VentRoutine.cs 4.3 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Venus_RT.Devices;
  4. using MECF.Framework.Common.Routine;
  5. using Venus_Core;
  6. using Aitex.Core.RT.DataCenter;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class VentRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum VentStep
  12. {
  13. kISODelay,
  14. kClosePVValves,
  15. KCloseTurboPurgeValve,
  16. KCloseISOValve,
  17. kOpenVentValves,
  18. kDelay_2,
  19. kCloseVentValves,
  20. }
  21. //private int _ventTime;
  22. private double _ventTimeDelay = 1;
  23. private int _checkATMTimeout = 90;
  24. public bool VentingFlag => _ventingflag;
  25. private bool _ventingflag = false;
  26. public VentRoutine(JetPMBase chamber) : base(chamber)
  27. {
  28. Name = "PM Vent";
  29. }
  30. public RState Start(params object[] objs)
  31. {
  32. if (CheckLid() &&
  33. CheckSlitDoor() &&
  34. CheckCDA() &&
  35. CheckATM())
  36. {
  37. Reset();
  38. _chamber.CloseValves();
  39. //_chamber.OpenValve(ValveType.TurboPumpPumping, true);
  40. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  41. //_chamber.OpenValve(ValveType.PVN22, true);
  42. //_chamber.OpenValve(ValveType.N2, true);
  43. //_chamber.OpenValve(ValveType.GasFinal, true);
  44. _checkATMTimeout = SC.GetValue<int>($"{Module}.CheckATMTimeout");
  45. _ventTimeDelay = SC.GetValue<double>($"{Module}.OverVentTime");
  46. if (Runner.Start(Module, Name) == RState.Running)
  47. {
  48. _ventingflag = true;
  49. return RState.Running;
  50. }
  51. else
  52. {
  53. _ventingflag = false;
  54. return RState.Failed;
  55. }
  56. }
  57. return RState.Failed;
  58. }
  59. public RState Monitor()
  60. {
  61. Runner
  62. .Run(VentStep.kClosePVValves, ClosePVValves, PVIsOpen)
  63. .Run(VentStep.KCloseTurboPurgeValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPurge, false), _delay_1s)
  64. .Run(VentStep.KCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_1s)
  65. .Run(VentStep.kOpenVentValves, OpenValve, () => { return _chamber.IsATM; }, _checkATMTimeout * 1000)
  66. .Delay(VentStep.kDelay_2, (int)_ventTimeDelay)
  67. .End(VentStep.kCloseVentValves, CloseVentGasFinalValves, _delay_2s);
  68. _ventingflag = Runner.Status == RState.Running;
  69. return Runner.Status;
  70. }
  71. private bool ClosePVValves()
  72. {
  73. _chamber.OpenValve(ValveType.Guage, false);
  74. if (_chamber.PendulumValveIsOpen())
  75. {
  76. return _chamber.TurnPendulumValve(false);
  77. }
  78. _chamber.OpenValve(ValveType.TurboPumpPumping, false);
  79. _chamber.OpenValve(ValveType.TurboPumpPurge, false);
  80. _chamber.OpenValve(ValveType.FastPump, false);
  81. _chamber.OpenValve(ValveType.SoftPump, false);
  82. return true;
  83. }
  84. private bool PVIsOpen()
  85. {
  86. return !_chamber.PendulumValveIsOpen();
  87. }
  88. private bool OpenValve()
  89. {
  90. if (_chamber.ChamberType == JetChamber.VenusSE || _chamber.ChamberType == JetChamber.VenusDE)
  91. {
  92. _chamber.OpenValve(ValveType.PVN22, true);
  93. }
  94. _chamber.OpenValve(ValveType.PVN22, true);
  95. _chamber.OpenValve(ValveType.N2, true);
  96. _chamber.OpenValve(ValveType.GasFinal, true);
  97. return true;
  98. }
  99. private bool CloseVentGasFinalValves()
  100. {
  101. //if (_chamber.ChamberType == JetChamber.VenusSE || _chamber.ChamberType == JetChamber.VenusDE)
  102. //{
  103. // _chamber.OpenValve(ValveType.PVN22, false);
  104. //}
  105. _chamber.OpenValve(ValveType.GasFinal, false);
  106. _chamber.OpenValve(ValveType.N2, false);
  107. _chamber.OpenValve(ValveType.PVN22, false);
  108. return true;
  109. }
  110. public void Abort()
  111. {
  112. CloseAllValves();
  113. }
  114. }
  115. }