zhouhr 4e783f1934 fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis 10 月之前
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LoadPrepareRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator 10 月之前
LoadRoutine.cs dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE 10 月之前
LoadWithSMIFRoutine.cs dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE 10 月之前
UnloadRoutine.cs dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE 10 月之前
UnloadWithSMIFRoutine.cs dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE 10 月之前
VCEHomeRoutine.cs 253fcb8be2 add CassetteArrive,CurrentSlot in UI,RT,Simulator 10 月之前
VceEntity.cs 4e783f1934 fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis 10 月之前