SimulatorSystem.cs 99 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  156. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  157. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  158. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  159. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
  160. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
  161. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  172. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  189. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  190. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. //// pressure
  206. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  207. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  209. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  210. //// Temperature
  211. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  212. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  213. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  214. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  215. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  216. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  217. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  218. // Datetime
  219. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  220. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  221. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  222. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  223. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  224. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  225. break;
  226. case JetChamber.Kepler2300:
  227. // chamber
  228. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  229. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  231. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  232. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  233. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  234. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  235. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  236. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  237. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  238. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  239. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  240. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  241. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  242. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  244. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  245. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  248. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  249. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  250. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  252. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  253. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  270. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  271. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  272. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  273. //// pressure
  274. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  275. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  276. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  277. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  278. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  279. //// Temperature
  280. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  281. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  282. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  283. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  284. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  285. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  286. // Datetime
  287. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  288. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  289. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  290. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  291. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  292. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  293. break;
  294. case JetChamber.Kepler2200A:
  295. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  296. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  297. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  298. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  299. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  300. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  301. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  302. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  303. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  304. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  305. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  306. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  307. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  308. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  309. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  318. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  319. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  320. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  321. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  322. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  323. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  324. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  325. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  326. //// pressure
  327. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  328. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  329. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  330. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  331. //// Temperature
  332. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  333. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  334. // Datetime
  335. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  336. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  337. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  338. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  339. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  340. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  341. break;
  342. }
  343. }
  344. private void SetTMDefaultValue()
  345. {
  346. ModuleName mod = ModuleName.TM;
  347. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  348. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  349. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  351. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  354. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  355. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  356. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  357. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  358. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  359. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  360. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  361. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  362. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  363. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  364. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  366. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  372. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  373. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  374. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  375. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  376. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  377. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  378. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  381. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  383. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  384. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  385. // Datetime
  386. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  387. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  388. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  389. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  390. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  391. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  392. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  393. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  394. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  395. {
  396. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  397. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  398. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  399. }
  400. else
  401. {
  402. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  403. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  404. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  405. }
  406. }
  407. private void SetSETMDefaultValue()
  408. {
  409. ModuleName mod = ModuleName.SETM;
  410. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  411. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  412. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  413. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  414. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  415. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  416. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  418. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  419. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  420. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  421. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  422. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  423. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  424. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  425. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  426. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  427. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  428. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  429. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  430. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  431. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  432. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  433. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  434. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  435. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  436. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  437. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  438. SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
  439. SetAiValue($"{mod}.AI_VCE_Pipeline_Vacuum_Gauge", 3000);
  440. SetAiValue($"{mod}.AI_TM_Pipeline_Vacuum_Gauge", 3000);
  441. SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
  442. }
  443. private bool OnMonitor()
  444. {
  445. try
  446. {
  447. foreach (var item in jetChambers)
  448. {
  449. switch (item.Value)
  450. {
  451. case JetChamber.Venus:
  452. MonitorSlitDoor(item.Key);
  453. MonitorPin(item.Key);
  454. MonitorPressure(item.Key);
  455. MonitorExtendAndRetract(item.Key);
  456. MonitorGas(item.Key);
  457. this.SimulateHe(item.Key);
  458. //MonitorRF(item.Key);
  459. ChangeTime(item.Key);
  460. //MonitorIOPumpCtrl(item.Key);
  461. break;
  462. case JetChamber.Kepler2300:
  463. MonitorSlitDoor(item.Key);
  464. MonitorPin(item.Key);
  465. MonitorPressure_Kepler(item.Key);
  466. //MonitorTemperature(item.Key);
  467. MonitorGas(item.Key);
  468. this.SimulateHe(item.Key);
  469. //MonitorRF(item.Key);
  470. ChangeTime(item.Key);
  471. //MonitorIOPumpCtrl(item.Key);
  472. MonitorLid(item.Key);
  473. break;
  474. case JetChamber.Kepler2200A:
  475. MonitorSlitDoor(item.Key);
  476. MonitorPressure_Kepler2200A(item.Key);
  477. //MonitorTemperature(item.Key);
  478. MonitorGas(item.Key);
  479. // MonitorRF(item.Key);
  480. ChangeTime(item.Key);
  481. //MonitorIOPumpCtrl(item.Key);
  482. MonitorLid(item.Key);
  483. MonitorIOHighTemperatureHeater(item.Key);
  484. break;
  485. case JetChamber.Kepler2200B:
  486. break;
  487. case JetChamber.VenusSE:
  488. MonitorPin(item.Key);
  489. //MonitorVenuSESlitDoor(item.Key);
  490. MonitorPressure_VenusSE(item.Key);
  491. break;
  492. }
  493. }
  494. ChangeTime(ModuleName.TM);
  495. MonitorMFSlitDoor();
  496. MonitorSEMFSlitDoor();
  497. MonitorMFPressure();
  498. MonitorSEMFPressure();
  499. }
  500. catch (Exception e)
  501. {
  502. LOG.WriteExeption(e);
  503. }
  504. return true;
  505. }
  506. private void ChangeTime(ModuleName mod)
  507. {
  508. // Heartbeat with PLC
  509. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  510. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  511. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  512. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  513. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  514. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  515. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  516. }
  517. //void MonitorVenuSESlitDoor(ModuleName mod)
  518. //{
  519. //}
  520. void MonitorSlitDoor(ModuleName mod)
  521. {
  522. // slit door open
  523. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  524. {
  525. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  526. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  527. }
  528. // slit door close
  529. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  530. {
  531. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  532. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  533. }
  534. }
  535. void MonitorMFSlitDoor()
  536. {
  537. ModuleName mod = ModuleName.TM;
  538. // LLA T door open
  539. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  540. {
  541. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  542. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  543. }
  544. // LLB T door open
  545. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  546. {
  547. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  548. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  549. }
  550. // LLA E door open
  551. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  552. {
  553. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  554. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  555. }
  556. // LLB E door open
  557. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  558. {
  559. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  560. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  561. }
  562. // LLA T door close
  563. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  564. {
  565. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  566. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  567. }
  568. // LLB T door close
  569. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  570. {
  571. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  572. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  573. }
  574. // LLA E door close
  575. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  576. {
  577. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  578. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  579. }
  580. // LLB E door close
  581. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  582. {
  583. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  584. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  585. }
  586. }
  587. void MonitorSEMFSlitDoor()
  588. {
  589. ModuleName mod = ModuleName.SETM;
  590. // VCE T door open
  591. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  592. {
  593. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  594. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  595. }
  596. // VCE T door Close
  597. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  598. {
  599. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  600. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  601. }
  602. }
  603. void MonitorPin(ModuleName mod)
  604. {
  605. // lift pin up
  606. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  607. {
  608. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  609. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  610. }
  611. }
  612. void MonitorLid(ModuleName mod)
  613. {
  614. // lift pin up
  615. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  616. {
  617. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  618. }
  619. }
  620. void MonitorExtendAndRetract(ModuleName mod)
  621. {
  622. // Extend
  623. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  624. if (_trigLLExtend.Q)
  625. {
  626. _trigLLRetract.RST = true;
  627. Thread.Sleep(500);
  628. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  629. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  630. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  631. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  632. }
  633. // Retract
  634. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  635. if (_trigLLRetract.Q)
  636. {
  637. count++;
  638. _trigLLExtend.RST = true;
  639. Thread.Sleep(500);
  640. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  641. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  642. if (count == 1)
  643. {
  644. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  645. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  646. }
  647. else if (count == 2)
  648. {
  649. count = 0;
  650. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  651. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  652. }
  653. }
  654. }
  655. void MonitorPressure(ModuleName mod)
  656. {
  657. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  658. // Loadlock pressure
  659. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  660. // Foreline
  661. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  662. {
  663. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  664. }
  665. else
  666. {
  667. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  668. }
  669. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  670. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  671. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  672. //float chamber_pressure = GetMockChamberPressure(mod);
  673. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  674. // soft pump & fast pump
  675. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  676. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  677. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  678. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  679. {
  680. //任意泵打开
  681. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  682. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  683. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  684. {//开双泵
  685. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  686. {
  687. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  688. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  689. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  690. }
  691. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  692. {
  693. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  694. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  695. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  696. }
  697. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  698. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  699. }
  700. else if (fast_pump_vlv.Value)//开
  701. {
  702. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  703. {
  704. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  705. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  706. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  707. }
  708. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  709. {
  710. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  711. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  712. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  713. }
  714. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  715. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  716. }
  717. else if (soft_pump_vlv.Value)
  718. {
  719. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  720. {
  721. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  722. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  723. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  724. }
  725. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  726. {
  727. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  728. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  729. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  730. }
  731. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  732. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  733. }
  734. else if (turbo_pump_vlv.Value)
  735. {
  736. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  737. if ((getAiValue_ChamberPressure - 500) >= 0)
  738. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  739. else
  740. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  741. if ((getAiValue_ProcessPressure - 500) >= 0)
  742. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  743. else
  744. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  745. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  746. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  747. }
  748. }
  749. // fast vent & purge
  750. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  751. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  752. //if (vent_vlv.Value || purge_vlv.Value)
  753. //{
  754. // if (vent_vlv.Value && purge_vlv.Value)
  755. // {
  756. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  757. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  758. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  759. // {
  760. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  761. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  762. // }
  763. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  764. // {
  765. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  766. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  767. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  768. // }
  769. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  770. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  771. // }
  772. // else
  773. //
  774. if (vent_vlv.Value)
  775. {
  776. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  777. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  778. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  779. {
  780. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  781. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  782. }
  783. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  784. {
  785. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  786. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  787. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  788. }
  789. else
  790. {
  791. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  792. }
  793. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  794. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  795. }
  796. // Loadlock Pumping Valve
  797. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  798. if (Loadlock_pump_vlv.Value)
  799. {
  800. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  801. }
  802. // Loadlock vent
  803. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  804. if (Loadlock_vent_vlv.Value)
  805. {
  806. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  807. }
  808. // 压力值越界,复位
  809. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  810. if (chamber_pressure1 > ATM_PRESSURE)
  811. {
  812. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  813. }
  814. else if (chamber_pressure1 < 20)
  815. {
  816. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  817. }
  818. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  819. if (process_pressure1 > PROCESS_GAUGE)
  820. {
  821. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  822. }
  823. else if (process_pressure1 < 20)
  824. {
  825. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  826. }
  827. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  828. if (foreline_pressure > 10000)
  829. {
  830. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  831. }
  832. else if (foreline_pressure < 150)
  833. {
  834. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  835. }
  836. // 模拟压力计漂移
  837. //int p1 = (int)GetMockChamberPressure(mod);
  838. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  839. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  840. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  841. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  842. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  843. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  844. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  845. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  846. // 根据当前压力值设定信号
  847. //float chamber_pressure2 = GetMockChamberPressure(mod);
  848. // ATM switch
  849. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  850. // VAC switch
  851. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  852. // Throttle valve
  853. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  854. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  855. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  856. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  857. // 压力值
  858. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  859. //{
  860. // short increase = (short)_rd.Next(20, 30);
  861. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  862. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  863. // {
  864. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  865. // }
  866. //}
  867. //else
  868. //{
  869. // short increase = (short)_rd.Next(20, 30);
  870. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  871. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  872. // {
  873. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  874. // }
  875. //}
  876. //// 位置值
  877. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  878. //{
  879. // short increase = (short)_rd.Next(20, 30);
  880. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  881. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  882. // {
  883. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  884. // }
  885. //}
  886. //else
  887. //{
  888. // short increase = (short)_rd.Next(20, 30);
  889. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  890. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  891. // {
  892. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  893. // }
  894. //}
  895. }
  896. void MonitorPressure_Kepler(ModuleName mod)
  897. {
  898. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  899. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  900. {
  901. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  902. }
  903. else
  904. {
  905. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  906. }
  907. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  908. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  909. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  910. //float chamber_pressure = GetMockChamberPressure(mod);
  911. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  912. // soft pump & fast pump
  913. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  914. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  915. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  916. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  917. {
  918. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  919. {
  920. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  921. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  922. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  923. {
  924. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  925. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  926. }
  927. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  928. {
  929. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  930. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  931. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  932. }
  933. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  934. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  935. }
  936. else if (fast_pump_vlv.Value)
  937. {
  938. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  939. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  940. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  941. {
  942. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  943. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  944. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  945. }
  946. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  947. {
  948. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  949. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  950. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  951. }
  952. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  953. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  954. }
  955. else if (soft_pump_vlv.Value)
  956. {
  957. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  958. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  959. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  960. {
  961. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  962. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  963. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  964. }
  965. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  966. {
  967. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  968. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  969. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  970. }
  971. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  972. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  973. }
  974. else if (turbo_pump_vlv.Value)
  975. {
  976. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  977. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  978. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  979. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  980. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  981. }
  982. }
  983. // fast vent & purge
  984. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  985. if (vent_vlv.Value)
  986. {
  987. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  988. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  989. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  990. {
  991. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  992. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  993. }
  994. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  995. {
  996. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  997. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  998. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  999. }
  1000. else
  1001. {
  1002. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1003. }
  1004. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1005. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1006. }
  1007. // Loadlock Pumping Valve
  1008. // 压力值越界,复位
  1009. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1010. if (chamber_pressure1 > ATM_PRESSURE)
  1011. {
  1012. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1013. }
  1014. else if (chamber_pressure1 < 20)
  1015. {
  1016. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1017. }
  1018. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1019. if (process_pressure1 > PROCESS_GAUGE)
  1020. {
  1021. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1022. }
  1023. else if (process_pressure1 < 20)
  1024. {
  1025. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1026. }
  1027. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1028. if (foreline_pressure > 10000)
  1029. {
  1030. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1031. }
  1032. else if (foreline_pressure < 150)
  1033. {
  1034. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1035. }
  1036. // ATM switch
  1037. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1038. // VAC switch
  1039. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1040. }
  1041. void MonitorPressure_VenusSE(ModuleName mod)
  1042. {
  1043. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1044. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1045. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1046. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1047. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1048. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1049. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1050. {
  1051. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1052. }
  1053. else
  1054. {
  1055. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1056. }
  1057. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1058. {
  1059. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1060. {
  1061. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1062. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1063. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1064. {
  1065. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1066. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1067. }
  1068. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1069. {
  1070. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1071. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1072. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1073. }
  1074. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1075. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1076. }
  1077. else if (fast_pump_vlv.Value)
  1078. {
  1079. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1080. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1081. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1082. {
  1083. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1084. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1085. }
  1086. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1087. {
  1088. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1089. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1090. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1091. }
  1092. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1093. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1094. }
  1095. else if (soft_pump_vlv.Value)
  1096. {
  1097. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1098. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1099. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1100. {
  1101. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1102. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1103. }
  1104. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1105. {
  1106. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1107. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1108. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1109. }
  1110. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1111. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1112. }
  1113. else if (turbo_pump_vlv.Value)
  1114. {
  1115. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1116. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1117. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1118. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1119. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1120. }
  1121. }
  1122. // 压力值越界,复位
  1123. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1124. if (chamber_pressure1 > ATM_PRESSURE)
  1125. {
  1126. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1127. }
  1128. else if (chamber_pressure1 < 20)
  1129. {
  1130. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1131. }
  1132. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1133. if (process_pressure1 > PROCESS_GAUGE)
  1134. {
  1135. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1136. }
  1137. else if (process_pressure1 < 20)
  1138. {
  1139. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1140. }
  1141. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1142. if (foreline_pressure > 10000)
  1143. {
  1144. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1145. }
  1146. else if (foreline_pressure < 150)
  1147. {
  1148. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1149. }
  1150. // ATM switch
  1151. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1152. // VAC switch
  1153. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1154. }
  1155. void MonitorPressure_Kepler2200A(ModuleName mod)
  1156. {
  1157. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1158. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1159. {
  1160. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1161. }
  1162. else
  1163. {
  1164. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1165. }
  1166. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1167. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1168. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1169. //float chamber_pressure = GetMockChamberPressure(mod);
  1170. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1171. // soft pump & fast pump
  1172. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1173. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1174. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1175. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1176. {
  1177. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1178. {
  1179. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1180. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1181. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1182. {
  1183. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1184. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1185. }
  1186. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1187. {
  1188. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1189. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1190. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1191. }
  1192. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1193. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1194. }
  1195. else if (fast_pump_vlv.Value)
  1196. {
  1197. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1198. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1199. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1200. {
  1201. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1202. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1203. }
  1204. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1205. {
  1206. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1207. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1208. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1209. }
  1210. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1211. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1212. }
  1213. else if (soft_pump_vlv.Value)
  1214. {
  1215. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1216. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1217. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1218. {
  1219. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1220. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1221. }
  1222. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1223. {
  1224. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1225. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1226. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1227. }
  1228. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1229. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1230. }
  1231. else if (turbo_pump_vlv.Value)
  1232. {
  1233. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1234. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1235. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1236. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1237. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1238. }
  1239. }
  1240. // fast vent & purge
  1241. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1242. if (vent_vlv.Value)
  1243. {
  1244. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1245. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1246. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1247. {
  1248. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1249. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1250. }
  1251. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1252. {
  1253. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1254. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1255. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1256. }
  1257. else
  1258. {
  1259. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1260. }
  1261. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1262. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1263. }
  1264. // Loadlock Pumping Valve
  1265. // 压力值越界,复位
  1266. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1267. if (chamber_pressure1 > ATM_PRESSURE)
  1268. {
  1269. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1270. }
  1271. else if (chamber_pressure1 < 20)
  1272. {
  1273. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1274. }
  1275. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1276. if (process_pressure1 > PROCESS_GAUGE)
  1277. {
  1278. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1279. }
  1280. else if (process_pressure1 < 20)
  1281. {
  1282. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1283. }
  1284. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1285. if (foreline_pressure > 10000)
  1286. {
  1287. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1288. }
  1289. else if (foreline_pressure < 150)
  1290. {
  1291. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1292. }
  1293. // ATM switch
  1294. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1295. // VAC switch
  1296. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1297. }
  1298. void MonitorSEMFPressure()
  1299. {
  1300. ModuleName mod = ModuleName.SETM;
  1301. string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
  1302. string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
  1303. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
  1304. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
  1305. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
  1306. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
  1307. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
  1308. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
  1309. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
  1310. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
  1311. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1312. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1313. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1314. {
  1315. if (getAiValue_TM_ChamberPressure > 10000)
  1316. {
  1317. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1318. }
  1319. else if (getAiValue_TM_ChamberPressure <= 10000)
  1320. {
  1321. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1322. }
  1323. }
  1324. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1325. {
  1326. if (getAiValue_TM_ChamberPressure > 10000)
  1327. {
  1328. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1329. }
  1330. else if (getAiValue_TM_ChamberPressure <= 10000)
  1331. {
  1332. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1333. }
  1334. }
  1335. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1336. {
  1337. if (getAiValue_VCE_ChamberPressure > 10000)
  1338. {
  1339. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1340. }
  1341. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1342. {
  1343. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1344. }
  1345. }
  1346. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1347. {
  1348. if (getAiValue_VCE_ChamberPressure > 10000)
  1349. {
  1350. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1351. }
  1352. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1353. {
  1354. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1355. }
  1356. }
  1357. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1358. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1359. {
  1360. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1361. }
  1362. else if (getAiValue_VCE_ChamberPressure < 20)
  1363. {
  1364. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1365. }
  1366. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1367. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1368. {
  1369. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1370. }
  1371. else if (getAiValue_TM_ChamberPressure < 20)
  1372. {
  1373. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1374. }
  1375. IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1376. // VAC switch
  1377. IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1378. }
  1379. void MonitorMFPressure()
  1380. {
  1381. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1382. //{
  1383. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1384. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1385. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1386. ModuleName mod = ModuleName.TM;
  1387. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1388. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1389. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1390. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1391. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1392. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1393. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1394. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1395. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1396. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1397. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1398. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1399. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1400. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1401. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1402. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1403. {
  1404. if (getAiValue_LLA_ChamberPressure > 10000)
  1405. {
  1406. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1407. }
  1408. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1409. {
  1410. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1411. }
  1412. }
  1413. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1414. {
  1415. if (getAiValue_LLB_ChamberPressure > 10000)
  1416. {
  1417. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1418. }
  1419. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1420. {
  1421. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1422. }
  1423. }
  1424. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1425. {
  1426. if (getAiValue_TM_ChamberPressure > 10000)
  1427. {
  1428. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1429. }
  1430. else if (getAiValue_TM_ChamberPressure <= 10000)
  1431. {
  1432. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1433. }
  1434. }
  1435. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1436. {
  1437. if (getAiValue_LLA_ChamberPressure > 10000)
  1438. {
  1439. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1440. }
  1441. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1442. {
  1443. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1444. }
  1445. }
  1446. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1447. {
  1448. if (getAiValue_LLB_ChamberPressure > 10000)
  1449. {
  1450. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1451. }
  1452. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1453. {
  1454. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1455. }
  1456. }
  1457. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1458. {
  1459. if (getAiValue_TM_ChamberPressure > 10000)
  1460. {
  1461. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1462. }
  1463. else if (getAiValue_TM_ChamberPressure <= 10000)
  1464. {
  1465. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1466. }
  1467. }
  1468. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1469. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1470. {
  1471. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1472. }
  1473. else if (getAiValue_LLA_ChamberPressure < 20)
  1474. {
  1475. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1476. }
  1477. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1478. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1479. {
  1480. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1481. }
  1482. else if (getAiValue_LLB_ChamberPressure < 20)
  1483. {
  1484. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1485. }
  1486. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1487. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1488. {
  1489. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1490. }
  1491. else if (getAiValue_TM_ChamberPressure < 20)
  1492. {
  1493. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1494. }
  1495. // ATM switch
  1496. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1497. // VAC switch
  1498. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1499. // ATM switch
  1500. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1501. // VAC switch
  1502. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1503. // ATM switch
  1504. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1505. // VAC switch
  1506. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1507. // }
  1508. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1509. //{
  1510. // ModuleName mod = ModuleName.TM;
  1511. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1512. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1513. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1514. //}
  1515. }
  1516. void SetAiValue(string name, float value)
  1517. {
  1518. byte[] flow = BitConverter.GetBytes(value);
  1519. short high1 = BitConverter.ToInt16(flow, 0);
  1520. short low1 = BitConverter.ToInt16(flow, 2);
  1521. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1522. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1523. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1524. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1525. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1526. }
  1527. float GetAiValue(string name)
  1528. {
  1529. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1530. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1531. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1532. return flow;
  1533. }
  1534. float GetAoValue(string name)
  1535. {
  1536. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1537. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1538. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1539. return flow;
  1540. }
  1541. void MonitorTemperature(ModuleName mod)
  1542. {
  1543. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1544. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1545. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1546. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1547. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1548. // 底座
  1549. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1550. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1551. //{
  1552. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1553. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1554. //}
  1555. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1556. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1557. //{
  1558. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1559. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1560. //}
  1561. // Foreline
  1562. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1563. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1564. {
  1565. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1566. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1567. }
  1568. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1569. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1570. {
  1571. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1572. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1573. }
  1574. // Wall
  1575. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1576. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1577. {
  1578. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1579. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1580. }
  1581. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1582. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1583. {
  1584. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1585. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1586. }
  1587. }
  1588. void MonitorGas(ModuleName mod)
  1589. {
  1590. // gas
  1591. this.SimulateMFC(mod, 1);
  1592. this.SimulateMFC(mod, 2);
  1593. this.SimulateMFC(mod, 3);
  1594. this.SimulateMFC(mod, 4);
  1595. this.SimulateMFC(mod, 5);
  1596. this.SimulateMFC(mod, 6);
  1597. this.SimulateMFC(mod, 7);
  1598. this.SimulateMFC(mod, 8);
  1599. this.SimulateN2(mod);
  1600. }
  1601. private void SimulateMFC(ModuleName mod, byte gasNum)
  1602. {
  1603. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1604. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1605. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1606. }
  1607. private void SimulateN2(ModuleName mod)
  1608. {
  1609. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1610. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1611. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1612. }
  1613. private void SimulateHe(ModuleName mod)
  1614. {
  1615. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1616. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1617. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1618. }
  1619. void MonitorRF(ModuleName mod)
  1620. {
  1621. // RF generator
  1622. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1623. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1624. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1625. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1626. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1627. }
  1628. void MonitorIOPumpCtrl(ModuleName mod)
  1629. {
  1630. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1631. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1632. }
  1633. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1634. {
  1635. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1636. {
  1637. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1638. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1639. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1640. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1641. }
  1642. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1643. {
  1644. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1645. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1646. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1647. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1648. }
  1649. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1650. {
  1651. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1652. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1653. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1654. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1655. }
  1656. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1657. {
  1658. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1659. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1660. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1661. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1662. }
  1663. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_H-HT_Heater_On"].Value;
  1664. var sp = GetAoValue($"{mod}.AO_CHB_H-HT_Temperature_Setpoint");
  1665. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1666. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1667. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", (float)mock_fb);
  1668. }
  1669. public void Terminate()
  1670. {
  1671. _thread.Stop();
  1672. }
  1673. public void SetCoolantOutletTemp(string module, int Temp)
  1674. {
  1675. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1676. //{
  1677. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1678. //}
  1679. }
  1680. }
  1681. }