- m_RtDataKeys.Add($"{ModuleName}.Chiller.IsOn");
- m_RtDataKeys.Add($"{ModuleName}.ValveHeater.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.ForelineHeater.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.WallHeater.DeviceData");
- m_RtDataKeys.Add($"{ModuleName}.FsmState");
- m_RtDataKeys.Add($"{ModuleName}.IsTurboPumpAtSpeed");
- m_RtDataKeys.Add($"{ModuleName}.TurboPumpWaterFlowSwitch");
- m_RtDataKeys.Add($"{ModuleName}.HasWafer");
- }
- #endregion
- }
- }
|