SEMFPlaceRoutine.cs 8.9 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258
  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Aitex.Core.Util;
  5. using Aitex.Sorter.Common;
  6. using MECF.Framework.Common.Equipment;
  7. using MECF.Framework.Common.Schedulers;
  8. using MECF.Framework.Common.SubstrateTrackings;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Linq;
  12. using System.Text;
  13. using System.Threading.Tasks;
  14. using Venus_Core;
  15. using Venus_RT.Devices;
  16. using Venus_RT.Devices.PreAligner;
  17. using Venus_RT.Devices.TM;
  18. using Venus_RT.Devices.VCE;
  19. using Venus_RT.Modules.VCE;
  20. namespace Venus_RT.Modules.TM.VenusEntity
  21. {
  22. public class SEMFPlaceRoutine : ModuleRoutineBase, IRoutine
  23. {
  24. private enum PlaceStep
  25. {
  26. seWaitModuleReady,
  27. sePrepareModule,
  28. seCheckStatus,
  29. seDoorOpen,
  30. sePlacing,
  31. seNotifyDone
  32. }
  33. private TMBase _tm;
  34. private ITransferRobot _robot;
  35. private IPreAlign _vpa;
  36. private VceEntity _vceModule;
  37. private ModuleName _targetModule;
  38. private int _targetSlot;
  39. private int _placingTimeout;
  40. public int currentStepNo;
  41. Hand _hand;
  42. public SEMFPlaceRoutine(TMBase tm, ITransferRobot robot, IPreAlign vpa, ModuleName module) : base(module)
  43. {
  44. _tm = tm;
  45. _robot = robot;
  46. _vpa = vpa;
  47. }
  48. public RState Start(params object[] objs)
  49. {
  50. if (!_robot.IsHomed)
  51. {
  52. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  53. return RState.Failed;
  54. }
  55. //MoveItem placeItem = (MoveItem)objs[0];
  56. var placeItem = (Queue<MoveItem>)objs[0];
  57. _targetModule = placeItem.Peek().DestinationModule;
  58. _targetSlot = placeItem.Peek().DestinationSlot;
  59. _hand = placeItem.Peek().RobotHand;
  60. //如果目标是Vce 获取vce
  61. if (ModuleHelper.IsLoadPort(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  62. {
  63. if (ModuleHelper.IsVCE(VCE2LP.QueryLP2VCE(_targetModule)))
  64. {
  65. _vceModule = Singleton<RouteManager>.Instance.GetVCE(VCE2LP.QueryLP2VCE(_targetModule));
  66. }
  67. else
  68. {
  69. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} ,which cannot find VCE2LP");
  70. return RState.Failed;
  71. }
  72. //如果vce有错误 报错
  73. if (_vceModule.IsError)
  74. {
  75. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} is Error! Please solve Error first!");
  76. return RState.Failed;
  77. }
  78. if (_targetSlot < 0)
  79. {
  80. LOG.Write(eEvent.ERR_TM, Module, $"VCE target slot cannot be {_targetSlot}. Please check it first.");
  81. return RState.Failed;
  82. }
  83. //if (_tm.VCESlitDoorClosed)
  84. //{
  85. // LOG.Write(eEvent.ERR_TM, Module, $"cannot place cause vce slitdoor not open.");
  86. // return RState.Failed;
  87. //}
  88. //如果VCE门是关闭的 说明还未进行pump 无法取片等
  89. //if (_tm.VCESlitDoorClosed)
  90. //{
  91. // LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} slitdoor not open! Please pump down vce and open it first!");
  92. // return RState.Failed;
  93. //}
  94. }
  95. //如果目标又不是VPA 报错
  96. else if (!ModuleHelper.IsAligner(_targetModule))
  97. {
  98. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for placing action");
  99. return RState.Failed;
  100. }
  101. //检查目标手臂上有wafer
  102. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_hand))
  103. {
  104. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as TM Robot Arm: {_hand} has no wafer");
  105. return RState.Failed;
  106. }
  107. //检查目标槽位上没有wafer
  108. if (WaferManager.Instance.CheckHasWafer(_targetModule, _targetSlot))
  109. {
  110. LOG.Write(eEvent.ERR_TM, Module, $"Cannot place as {_targetModule} Slot {_targetSlot + 1} has a wafer");
  111. return RState.Failed;
  112. }
  113. //2023/10/13 朱永吉 atm mode的判断不允许自动pump vent 信号不满足手动pump vent
  114. //if (RouteManager.IsATMMode && _targetModule == ModuleName.VCE1)
  115. //{
  116. // if (!_tm.IsVCEATM)
  117. // {
  118. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but VCE is not ATM!");
  119. // return RState.Failed;
  120. // }
  121. //
  122. // if (!_tm.IsTMATM)
  123. // {
  124. // LOG.Write(eEvent.ERR_TM, Module, $"System in ATM Mode but TM is not ATM!");
  125. // return RState.Failed;
  126. // }
  127. //}
  128. //else
  129. //{
  130. // if (_tm.IsVCEATM)
  131. // {
  132. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but VCE is ATM!");
  133. // return RState.Failed;
  134. // }
  135. //
  136. // if (_tm.IsTMATM)
  137. // {
  138. // LOG.Write(eEvent.ERR_TM, Module, $"System not in ATM Mode but TM is ATM!");
  139. // return RState.Failed;
  140. // }
  141. //}
  142. Reset();
  143. _placingTimeout = SC.GetValue<int>($"{Module}.PlaceTimeout") * 1000;
  144. return Runner.Start(Module, $"Place to {_targetModule}");
  145. }
  146. public RState Monitor()
  147. {
  148. Runner.Wait(PlaceStep.seWaitModuleReady, CheckModuleReady, _delay_60s)
  149. .Run(PlaceStep.sePrepareModule, PrepareModule, CheckModuleReady)
  150. .RunIf(PlaceStep.seDoorOpen, ModuleHelper.IsLoadPort(_targetModule), VCEDoorOpen, CheckVCEDoorOpen)
  151. .RunIf(PlaceStep.seCheckStatus, ModuleHelper.IsLoadPort(_targetModule), VCECheckStatus, CheckStatusIsOk)
  152. .Run(PlaceStep.sePlacing, Placing, WaitPlaceDone, _placingTimeout)
  153. .End(PlaceStep.seNotifyDone, NullFun, 500);
  154. return Runner.Status;
  155. }
  156. private bool VCECheckStatus()
  157. {
  158. return _vceModule.CheckToPostMessage((int)VceMSG.CheckStatus);
  159. }
  160. private bool CheckStatusIsOk()
  161. {
  162. return _vceModule.CurrentSlot == (_targetSlot + 1);
  163. }
  164. private bool PrepareModule()
  165. {
  166. switch (_targetModule)
  167. {
  168. case ModuleName.LP1:
  169. case ModuleName.LP2:
  170. _vceModule.PostMsg(VceMSG.Goto, _targetSlot);
  171. return true;//移动到目标槽位
  172. case ModuleName.Aligner1:
  173. case ModuleName.Aligner2:
  174. return true;//10/17暂时为true 后可能要求旋转
  175. default:
  176. return false;
  177. }
  178. }
  179. private bool WaitPlaceDone()
  180. {
  181. if (_robot.Status == RState.Running)
  182. {
  183. return false;
  184. }
  185. else if (_robot.Status == RState.End)
  186. {
  187. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_hand, _targetModule, _targetSlot);
  188. return true;
  189. }
  190. else
  191. {
  192. Runner.Stop($"TM Robot Placing failed, {_robot.Status}");
  193. return true;
  194. }
  195. }
  196. private bool VCEDoorOpen()
  197. {
  198. return _tm.TurnSlitDoor(VCE2LP.QueryLP2VCE(_targetModule), true);
  199. }
  200. private bool CheckVCEDoorOpen()
  201. {
  202. return _tm.CheckSlitValveOpen(VCE2LP.QueryLP2VCE(_targetModule));
  203. }
  204. private bool Placing()
  205. {
  206. if(ModuleHelper.IsLoadPort(_targetModule))
  207. return _robot.Place(VCE2LP.QueryLP2VCE(_targetModule), 0, _hand);
  208. else
  209. return _robot.Place(_targetModule, 0, _hand);
  210. }
  211. private bool CheckModuleReady()
  212. {
  213. switch (_targetModule)
  214. {
  215. case ModuleName.LP1:
  216. case ModuleName.LP2:
  217. return _vceModule.IsIdle;
  218. case ModuleName.Aligner1:
  219. case ModuleName.Aligner2:
  220. return _vpa.Status == RState.End;
  221. default:
  222. return false;
  223. }
  224. }
  225. public void Abort()
  226. {
  227. }
  228. }
  229. }