SimulatorSystem.cs 102 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  156. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  157. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  158. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  159. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
  160. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
  161. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  172. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  189. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  190. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. //// pressure
  206. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  207. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  209. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  210. //// Temperature
  211. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  212. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  213. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  214. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  215. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  216. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  217. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  218. // Datetime
  219. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  220. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  221. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  222. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  223. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  224. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  225. break;
  226. case JetChamber.Kepler2300:
  227. // chamber
  228. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  229. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  231. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  232. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  233. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  234. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  235. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  236. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  237. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  238. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  239. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  240. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  241. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  242. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  244. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  245. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  248. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  249. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  250. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  252. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  253. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  270. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  271. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  272. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  273. //// pressure
  274. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  275. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  276. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  277. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  278. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  279. //// Temperature
  280. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  281. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  282. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  283. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  284. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  285. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  286. // Datetime
  287. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  288. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  289. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  290. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  291. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  292. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  293. break;
  294. case JetChamber.Kepler2200A:
  295. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  296. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  297. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  298. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  299. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  300. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  301. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  302. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  303. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  304. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  305. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  306. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  307. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  308. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  309. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  318. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  319. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  320. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  321. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  322. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  323. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  324. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  325. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  326. //// pressure
  327. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  328. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  329. SetAiValue($"{mod}.AI_Process_Pressure_2t", 100);
  330. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  331. //// Temperature
  332. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  333. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  334. // Datetime
  335. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  336. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  337. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  338. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  339. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  340. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  341. break;
  342. }
  343. }
  344. private void SetTMDefaultValue()
  345. {
  346. ModuleName mod = ModuleName.TM;
  347. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  348. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  349. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  351. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  354. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  355. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  356. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  357. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  358. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  359. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  360. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  361. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  362. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  363. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  364. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  366. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  372. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  373. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  374. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  375. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  376. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  377. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  378. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  381. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  383. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  384. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  385. // Datetime
  386. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  387. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  388. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  389. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  390. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  391. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  392. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  393. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  394. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  395. {
  396. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  397. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  398. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  399. }
  400. else
  401. {
  402. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  403. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  404. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  405. }
  406. }
  407. private void SetSETMDefaultValue()
  408. {
  409. ModuleName mod = ModuleName.SETM;
  410. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  411. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  412. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  413. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  414. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  415. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  418. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  419. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  420. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  421. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  422. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  423. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  424. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  425. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  426. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  427. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  428. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  429. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  430. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  431. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  432. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  433. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  434. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  435. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  436. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  437. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  438. SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
  439. SetAiValue($"{mod}.AI_VCE_Pipeline_Vacuum_Gauge", 3000);
  440. SetAiValue($"{mod}.AI_TM_Pipeline_Vacuum_Gauge", 3000);
  441. SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
  442. }
  443. private bool OnMonitor()
  444. {
  445. try
  446. {
  447. foreach (var item in jetChambers)
  448. {
  449. switch (item.Value)
  450. {
  451. case JetChamber.Venus:
  452. MonitorSlitDoor(item.Key);
  453. MonitorPin(item.Key);
  454. MonitorPressure(item.Key);
  455. MonitorExtendAndRetract(item.Key);
  456. MonitorGas(item.Key);
  457. this.SimulateHe(item.Key);
  458. //MonitorRF(item.Key);
  459. ChangeTime(item.Key);
  460. //MonitorIOPumpCtrl(item.Key);
  461. break;
  462. case JetChamber.Kepler2300:
  463. MonitorSlitDoor(item.Key);
  464. MonitorPin(item.Key);
  465. MonitorPressure_Kepler(item.Key);
  466. //MonitorTemperature(item.Key);
  467. MonitorGas(item.Key);
  468. this.SimulateHe(item.Key);
  469. //MonitorRF(item.Key);
  470. ChangeTime(item.Key);
  471. //MonitorIOPumpCtrl(item.Key);
  472. MonitorLid(item.Key);
  473. break;
  474. case JetChamber.Kepler2200A:
  475. MonitorSlitDoor(item.Key);
  476. MonitorPressure_Kepler2200A(item.Key);
  477. //MonitorTemperature(item.Key);
  478. MonitorGas(item.Key);
  479. // MonitorRF(item.Key);
  480. ChangeTime(item.Key);
  481. //MonitorIOPumpCtrl(item.Key);
  482. MonitorLid(item.Key);
  483. MonitorIOHighTemperatureHeater(item.Key);
  484. break;
  485. case JetChamber.Kepler2200B:
  486. break;
  487. case JetChamber.VenusSE:
  488. MonitorPin(item.Key);
  489. //MonitorVenuSESlitDoor(item.Key);
  490. MonitorPressure_VenusSE(item.Key);
  491. break;
  492. }
  493. }
  494. ChangeTime(ModuleName.TM);
  495. MonitorMFSlitDoor();
  496. MonitorSEMFSlitDoor();
  497. MonitorMFPressure();
  498. MonitorSEMFPressure();
  499. }
  500. catch (Exception e)
  501. {
  502. LOG.WriteExeption(e);
  503. }
  504. return true;
  505. }
  506. private void ChangeTime(ModuleName mod)
  507. {
  508. // Heartbeat with PLC
  509. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  510. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  511. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  512. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  513. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  514. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  515. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  516. }
  517. //void MonitorVenuSESlitDoor(ModuleName mod)
  518. //{
  519. //}
  520. void MonitorSlitDoor(ModuleName mod)
  521. {
  522. // slit door open
  523. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  524. {
  525. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  526. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  527. }
  528. // slit door close
  529. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  530. {
  531. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  532. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  533. }
  534. }
  535. void MonitorMFSlitDoor()
  536. {
  537. ModuleName mod = ModuleName.TM;
  538. // LLA T door open
  539. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  540. {
  541. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  542. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  543. }
  544. // LLB T door open
  545. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  546. {
  547. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  548. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  549. }
  550. // LLA E door open
  551. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  552. {
  553. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  554. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  555. }
  556. // LLB E door open
  557. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  558. {
  559. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  560. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  561. }
  562. // LLA T door close
  563. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  564. {
  565. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  566. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  567. }
  568. // LLB T door close
  569. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  570. {
  571. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  572. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  573. }
  574. // LLA E door close
  575. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  576. {
  577. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  578. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  579. }
  580. // LLB E door close
  581. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  582. {
  583. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  584. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  585. }
  586. }
  587. void MonitorSEMFSlitDoor()
  588. {
  589. ModuleName mod = ModuleName.SETM;
  590. // VCE T door open
  591. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  592. {
  593. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  594. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  595. }
  596. // VCE T door Close
  597. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  598. {
  599. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  600. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  601. }
  602. //pma
  603. if (IO.DO[$"{mod}.DO_TM_PMA_OP"].Value)
  604. {
  605. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = true;
  606. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = false;
  607. }
  608. if (IO.DO[$"{mod}.DO_TM_PMA_CL"].Value)
  609. {
  610. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  611. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  612. }
  613. //pmb
  614. if (IO.DO[$"{mod}.DO_TM_PMB_OP"].Value)
  615. {
  616. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = true;
  617. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = false;
  618. }
  619. if (IO.DO[$"{mod}.DO_TM_PMB_CL"].Value)
  620. {
  621. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  622. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  623. }
  624. //pmc
  625. if (IO.DO[$"{mod}.DO_TM_PMC_OP"].Value)
  626. {
  627. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = true;
  628. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = false;
  629. }
  630. if (IO.DO[$"{mod}.DO_TM_PMC_CL"].Value)
  631. {
  632. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  633. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  634. }
  635. //pmd
  636. if (IO.DO[$"{mod}.DO_TM_PMD_OP"].Value)
  637. {
  638. IO.DI[$"{mod}.DI_TM_PMD_OPS"].Value = true;
  639. IO.DI[$"{mod}.DI_TM_PMD_CLS"].Value = false;
  640. }
  641. if (IO.DO[$"{mod}.DO_TM_PMD_CL"].Value)
  642. {
  643. IO.DI[$"{mod}.DI_TM_PMD_OPS"].Value = false;
  644. IO.DI[$"{mod}.DI_TM_PMD_CLS"].Value = true;
  645. }
  646. }
  647. void MonitorPin(ModuleName mod)
  648. {
  649. // lift pin up
  650. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  651. {
  652. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  653. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  654. }
  655. }
  656. void MonitorLid(ModuleName mod)
  657. {
  658. // lift pin up
  659. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  660. {
  661. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  662. }
  663. }
  664. void MonitorExtendAndRetract(ModuleName mod)
  665. {
  666. // Extend
  667. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  668. if (_trigLLExtend.Q)
  669. {
  670. _trigLLRetract.RST = true;
  671. Thread.Sleep(500);
  672. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  673. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  674. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  675. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  676. }
  677. // Retract
  678. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  679. if (_trigLLRetract.Q)
  680. {
  681. count++;
  682. _trigLLExtend.RST = true;
  683. Thread.Sleep(500);
  684. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  685. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  686. if (count == 1)
  687. {
  688. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  689. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  690. }
  691. else if (count == 2)
  692. {
  693. count = 0;
  694. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  695. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  696. }
  697. }
  698. }
  699. void MonitorPressure(ModuleName mod)
  700. {
  701. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  702. // Loadlock pressure
  703. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  704. // Foreline
  705. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  706. {
  707. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  708. }
  709. else
  710. {
  711. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  712. }
  713. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  714. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  715. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  716. //float chamber_pressure = GetMockChamberPressure(mod);
  717. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  718. // soft pump & fast pump
  719. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  720. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  721. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  722. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  723. {
  724. //任意泵打开
  725. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  726. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  727. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  728. {//开双泵
  729. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  730. {
  731. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  732. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  733. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  734. }
  735. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  736. {
  737. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  738. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  739. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  740. }
  741. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  742. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  743. }
  744. else if (fast_pump_vlv.Value)//开
  745. {
  746. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  747. {
  748. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  749. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  750. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  751. }
  752. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  753. {
  754. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  755. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  756. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  757. }
  758. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  759. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  760. }
  761. else if (soft_pump_vlv.Value)
  762. {
  763. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  764. {
  765. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  766. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  767. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  768. }
  769. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  770. {
  771. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  772. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  773. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  774. }
  775. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  776. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  777. }
  778. else if (turbo_pump_vlv.Value)
  779. {
  780. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  781. if ((getAiValue_ChamberPressure - 500) >= 0)
  782. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  783. else
  784. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  785. if ((getAiValue_ProcessPressure - 500) >= 0)
  786. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  787. else
  788. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  789. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  790. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  791. }
  792. }
  793. // fast vent & purge
  794. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  795. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  796. //if (vent_vlv.Value || purge_vlv.Value)
  797. //{
  798. // if (vent_vlv.Value && purge_vlv.Value)
  799. // {
  800. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  801. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  802. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  803. // {
  804. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  805. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  806. // }
  807. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  808. // {
  809. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  810. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  811. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  812. // }
  813. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  814. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  815. // }
  816. // else
  817. //
  818. if (vent_vlv.Value)
  819. {
  820. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  821. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  822. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  823. {
  824. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  825. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  826. }
  827. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  828. {
  829. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  830. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  831. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  832. }
  833. else
  834. {
  835. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  836. }
  837. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  838. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  839. }
  840. // Loadlock Pumping Valve
  841. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  842. if (Loadlock_pump_vlv.Value)
  843. {
  844. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  845. }
  846. // Loadlock vent
  847. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  848. if (Loadlock_vent_vlv.Value)
  849. {
  850. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  851. }
  852. // 压力值越界,复位
  853. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  854. if (chamber_pressure1 > ATM_PRESSURE)
  855. {
  856. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  857. }
  858. else if (chamber_pressure1 < 20)
  859. {
  860. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  861. }
  862. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  863. if (process_pressure1 > PROCESS_GAUGE)
  864. {
  865. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  866. }
  867. else if (process_pressure1 < 20)
  868. {
  869. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  870. }
  871. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  872. if (foreline_pressure > 10000)
  873. {
  874. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  875. }
  876. else if (foreline_pressure < 150)
  877. {
  878. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  879. }
  880. // 模拟压力计漂移
  881. //int p1 = (int)GetMockChamberPressure(mod);
  882. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  883. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  884. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  885. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  886. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  887. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  888. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  889. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  890. // 根据当前压力值设定信号
  891. //float chamber_pressure2 = GetMockChamberPressure(mod);
  892. // ATM switch
  893. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  894. // VAC switch
  895. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  896. // Throttle valve
  897. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  898. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  899. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  900. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  901. // 压力值
  902. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  903. //{
  904. // short increase = (short)_rd.Next(20, 30);
  905. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  906. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  907. // {
  908. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  909. // }
  910. //}
  911. //else
  912. //{
  913. // short increase = (short)_rd.Next(20, 30);
  914. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  915. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  916. // {
  917. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  918. // }
  919. //}
  920. //// 位置值
  921. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  922. //{
  923. // short increase = (short)_rd.Next(20, 30);
  924. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  925. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  926. // {
  927. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  928. // }
  929. //}
  930. //else
  931. //{
  932. // short increase = (short)_rd.Next(20, 30);
  933. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  934. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  935. // {
  936. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  937. // }
  938. //}
  939. }
  940. void MonitorPressure_Kepler(ModuleName mod)
  941. {
  942. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  943. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  944. {
  945. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  946. }
  947. else
  948. {
  949. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  950. }
  951. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  952. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  953. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  954. //float chamber_pressure = GetMockChamberPressure(mod);
  955. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  956. // soft pump & fast pump
  957. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  958. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  959. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  960. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  961. {
  962. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  963. {
  964. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  965. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  966. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  967. {
  968. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  969. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  970. }
  971. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  972. {
  973. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  974. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  975. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  976. }
  977. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  978. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  979. }
  980. else if (fast_pump_vlv.Value)
  981. {
  982. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  983. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  984. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  985. {
  986. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  987. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  988. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  989. }
  990. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  991. {
  992. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  993. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  994. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  995. }
  996. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  997. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  998. }
  999. else if (soft_pump_vlv.Value)
  1000. {
  1001. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1002. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1003. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1004. {
  1005. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  1006. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  1007. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1008. }
  1009. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1010. {
  1011. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1012. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1013. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1014. }
  1015. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1016. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1017. }
  1018. else if (turbo_pump_vlv.Value)
  1019. {
  1020. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1021. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1022. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1023. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1024. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1025. }
  1026. }
  1027. // fast vent & purge
  1028. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1029. if (vent_vlv.Value)
  1030. {
  1031. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1032. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1033. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1034. {
  1035. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1036. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1037. }
  1038. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1039. {
  1040. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1041. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1042. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1043. }
  1044. else
  1045. {
  1046. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1047. }
  1048. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1049. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1050. }
  1051. // Loadlock Pumping Valve
  1052. // 压力值越界,复位
  1053. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1054. if (chamber_pressure1 > ATM_PRESSURE)
  1055. {
  1056. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1057. }
  1058. else if (chamber_pressure1 < 20)
  1059. {
  1060. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1061. }
  1062. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1063. if (process_pressure1 > PROCESS_GAUGE)
  1064. {
  1065. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1066. }
  1067. else if (process_pressure1 < 20)
  1068. {
  1069. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1070. }
  1071. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1072. if (foreline_pressure > 10000)
  1073. {
  1074. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1075. }
  1076. else if (foreline_pressure < 150)
  1077. {
  1078. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1079. }
  1080. // ATM switch
  1081. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1082. // VAC switch
  1083. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1084. }
  1085. void MonitorPressure_VenusSE(ModuleName mod)
  1086. {
  1087. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1088. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1089. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1090. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1091. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1092. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1093. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1094. {
  1095. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1096. }
  1097. else
  1098. {
  1099. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1100. }
  1101. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1102. {
  1103. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1104. {
  1105. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1106. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1107. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1108. {
  1109. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1110. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1111. }
  1112. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1113. {
  1114. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1115. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1116. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1117. }
  1118. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1119. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1120. }
  1121. else if (fast_pump_vlv.Value)
  1122. {
  1123. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1124. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1125. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1126. {
  1127. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1128. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1129. }
  1130. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1131. {
  1132. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1133. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1134. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1135. }
  1136. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1137. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1138. }
  1139. else if (soft_pump_vlv.Value)
  1140. {
  1141. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1142. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1143. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1144. {
  1145. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1146. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1147. }
  1148. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1149. {
  1150. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1151. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1152. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1153. }
  1154. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1155. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1156. }
  1157. else if (turbo_pump_vlv.Value)
  1158. {
  1159. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1160. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1161. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1162. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1163. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1164. }
  1165. }
  1166. // 压力值越界,复位
  1167. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1168. if (chamber_pressure1 > ATM_PRESSURE)
  1169. {
  1170. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1171. }
  1172. else if (chamber_pressure1 < 20)
  1173. {
  1174. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1175. }
  1176. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1177. if (process_pressure1 > PROCESS_GAUGE)
  1178. {
  1179. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1180. }
  1181. else if (process_pressure1 < 20)
  1182. {
  1183. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1184. }
  1185. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1186. if (foreline_pressure > 10000)
  1187. {
  1188. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1189. }
  1190. else if (foreline_pressure < 150)
  1191. {
  1192. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1193. }
  1194. // ATM switch
  1195. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1196. // VAC switch
  1197. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1198. }
  1199. void MonitorPressure_Kepler2200A(ModuleName mod)
  1200. {
  1201. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1202. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1203. {
  1204. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1205. }
  1206. else
  1207. {
  1208. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1209. }
  1210. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1211. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1212. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1213. //float chamber_pressure = GetMockChamberPressure(mod);
  1214. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1215. // soft pump & fast pump
  1216. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1217. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1218. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1219. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1220. {
  1221. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1222. {
  1223. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1224. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1225. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1226. {
  1227. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1228. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1229. }
  1230. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1231. {
  1232. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1233. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1234. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1235. }
  1236. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1237. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1238. }
  1239. else if (fast_pump_vlv.Value)
  1240. {
  1241. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1242. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1243. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1244. {
  1245. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1246. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1247. }
  1248. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1249. {
  1250. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1251. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1252. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1253. }
  1254. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1255. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1256. }
  1257. else if (soft_pump_vlv.Value)
  1258. {
  1259. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1260. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1261. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1262. {
  1263. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1264. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1265. }
  1266. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1267. {
  1268. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1269. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1270. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1271. }
  1272. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1273. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1274. }
  1275. else if (turbo_pump_vlv.Value)
  1276. {
  1277. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1278. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1279. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1280. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1281. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1282. }
  1283. }
  1284. // fast vent & purge
  1285. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1286. if (vent_vlv.Value)
  1287. {
  1288. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1289. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1290. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1291. {
  1292. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1293. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1294. }
  1295. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1296. {
  1297. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1298. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1299. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1300. }
  1301. else
  1302. {
  1303. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1304. }
  1305. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1306. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1307. }
  1308. // Loadlock Pumping Valve
  1309. // 压力值越界,复位
  1310. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1311. if (chamber_pressure1 > ATM_PRESSURE)
  1312. {
  1313. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1314. }
  1315. else if (chamber_pressure1 < 20)
  1316. {
  1317. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1318. }
  1319. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1320. if (process_pressure1 > PROCESS_GAUGE)
  1321. {
  1322. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1323. }
  1324. else if (process_pressure1 < 20)
  1325. {
  1326. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1327. }
  1328. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1329. if (foreline_pressure > 10000)
  1330. {
  1331. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1332. }
  1333. else if (foreline_pressure < 150)
  1334. {
  1335. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1336. }
  1337. // ATM switch
  1338. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1339. // VAC switch
  1340. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1341. }
  1342. void MonitorSEMFPressure()
  1343. {
  1344. ModuleName mod = ModuleName.SETM;
  1345. string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
  1346. string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
  1347. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
  1348. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
  1349. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
  1350. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
  1351. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
  1352. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
  1353. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
  1354. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
  1355. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1356. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1357. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1358. {
  1359. if (getAiValue_TM_ChamberPressure > 10000)
  1360. {
  1361. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1362. }
  1363. else if (getAiValue_TM_ChamberPressure <= 10000)
  1364. {
  1365. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1366. }
  1367. }
  1368. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1369. {
  1370. if (getAiValue_TM_ChamberPressure > 10000)
  1371. {
  1372. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1373. }
  1374. else if (getAiValue_TM_ChamberPressure <= 10000)
  1375. {
  1376. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1377. }
  1378. }
  1379. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1380. {
  1381. if (getAiValue_VCE_ChamberPressure > 10000)
  1382. {
  1383. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1384. }
  1385. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1386. {
  1387. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1388. }
  1389. }
  1390. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1391. {
  1392. if (getAiValue_VCE_ChamberPressure > 10000)
  1393. {
  1394. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1395. }
  1396. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1397. {
  1398. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1399. }
  1400. }
  1401. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1402. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1403. {
  1404. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1405. }
  1406. else if (getAiValue_VCE_ChamberPressure < 20)
  1407. {
  1408. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1409. }
  1410. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1411. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1412. {
  1413. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1414. }
  1415. else if (getAiValue_TM_ChamberPressure < 20)
  1416. {
  1417. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1418. }
  1419. IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1420. // VAC switch
  1421. IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1422. }
  1423. void MonitorMFPressure()
  1424. {
  1425. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1426. //{
  1427. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1428. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1429. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1430. ModuleName mod = ModuleName.TM;
  1431. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1432. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1433. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1434. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1435. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1436. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1437. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1438. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1439. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1440. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1441. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1442. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1443. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1444. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1445. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1446. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1447. {
  1448. if (getAiValue_LLA_ChamberPressure > 10000)
  1449. {
  1450. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1451. }
  1452. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1453. {
  1454. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1455. }
  1456. }
  1457. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1458. {
  1459. if (getAiValue_LLB_ChamberPressure > 10000)
  1460. {
  1461. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1462. }
  1463. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1464. {
  1465. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1466. }
  1467. }
  1468. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1469. {
  1470. if (getAiValue_TM_ChamberPressure > 10000)
  1471. {
  1472. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1473. }
  1474. else if (getAiValue_TM_ChamberPressure <= 10000)
  1475. {
  1476. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1477. }
  1478. }
  1479. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1480. {
  1481. if (getAiValue_LLA_ChamberPressure > 10000)
  1482. {
  1483. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1484. }
  1485. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1486. {
  1487. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1488. }
  1489. }
  1490. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1491. {
  1492. if (getAiValue_LLB_ChamberPressure > 10000)
  1493. {
  1494. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1495. }
  1496. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1497. {
  1498. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1499. }
  1500. }
  1501. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1502. {
  1503. if (getAiValue_TM_ChamberPressure > 10000)
  1504. {
  1505. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1506. }
  1507. else if (getAiValue_TM_ChamberPressure <= 10000)
  1508. {
  1509. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1510. }
  1511. }
  1512. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1513. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1514. {
  1515. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1516. }
  1517. else if (getAiValue_LLA_ChamberPressure < 20)
  1518. {
  1519. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1520. }
  1521. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1522. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1523. {
  1524. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1525. }
  1526. else if (getAiValue_LLB_ChamberPressure < 20)
  1527. {
  1528. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1529. }
  1530. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1531. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1532. {
  1533. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1534. }
  1535. else if (getAiValue_TM_ChamberPressure < 20)
  1536. {
  1537. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1538. }
  1539. // ATM switch
  1540. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1541. // VAC switch
  1542. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1543. // ATM switch
  1544. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1545. // VAC switch
  1546. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1547. // ATM switch
  1548. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1549. // VAC switch
  1550. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1551. // }
  1552. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1553. //{
  1554. // ModuleName mod = ModuleName.TM;
  1555. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1556. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1557. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1558. //}
  1559. }
  1560. void SetAiValue(string name, float value)
  1561. {
  1562. byte[] flow = BitConverter.GetBytes(value);
  1563. short high1 = BitConverter.ToInt16(flow, 0);
  1564. short low1 = BitConverter.ToInt16(flow, 2);
  1565. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1566. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1567. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1568. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1569. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1570. }
  1571. float GetAiValue(string name)
  1572. {
  1573. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1574. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1575. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1576. return flow;
  1577. }
  1578. float GetAoValue(string name)
  1579. {
  1580. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1581. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1582. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1583. return flow;
  1584. }
  1585. void MonitorTemperature(ModuleName mod)
  1586. {
  1587. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1588. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1589. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1590. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1591. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1592. // 底座
  1593. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1594. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1595. //{
  1596. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1597. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1598. //}
  1599. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1600. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1601. //{
  1602. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1603. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1604. //}
  1605. // Foreline
  1606. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1607. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1608. {
  1609. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1610. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1611. }
  1612. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1613. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1614. {
  1615. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1616. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1617. }
  1618. // Wall
  1619. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1620. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1621. {
  1622. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1623. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1624. }
  1625. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1626. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1627. {
  1628. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1629. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1630. }
  1631. }
  1632. void MonitorGas(ModuleName mod)
  1633. {
  1634. // gas
  1635. this.SimulateMFC(mod, 1);
  1636. this.SimulateMFC(mod, 2);
  1637. this.SimulateMFC(mod, 3);
  1638. this.SimulateMFC(mod, 4);
  1639. this.SimulateMFC(mod, 5);
  1640. this.SimulateMFC(mod, 6);
  1641. this.SimulateMFC(mod, 7);
  1642. this.SimulateMFC(mod, 8);
  1643. this.SimulateN2(mod);
  1644. }
  1645. private void SimulateMFC(ModuleName mod, byte gasNum)
  1646. {
  1647. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1648. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1649. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1650. }
  1651. private void SimulateN2(ModuleName mod)
  1652. {
  1653. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1654. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1655. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1656. }
  1657. private void SimulateHe(ModuleName mod)
  1658. {
  1659. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1660. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1661. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1662. }
  1663. void MonitorRF(ModuleName mod)
  1664. {
  1665. // RF generator
  1666. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1667. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1668. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1669. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1670. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1671. }
  1672. void MonitorIOPumpCtrl(ModuleName mod)
  1673. {
  1674. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1675. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1676. }
  1677. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1678. {
  1679. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1680. {
  1681. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1682. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1683. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1684. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1685. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1686. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1687. }
  1688. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1689. {
  1690. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1691. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1692. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1693. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1694. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1695. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1696. }
  1697. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1698. {
  1699. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1700. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1701. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1702. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1703. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1704. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1705. }
  1706. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  1707. {
  1708. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1709. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1710. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1711. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  1712. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1713. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1714. }
  1715. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  1716. {
  1717. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1718. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1719. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1720. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1721. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  1722. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1723. }
  1724. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1725. {
  1726. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1727. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1728. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1729. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  1730. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  1731. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1732. }
  1733. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  1734. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  1735. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1736. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1737. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  1738. }
  1739. public void Terminate()
  1740. {
  1741. _thread.Stop();
  1742. }
  1743. public void SetCoolantOutletTemp(string module, int Temp)
  1744. {
  1745. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1746. //{
  1747. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1748. //}
  1749. }
  1750. }
  1751. }