VenusDevice.cs 6.6 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValveMfc9,
  14. ValveMfc10,
  15. ValveMfc11,
  16. ValveMfc12,
  17. ValvePVN21,
  18. ValvePVN22,
  19. ValvePV11,
  20. ValvePV12,
  21. ValvePV21,
  22. ValvePV22,
  23. ValvePV31,
  24. ValvePV32,
  25. ValvePV41,
  26. ValvePV42,
  27. ValvePV51,
  28. ValvePV52,
  29. ValvePV61,
  30. ValvePV62,
  31. ValvePV71,
  32. ValvePV72,
  33. ValvePV81,
  34. ValvePV82,
  35. ValvePV91,
  36. ValvePV92,
  37. ValvePVA1,
  38. ValvePVA2,
  39. ValvePVB1,
  40. ValvePVB2,
  41. ValvePVC1,
  42. ValvePVC2,
  43. ValveN2,
  44. ValvePVHe1,
  45. ValvePVHe2,
  46. ValvePVHe3,
  47. ValveHeISO,
  48. ValveMainPurge,
  49. ValveGasFinal,
  50. ValveSoftPump,
  51. ValveFastPump,
  52. ValveCHBPurge,
  53. ValveTurboPumpPumping,
  54. ValveTurboPumpPurge,
  55. ValveGuage,
  56. ValveLoadlockVent,
  57. ValveLoadlockPumping,
  58. MfcGas1,
  59. MfcGas2,
  60. MfcGas3,
  61. MfcGas4,
  62. MfcGas5,
  63. GasStick1,
  64. GasStick2,
  65. GasStick3,
  66. TemperatureControl,
  67. ChamberLid,
  68. ATM_SW,
  69. VAC_SW,
  70. WaterFlow_SW,
  71. N2_Pressure,
  72. ProcessGauge,
  73. PressureGauge,
  74. ForelineGauge,
  75. MainPump,
  76. Chiller,
  77. InnerChiller,
  78. OuterChiller,
  79. TopChiller,
  80. Rf,
  81. BiasRf,
  82. Match,
  83. BiasMatch,
  84. PressureControl,
  85. ThrottleValve,
  86. HeaterChamber,
  87. ForelineHeater,
  88. Heartbeat,
  89. ResetPlcSignal,
  90. LiftPin,
  91. SlitDoor,
  92. SmallPin,
  93. MediumPin,
  94. LoadLockArm,
  95. StatisticsRfOnTime,
  96. StatisticsPumpOnTime,
  97. PlcDateTime,
  98. Lid,
  99. LidLoadlock,
  100. LidLocker,
  101. ESCHV,
  102. PendulumValve,
  103. TurboPump,
  104. EndPoint,
  105. TMLid,
  106. LLALid,
  107. LLBLid,
  108. LLATSlitDoor,
  109. LLBTSlitDoor,
  110. LLAESlitDoor,
  111. LLBESlitDoor,
  112. TMValveN2,
  113. TMSoftPumpValve,
  114. TMFastPumpValve,
  115. TMPurgeValve,
  116. TMVentValve,
  117. //TMSoftVentValve,
  118. //TMFastVentValve,
  119. LLASoftPumpValve,
  120. LLAFastPumpValve,
  121. LLAPurgeValve,
  122. LLAVentValve,
  123. LLBSoftPumpValve,
  124. LLBFastPumpValve,
  125. LLBPurgeValve,
  126. LLBVentValve,
  127. ValveWaterRelay,
  128. TMPowerOn,
  129. TMInSafty,
  130. WaferLeakSensor,
  131. EFEMSideDoorClosed,
  132. TMPCWFlowSwitch,
  133. LLAPCWFlowSwitch,
  134. LLBPCWFlowSwitch,
  135. TMLidClosed,
  136. CDAPressureSwitch,
  137. VaccumPressureSwitch,
  138. N2PressureSwitch,
  139. TMPressureCtrl,
  140. TMRobotNotExtendPMA,
  141. TMRobotNotExtendPMB,
  142. TMRobotNotExtendPMC,
  143. TMRobotNotExtendPMD,
  144. TMRobotNotExtendLLA,
  145. TMRobotNotExtendLLB,
  146. EfemRobotNotExtendLLA,
  147. EfemRobotNotExtendLLB,
  148. TMVacSwitch,
  149. LLAVacSwitch,
  150. LLBVacSwitch,
  151. TMATMSwitch,
  152. LLAATMSwitch,
  153. LLBATMSwitch,
  154. LLAWaferSizeCheckSwitch,
  155. LLBWaferSizeCheckSwitch,
  156. PMAWaferSizeCheckSwitch,
  157. PMBWaferSizeCheckSwitch,
  158. PMCWaferSizeCheckSwitch,
  159. PMDWaferSizeCheckSwitch,
  160. LLASoftVentValve,
  161. LLAFastVentValve,
  162. LLBSoftVentValve,
  163. LLBFastVentValve,
  164. TMVacAtmMode,
  165. }
  166. public enum StateData
  167. {
  168. RecipeProcessTime,
  169. RecipeStepNo,
  170. RecipeStepMode,
  171. RecipeName,
  172. RecipeBaseName,
  173. RecipeStepTimeElapsed,
  174. RecipeStepTimeSetPoint,
  175. RecipeStepRfTimeSetPoint,
  176. RecipeStepElectrodeTemp,
  177. SmallWafer,
  178. MidWafer,
  179. BigWafer,
  180. RfTimeElapsed,
  181. PumpTime,
  182. PMState,
  183. TMState,
  184. IsAutoMode,
  185. IsPmOnline,
  186. IsTmOnline,
  187. PMJobState,
  188. TMJobState,
  189. PmPlatformState,
  190. JobState,
  191. JobTmRecipe,
  192. JobPmRecipe,
  193. JobStartTime,
  194. JobStopTime,
  195. JobProcessCount,
  196. IsPumpingOkForProcess,
  197. IsCoolingOkForProcess,
  198. IsGasFlowingOkForProcess,
  199. IsRfPowering,
  200. TotalCycle,
  201. ProcessStatus,
  202. AlarmEvent,
  203. LeakCheckElapseTime,
  204. DataLogName,
  205. LotName,
  206. CurrentMagazineType,
  207. SchedulerRecipe,
  208. SchedulerState,
  209. SchedulerLoadStationInSubstrate,
  210. SchedulerRailInSubstrate,
  211. SchedulerPmSubstrate,
  212. SchedulerRailOutSubstrate,
  213. SchedulerLoadStationOutSubstrate,
  214. }
  215. public enum RtOperation
  216. {
  217. DeviceOperation,
  218. LockLid,
  219. UnlockLid,
  220. StartPump,
  221. StartTurboPump,
  222. Pump,
  223. PumpLoadLock,
  224. StopPump,
  225. GasFlow,
  226. StopGasFlow,
  227. Cooling,
  228. StopCooling,
  229. /// <summary>
  230. ///
  231. /// 0:Step mode
  232. /// 1:Power on time
  233. /// 2:Electrode temperature
  234. /// 3:Electrode Critical temperature
  235. /// </summary>
  236. RfPower,
  237. Vent,
  238. VentLoadLock,
  239. Purge,
  240. PurgeLoadLock,
  241. Abort,
  242. Heat,
  243. SetConfig,
  244. SetPMBChillerState,
  245. SetHardwareConfig,
  246. LLPlace,
  247. LLPick,
  248. PMPick,
  249. PMPlace,
  250. Extend,
  251. Retract,
  252. RunRecipe,
  253. SkipCurrentStep,
  254. ResumeRecipe,
  255. AbortRecipe,
  256. Reset,
  257. LeakCheck,
  258. GasLeakCheck,
  259. DeleteLeakCheck,
  260. MFCVerification,
  261. AllMFCVerification,
  262. SwitchOffBuzzer,
  263. // Lift pin & Guide pin
  264. MoveLiftPin,
  265. MoveGuidePin,
  266. StartAutoRun,
  267. StopAutoRun,
  268. PauseAutoRun,
  269. ResumeAutoRun,
  270. InitAll,
  271. AckError,
  272. TmRun,
  273. TmStop,
  274. PmAuto,
  275. PmManual,
  276. PmOnline,
  277. PmOffline,
  278. JobAuto,
  279. JobManual,
  280. JobRun,
  281. JobStop,
  282. JobAbort,
  283. JobPmLoadRecipe,
  284. JobTmLoadRecipe,
  285. JobTmRun,
  286. JobTmStop,
  287. JobPmOnline,
  288. JobPmOffline,
  289. JobPmProcessDone,
  290. JobTmRecovered,
  291. Cycle,
  292. Online,
  293. Offline,
  294. ControlPressure,
  295. AbortControlPressure
  296. }
  297. public enum MovementPosition
  298. {
  299. Down, Up, Left, Right, Middle, Unknown
  300. }
  301. public enum RState
  302. {
  303. Init,
  304. Running,
  305. End,
  306. Failed,
  307. Timeout,
  308. }
  309. }