Kepler-Release/Venus/Venus_RT/Modules/PMs/PMProcessRoutine.cs

using System;
using System.Collections.Generic;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Common;
using Aitex.Core.RT.RecipeCenter;
using Venus_RT.Devices;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using Venus_Core;
using System.Diagnostics;
using MECF.Framework.Common.DBCore;
using Venus_RT.FAs;

namespace Venus_RT.Modules.PMs
{
    class PMProcessRoutine : PMRoutineBase, IRoutine
    {
        private enum ProcessStep
        {
            kPreparePressure,
            kPrepareTemperature,
            kRunRecipes,
            kEnd,
        }
        public string CurrentRunningRecipe { get; set; }
        public string ProcessRecipeName { get; set; }
        public string ChuckRecipeName { get; set; }
        public string DechuckRecipeName { get; set; }
        public string CleanRecipeName { get; set; }
        public RecipeHead ProcessRecipeHead { get; set; }
        public DateTime RecipeStartTime { get; private set; }

        private readonly PumpDownRoutine _pumpDownRoutine;
        private readonly ProcessHelper _processHelper;
        private bool _withWafer = true;
        //private bool _needPumpDown = false;
        public Recipe _currentRecipe = null;
        private int _currentStep = 0;
        private Queue<Recipe> _qeRecipes = new Queue<Recipe>();

        private double _tolerance;
        private double _OffsetTemp = 0.0f;

        private bool _bLoopMode = false;
        private int _loopStartStep = 0;
        private int _loopCounter = 0;
        private int _recipeRunningMode = 0;
        private Stopwatch _stepTime = new Stopwatch();
        public RecipeResult currentRecipeResult;
        public bool isMaualEndStep;
        private RecipeFACallback _faCallback;
        private JetChamber _jetChamber;

        private double ChillerTemp
        {
            get
            {
                if (ProcessRecipeHead != null)
                {
                    if (!string.IsNullOrEmpty(ProcessRecipeHead.ChillerTemp))
                    {
                        double setpoint = Convert.ToDouble(ProcessRecipeHead.ChillerTemp);
                        if (setpoint > 0 && setpoint < 600)
                            return setpoint;
                    }
                }
                return 0;
            }
        }
        private double BasePressure
        {
            get
            {
                if (ProcessRecipeHead != null)
                {
                    if (!string.IsNullOrEmpty(ProcessRecipeHead.BasePressure))
                    {
                        double setpoint = Convert.ToDouble(ProcessRecipeHead.BasePressure);
                        if (setpoint > 0 && setpoint < 750000)
                            return setpoint;
                    }
                }
                return SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
            }
        }
        public double EstimatedTotalLeftTime
        {
            get;
            private set;
        }

        public PMProcessRoutine(JetPMBase chamber, PumpDownRoutine pdRoutine) : base(chamber)
        {
            Name = "Process";
            _pumpDownRoutine = pdRoutine;
            _processHelper = new ProcessHelper(chamber);
            _faCallback = new RecipeFACallback();
            
            _jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Module}.ChamberType");
        }

        private bool AssignFuns(Recipe recipe)
        {
            foreach(var step in recipe.Steps)
            {
                if (_processHelper.LoadStepFuns(step) == false)

                    return false;

                foreach(ProcessUnitBase unit in step.LstUnit)
                {
                    if (_processHelper.LoadMethods(unit) == false)
                    {
                        Stop($"Cannot find the process routine for unit:{unit.GetType()}");
                        return false;
                    }                      
                }
            }

            
            return true;
        }

        public RState Start(params object[] objs)
        {

            if (_withWafer && WaferManager.Instance.CheckNoWafer(Module.ToString(), 0))
            {
                Stop($"can not run process, no wafer at {Module}");
                FaEvent.FaPostAlarm(Module.ToString(), $"can not run process, no wafer at {Module}");
                return RState.Failed;
            }

            if (!_chamber.IsRFGInterlockOn)
            {
                Stop("射频电源 Interlock条件不满足");
                FaEvent.FaPostAlarm(Module.ToString(), "射频电源 Interlock条件不满足");
                return RState.Failed;
            }

            if (!CheckSlitDoor() || !CheckDryPump() || !CheckTurboPump())
            {
                return RState.Failed;
            }
            RecipeStartTime = DateTime.Now;
            // Load/Validate Recipe
            _qeRecipes.Clear();
            string recipeName = (string)objs[0];
            currentRecipeResult = new RecipeResult();
            currentRecipeResult.RecipeName = recipeName;
            
            string recipeContent = RecipeFileManager.Instance.LoadRecipe(_chamber.Name, recipeName, false);
            Recipe recipe = Recipe.Load(recipeContent);
            currentRecipeResult.RecipeStepCount=recipe.Steps.Count;
            if (recipe == null)
            {
                Stop($"Load Recipe:{recipeName} failed");
                FaEvent.FaPostAlarm(Module.ToString(), $"Load Recipe:{recipeName} failed");
                return RState.Failed;
            }

            _recipeRunningMode = SC.GetValue<int>($"{Module}.RecipeRunningMode");
            _processHelper.m_RecipeHead = recipe.Header;
            switch (recipe.Header.Type)
            {
                case RecipeType.Process:
                   if(_recipeRunningMode == 1 && recipe.Header.ChuckRecipe != null && !string.IsNullOrEmpty(recipe.Header.ChuckRecipe))
                    {
                        string chuckcontent= RecipeFileManager.Instance.LoadRecipe(_chamber.Name, recipe.Header.ChuckRecipe, false);
                        var chuckRecipe = Recipe.Load(chuckcontent);
                        if(chuckRecipe != null)
                        {
                            ChuckRecipeName = recipe.Header.ChuckRecipe;
                            _qeRecipes.Enqueue(chuckRecipe);
                        }
                    }

                    ProcessRecipeHead = recipe.Header;
                   
                    ProcessRecipeName = recipeName;
                    _qeRecipes.Enqueue(recipe);

                    if(_recipeRunningMode == 1 && recipe.Header.DechuckRecipe != null && !string.IsNullOrEmpty(recipe.Header.DechuckRecipe))
                    {

                        string dechuckcontent = RecipeFileManager.Instance.LoadRecipe(_chamber.Name, recipe.Header.DechuckRecipe, false);
                        var dechuckRecipe = Recipe.Load(dechuckcontent);
                        if(dechuckRecipe != null)
                        {
                            DechuckRecipeName = recipe.Header.DechuckRecipe;
                            _qeRecipes.Enqueue(dechuckRecipe);
                        }
                    }

                    break;
                case RecipeType.Chuck:
                    ChuckRecipeName = recipeName;
                    _qeRecipes.Enqueue(recipe);
                    break;
                case RecipeType.DeChuck:
                    DechuckRecipeName = recipeName;
                    _qeRecipes.Enqueue(recipe);
                    break;
                case RecipeType.Clean:
                    CleanRecipeName = recipeName;
                    _qeRecipes.Enqueue(recipe);
                    break;
            }

            foreach(Recipe rcp in _qeRecipes)
            {
                if (AssignFuns(rcp) == false)
                {
                    Stop($"Associate process alogrithm with recipe:{rcp.Header.Name} failed");
                    FaEvent.FaPostAlarm(Module.ToString(), $"Associate process alogrithm with recipe:{rcp.Header.Name} failed");
                    return RState.Failed;
                }
            }

            _bLoopMode = false;
            _loopStartStep = 0;
            _loopCounter = 0;

            _tolerance = SC.GetValue<double>($"System.MaxTemperatureToleranceToTarget");
            _OffsetTemp = SC.GetValue<double>($"{Module}.Chiller.ChillerTemperatureOffset");
            _faCallback.RecipeStart(_chamber.Module.ToString(), recipeName);
            WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
            return Runner.Start(Module, Name);
        }
        public RState Monitor()
        {
            Runner.Run((int)ProcessStep.kPreparePressure,   PreparePressure,    IsPressureReady)
                .Run((int)ProcessStep.kPrepareTemperature,  PrepareTemp,        IsTempReady)
                .Run((int)ProcessStep.kRunRecipes,          StartNewRecipe,     RunRecipes,5*60*60*1000)
                .End((int)ProcessStep.kEnd,                 ProcessDone,        _delay_1s);

            return Runner.Status;
        }

        private bool PreparePressure()
        {
            //2023/09/02 tps remove
            //if(_chamber.ProcessHighPressure < 5 && _chamber.ProcessLowPressure<BasePressure)
            //{
            //    _needPumpDown = false;
            //    return true;
            //}

            //_needPumpDown = true;
            return _pumpDownRoutine.Start(BasePressure) == RState.Running;
        }

        private bool IsPressureReady()
        {
            //if (_needPumpDown == false)
            //    return true;          

            var status = _pumpDownRoutine.Monitor();
            if(status == RState.End)
            {
                return true;
            }
            else if (status == RState.Failed || status == RState.Timeout)
            {             
                Runner.Stop($"Pump down to {BasePressure} failed.");
                FaEvent.FaPostAlarm(Module.ToString(), $"Pump down to {BasePressure} failed.");
                return true;
            }

            return false;
        }

        private bool PrepareTemp()
        {

            if (_jetChamber == JetChamber.Venus)
            {
                return SetCoolantTemp(ChillerTemp, _OffsetTemp);
            }
            else
            { 
            return true;
            }

        }

        private bool IsTempReady()
        {
            if (_jetChamber == JetChamber.Venus)
            {
                return CheckCoolantTemp(ChillerTemp, _tolerance);
            }
            else
            {
                return true;
            }
        }

        public RState StartNewStep()
        {
            _stepTime.Restart();
            var state = _currentRecipe.Steps[_currentStep].Start();
            if (state != RState.Running)
                return state;
                

            if (_currentRecipe.Steps[_currentStep].CycleStart)
            {
                if (!_bLoopMode)
                {
                    _bLoopMode = true;
                    _loopStartStep = _currentStep;
                    _loopCounter = _currentRecipe.Steps[_currentStep].CycleNumber-1;

                    currentRecipeResult.RecipeAllCounters = _currentRecipe.Steps[_currentStep].CycleNumber;
                    currentRecipeResult.RecipeCurrentCounter = _loopCounter == 0 ? 0 : 1;
                }
            }

            return RState.Running;
        }

        private bool StartNewRecipe()
        {
            if(_qeRecipes.Count > 0)
            {
                _currentStep = 0;
                _currentRecipe = _qeRecipes.Dequeue();
                CurrentRunningRecipe = _currentRecipe.Header.Name;

                Notify($"Recipe:{CurrentRunningRecipe} start");
                FaEvent.FaPostInfo(Module.ToString(), $"Recipe:{CurrentRunningRecipe} start");

                _chamber.EPDRecipeStart(CurrentRunningRecipe);
                return StartNewStep() == RState.Running;
            }
            
            return false;
        }
        private bool RunRecipes()
        {     
            var step = _currentRecipe.Steps[_currentStep];
            currentRecipeResult.RecipeStepCount = _currentRecipe.Steps.Count;
            currentRecipeResult.RecipeName = _currentRecipe.Header.Name;
            currentRecipeResult.RecipeType = _currentRecipe.Header.Type.ToString();
            currentRecipeResult.RecipeStepNumber = step.StepNo;
            currentRecipeResult.RecipeStepType=step.Type.ToString();
            currentRecipeResult.RecipeStepDescription=string.IsNullOrEmpty(step.Description)? "": step.Description;
            currentRecipeResult.RecipeStepSetTime=step.Time;
            currentRecipeResult.RecipeType=_currentRecipe.Header.Type.ToString();
            //currentRecipeResult.RecipeStepDuringTime = (int)_stepTime.ElapsedMilliseconds/1000;
            currentRecipeResult.RecipeStepDuringTime = new System.TimeSpan(0, 0, System.Convert.ToInt32(_stepTime.ElapsedMilliseconds/1000));
            

            var result = step.Run();
            if(result == RState.Failed)
            {
                ProcessDataRecorder.RecordPrecess(Guid.NewGuid().ToString(), RecipeStartTime, DateTime.Now, CurrentRunningRecipe, "Fail", "", _chamber.Name, "", "");
                UpdateWaferStatus(false);
                Runner.Stop($"Recipe:{CurrentRunningRecipe}, Step:{_currentStep + 1} Failed");
                FaEvent.FaPostAlarm(Module.ToString(), $"Recipe:{CurrentRunningRecipe}, Step:{_currentStep + 1} Failed");
                return true;
            }
            else if(result == RState.End || isMaualEndStep == true)
            {
                if(_currentRecipe.Steps.Count > _currentStep + 1 && _currentRecipe.Steps[_currentStep + 1].Type != StepType.OverEtch)
                    _currentRecipe.Steps[_currentStep].End();

                if(_currentRecipe.Steps[_currentStep].CycleEnd)
                {
                    if(_loopCounter > 0)
                    {
                        _loopCounter--;
                        currentRecipeResult.RecipeCurrentCounter += 1;

                        _currentStep = _loopStartStep;
                        return StartNewStep() != RState.Running;
                    }
                    else
                    {
                        _bLoopMode = false;
                        _loopStartStep = 0;
                    }
                }

                if (_currentStep < _currentRecipe.Steps.Count - 1|| isMaualEndStep==true)
                {
                    result = RState.End;
                    isMaualEndStep =false;
                    _currentStep++;
                    return StartNewStep() != RState.Running;
                }
                else
                {
                    Notify($"Recipe:{CurrentRunningRecipe} finished");
                    FaEvent.FaPostInfo(Module.ToString(), $"Recipe:{CurrentRunningRecipe} finished");
                    UpdateWaferStatus();

                    _chamber.EPDRecipeStop();
                    return !StartNewRecipe();
                }
            }

            return false;
        }

        private bool ProcessDone()
        {
            _stepTime.Stop();
            WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Idle);
            CloseAllValves();
            _chamber.GeneratorBiasPowerOn(false);
            _chamber.GeneratorPowerOn(false);
            _chamber.OpenValve(ValveType.TurboPumpPumping, true);
            _chamber.OpenValve(ValveType.TurboPumpPurge, true);
            _chamber.OpenValve(ValveType.Guage, true);
            _chamber.SetPVPostion(1000);
            WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
            string waferId = "", slotID = "", lotID = "", recipename = "";
            WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(Module.ToString()), 0);
            if (!waferInfo.IsEmpty)
            {
                waferId = waferInfo.InnerId.ToString();
                slotID = waferInfo.OriginSlot.ToString();
                lotID = waferInfo.ProcessJob == null || string.IsNullOrEmpty(waferInfo.ProcessJob.ControlJobName) ? "" : waferInfo.ProcessJob.ControlJobName;
                recipename = string.Format(@"{0}/{1}/{2}", ChuckRecipeName, ProcessRecipeName, DechuckRecipeName);
            }
            ProcessDataRecorder.RecordPrecess(Guid.NewGuid().ToString(), RecipeStartTime, DateTime.Now, recipename,"", waferId, _chamber.Name, lotID, slotID);
            return true;
        }

        private void UpdateWaferStatus(bool bDone = true)
        {
            if(bDone == false)
            {
                WaferManager.Instance.UpdateWaferProcessStatus(ModuleName.PMA, 0, EnumWaferProcessStatus.Failed);
                if(_currentRecipe.Header.Type == RecipeType.Chuck)
                {
                    // set wafer chucked flag even if the chuck recipe failed.
                    WaferManager.Instance.UpdateWaferChuckStatus(ModuleName.PMA, 0, EnumWaferChuckStatus.Chucked);
                }
            }
            switch(_currentRecipe.Header.Type)
            {
                case RecipeType.Process:
                    break;
                case RecipeType.Chuck:
                    WaferManager.Instance.UpdateWaferChuckStatus(ModuleName.PMA, 0, EnumWaferChuckStatus.Chucked);
                    break;
                case RecipeType.DeChuck:
                    WaferManager.Instance.UpdateWaferProcessStatus(ModuleName.PMA, 0, EnumWaferProcessStatus.Completed);
                    WaferManager.Instance.UpdateWaferChuckStatus(ModuleName.PMA, 0, EnumWaferChuckStatus.Dechucked);
                    break;
            }
        }

        public void Abort()
        {
            ProcessDataRecorder.RecordPrecess(Guid.NewGuid().ToString(), RecipeStartTime, DateTime.Now, CurrentRunningRecipe, "Fail", "", _chamber.Name, "", "");

            _chamber.GeneratorBiasPowerOn(false);
            _chamber.GeneratorPowerOn(false);
            _chamber.TurnPendulumValve(false);
            CloseAllValves();
            _chamber.OpenValve(ValveType.TurboPumpPumping, true);
            _chamber.OpenValve(ValveType.TurboPumpPurge, true);
        }
    }
}