SEMFPMPickRoutine.cs 11 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.Routine;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using Aitex.Sorter.Common;
  8. using MECF.Framework.Common.DBCore;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Linq;
  16. using System.Text;
  17. using System.Threading.Tasks;
  18. using System.Windows;
  19. using System.Windows.Interop;
  20. using Venus_Core;
  21. using Venus_RT.Devices;
  22. using Venus_RT.Devices.IODevices;
  23. using Venus_RT.Modules.PMs;
  24. namespace Venus_RT.Modules.TM.VenusEntity
  25. {
  26. public class SEMFPMPickRoutine : ModuleRoutineBase, IRoutine
  27. {
  28. private enum PickStep
  29. {
  30. WaitPMReady,
  31. WaitforControlPressure,
  32. PMPrepare,
  33. ArmExtend,
  34. QueryAWC,
  35. DropDownWafer,
  36. PickDelay,
  37. ArmRetract,
  38. SavePickeData,
  39. NotifyDone,
  40. CloseSlitDoor,
  41. EndDelay
  42. }
  43. private readonly HongHuTM _tm;
  44. private readonly ITransferRobot _robot;
  45. private int _pickdelay = 0;
  46. private ModuleName _targetModule;
  47. private Hand _hand;
  48. private int _targetSlot;
  49. private PMEntity _pmModule;
  50. private int _ExtendTimeout = 120 * 1000;
  51. private int _RetractTimeout = 120 * 1000;
  52. private JetPMBase _chamber;
  53. private bool NeedControlPressure;
  54. private int _controlPressureSetPoint = 90;
  55. private int _controlFlowSetPoint = 10;
  56. //private DateTime _starttime;
  57. private bool _queryAwc;
  58. public SEMFPMPickRoutine(HongHuTM honghutm, ITransferRobot robot) : base(ModuleName.TMRobot)
  59. {
  60. _tm = honghutm;
  61. _robot = robot;
  62. _queryAwc = false;
  63. }
  64. public RState Start(params object[] objs)
  65. {
  66. //_starttime = DateTime.Now;
  67. if (!_robot.IsHomed)
  68. {
  69. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  70. return RState.Failed;
  71. }
  72. var pickItem = (Queue<MoveItem>)objs[0];
  73. _targetModule = pickItem.Peek().SourceModule;
  74. _targetSlot = pickItem.Peek().SourceSlot;
  75. _hand = pickItem.Peek().RobotHand;
  76. //_chamber = (JetChamber)SC.GetValue<int>($"{_targetModule}.ChamberType");
  77. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  78. {
  79. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  80. }
  81. else
  82. {
  83. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for picking action");
  84. return RState.Failed;
  85. }
  86. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_hand))
  87. {
  88. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as TM Robot Arm: {_hand} already has a wafer");
  89. return RState.Failed;
  90. }
  91. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  92. {
  93. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  94. return RState.Failed;
  95. }
  96. var wafer = WaferManager.Instance.GetWafer(_targetModule, _targetSlot);
  97. LOG.Write(eEvent.INFO_TM_ROBOT, ModuleName.TMRobot, $"{wafer.WaferOrigin} will be move from {_targetModule} {_targetSlot + 1} to TM Robot {_hand}");
  98. _ExtendTimeout = SC.GetValue<int>("SETM.ExtendTimeout") * 1000;
  99. _RetractTimeout = SC.GetValue<int>("SETM.RetractTimeout") * 1000;
  100. _pickdelay = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  101. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  102. {
  103. NeedControlPressure = true;
  104. }
  105. else
  106. {
  107. NeedControlPressure = false;
  108. }
  109. Reset();
  110. return Runner.Start(Module, $"Pick from {_targetModule}");
  111. }
  112. public RState Monitor()
  113. {
  114. Runner.Wait(PickStep.WaitPMReady, () => _pmModule.IsIdle, _delay_60s)
  115. .RunIf(PickStep.WaitforControlPressure, NeedControlPressure, StartControlPressure, IsPressureReady, _delay_60s)
  116. .Run(PickStep.PMPrepare, ModulePrepare, IsModulePrepareReady)
  117. .Run(PickStep.ArmExtend, ArmExtend, WaitRobotExtendDone, _ExtendTimeout)
  118. .Run(PickStep.QueryAWC, QueryAWC, WaitRobotQueryDone, _delay_1s)
  119. .Run(PickStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  120. .Delay(PickStep.PickDelay, _pickdelay)
  121. .Run(PickStep.ArmRetract, ArmRetract, WaitRobotRetractDone, _RetractTimeout)
  122. .Run(PickStep.SavePickeData, RecordAWCData, NullFun)
  123. .Run(PickStep.NotifyDone, NotifyPMDone, _delay_50ms)
  124. .Delay(PickStep.PickDelay, _delay_50ms)
  125. .Run(PickStep.CloseSlitDoor, PMDoorClose, WaitPMDoorClose)
  126. .End(PickStep.EndDelay, NullFun, _delay_50ms);
  127. return Runner.Status;
  128. }
  129. private bool ModulePrepare()
  130. {
  131. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  132. //_tm.TurnSlitDoor(_targetModule, true);
  133. return true;
  134. }
  135. private bool IsModulePrepareReady()
  136. {
  137. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  138. }
  139. private bool ArmExtend()
  140. {
  141. if (!_pmModule.IsSlitDoorOpen)
  142. {
  143. LOG.Write(eEvent.ERR_TM, Module, $"Cannot pick as {_targetModule} Door is not Open");
  144. return false;
  145. }
  146. return _robot.PickExtend(_targetModule, _targetSlot, _hand);
  147. }
  148. private bool ArmRetract()
  149. {
  150. return _robot.PickRetract(_targetModule, _targetSlot, _hand);
  151. }
  152. private bool WaitRobotExtendDone()
  153. {
  154. if (_robot.Status == RState.Running)
  155. {
  156. return false;
  157. }
  158. else if (_robot.Status == RState.End)
  159. {
  160. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_hand);
  161. return true;
  162. }
  163. else
  164. {
  165. Runner.Stop($"TM Robot Pick Extend failed, {_robot.Status}");
  166. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  167. return true;
  168. }
  169. }
  170. private bool IsPressureReady()
  171. {
  172. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  173. //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
  174. double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
  175. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  176. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  177. {
  178. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "current pmpressure"+PMPressure);
  179. //LOG.Write(eEvent.WARN_DEFAULT_WARN, _targetModule, "DATA current pmpressure"+DATA.Poll($"{_targetModule}.ChamberPressure"));
  180. //string reason = $"{Module} and TM pressure difference exceeds the max limit {maxPressureDifference}, TMPressure:{TMPressure}, {Module}Pressure:{PMPressure}";
  181. //LOG.Write(eEvent.ERR_DEVICE_INFO, Module, reason);
  182. return true;
  183. }
  184. else return false;
  185. }
  186. private bool StartControlPressure()
  187. {
  188. _chamber = DEVICE.GetDevice<JetPMBase>(_targetModule.ToString());
  189. _controlPressureSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  190. _controlFlowSetPoint = SC.GetValue<int>($"{_targetModule}.ControlPressureN2FlowSetPoint");
  191. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  192. return true;
  193. }
  194. private bool QueryAWC()
  195. {
  196. if (!_queryAwc)
  197. return true;
  198. else
  199. return _robot.QueryAwc(); ;
  200. }
  201. private bool WaitRobotQueryDone()
  202. {
  203. if (!_queryAwc)
  204. return true;
  205. if (_robot.Status == RState.Running)
  206. {
  207. return false;
  208. }
  209. else if (_robot.Status == RState.End)
  210. {
  211. return true;
  212. }
  213. else
  214. {
  215. Runner.Stop($"TM Robot Query Awc failed, {_robot.Status}");
  216. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  217. return true;
  218. }
  219. }
  220. private bool RecordAWCData()
  221. {
  222. if (!_queryAwc)
  223. return true;
  224. return true;
  225. }
  226. private bool NotifyPMPickWafer()
  227. {
  228. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  229. return true;
  230. }
  231. private bool WaitPMWaferDropDown()
  232. {
  233. return _pmModule.Status == PMEntity.PMStatus.Exchange_Ready;
  234. }
  235. private bool WaitRobotRetractDone()
  236. {
  237. if (_robot.Status == RState.Running)
  238. {
  239. return false;
  240. }
  241. else if (_robot.Status == RState.End)
  242. {
  243. return true;
  244. }
  245. else
  246. {
  247. Runner.Stop($"TM Robot Pick Retract failed, {_robot.Status}");
  248. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  249. return true;
  250. }
  251. }
  252. private bool NotifyPMDone()
  253. {
  254. _pmModule.PostMsg(PMEntity.MSG.PickReady);
  255. return true;
  256. }
  257. private bool PMDoorClose()
  258. {
  259. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Close Door Again");
  260. return _tm.TurnSlitDoor(_targetModule, false);
  261. }
  262. private bool WaitPMDoorClose()
  263. {
  264. if (_tm.CheckSlitValveClose(_targetModule))
  265. {
  266. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check Door Close");
  267. return true;
  268. }
  269. else
  270. {
  271. LOG.Write(eEvent.WARN_TM, Module, $"PMPick Check not Close Door");
  272. return false;
  273. }
  274. }
  275. public void Abort()
  276. {
  277. _robot.Halt();
  278. }
  279. }
  280. }