PumpDownRoutine.cs 4.6 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class PumpDownRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum PumpStep
  12. {
  13. kDelay_2s,
  14. kCloseISOValve,
  15. kSoftPump,
  16. kFastPump,
  17. kPVHe2,
  18. kISOValve,
  19. kTurboN2Purge,
  20. kVATValve,
  21. kOpenTurboPumpPurgeGasFinal,
  22. kFinalStep,
  23. kEnd,
  24. }
  25. //private int _ventTime;
  26. private int _pump_delay = 5000;
  27. private int _roughPumpPressure = 75000;
  28. private int _vHe2FlowPressure = 200;
  29. private int _basePressure = 10;
  30. private JetChamber jetChamber = JetChamber.None;
  31. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  32. {
  33. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  34. Name = "PumpDown";
  35. }
  36. public RState Start(params object[] objs)
  37. {
  38. if (CheckLid() &&
  39. CheckSlitDoor())
  40. {
  41. Reset();
  42. _chamber.CloseValves();
  43. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.RoughPumpDownPressure") * 1000;
  44. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  45. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  46. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  47. _chamber.OpenValve(ValveType.PVN22, true);
  48. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  49. _chamber.TurnPendulumValve(false);
  50. if (jetChamber == JetChamber.Venus)
  51. {
  52. _chamber.OpenValve(ValveType.HeISO, false);
  53. _chamber.OpenValve(ValveType.PVHe3, false);
  54. }
  55. return Runner.Start(Module, Name);
  56. }
  57. return RState.Failed;
  58. }
  59. public RState Monitor()
  60. {
  61. Runner.Delay((int)PumpStep.kDelay_2s, _delay_2s)
  62. .Run((int)PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  63. .Run((int)PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  64. .Run((int)PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  65. .Run((int)PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  66. .Run((int)PumpStep.kISOValve, OpenISOValve, _delay_2s)
  67. .Run((int)PumpStep.kVATValve, OpenVATValve, _delay_5s)
  68. .Run((int)PumpStep.kOpenTurboPumpPurgeGasFinal, () =>
  69. {
  70. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  71. _chamber.OpenValve(ValveType.GasFinal, true);
  72. return true;
  73. }, 3000)
  74. .Run((int)PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  75. .End((int)PumpStep.kEnd, NullFun, _delay_1s);
  76. return Runner.Status;
  77. }
  78. private bool OpenFastPump()
  79. {
  80. _chamber.OpenValve(ValveType.SoftPump, false);
  81. _chamber.OpenValve(ValveType.FastPump, true);
  82. return true;
  83. }
  84. private bool OpenHe2Valve()
  85. {
  86. _chamber.OpenValve(ValveType.FastPump, false);
  87. _chamber.OpenValve(ValveType.PVHe2, true);
  88. return true;
  89. }
  90. private bool OpenISOValve()
  91. {
  92. _chamber.OpenValve(ValveType.PVHe2, false);
  93. // ISO Valve
  94. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  95. return true;
  96. }
  97. private bool OpenVATValve()
  98. {
  99. return _chamber.TurnPendulumValve(true);
  100. }
  101. private bool FinalStep()
  102. {
  103. _chamber.OpenValve(ValveType.Guage, true);
  104. //2023/04/25修改
  105. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  106. //_chamber.OpenValve(ValveType.GasFinal, true);
  107. return true;
  108. }
  109. public void Abort()
  110. {
  111. CloseAllValves();
  112. }
  113. }
  114. }