VenusDevice.cs 5.8 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValveGasFinal,
  27. ValveSoftPump,
  28. ValveFastPump,
  29. ValveCHBPurge,
  30. ValveTurboPumpPumping,
  31. ValveTurboPumpPurge,
  32. ValveGuage,
  33. ValveLoadlockVent,
  34. ValveLoadlockPumping,
  35. MfcGas1,
  36. MfcGas2,
  37. MfcGas3,
  38. MfcGas4,
  39. MfcGas5,
  40. GasStick1,
  41. GasStick2,
  42. GasStick3,
  43. TemperatureControl,
  44. ChamberLid,
  45. ATM_SW,
  46. VAC_SW,
  47. WaterFlow_SW,
  48. N2_Pressure,
  49. ProcessGauge,
  50. PressureGauge,
  51. ForelineGauge,
  52. MainPump,
  53. Chiller,
  54. Rf,
  55. BiasRf,
  56. Match,
  57. BiasMatch,
  58. PressureControl,
  59. ThrottleValve,
  60. HeaterChamber,
  61. ForelineHeater,
  62. Heartbeat,
  63. ResetPlcSignal,
  64. LiftPin,
  65. SlitDoor,
  66. SmallPin,
  67. MediumPin,
  68. LoadLockArm,
  69. StatisticsRfOnTime,
  70. StatisticsPumpOnTime,
  71. PlcDateTime,
  72. Lid,
  73. LidLoadlock,
  74. LidLocker,
  75. ESCHV,
  76. PendulumValve,
  77. TurboPump,
  78. EndPoint,
  79. TMLid,
  80. LLALid,
  81. LLBLid,
  82. LLATSlitDoor,
  83. LLBTSlitDoor,
  84. LLAESlitDoor,
  85. LLBESlitDoor,
  86. TMValveN2,
  87. TMSoftPumpValve,
  88. TMFastPumpValve,
  89. TMPurgeValve,
  90. //TMVentValve,
  91. TMSoftVentValve,
  92. TMFastVentValve,
  93. LLASoftPumpValve,
  94. LLAFastPumpValve,
  95. LLAPurgeValve,
  96. LLAVentValve,
  97. LLBSoftPumpValve,
  98. LLBFastPumpValve,
  99. LLBPurgeValve,
  100. LLBVentValve,
  101. ValveWaterRelay,
  102. TMPowerOn,
  103. TMInSafty,
  104. WaferLeakSensor,
  105. EFEMSideDoorClosed,
  106. TMPCWFlowSwitch,
  107. LLAPCWFlowSwitch,
  108. LLBPCWFlowSwitch,
  109. TMLidClosed,
  110. CDAPressureSwitch,
  111. VaccumPressureSwitch,
  112. N2PressureSwitch,
  113. TMPressureCtrl,
  114. TMRobotNotExtendPMA,
  115. TMRobotNotExtendPMB,
  116. TMRobotNotExtendPMC,
  117. TMRobotNotExtendPMD,
  118. TMRobotNotExtendLLA,
  119. TMRobotNotExtendLLB,
  120. EfemRobotNotExtendLLA,
  121. EfemRobotNotExtendLLB,
  122. TMVacSwitch,
  123. LLAVacSwitch,
  124. LLBVacSwitch,
  125. TMATMSwitch,
  126. LLAATMSwitch,
  127. LLBATMSwitch,
  128. LLAWaferSizeCheckSwitch,
  129. LLBWaferSizeCheckSwitch,
  130. PMAWaferSizeCheckSwitch,
  131. PMBWaferSizeCheckSwitch,
  132. PMCWaferSizeCheckSwitch,
  133. PMDWaferSizeCheckSwitch,
  134. }
  135. public enum StateData
  136. {
  137. RecipeProcessTime,
  138. RecipeStepNo,
  139. RecipeStepMode,
  140. RecipeName,
  141. RecipeBaseName,
  142. RecipeStepTimeElapsed,
  143. RecipeStepTimeSetPoint,
  144. RecipeStepRfTimeSetPoint,
  145. RecipeStepElectrodeTemp,
  146. SmallWafer,
  147. MidWafer,
  148. BigWafer,
  149. RfTimeElapsed,
  150. PumpTime,
  151. PMState,
  152. TMState,
  153. IsAutoMode,
  154. IsPmOnline,
  155. IsTmOnline,
  156. PMJobState,
  157. TMJobState,
  158. PmPlatformState,
  159. JobState,
  160. JobTmRecipe,
  161. JobPmRecipe,
  162. JobStartTime,
  163. JobStopTime,
  164. JobProcessCount,
  165. IsPumpingOkForProcess,
  166. IsCoolingOkForProcess,
  167. IsGasFlowingOkForProcess,
  168. IsRfPowering,
  169. TotalCycle,
  170. ProcessStatus,
  171. AlarmEvent,
  172. LeakCheckElapseTime,
  173. DataLogName,
  174. LotName,
  175. CurrentMagazineType,
  176. SchedulerRecipe,
  177. SchedulerState,
  178. SchedulerLoadStationInSubstrate,
  179. SchedulerRailInSubstrate,
  180. SchedulerPmSubstrate,
  181. SchedulerRailOutSubstrate,
  182. SchedulerLoadStationOutSubstrate,
  183. }
  184. public enum RtOperation
  185. {
  186. DeviceOperation,
  187. LockLid,
  188. UnlockLid,
  189. StartPump,
  190. StartTurboPump,
  191. Pump,
  192. PumpLoadLock,
  193. StopPump,
  194. GasFlow,
  195. StopGasFlow,
  196. Cooling,
  197. StopCooling,
  198. /// <summary>
  199. ///
  200. /// 0:Step mode
  201. /// 1:Power on time
  202. /// 2:Electrode temperature
  203. /// 3:Electrode Critical temperature
  204. /// </summary>
  205. RfPower,
  206. Vent,
  207. VentLoadLock,
  208. Purge,
  209. PurgeLoadLock,
  210. Abort,
  211. Heat,
  212. SetConfig,
  213. SetPMBChillerState,
  214. SetHardwareConfig,
  215. LLPlace,
  216. LLPick,
  217. PMPick,
  218. PMPlace,
  219. Extend,
  220. Retract,
  221. RunRecipe,
  222. SkipCurrentStep,
  223. ResumeRecipe,
  224. AbortRecipe,
  225. Reset,
  226. LeakCheck,
  227. GasLeakCheck,
  228. DeleteLeakCheck,
  229. MFCVerification,
  230. AllMFCVerification,
  231. SwitchOffBuzzer,
  232. // Lift pin & Guide pin
  233. MoveLiftPin,
  234. MoveGuidePin,
  235. StartAutoRun,
  236. StopAutoRun,
  237. PauseAutoRun,
  238. ResumeAutoRun,
  239. InitAll,
  240. AckError,
  241. TmRun,
  242. TmStop,
  243. PmAuto,
  244. PmManual,
  245. PmOnline,
  246. PmOffline,
  247. JobAuto,
  248. JobManual,
  249. JobRun,
  250. JobStop,
  251. JobAbort,
  252. JobPmLoadRecipe,
  253. JobTmLoadRecipe,
  254. JobTmRun,
  255. JobTmStop,
  256. JobPmOnline,
  257. JobPmOffline,
  258. JobPmProcessDone,
  259. JobTmRecovered,
  260. Cycle
  261. }
  262. public enum MovementPosition
  263. {
  264. Down, Up, Left, Right, Middle, Unknown
  265. }
  266. public enum RState
  267. {
  268. Init,
  269. Running,
  270. End,
  271. Failed,
  272. Timeout,
  273. }
  274. }