| .. |
|
LoadPrepareRoutine.cs
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 year ago |
|
LoadRoutine.cs
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 year ago |
|
LoadWithSMIFRoutine.cs
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 year ago |
|
UnloadRoutine.cs
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 year ago |
|
UnloadWithSMIFRoutine.cs
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 year ago |
|
VceEntity.cs
|
dc38e4a4a8
fix bug in Venus SE Swap
|
1 year ago |
zhouhr
dc38e4a4a8
fix bug in Venus SE Swap