| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192 | 
							- using System;
 
- using System.Collections.Generic;
 
- using System.Linq;
 
- using System.Text;
 
- using System.Threading.Tasks;
 
- namespace Venus_Core
 
- {
 
-     public enum RtState
 
-     {
 
-         Init,
 
-         Initializing,
 
-         Idle,
 
-         Manual,
 
-         Transfer,
 
-         AutoIdle,
 
-         AutoRunning,
 
-         AutoRunningPaused,
 
-         ReturningCassette,
 
-         Cycle,
 
-         PrepareCycle,
 
-         PostCycle,
 
-         SetSpeed,
 
-         Error,
 
-         Reset,
 
-         Processing,
 
-         PostProcess,
 
-         PauseProcess,
 
-         //Maintenance,
 
-         //WaferMapping,
 
-         //Cycling,
 
-         TMCycle,
 
-         ReturnWafer,
 
-     }
 
-     public enum PMState
 
-     {
 
-         Init,
 
-         Idle,
 
-         Homing,
 
-         GasFlowing,
 
-         RfPowering,
 
-         Heating,
 
-         LaunchingPump,
 
-         LaunchingTurboPump,
 
-         Pumping,
 
-         Venting,
 
-         Purging,
 
-         GasLinePurge,
 
-         PumpingLoadLock,
 
-         VentingLoadLock,
 
-         PurgingLoadLock,
 
-         LoadLockLeakCheck,
 
-         MoveLift,
 
-         Purge,
 
-         // transfer
 
-         LLPlacing,
 
-         LLPicking,
 
-         Transfer,
 
-         Error,
 
-         PrepareTransfer,
 
-         PostTransfer,
 
-         TransferHandoff,
 
-         //Process,
 
-         LeakCheck,
 
-         GasBoxLeakCheck,
 
-         LiftpinMoving,
 
-         LiftpinWaiting,
 
-         GuidePinMoving,
 
-         PreClean,
 
-         LoadProcessRecipe,
 
-         PreProcess,
 
-         Processing,
 
-         PostProcess,
 
-         OpeningLid,
 
-         ClosingLid,
 
-         MFCVerification,
 
-         AllMFCVerification,
 
-         // exchange wafer with TM
 
-         PreparePick,
 
-         PreparePlace,
 
-         ReadyForPick,
 
-         ReadyForPlace,
 
-         DropDownWafer,
 
-         LiftUpWafer,
 
-         DropDownReady,
 
-         LiftUpReady,
 
-         FinishPick,
 
-         FinishPlace,
 
-         PartialPressureTesting,
 
-         VATPerformanceTesting
 
-     }
 
-     public enum TMState
 
-     {
 
-         Unknown,
 
-         Init,
 
-         Initializing,
 
-         InitializingRB,
 
-         Idle,
 
-         Error,
 
-         Pumping,
 
-         Venting,
 
-         Purging,
 
-         Leakchecking,
 
-         Picking,
 
-         Placing,
 
-         Swaping,
 
-         PMPicking,
 
-         PMPlacing,
 
-         PMSwaping,
 
-         Aligning,
 
-         Mapping,
 
-         Extending,
 
-         Retracting,
 
-         Swapping,
 
-         Gotoing,
 
-         ControllingPressure
 
-     }
 
-     public enum LLState
 
-     {
 
-         //Unknown,
 
-         //Init,
 
-         //Initializing,
 
-         //Idle,
 
-         //Error,
 
-         //Pumping,
 
-         //Venting,
 
-         //Purging,
 
-         //Leakchecking,
 
-         //Picking,
 
-         //Placing,
 
-         //Swaping,
 
-         //PMPicking,
 
-         //PMPlacing,
 
-         //PMSwaping,
 
-         //Aligning,
 
-         //Mapping,
 
-         //Extending,
 
-         //Retracting,
 
-         //Swapping,
 
-         //Gotoing,
 
-         Unknown,
 
-         Init,
 
-         Initializing,
 
-         Idle,
 
-         Error,
 
-         Pumping,
 
-         Venting,
 
-         Purging,
 
-         LeakCheck,
 
-         Prepare_For_TM,
 
-         Prepare_For_EFEM,
 
-         Ready_For_TM,
 
-         Ready_For_EFEM,
 
-     }
 
-     public enum EFEMSTATE
 
-     {
 
-         Unknown,            // 0
 
-         Initializing,       // 1
 
-         Idle,               // 2
 
-         Error,              // 3
 
-         Picking,            // 4
 
-         Placing,            // 5
 
-         Aligning,           // 6
 
-         Mapping,            // 7
 
-         Init,               // 8
 
-         Orgshing,           // 9
 
-         Lifting,            // 10
 
-         InitingAL,          // 11
 
-         InitingRB,          // 12
 
-         Extending,          // 13
 
-         Retracting,         // 14
 
-                             //SettingLamp,        // 15
 
-         Swapping,
 
-         Gotoing,
 
-         Gripping,
 
-         Ungripping,
 
-         Fliping,
 
-     }
 
- }
 
 
  |