SchedulerPM.cs 17 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. namespace Venus_RT.Scheduler
  27. {
  28. public class SchedulerPM : SchedulerModule
  29. {
  30. public override bool IsAvailable
  31. {
  32. get { return _entity.IsIdle && _entity.IsInclude && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  33. }
  34. public override bool IsOnline
  35. {
  36. get { return _entity != null && _entity.IsOnline; }
  37. }
  38. public override bool IsError
  39. {
  40. get { return _entity.IsError; }
  41. }
  42. public override bool IsIdle
  43. {
  44. get { return _entity.IsIdle; }
  45. }
  46. public override bool IsVac
  47. {
  48. get { return _entity.IsVac; }
  49. }
  50. public override bool IsAtm
  51. {
  52. get { return _entity.IsAtm; }
  53. }
  54. public override int TimeToReady
  55. {
  56. get { return (IsOnline && IsInclude)? _entity.TimeToReady : int.MaxValue; }
  57. }
  58. public override bool IsInclude { get { return _entity.IsInclude; } }
  59. public TaskType Task => _task;
  60. private PMEntity _entity = null;
  61. private ModuleName _taskRobot;
  62. private EnumTransferType _taskTransferType;
  63. private Hand _taskBlade;
  64. private int _taskSlot;
  65. private int _entityTaskToken = (int)FSM_MSG.NONE;
  66. private DeviceTimer _timerProcess = new DeviceTimer();
  67. private JetPMBase _pm;
  68. private int _idleCleanOpt = 0;
  69. private int _idleCleanHourSetPoint;
  70. private int _idleCleanWaferSetPoint;
  71. private int _idleCleanWaferCount;
  72. private string _idleCleanRecipe;
  73. private DateTime _lastRunTime = new DateTime();
  74. private float _paramTemp;
  75. public float Temperature
  76. {
  77. get
  78. {
  79. return _entity.ChamberTemperature;
  80. }
  81. }
  82. public JetChamber ChamberType
  83. {
  84. get
  85. {
  86. return _entity.ChamberType;
  87. }
  88. }
  89. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  90. {
  91. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  92. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  93. EventWaferArrived += WaferArrived;
  94. LoadIdleCleanOpt();
  95. }
  96. public void InitClean()
  97. {
  98. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  99. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  100. }
  101. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  102. {
  103. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  104. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  105. }
  106. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  107. {
  108. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  109. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  110. }
  111. public bool IsTemperatureReady(float temp)
  112. {
  113. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  114. }
  115. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  116. {
  117. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  118. _taskTransferType == type;
  119. }
  120. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  121. {
  122. _task = TaskType.PrepareTransfer;
  123. _taskRobot = robot;
  124. _taskSlot = slot;
  125. _taskTransferType = type;
  126. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  127. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  128. return _entityTaskToken != (int)FSM_MSG.NONE;
  129. }
  130. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  131. {
  132. _task = TaskType.PrepareTransfer;
  133. _taskRobot = robot;
  134. _taskSlot = slot;
  135. _taskBlade = blade;
  136. _taskTransferType = type;
  137. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  138. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  139. return _entityTaskToken != (int)FSM_MSG.NONE;
  140. }
  141. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  142. {
  143. _task = TaskType.PrepareTransfer;
  144. _taskRobot = robot;
  145. _taskSlot = slot;
  146. _taskBlade = blade;
  147. _taskTransferType = type;
  148. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  149. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  150. return _entityTaskToken != (int)FSM_MSG.NONE;
  151. }
  152. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  153. {
  154. StopWaitTransfer(robot);
  155. _task = TaskType.PostTransfer;
  156. _taskRobot = robot;
  157. _taskSlot = slot;
  158. _taskTransferType = type;
  159. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  160. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  161. return _entityTaskToken != (int)FSM_MSG.NONE;
  162. }
  163. public override bool PostTransfer(ModuleName robot)
  164. {
  165. StopWaitTransfer(robot);
  166. _task = TaskType.PostTransfer;
  167. _taskRobot = robot;
  168. _taskSlot = _inTransferSlot;
  169. _taskTransferType = _inTransferType;
  170. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  171. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  172. return _entityTaskToken != (int)FSM_MSG.NONE;
  173. }
  174. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  175. {
  176. bool withWafer;
  177. if (recipeType == RecipeType.Clean)
  178. {
  179. withWafer = false;
  180. }
  181. else
  182. {
  183. withWafer = true;
  184. }
  185. _task = TaskType.Process;
  186. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  187. if (RouteManager.IsATMMode)
  188. {
  189. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  190. _timerProcess.Start(time * 1000);
  191. LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
  192. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  193. return true;
  194. }
  195. else
  196. {
  197. if(isCleanRecipe)
  198. {
  199. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  200. }
  201. else
  202. {
  203. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  204. }
  205. return _entityTaskToken != (int)FSM_MSG.NONE;
  206. }
  207. }
  208. public override bool Preheating(float temperature)
  209. {
  210. _task = TaskType.Heating;
  211. _paramTemp = temperature;
  212. _entityTaskToken = _entity.InvokePreHeat(temperature);
  213. LogTaskStart(_task, $"preheat to {temperature}");
  214. return _entityTaskToken != (int)FSM_MSG.NONE;
  215. }
  216. public bool CheckTaskDone()
  217. {
  218. bool ret = false;
  219. switch (_task)
  220. {
  221. case TaskType.None:
  222. ret = true;
  223. break;
  224. case TaskType.PrepareTransfer:
  225. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  226. break;
  227. case TaskType.PostTransfer:
  228. ret = _entity.CheckAcked(_entityTaskToken);
  229. break;
  230. case TaskType.Heating:
  231. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  232. break;
  233. case TaskType.Process:
  234. case TaskType.IdlePurgeProcess:
  235. case TaskType.IdleCleanProcess:
  236. case TaskType.PreJobProcess:
  237. case TaskType.CompleteJobProcess:
  238. if (RouteManager.IsATMMode)
  239. {
  240. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  241. if (ret)
  242. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  243. }
  244. else
  245. {
  246. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  247. }
  248. break;
  249. }
  250. if (ret && _task != TaskType.None)
  251. {
  252. LogTaskDone(_task, "");
  253. _task = TaskType.None;
  254. }
  255. return ret;
  256. }
  257. public bool Monitor()
  258. {
  259. return true;
  260. }
  261. public void SetPMAuto()
  262. {
  263. _entity.SetAuto();
  264. }
  265. public bool IdlePurgeProcess(string recipeName)
  266. {
  267. _task = TaskType.IdlePurgeProcess;
  268. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  269. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  270. return _entityTaskToken != (int)FSM_MSG.NONE;
  271. }
  272. public bool IdleCleanProcess(string recipeName)
  273. {
  274. _task = TaskType.IdleCleanProcess;
  275. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  276. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  277. return _entityTaskToken != (int)FSM_MSG.NONE;
  278. }
  279. public void PreJobClean()
  280. {
  281. }
  282. public bool PreJobProcess(string recipeName)
  283. {
  284. _task = TaskType.PreJobProcess;
  285. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  286. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  287. return _entityTaskToken != (int)FSM_MSG.NONE;
  288. }
  289. public bool CompleteJobProcess(string recipeName)
  290. {
  291. _task = TaskType.CompleteJobProcess;
  292. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  293. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  294. return _entityTaskToken != (int)FSM_MSG.NONE;
  295. }
  296. private void WaferArrived(object sender, EventArgs e)
  297. {
  298. if(WaferManager.Instance.CheckHasWafer(Module, 0))
  299. {
  300. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  301. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  302. if (recipeName.Length > 0)
  303. {
  304. Process(recipeName, false, RecipeType.Process, wafer);
  305. }
  306. else
  307. {
  308. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
  309. }
  310. }
  311. else
  312. {
  313. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
  314. }
  315. }
  316. public override void ResetTask()
  317. {
  318. _entity.ResetRecipeTime();
  319. base.ResetTask();
  320. }
  321. #region clean task
  322. private void LoadIdleCleanOpt()
  323. {
  324. // Load Idle Clean Config
  325. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  326. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  327. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  328. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  329. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  330. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  331. if (lastRun.Length > 10)
  332. {
  333. try
  334. {
  335. _lastRunTime = DateTime.Parse(lastRun);
  336. }
  337. catch
  338. {
  339. lastRun = string.Empty;
  340. }
  341. }
  342. if (lastRun.Length <= 10)
  343. {
  344. _lastRunTime = DateTime.Now;
  345. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  346. }
  347. // validate the idle clean recipe name
  348. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  349. if (File.Exists(path))
  350. {
  351. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  352. Recipe recipe = Recipe.Load(recipeContent);
  353. if (recipe == null)
  354. {
  355. _idleCleanRecipe = string.Empty;
  356. }
  357. }
  358. }
  359. public void WaferProcessDone()
  360. {
  361. _lastRunTime = DateTime.Now;
  362. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  363. _idleCleanWaferCount++;
  364. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  365. }
  366. private void ResetIdleCleanCounter()
  367. {
  368. _lastRunTime = DateTime.Now;
  369. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  370. _idleCleanWaferCount = 0;
  371. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  372. }
  373. public bool RunIdleCleanTask()
  374. {
  375. if(_idleCleanOpt == 1)
  376. {
  377. TimeSpan span = DateTime.Now - _lastRunTime;
  378. if(span.TotalHours >= _idleCleanHourSetPoint)
  379. {
  380. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  381. ResetIdleCleanCounter();
  382. return true;
  383. }
  384. }
  385. else if(_idleCleanOpt == 2)
  386. {
  387. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  388. {
  389. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  390. ResetIdleCleanCounter();
  391. return true;
  392. }
  393. }
  394. return false;
  395. }
  396. public bool RunJobCleanTask(string jobCleanRecipe)
  397. {
  398. // validate the job clean recipe name
  399. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  400. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  401. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  402. if (recipeContent.Length == 0)
  403. {
  404. return false;
  405. }
  406. Recipe recipe = Recipe.Load(recipeContent);
  407. if (recipe == null)
  408. {
  409. LOG.Write(eEvent.WARN_ROUTER, Module, $"Loading clean recipe: {path} failed");
  410. return false;
  411. }
  412. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  413. }
  414. #endregion
  415. }
  416. }