PMEntity.cs 62 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using Aitex.Core.Common;
  4. using Aitex.Core.RT.DataCenter;
  5. using Aitex.Core.RT.Device;
  6. using Aitex.Core.RT.Event;
  7. using Aitex.Core.RT.Fsm;
  8. using Aitex.Core.RT.OperationCenter;
  9. using Aitex.Core.RT.SCCore;
  10. using Aitex.Core.Util;
  11. using Aitex.Sorter.Common;
  12. using MECF.Framework.Common.Equipment;
  13. using MECF.Framework.Common.Schedulers;
  14. using MECF.Framework.Common.SubstrateTrackings;
  15. using Venus_Core;
  16. using Venus_RT.Devices;
  17. using Aitex.Core.RT.Log;
  18. using Aitex.Core.UI.DeviceControl;
  19. using MECF.Framework.Common.DataCenter;
  20. namespace Venus_RT.Modules.PMs
  21. {
  22. public class RecipeRunningInfo
  23. {
  24. public Guid InnerId { get; set; }
  25. public RecipeHead Head { get; set; }
  26. public List<RecipeStep> RecipeStepList { get; set; }
  27. public string RecipeName { get; set; }
  28. public DateTime BeginTime { get; set; }
  29. public DateTime EndTime { get; set; }
  30. public int StepNumber { get; set; }
  31. public string StepName { get; set; }
  32. public double StepTime { get; set; }
  33. public double StepElapseTime { get; set; }
  34. public double TotalTime { get; set; }
  35. public double TotalElapseTime { get; set; }
  36. }
  37. public class PMEntity : Entity, IModuleEntity
  38. {
  39. public enum PMStatus
  40. {
  41. Not_Ready,
  42. Ready_For_Pick,
  43. Ready_For_Place,
  44. Exchange_Ready,
  45. }
  46. public enum MSG
  47. {
  48. Home,
  49. Transfer,
  50. PrepareTransfer,
  51. PostTransfer,
  52. Reset,
  53. Abort,
  54. Error,
  55. LaunchPump,
  56. LaunchTurboPump,
  57. Pump,
  58. Vent,
  59. PumpLoadLock,
  60. VentLoadLock,
  61. PurgeLoadLock,
  62. LoadLockLeakCheck,
  63. CyclePurge,
  64. GasLinePurge,
  65. Heat,
  66. TransferHandoff,
  67. StartTransfer,
  68. LeakCheck,
  69. GasLeakCheck,
  70. MoveLiftPin,
  71. MoveGuidePin,
  72. PartialPressure,
  73. VATPerformance,
  74. LLPlace,
  75. LLPick,
  76. Process,
  77. RunRecipe,
  78. PostProcess,
  79. RecipeSkipStep,
  80. RecipeUpdate,
  81. RecipeResume,
  82. RecipePause,
  83. RecipeAbort,
  84. PreProcess,
  85. AutoMode,
  86. ManualMode,
  87. LockLid,
  88. Clean,
  89. Online,
  90. Offline,
  91. GasFlow,
  92. StopGasFlow,
  93. RfPower,
  94. MFCVerification,
  95. // exchange wafer with TM
  96. PreparePick,
  97. PreparePlace,
  98. LiftUpWafer,
  99. DropDownWafer,
  100. PickReady,
  101. PlaceReady,
  102. MaxMsg
  103. }
  104. private readonly JetPMBase _chamber;
  105. public ModuleName Module { get; }
  106. public PMStatus Status { get; private set; }
  107. private StatsDataItem _statProcessedWafer;
  108. private StatsDataItemRFAndPump _statRfOnTime;
  109. private StatsDataItemRFAndPump _statBiasRfOnTime;
  110. private StatsDataItemRFAndPump _statPumpOnTime;
  111. private readonly PMHomeRoutine _home;
  112. private readonly StartDryPumpRoutine _startDryPumpRoutine;
  113. private readonly StartTurboPumpRoutine _startTurboPumpRoutine;
  114. private readonly VentRoutine _ventRoutine;
  115. private readonly VenusVentRoutine _venusVentRoutine;
  116. private readonly PumpDownRoutine _pumpRoutine;
  117. //private readonly LoadLockVentRoutine _ventLoadLockRoutine;
  118. //private readonly LoadLockPumpRoutine _pumpLoadLockRoutine;
  119. //private readonly LoadLockPurgeRoutine _purgeLoadLockRoutine;
  120. //private readonly LoadLockLeakCheckRoutine _loadLockLeakCheckRoutine;
  121. private readonly PMPurgeRoutine _purgeRoutine;
  122. private readonly PMGaslinePurgeRoutine _gaslinePurgeRoutine;
  123. private readonly PMLeakCheckRoutine _leakCheckRoutine;
  124. private readonly GasBoxLeakCheckRoutine _gasBoxLeakCheckRoutine;
  125. //private readonly LLPlaceRoutine _llPlaceRoutine;
  126. //private readonly LLPickRoutine _llPickRoutine;
  127. private readonly PMProcessRoutine _processRoutine;
  128. private readonly GasFlowRoutine _gasFlowRoutine;
  129. private readonly RFPowerSwitchRoutine _rfPowerRoutine;
  130. private readonly PMGasVerificationRoutine _gasVerificationRoutine;
  131. private readonly PMPartialPressureRoutine _pmPartialPressureRoutine;
  132. private readonly PMVATPerformanceRoutine _pmVATPerformanceRoutine;
  133. //private readonly PMHeatRoutine _pmHeatRoutine;
  134. private AutoFlag _AutoMode;
  135. private bool _isOnline = false;
  136. //private bool _isAlarm;
  137. //private DateTime _pumpStartTime;
  138. //private TimeSpan _pumpElapsedTime;
  139. //private DateTime _rfStartTime;
  140. //private DateTime _tcStartTime;
  141. //private TimeSpan _rfElapsedTime;
  142. //private TimeSpan _tcElapsedTime;
  143. //private MovementPosition _goalLiftPin;
  144. //private ushort _ActivatedActionID;
  145. //private Stopwatch _LifpinSleepTimer;
  146. private bool startControlPressureFlag = true;
  147. //private bool stopControlPressureFlag = false;
  148. private int _controlPressureSetPoint = 90;
  149. private int _controlFlowSetPoint = 90;
  150. public JetChamber ChamberType => _chamber.ChamberType;
  151. public bool IsIdle
  152. {
  153. get { return fsm.State == (int)PMState.Idle; }
  154. }
  155. public bool IsError
  156. {
  157. get { return fsm.State == (int)PMState.Error; }
  158. }
  159. public bool IsInit
  160. {
  161. get { return fsm.State == (int)PMState.Init; }
  162. }
  163. public bool IsBusy
  164. {
  165. get { return !IsInit && !IsError && !IsIdle; }
  166. }
  167. public bool IsProcessing
  168. {
  169. get { return fsm.State == (int)PMState.PreProcess || fsm.State == (int)PMState.Processing || fsm.State == (int)PMState.PostProcess; }
  170. }
  171. public bool IsOnline
  172. {
  173. get { return _isOnline; }
  174. }
  175. public bool IsInclude
  176. {
  177. get;
  178. private set;
  179. } = true;
  180. private Dictionary<string, int> _dictRecipeTime = new Dictionary<string, int>();
  181. public override int TimeToReady
  182. {
  183. get
  184. {
  185. switch ((PMState)fsm.State)
  186. {
  187. case PMState.Processing:
  188. case PMState.Clean:
  189. if (Singleton<RouteManager>.Instance.IsAutoMode && IsOnline)
  190. {
  191. if (_dictRecipeTime.ContainsKey(_processRoutine.currentRecipeResult.RecipeName))
  192. {
  193. return Math.Max(_dictRecipeTime[_processRoutine.currentRecipeResult.RecipeName] - fsm.ElapsedTime, 0);
  194. }
  195. }
  196. break;
  197. }
  198. return int.MaxValue / 2;
  199. }
  200. }
  201. public bool IsAutoMode => _AutoMode == AutoFlag.Auto;
  202. public bool IsSlitDoorOpen => _chamber.CheckSlitDoorOpen();
  203. public bool IsSlitDoorClose => _chamber.CheckSlitDoorClose();
  204. public bool LiftPinIsDown => _chamber.LiftPinIsDown;
  205. public bool LiftPinIsUp => _chamber.LiftPinIsUp;
  206. public double ChamberPressure => _chamber.ChamberPressure;
  207. public double ProcessPressure => _chamber.ProcessPressure;
  208. public bool IsVac => _chamber.IsVAC;
  209. public bool IsAtm => _chamber.IsATM;
  210. public float ChamberTemperature => _chamber.ChamberTemperature;
  211. public bool Check(int msg, out string reason, object[] objs)
  212. {
  213. reason = "";
  214. return true;
  215. }
  216. //
  217. private bool CheckToPostMessage(int msg, params object[] args)
  218. {
  219. if (!fsm.FindTransition(fsm.State, msg))
  220. {
  221. EV.PostWarningLog(Module.ToString(), eEvent.WARN_State, $"{Module} is in {(PMState)fsm.State} state,can not do {(MSG)msg}");
  222. return false;
  223. }
  224. fsm.PostMsg(msg, args);
  225. return true;
  226. }
  227. public int Invoke(string function, params object[] args)
  228. {
  229. switch (function)
  230. {
  231. case "Home":
  232. CheckToPostMessage((int)MSG.Home);
  233. return (int)MSG.Home;
  234. }
  235. return (int)FSM_MSG.NONE;
  236. }
  237. public bool CheckAcked(int msg)
  238. {
  239. return fsm.CheckExecuted(msg);
  240. }
  241. public void ResetRecipeTime()
  242. {
  243. _dictRecipeTime.Clear();
  244. }
  245. public bool IsPrepareTransferReady(ModuleName robot, EnumTransferType type, int slot, Hand blade)
  246. {
  247. //if (type == EnumTransferType.Pick)
  248. //{
  249. // return _chamber.CheckEnableTransfer(type, WaferManager.Instance.GetWafer(_chamber.Module, 0).Size);
  250. //}
  251. //else if (type == EnumTransferType.Place)
  252. //{
  253. // return _chamber.CheckEnableTransfer(type, WaferManager.Instance.GetWafer(robot, (int)blade).Size);
  254. //}
  255. return false;
  256. }
  257. public int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  258. {
  259. if (CheckToPostMessage((int)MSG.PrepareTransfer, type.ToString()))
  260. return (int)MSG.PrepareTransfer;
  261. return (int)FSM_MSG.NONE;
  262. }
  263. public int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp)
  264. {
  265. if (CheckToPostMessage((int)MSG.PrepareTransfer, type.ToString(), temp))
  266. return (int)MSG.PrepareTransfer;
  267. return (int)FSM_MSG.NONE;
  268. }
  269. public int InvokePrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, WaferSize size)
  270. {
  271. if (CheckToPostMessage((int)MSG.PrepareTransfer, type.ToString(), temp, size))
  272. return (int)MSG.PrepareTransfer;
  273. return (int)FSM_MSG.NONE;
  274. }
  275. public int InvokePostTransfer(ModuleName robot, EnumTransferType type, int slot)
  276. {
  277. if (CheckToPostMessage((int)MSG.PostTransfer, type.ToString()))
  278. return (int)MSG.PostTransfer;
  279. return (int)FSM_MSG.NONE;
  280. }
  281. public int InvokeClean(string recipeName, string waferID, RecipeType recipeType)
  282. {
  283. if (CheckToPostMessage((int)MSG.Clean, recipeName, waferID, recipeType))
  284. {
  285. return (int)MSG.Clean;
  286. }
  287. return (int)FSM_MSG.NONE;
  288. }
  289. public int InvokeProcess(string recipeName, string waferID, RecipeType recipeType)
  290. {
  291. if (CheckToPostMessage((int)MSG.RunRecipe, recipeName, waferID, recipeType))
  292. return (int)MSG.RunRecipe;
  293. return (int)FSM_MSG.NONE;
  294. }
  295. public int InvokePreHeat(float temperature)
  296. {
  297. if (CheckToPostMessage((int)MSG.Heat, (double)temperature))
  298. return (int)MSG.Heat;
  299. return (int)FSM_MSG.NONE;
  300. }
  301. public void InvokeReset()
  302. {
  303. PostMsg((int)MSG.Reset);
  304. }
  305. public void SetAuto()
  306. {
  307. this._AutoMode = AutoFlag.Auto;
  308. }
  309. private bool FnSetManual(object[] param)
  310. {
  311. if (fsm.State == (int)PMState.PreProcess || fsm.State == (int)PMState.Processing || fsm.State == (int)PMState.PostProcess)
  312. {
  313. EV.PostWarningLog(Module.ToString(), $"{Module} is in {(PMState)fsm.State},can not do SetAutoMode");
  314. return false;
  315. }
  316. this._AutoMode = AutoFlag.Manual;
  317. if (IsOnline)
  318. {
  319. EV.PostWarningLog(Module.ToString(), $"{Module} is online,change to offline due to the chamber change to manual mode");
  320. this._isOnline = false;
  321. }
  322. return true;
  323. }
  324. private bool FnSetInclude()
  325. {
  326. if (IsOnline == true)
  327. {
  328. LOG.Write(eEvent.WARN_PM, Module, $"{Module} is online,can not set Include");
  329. return false;
  330. }
  331. IsInclude = true;
  332. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Set Include Success");
  333. return true;
  334. }
  335. private bool FnSetExclude()
  336. {
  337. if (IsOnline == true)
  338. {
  339. LOG.Write(eEvent.WARN_PM, Module, $"{Module} is online,can not set Exclude");
  340. return false;
  341. }
  342. IsInclude = false;
  343. LOG.Write(eEvent.INFO_PM, Module, $"{Module} Set Exclude Success");
  344. return true;
  345. }
  346. private bool FnSetOnline(object[] param)
  347. {
  348. //if (!IsAutoMode)
  349. //{
  350. // EV.PostWarningLog(Module.ToString(), $"{Module} in manual mode,can not set online.");
  351. // return false;
  352. //}
  353. if (!IsInclude)
  354. {
  355. LOG.Write(eEvent.WARN_PM, Module, $"{Module} is excluded,can not be put online");
  356. return false;
  357. }
  358. if (!_chamber.HomeIsOK(out string reason))
  359. {
  360. LOG.Write(eEvent.WARN_PM, Module, $"{Module} {reason},can not be put online");
  361. return false;
  362. }
  363. if (!_chamber.CheckSlitDoorClose())
  364. {
  365. EV.PostWarningLog(Module.ToString(), $"{Module} slit door is open,can not set online.");
  366. return false;
  367. }
  368. this._isOnline = true;
  369. return true;
  370. }
  371. private bool FnSetOffline(object[] param)
  372. {
  373. this._isOnline = false;
  374. return true;
  375. }
  376. private List<eEvent> stopEntityId = new List<eEvent>()
  377. {
  378. eEvent.ERR_MATCH,
  379. eEvent.ERR_RF,
  380. eEvent.ERR_PENDULUM_VALVE,
  381. eEvent.ERR_DEVICE_INFO,
  382. eEvent.ERR_DRY_PUMP,
  383. eEvent.ERR_HighTemperatureHeater
  384. };
  385. public PMEntity(ModuleName module)
  386. {
  387. Module = module;
  388. _chamber = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  389. _home = new PMHomeRoutine(_chamber);
  390. _startDryPumpRoutine = new StartDryPumpRoutine(_chamber);
  391. _startTurboPumpRoutine = new StartTurboPumpRoutine(_chamber);
  392. _ventRoutine = new VentRoutine(_chamber);
  393. _venusVentRoutine = new VenusVentRoutine(_chamber);
  394. _pumpRoutine = new PumpDownRoutine(_chamber);
  395. //_ventLoadLockRoutine = new LoadLockVentRoutine(_chamber);
  396. //_pumpLoadLockRoutine = new LoadLockPumpRoutine(_chamber);
  397. //_purgeLoadLockRoutine = new LoadLockPurgeRoutine(_chamber);
  398. //_loadLockLeakCheckRoutine = new LoadLockLeakCheckRoutine(_chamber);
  399. _purgeRoutine = new PMPurgeRoutine(_chamber);
  400. _gaslinePurgeRoutine = new PMGaslinePurgeRoutine(_chamber, _pumpRoutine);
  401. _leakCheckRoutine = new PMLeakCheckRoutine(_chamber);
  402. _gasBoxLeakCheckRoutine = new GasBoxLeakCheckRoutine(_chamber);
  403. //_llPlaceRoutine = new LLPlaceRoutine(_chamber);
  404. //_llPickRoutine = new LLPickRoutine(_chamber, _ventLoadLockRoutine);
  405. _processRoutine = new PMProcessRoutine(_chamber, _pumpRoutine);
  406. _gasFlowRoutine = new GasFlowRoutine(_chamber);
  407. _rfPowerRoutine = new RFPowerSwitchRoutine(_chamber, true);
  408. _gasVerificationRoutine = new PMGasVerificationRoutine(_chamber, _pumpRoutine);
  409. _pmPartialPressureRoutine = new PMPartialPressureRoutine(_chamber);
  410. _pmVATPerformanceRoutine = new PMVATPerformanceRoutine(_chamber);
  411. //_pmControlPressureRoutine = new PMControlPressureRoutine(_chamber);
  412. //_pmHeatRoutine = new PMHeatRoutine(_chamber);
  413. fsm = new StateMachine<PMEntity>(Module.ToString(), (int)PMState.Init, 50);
  414. //Idle
  415. EnterExitTransition((int)PMState.Idle, FnIdle, (int)FSM_MSG.NONE, null);
  416. EnterExitTransition<PMState, FSM_MSG>(PMState.Error, fEnterError, FSM_MSG.NONE, null);
  417. EnterExitTransition<PMState, FSM_MSG>(PMState.ReadyForPick, fnEnterPickReady, FSM_MSG.NONE, fnExitPickReady);
  418. EnterExitTransition<PMState, FSM_MSG>(PMState.ReadyForPlace, fnEnterPlaceReady, FSM_MSG.NONE, fnExitPlaceReady);
  419. EnterExitTransition<PMState, FSM_MSG>(PMState.DropDownReady, fnEnterDropDownReady, FSM_MSG.NONE, fnExitDropDownReady);
  420. EnterExitTransition<PMState, FSM_MSG>(PMState.LiftUpReady, fnEnterLiftUpReady, FSM_MSG.NONE, fnExitLiftUpReady);
  421. //Home
  422. //EnterExitTransition((int)PMState.Homing, FnEnterHome, (int)FSM_MSG.NONE, FnExitHome);
  423. AnyStateTransition(MSG.Error, FnError, PMState.Error);
  424. AnyStateTransition(MSG.Online, FnSetOnline, FSM_STATE.SAME);
  425. AnyStateTransition(MSG.Offline, FnSetOffline, FSM_STATE.SAME);
  426. AnyStateTransition(FSM_MSG.ALARM, FnAlarm, PMState.Error);
  427. Transition(PMState.Init, FSM_MSG.TIMER, FnTimeout, PMState.Init);
  428. Transition(PMState.Init, MSG.Home, FnStartHome, PMState.Homing);
  429. Transition(PMState.Error, MSG.Home, FnStartHome, PMState.Homing);
  430. Transition(PMState.Idle, MSG.Home, FnStartHome, PMState.Homing);
  431. Transition(PMState.Homing, MSG.Home, FnStartHome, PMState.Homing);
  432. Transition(PMState.Homing, FSM_MSG.TIMER, FnMonitorHome, PMState.Idle);
  433. Transition(PMState.Homing, MSG.Abort, FnAbortHome, PMState.Idle);
  434. Transition(PMState.Idle, FSM_MSG.TIMER, FnIdleTimeout, PMState.Idle);
  435. Transition(PMState.Error, FSM_MSG.TIMER, FnErrorTimeout, PMState.Error);
  436. //Launch DryPump sequence
  437. Transition(PMState.Idle, MSG.LaunchPump, FnLaunchPump, PMState.LaunchingPump);
  438. Transition(PMState.LaunchingPump, FSM_MSG.TIMER, FnLaunchPumpTimeout, PMState.Idle);
  439. Transition(PMState.LaunchingPump, MSG.Abort, FnAbortStartPumping, PMState.Idle);
  440. //Launch TurboPump sequence
  441. Transition(PMState.Idle, MSG.LaunchTurboPump, FnLaunchTurboPump, PMState.LaunchingTurboPump);
  442. Transition(PMState.LaunchingTurboPump, FSM_MSG.TIMER, FnLaunchTurboPumpTimeout, PMState.Idle);
  443. Transition(PMState.LaunchingTurboPump, MSG.Abort, FnAbortStartTurboPumping, PMState.Idle);
  444. //vent sequence
  445. Transition(PMState.Idle, MSG.Vent, FnStartVent, PMState.Venting);
  446. Transition(PMState.Pumping, MSG.Vent, FnVentToPumping, PMState.Venting);
  447. Transition(PMState.Venting, FSM_MSG.TIMER, FnVentTimeout, PMState.Idle);
  448. Transition(PMState.Venting, MSG.Abort, FnAbortVent, PMState.Idle);
  449. //Pump sequence
  450. Transition(PMState.Idle, MSG.Pump, FnStartPumpDown, PMState.Pumping);
  451. Transition(PMState.Venting, MSG.Pump, FnVentToPumping, PMState.Pumping);
  452. Transition(PMState.Pumping, FSM_MSG.TIMER, FnPumpDownTimeout, PMState.Idle);
  453. Transition(PMState.Pumping, MSG.Abort, FnAbortPumping, PMState.Idle);
  454. //Pump Loadlock sequence
  455. //Transition(PMState.Idle, MSG.PumpLoadLock, FnStartPumpDownLoadLock, PMState.PumpingLoadLock);
  456. //Transition(PMState.VentingLoadLock, MSG.PumpLoadLock, FnVentLoadLockToPumpingLoadLock, PMState.PumpingLoadLock);
  457. //Transition(PMState.PumpingLoadLock, FSM_MSG.TIMER, FnPumpDownLoadLockTimeout, PMState.Idle);
  458. //Transition(PMState.PumpingLoadLock, MSG.Abort, FnAbortPumpingLoadLock, PMState.Idle);
  459. //Vent Loadlock sequence
  460. //Transition(PMState.Idle, MSG.VentLoadLock, FnStartVentLoadlock, PMState.VentingLoadLock);
  461. //Transition(PMState.PumpingLoadLock, MSG.VentLoadLock, FnPumpingLoadLockToVentLoadLock, PMState.VentingLoadLock);
  462. //Transition(PMState.VentingLoadLock, FSM_MSG.TIMER, FnVentLoadLockTimeout, PMState.Idle);
  463. //Transition(PMState.VentingLoadLock, MSG.Abort, FnAbortVentLoadLock, PMState.Idle);
  464. // Purge LoadLock sequence
  465. //Transition(PMState.Idle, MSG.PurgeLoadLock, FnStartPurgeLoadlock, PMState.PurgingLoadLock);
  466. //Transition(PMState.PurgingLoadLock, FSM_MSG.TIMER, FnPurgeLoadLockTimeout, PMState.Idle);
  467. //Transition(PMState.PurgingLoadLock, MSG.Abort, FnAbortPurgeLoadLock, PMState.Idle);
  468. //LoadLock Leak check sequence
  469. //Transition(PMState.Idle, MSG.LoadLockLeakCheck, FnStartLoadLockLeakCheck, PMState.LoadLockLeakCheck);
  470. //Transition(PMState.LoadLockLeakCheck, FSM_MSG.TIMER, FnLoadLockLeakCheckTimeout, PMState.Idle);
  471. //Transition(PMState.LoadLockLeakCheck, MSG.Abort, FnAbortLoadLockLeakCheck, PMState.Idle);
  472. // PM Purge sequence
  473. Transition(PMState.Idle, MSG.CyclePurge, FnStartPurge, PMState.Purging);
  474. Transition(PMState.Purging, FSM_MSG.TIMER, FnPurgeTimeout, PMState.Idle);
  475. Transition(PMState.Purging, MSG.Abort, FnAbortPurge, PMState.Idle);
  476. // PM GasLine Purge sequence
  477. Transition(PMState.Idle, MSG.GasLinePurge, FnStartGasLinePurge, PMState.GasLinePurge);
  478. Transition(PMState.GasLinePurge, FSM_MSG.TIMER, FnGasLinePurgeTimeout, PMState.Idle);
  479. Transition(PMState.GasLinePurge, MSG.Abort, FnAbortGasLinePurge, PMState.Idle);
  480. //PM Leak check sequence
  481. Transition(PMState.Idle, MSG.LeakCheck, FnStartPMLeakCheck, PMState.LeakCheck);
  482. Transition(PMState.LeakCheck, FSM_MSG.TIMER, FnPMLeakCheckTimeout, PMState.Idle);
  483. Transition(PMState.LeakCheck, MSG.Abort, FnAbortPMLeakCheck, PMState.Idle);
  484. //PM GasBox Leak check sequence
  485. Transition(PMState.Idle, MSG.GasLeakCheck, FnStartGasBoxLeakCheck, PMState.GasBoxLeakCheck);
  486. Transition(PMState.GasBoxLeakCheck, FSM_MSG.TIMER, FnGasBoxLeakCheckTimeout, PMState.Idle);
  487. Transition(PMState.GasBoxLeakCheck, MSG.Abort, FnAbortGasBoxLeakCheck, PMState.Idle);
  488. // PlaceWafer from LoadLock Arm sequence
  489. //Transition(PMState.Idle, MSG.LLPlace, FnStartLLPlace, PMState.LLPlacing);
  490. //Transition(PMState.LLPlacing, FSM_MSG.TIMER, FnLLPlaceTimeout, PMState.Idle);
  491. //Transition(PMState.LLPlacing, MSG.Abort, FnAbortLLPlace, PMState.Idle);
  492. // PickWafer to LoadLock Arm sequence
  493. //Transition(PMState.Idle, MSG.LLPick, FnStartLLPick, PMState.LLPicking);
  494. //Transition(PMState.LLPicking, FSM_MSG.TIMER, FnLLPickTimeout, PMState.Idle);
  495. //Transition(PMState.LLPicking, MSG.Abort, FnAbortLLPick, PMState.Idle);
  496. // Process
  497. Transition(PMState.Idle, MSG.RunRecipe, FnRunRecipe, PMState.Processing);
  498. Transition(PMState.Processing, FSM_MSG.TIMER, FnProcessTimeout, PMState.Idle);
  499. Transition(PMState.Processing, MSG.Abort, FnAbortProcess, PMState.Idle);
  500. // Clean
  501. Transition(PMState.Idle, MSG.Clean, FnRunRecipe, PMState.Clean);
  502. Transition(PMState.Clean, FSM_MSG.TIMER, FnProcessTimeout, PMState.Idle);
  503. Transition(PMState.Clean, MSG.Abort, FnAbortProcess, PMState.Idle);
  504. // Gas Flow sequence
  505. Transition(PMState.Idle, MSG.GasFlow, FnStartGasFlow, PMState.GasFlowing);
  506. Transition(PMState.GasFlowing, MSG.GasFlow, FnAbortGasFlow, PMState.Idle);
  507. Transition(PMState.GasFlowing, FSM_MSG.TIMER, FnGasFlowTimeout, PMState.Idle);
  508. Transition(PMState.GasFlowing, MSG.StopGasFlow, FnStopGasFlow, PMState.Idle);
  509. Transition(PMState.GasFlowing, MSG.Abort, FnAbortGasFlow, PMState.Idle);
  510. //RF Power sequence
  511. Transition(PMState.Idle, MSG.RfPower, FnStartRfPower, PMState.RfPowering);
  512. Transition(PMState.GasFlowing, MSG.RfPower, FnStartRfPower, PMState.RfPowering);
  513. Transition(PMState.RfPowering, FSM_MSG.TIMER, FnRfPowerTimeout, PMState.Idle);
  514. Transition(PMState.RfPowering, MSG.Abort, FnAbortRfPower, PMState.Idle);
  515. //MFC verification
  516. Transition(PMState.Idle, MSG.MFCVerification, FnStartMFCVerification, PMState.MFCVerification);
  517. Transition(PMState.MFCVerification, FSM_MSG.TIMER, FnMFCVerificationTimeout, PMState.Idle);
  518. Transition(PMState.MFCVerification, MSG.Abort, FnAbortMFCVerification, PMState.Idle);
  519. //////////////////////// Exchange Wafer with TM ///////////////////////////////////////////////////////
  520. // Pick Wafer from PM
  521. Transition(PMState.Idle, MSG.PreparePick, FnStartPreparePick, PMState.PreparePick);
  522. Transition(PMState.PreparePick, MSG.Abort, FnAbortPreparePick, PMState.Idle);
  523. Transition(PMState.PreparePick, FSM_MSG.TIMER, FnPreparePickTimeout, PMState.ReadyForPick);
  524. Transition(PMState.PreparePick, MSG.PreparePick, null, PMState.PreparePick);
  525. Transition(PMState.ReadyForPick, MSG.Abort, FnAbortPick, PMState.Idle);
  526. Transition(PMState.ReadyForPick, MSG.DropDownWafer, FnStartDropDownWafer, PMState.DropDownWafer);
  527. Transition(PMState.ReadyForPick, MSG.PreparePick, null, PMState.ReadyForPick);
  528. Transition(PMState.DropDownWafer, FSM_MSG.TIMER, FnDropDownTimeout, PMState.DropDownReady);
  529. Transition(PMState.DropDownReady, MSG.PickReady, FnStartFinishPick, PMState.FinishPick);
  530. Transition(PMState.ReadyForPick, MSG.PickReady, FnStartFinishPick, PMState.FinishPick);
  531. Transition(PMState.FinishPick, FSM_MSG.TIMER, FnFinishPickTimeout, PMState.Idle);
  532. // Place Wafer to PM
  533. Transition(PMState.Idle, MSG.PreparePlace, FnStartPreparePlace, PMState.PreparePlace);
  534. //Transition(PMState.Heating, MSG.PreparePlace, FnStartPreparePlace, PMState.PreparePlace);
  535. Transition(PMState.PreparePlace, MSG.Abort, FnAbortPreparePlace, PMState.Idle);
  536. Transition(PMState.PreparePlace, FSM_MSG.TIMER, FnPreparePlaceTimeout, PMState.ReadyForPlace);
  537. Transition(PMState.PreparePlace, MSG.PreparePlace, null, PMState.PreparePlace);
  538. Transition(PMState.ReadyForPlace, MSG.LiftUpWafer, FnStartLiftUpWafer, PMState.LiftUpWafer);
  539. Transition(PMState.LiftUpWafer, FSM_MSG.TIMER, FnLiftUpTimeout, PMState.LiftUpReady);
  540. Transition(PMState.LiftUpReady, MSG.PlaceReady, FnStartFinishPlace, PMState.FinishPlace);
  541. Transition(PMState.ReadyForPlace, MSG.PlaceReady, FnStartFinishPlace, PMState.FinishPlace);
  542. Transition(PMState.PreparePlace, MSG.Abort, FnAortPlace, PMState.Idle);
  543. Transition(PMState.ReadyForPlace, MSG.Abort, FnAortPlace, PMState.Idle);
  544. Transition(PMState.ReadyForPlace, MSG.PreparePlace, null, PMState.ReadyForPlace);
  545. Transition(PMState.LiftUpReady, MSG.Abort, FnAortPlace, PMState.Idle);
  546. Transition(PMState.FinishPlace, FSM_MSG.TIMER, FnFinishPlaceTimeout, PMState.Idle);
  547. // Swap Wafer With PM
  548. Transition(PMState.DropDownReady, MSG.PreparePlace, FnStartSwapPlace, PMState.PreparePlace);
  549. Transition(PMState.ReadyForPick, MSG.PreparePlace, FnStartPreparePlace, PMState.PreparePlace);
  550. Transition(PMState.Idle, MSG.PartialPressure, FnStartPartialPressure, PMState.PartialPressureTesting);
  551. Transition(PMState.PartialPressureTesting, FSM_MSG.TIMER, FnPartialPressureTimeout, PMState.Idle);
  552. Transition(PMState.PartialPressureTesting, MSG.Abort, FnAbortPartialPressure, PMState.Idle);
  553. Transition(PMState.Idle, MSG.VATPerformance, FnStartVATPerformance, PMState.VATPerformanceTesting);
  554. Transition(PMState.VATPerformanceTesting, FSM_MSG.TIMER, FnVATPerformanceTimeout, PMState.Idle);
  555. Transition(PMState.VATPerformanceTesting, MSG.Abort, FnAbortVATPerformance, PMState.Idle);
  556. //Transition(PMState.Idle, MSG.Heat, FnStartHeat, PMState.Heating);
  557. AnyStateTransition(FSM_MSG.TIMER, FnControlPressure, FSM_STATE.SAME);
  558. Running = true;
  559. WaferManager.Instance.SubscribeLocation(Module, 1);
  560. }
  561. protected override bool Init()
  562. {
  563. DATA.Subscribe($"{Module}.FsmState", () => (((PMState)fsm.State)), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  564. DATA.Subscribe($"{Module}.FsmPrevState", () => (((PMState)fsm.PrevState).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  565. DATA.Subscribe($"{Module}.FsmLastMessage", () => (((MSG)fsm.LastMsg).ToString()), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  566. //DATA.Subscribe($"{Module}.LoadLockPurge.PurgeCounter", () => _purgeLoadLockRoutine.PurgeCounter, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  567. DATA.Subscribe($"{Module}.PartialPressureCounter", () => _pmPartialPressureRoutine.counter, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  568. DATA.Subscribe($"{Module}.VATPerformanceCounter", () => _pmVATPerformanceRoutine.counter, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  569. DATA.Subscribe($"{Module}.VATPerformanceResult", () => _pmVATPerformanceRoutine?.m_sb.ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  570. DATA.Subscribe($"{Module}.PartialPressureResult", () => _pmPartialPressureRoutine?.m_sb.ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  571. DATA.Subscribe($"{Module}.MFCCalibrationDatas", () => _gasVerificationRoutine?._MFCCalibrationDatas, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  572. DATA.Subscribe($"{Module}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  573. DATA.Subscribe($"{Module}.IsAlarm", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  574. DATA.Subscribe($"{Module}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  575. DATA.Subscribe($"{Module}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  576. DATA.Subscribe($"{Module}.IsOnline", () => _isOnline, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  577. DATA.Subscribe($"{Module}.VentingFlag", () => ChamberType == JetChamber.VenusSE || ChamberType == JetChamber.VenusDE ? _venusVentRoutine.VentingFlag: _ventRoutine.VentingFlag, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  578. //DATA.Subscribe($"{Module}.GetLeakCheckDatas", () => LeakCheckDataRecorder.GetAllLeakCheckData(Module.ToString()));
  579. DATA.Subscribe($"{Module}.CurrentRecipeResult", () => _processRoutine.currentRecipeResult, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  580. DATA.Subscribe($"{Module}.LeakCheck.Step", () => _leakCheckRoutine.CurrentStep, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  581. DATA.Subscribe($"{Module}.GasLeakCheck.Step", () => _gasBoxLeakCheckRoutine.CurrentStep, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  582. DATA.Subscribe($"{Module}.IsInclude", () => IsInclude, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  583. OP.Subscribe($"{Module}.{RtOperation.GasFlow}", (cmd, args) => CheckToPostMessage((int)MSG.GasFlow, args));
  584. OP.Subscribe($"{Module}.{RtOperation.LeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.LeakCheck, args));
  585. OP.Subscribe($"{Module}.{RtOperation.GasLeakCheck}", (cmd, args) => CheckToPostMessage((int)MSG.GasLeakCheck, args));
  586. OP.Subscribe($"{Module}.Home", (cmd, args) => CheckToPostMessage((int)MSG.Home));
  587. OP.Subscribe($"{Module}.{RtOperation.StartPump}", (cmd, args) => CheckToPostMessage((int)MSG.LaunchPump));
  588. OP.Subscribe($"{Module}.{RtOperation.StartTurboPump}", (cmd, args) => CheckToPostMessage((int)MSG.LaunchTurboPump));
  589. OP.Subscribe($"{Module}.{RtOperation.Pump}", (cmd, args) => CheckToPostMessage((int)MSG.Pump));
  590. OP.Subscribe($"{Module}.{RtOperation.Purge}", (cmd, args) => CheckToPostMessage((int)MSG.CyclePurge));
  591. OP.Subscribe($"{Module}.{RtOperation.RfPower}", (cmd, args) => CheckToPostMessage((int)MSG.RfPower));
  592. OP.Subscribe($"{Module}.{RtOperation.Vent}", (cmd, args) => CheckToPostMessage((int)MSG.Vent));
  593. OP.Subscribe($"{Module}.{RtOperation.VentLoadLock}", (cmd, args) => CheckToPostMessage((int)MSG.VentLoadLock));
  594. OP.Subscribe($"{Module}.{RtOperation.PurgeLoadLock}", (cmd, args) => CheckToPostMessage((int)MSG.PurgeLoadLock));
  595. OP.Subscribe($"{Module}.{RtOperation.PumpLoadLock}", (cmd, args) => CheckToPostMessage((int)MSG.PumpLoadLock));
  596. OP.Subscribe($"{Module}.{RtOperation.Reset}", (cmd, args) => CheckToPostMessage((int)MSG.Reset));
  597. OP.Subscribe($"{Module}.{RtOperation.Abort}", (cmd, args) => CheckToPostMessage((int)MSG.Abort));
  598. OP.Subscribe($"{Module}.{RtOperation.LLPick}", (cmd, args) => CheckToPostMessage((int)MSG.LLPick));
  599. OP.Subscribe($"{Module}.{RtOperation.LLPlace}", (cmd, args) => CheckToPostMessage((int)MSG.LLPlace));
  600. OP.Subscribe($"{Module}.{RtOperation.MFCVerification}", (cmd, args) => CheckToPostMessage((int)MSG.MFCVerification, args));
  601. OP.Subscribe($"{Module}.{RtOperation.RunRecipe}", (cmd, args) => CheckToPostMessage((int)MSG.RunRecipe, args));
  602. OP.Subscribe($"{Module}.{RtOperation.RunCleanRecipe}", (cmd, args) => CheckToPostMessage((int)MSG.Clean, args));
  603. OP.Subscribe($"{Module}.PartialPressureTest", (cmd, args) => CheckToPostMessage((int)MSG.PartialPressure, args[0], args[1]));
  604. OP.Subscribe($"{Module}.VATPerformanceTest", (cmd, args) => CheckToPostMessage((int)MSG.VATPerformance, args[0], args[1], args[2]));
  605. OP.Subscribe($"{Module}.GasLinePurge", (cmd, args) => CheckToPostMessage((int)MSG.GasLinePurge, args[0]));
  606. OP.Subscribe($"{Module}.ManualEndStep", (cmd, args) => ManualEndStep());
  607. OP.Subscribe($"{Module}.{RtOperation.Online}", (cmd, args) => CheckToPostMessage((int)MSG.Online));
  608. OP.Subscribe($"{Module}.{RtOperation.Offline}", (cmd, args) => CheckToPostMessage((int)MSG.Offline));
  609. OP.Subscribe($"{Module}.{RtOperation.PmError}", (cmd, args) => CheckToPostMessage((int)MSG.Error));
  610. OP.Subscribe($"{Module}.{RtOperation.Include}", (cmd, args) => FnSetInclude());
  611. OP.Subscribe($"{Module}.{RtOperation.Exclude}", (cmd, args) => FnSetExclude());
  612. OP.Subscribe($"{Module}.SubscribeStatsData",(cmd, args) =>
  613. {
  614. StatsDataManager.Instance.Subscribe(args[0].ToString(), args[1].ToString());
  615. return true;
  616. });
  617. StatsDataManager.Instance.Subscribe($"{Module}.ProcessedWaferCount", "Processed Wafer Count", 0);
  618. if (_chamber.IsRFAble())
  619. StatsDataManager.Instance.Subscribe($"{Module}.RfOnTime", "Rf On Time");
  620. if (_chamber.IsBiasRFAble())
  621. StatsDataManager.Instance.Subscribe($"{Module}.BiasRfOnTime", "Bias Rf On Time");
  622. StatsDataManager.Instance.Subscribe($"{Module}.PumpOnTime", "Pump On Time");
  623. _statProcessedWafer = StatsDataManager.Instance.GetItem($"{Module}.ProcessedWaferCount");
  624. _statRfOnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.RfOnTime");
  625. if (_chamber.IsBiasRFAble())
  626. _statBiasRfOnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.BiasRfOnTime");
  627. //_statPumpOnTime = StatsDataManager.Instance.GetItemRFAndPump($"{Module}.PumpOnTime");
  628. DATA.Subscribe($"{Module}.ProcessedWaferCount", () => _statProcessedWafer.Value, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  629. if (_chamber.IsRFAble())
  630. DATA.Subscribe($"{Module}.RfOnTime", () => _statRfOnTime.fromLastPM);
  631. if (_chamber.IsBiasRFAble())
  632. DATA.Subscribe($"{Module}.BiasRfOnTime", () => _statBiasRfOnTime.fromLastPM);
  633. //DATA.Subscribe($"{Module}.PumpOnTime", () => _statPumpOnTime.fromLastPM);
  634. if (ChamberType == JetChamber.Kepler2200A || ChamberType == JetChamber.Kepler2200B)
  635. {
  636. LOG.PMErrorInterrupt += (pmname,id) => PMErrorInterrupt(pmname,id);
  637. }
  638. return true;
  639. }
  640. private void PMErrorInterrupt(ModuleName pmname, eEvent eEventid)
  641. {
  642. if ( pmname == Module && stopEntityId.Contains(eEventid))
  643. {
  644. CheckToPostMessage((int)MSG.Error);
  645. }
  646. }
  647. private bool ManualEndStep()
  648. {
  649. _processRoutine.isMaualEndStep = true;
  650. return true;
  651. }
  652. private bool FnIdle(object[] objs)
  653. {
  654. Running = false;
  655. return true;
  656. }
  657. private bool fEnterError(object[] objs)
  658. {
  659. return true;
  660. }
  661. private bool fnEnterPickReady(object[] objs)
  662. {
  663. Status = PMStatus.Ready_For_Pick;
  664. return true;
  665. }
  666. private bool fnExitPickReady(object[] objs)
  667. {
  668. Status = PMStatus.Not_Ready;
  669. return true;
  670. }
  671. private bool fnEnterPlaceReady(object[] objs)
  672. {
  673. Status = PMStatus.Ready_For_Place;
  674. return true;
  675. }
  676. private bool fnExitPlaceReady(object[] objs)
  677. {
  678. Status = PMStatus.Not_Ready;
  679. return true;
  680. }
  681. private bool fnEnterDropDownReady(object[] objs)
  682. {
  683. Status = PMStatus.Exchange_Ready;
  684. return true;
  685. }
  686. private bool fnExitDropDownReady(object[] objs)
  687. {
  688. Status = PMStatus.Not_Ready;
  689. return true;
  690. }
  691. private bool fnEnterLiftUpReady(object[] objs)
  692. {
  693. Status = PMStatus.Exchange_Ready;
  694. return true;
  695. }
  696. private bool fnExitLiftUpReady(object[] objs)
  697. {
  698. Status = PMStatus.Not_Ready;
  699. return true;
  700. }
  701. private bool FnAlarm(object[] objs)
  702. {
  703. if ((PMState)fsm.State == PMState.Processing)
  704. {
  705. }
  706. return true;
  707. }
  708. private bool FnError(object[] objs)
  709. {
  710. Running = false;
  711. _isOnline = false;
  712. //if (((PMState)fsm.State == PMState.Processing) || ((PMState)fsm.State == PMState.PreProcess)
  713. // || ((PMState)fsm.State == PMState.Homing) || ((PMState)fsm.State == PMState.LoadProcessRecipe))
  714. // return false;
  715. //_chamber.CloseValves();
  716. //_chamber.GeneratorPowerOn(false);
  717. //_chamber.GeneratorBiasPowerOn(false);
  718. //_chamber.OpenValve(ValveType.TurboPumpPumping, true);
  719. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  720. //_chamber.OnOffSetESCHV(false);
  721. _chamber.PMInError();
  722. if (IsProcessing)
  723. {
  724. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Failed);
  725. }
  726. return true;
  727. }
  728. private bool FnTimeout(object[] objs)
  729. {
  730. _debugRoutine();
  731. return true;
  732. }
  733. private bool FnIdleTimeout(object[] objs)
  734. {
  735. _chamber.CheckIdleInterlock(0);
  736. //_debugRoutine();
  737. return true;
  738. }
  739. private bool FnErrorTimeout(object[] objs)
  740. {
  741. //_debugRoutine();
  742. return true;
  743. }
  744. private bool FnStartHome(object[] objs)
  745. {
  746. return _home.Start() == RState.Running;
  747. }
  748. private bool FnMonitorHome(object[] objs)
  749. {
  750. RState ret = _home.Monitor();
  751. if (ret == RState.Failed || ret == RState.Timeout)
  752. {
  753. PostMsg(MSG.Error);
  754. return false;
  755. }
  756. return ret == RState.End;
  757. }
  758. private bool FnAbortHome(object[] objs)
  759. {
  760. _home.Abort();
  761. return true;
  762. }
  763. private bool FnLaunchPump(object[] param)
  764. {
  765. return _startDryPumpRoutine.Start() == RState.Running;
  766. }
  767. private bool FnLaunchPumpTimeout(object[] param)
  768. {
  769. RState ret = _startDryPumpRoutine.Monitor();
  770. if (ret == RState.Failed || ret == RState.Timeout)
  771. {
  772. PostMsg(MSG.Error);
  773. return false;
  774. }
  775. return ret == RState.End;
  776. }
  777. private bool FnAbortStartPumping(object[] param)
  778. {
  779. _startDryPumpRoutine.Abort();
  780. return true;
  781. }
  782. private bool FnLaunchTurboPump(object[] param)
  783. {
  784. return _startTurboPumpRoutine.Start() == RState.Running;
  785. }
  786. private bool FnLaunchTurboPumpTimeout(object[] param)
  787. {
  788. RState ret = _startTurboPumpRoutine.Monitor();
  789. if (ret == RState.Failed || ret == RState.Timeout)
  790. {
  791. PostMsg(MSG.Error);
  792. return false;
  793. }
  794. return ret == RState.End;
  795. }
  796. private bool FnAbortStartTurboPumping(object[] param)
  797. {
  798. _startTurboPumpRoutine.Abort();
  799. return true;
  800. }
  801. private bool FnStartVent(object[] param)
  802. {
  803. switch (ChamberType)
  804. {
  805. case JetChamber.VenusSE:
  806. case JetChamber.VenusDE:
  807. return _venusVentRoutine.Start() == RState.Running;
  808. default:
  809. return _ventRoutine.Start() == RState.Running;
  810. }
  811. }
  812. private bool FnVentTimeout(object[] param)
  813. {
  814. RState ret;
  815. switch (ChamberType)
  816. {
  817. case JetChamber.VenusSE:
  818. case JetChamber.VenusDE:
  819. ret = _venusVentRoutine.Monitor();
  820. break;
  821. default:
  822. ret = _ventRoutine.Monitor();
  823. break;
  824. }
  825. if (ret == RState.Failed || ret == RState.Timeout)
  826. {
  827. PostMsg(MSG.Error);
  828. return false;
  829. }
  830. return ret == RState.End;
  831. }
  832. private bool FnVentToPumping(object[] param)
  833. {
  834. switch (ChamberType)
  835. {
  836. case JetChamber.VenusSE:
  837. case JetChamber.VenusDE:
  838. _venusVentRoutine.Abort();
  839. break;
  840. default:
  841. _ventRoutine.Abort();
  842. break;
  843. }
  844. return true; // FnStartPumpDown(param);
  845. }
  846. private bool FnAbortVent(object[] param)
  847. {
  848. switch (ChamberType)
  849. {
  850. case JetChamber.VenusSE:
  851. case JetChamber.VenusDE:
  852. _venusVentRoutine.Abort();
  853. break;
  854. default:
  855. _ventRoutine.Abort();
  856. break;
  857. }
  858. return true;
  859. }
  860. private bool FnStartPumpDown(object[] param)
  861. {
  862. return _pumpRoutine.Start() == RState.Running;
  863. }
  864. private bool FnPumpDownTimeout(object[] param)
  865. {
  866. RState ret = _pumpRoutine.Monitor();
  867. if (ret == RState.Failed || ret == RState.Timeout)
  868. {
  869. PostMsg(MSG.Error);
  870. return false;
  871. }
  872. return ret == RState.End;
  873. }
  874. private bool FnAbortPumping(object[] param)
  875. {
  876. _pumpRoutine.Abort();
  877. return true;
  878. }
  879. //private bool FnStartVentLoadlock(object[] param)
  880. //{
  881. // return _ventLoadLockRoutine.Start() == RState.Running;
  882. //}
  883. //private bool FnVentLoadLockTimeout(object[] param)
  884. //{
  885. // RState ret = _ventLoadLockRoutine.Monitor();
  886. // if (ret == RState.Failed || ret == RState.Timeout)
  887. // {
  888. // PostMsg(MSG.Error);
  889. // return false;
  890. // }
  891. // return ret == RState.End;
  892. //}
  893. //private bool FnVentLoadLockToPumpingLoadLock(object[] param)
  894. //{
  895. // _ventLoadLockRoutine.Abort();
  896. // return FnStartPumpDownLoadLock(param);
  897. //}
  898. //private bool FnAbortVentLoadLock(object[] param)
  899. //{
  900. // _ventLoadLockRoutine.Abort();
  901. // return true;
  902. //}
  903. //private bool FnStartPumpDownLoadLock(object[] param)
  904. //{
  905. // return _pumpLoadLockRoutine.Start() == RState.Running;
  906. //}
  907. //private bool FnPumpDownLoadLockTimeout(object[] param)
  908. //{
  909. // RState ret = _pumpLoadLockRoutine.Monitor();
  910. // if (ret == RState.Failed || ret == RState.Timeout)
  911. // {
  912. // PostMsg(MSG.Error);
  913. // return false;
  914. // }
  915. // return ret == RState.End;
  916. //}
  917. private bool FnPumpingToVent(object[] param)
  918. {
  919. _pumpRoutine.Abort();
  920. return FnStartVent(param);
  921. }
  922. //private bool FnPumpingLoadLockToVentLoadLock(object[] param)
  923. //{
  924. // _pumpLoadLockRoutine.Abort();
  925. // return FnStartVentLoadlock(param);
  926. //}
  927. //private bool FnAbortPumpingLoadLock(object[] param)
  928. //{
  929. // _pumpLoadLockRoutine.Abort();
  930. // return true;
  931. //}
  932. //private bool FnStartPurgeLoadlock(object[] param)
  933. //{
  934. // return _purgeLoadLockRoutine.Start() == RState.Running;
  935. //}
  936. //private bool FnPurgeLoadLockTimeout(object[] param)
  937. //{
  938. // RState ret = _purgeLoadLockRoutine.Monitor();
  939. // if (ret == RState.Failed || ret == RState.Timeout)
  940. // {
  941. // PostMsg(MSG.Error);
  942. // return false;
  943. // }
  944. // return ret == RState.End;
  945. //}
  946. //private bool FnAbortPurgeLoadLock(object[] param)
  947. //{
  948. // _purgeLoadLockRoutine.Abort();
  949. // return true;
  950. //}
  951. //private bool FnStartLoadLockLeakCheck(object[] param)
  952. //{
  953. // return _loadLockLeakCheckRoutine.Start() == RState.Running;
  954. //}
  955. //private bool FnLoadLockLeakCheckTimeout(object[] param)
  956. //{
  957. // RState ret = _loadLockLeakCheckRoutine.Monitor();
  958. // if (ret == RState.Failed || ret == RState.Timeout)
  959. // {
  960. // PostMsg(MSG.Error);
  961. // return false;
  962. // }
  963. // return ret == RState.End;
  964. //}
  965. //private bool FnAbortLoadLockLeakCheck(object[] param)
  966. //{
  967. // _loadLockLeakCheckRoutine.Abort();
  968. // return true;
  969. //}
  970. private bool FnStartPurge(object[] param)
  971. {
  972. return _purgeRoutine.Start() == RState.Running;
  973. }
  974. private bool FnPurgeTimeout(object[] param)
  975. {
  976. RState ret = _purgeRoutine.Monitor();
  977. if (ret == RState.Failed || ret == RState.Timeout)
  978. {
  979. PostMsg(MSG.Error);
  980. return false;
  981. }
  982. return ret == RState.End;
  983. }
  984. private bool FnAbortPurge(object[] param)
  985. {
  986. _purgeRoutine.Abort();
  987. return true;
  988. }
  989. private bool FnStartGasLinePurge(object[] param)
  990. {
  991. return _gaslinePurgeRoutine.Start(param) == RState.Running;
  992. }
  993. private bool FnGasLinePurgeTimeout(object[] param)
  994. {
  995. RState ret = _gaslinePurgeRoutine.Monitor();
  996. if (ret == RState.Failed || ret == RState.Timeout)
  997. {
  998. PostMsg(MSG.Error);
  999. return false;
  1000. }
  1001. return ret == RState.End;
  1002. }
  1003. private bool FnAbortGasLinePurge(object[] param)
  1004. {
  1005. _gaslinePurgeRoutine.Abort();
  1006. return true;
  1007. }
  1008. private bool FnStartPMLeakCheck(object[] param)
  1009. {
  1010. return _leakCheckRoutine.Start(param) == RState.Running;
  1011. }
  1012. private bool FnPMLeakCheckTimeout(object[] param)
  1013. {
  1014. RState ret = _leakCheckRoutine.Monitor();
  1015. if (ret == RState.Failed || ret == RState.Timeout)
  1016. {
  1017. PostMsg(MSG.Error);
  1018. return false;
  1019. }
  1020. return ret == RState.End;
  1021. }
  1022. private bool FnAbortPMLeakCheck(object[] param)
  1023. {
  1024. _leakCheckRoutine.Abort();
  1025. return true;
  1026. }
  1027. private bool FnStartGasBoxLeakCheck(object[] param)
  1028. {
  1029. return _gasBoxLeakCheckRoutine.Start(param) == RState.Running;
  1030. }
  1031. private bool FnGasBoxLeakCheckTimeout(object[] param)
  1032. {
  1033. RState ret = _gasBoxLeakCheckRoutine.Monitor();
  1034. if (ret == RState.Failed || ret == RState.Timeout)
  1035. {
  1036. PostMsg(MSG.Error);
  1037. return false;
  1038. }
  1039. return ret == RState.End;
  1040. }
  1041. private bool FnAbortGasBoxLeakCheck(object[] param)
  1042. {
  1043. _gasBoxLeakCheckRoutine.Abort();
  1044. return true;
  1045. }
  1046. //private bool FnStartLLPlace(object[] param)
  1047. //{
  1048. // return _llPlaceRoutine.Start() == RState.Running;
  1049. //}
  1050. //private bool FnLLPlaceTimeout(object[] param)
  1051. //{
  1052. // RState ret = _llPlaceRoutine.Monitor();
  1053. // if (ret == RState.Failed || ret == RState.Timeout)
  1054. // {
  1055. // PostMsg(MSG.Error);
  1056. // return false;
  1057. // }
  1058. // return ret == RState.End;
  1059. //}
  1060. //private bool FnAbortLLPlace(object[] param)
  1061. //{
  1062. // _llPlaceRoutine.Abort();
  1063. // return true;
  1064. //}
  1065. //private bool FnStartLLPick(object[] param)
  1066. //{
  1067. // return _llPickRoutine.Start() == RState.Running;
  1068. //}
  1069. //private bool FnLLPickTimeout(object[] param)
  1070. //{
  1071. // RState ret = _llPickRoutine.Monitor();
  1072. // if (ret == RState.Failed || ret == RState.Timeout)
  1073. // {
  1074. // PostMsg(MSG.Error);
  1075. // return false;
  1076. // }
  1077. // return ret == RState.End;
  1078. //}
  1079. //private bool FnAbortLLPick(object[] param)
  1080. //{
  1081. // _llPickRoutine.Abort();
  1082. // return true;
  1083. //}
  1084. private bool FnRunRecipe(object[] param)
  1085. {
  1086. RState ret = _processRoutine.Start(param);
  1087. if (ret == RState.Failed || ret == RState.Timeout)
  1088. {
  1089. PostMsg(MSG.Error);
  1090. return false;
  1091. }
  1092. return ret == RState.Running;
  1093. }
  1094. private bool FnProcessTimeout(object[] param)
  1095. {
  1096. _chamber.CheckIdleInterlock(500);
  1097. RState ret = _processRoutine.Monitor();
  1098. if (ret == RState.Failed || ret == RState.Timeout)
  1099. {
  1100. PostMsg(MSG.Error);
  1101. return false;
  1102. }
  1103. if (ret == RState.End)
  1104. {
  1105. StatsDataManager.Instance.Increase(_statProcessedWafer.Name);
  1106. _dictRecipeTime[_processRoutine.currentRecipeResult.RecipeName] = fsm.ElapsedTime;
  1107. return true;
  1108. }
  1109. return false;
  1110. }
  1111. private bool FnAbortProcess(object[] param)
  1112. {
  1113. StatsDataManager.Instance.Increase(_statProcessedWafer.Name);
  1114. _processRoutine.Abort();
  1115. return true;
  1116. }
  1117. private bool FnStartGasFlow(object[] param)
  1118. {
  1119. return _gasFlowRoutine.Start(param) == RState.Running;
  1120. }
  1121. private bool FnGasFlowTimeout(object[] param)
  1122. {
  1123. RState ret = _gasFlowRoutine.Monitor();
  1124. if (ret == RState.Failed || ret == RState.Timeout)
  1125. {
  1126. PostMsg(MSG.Error);
  1127. return false;
  1128. }
  1129. return ret == RState.End;
  1130. }
  1131. private bool FnStopGasFlow(object[] param)
  1132. {
  1133. _gasFlowRoutine.Abort();
  1134. return true;
  1135. }
  1136. private bool FnAbortGasFlow(object[] param)
  1137. {
  1138. _gasFlowRoutine.Abort();
  1139. return true;
  1140. }
  1141. private bool FnStartRfPower(object[] param)
  1142. {
  1143. return _rfPowerRoutine.Start(param) == RState.Running;
  1144. }
  1145. private bool FnRfPowerTimeout(object[] param)
  1146. {
  1147. RState ret = _rfPowerRoutine.Monitor();
  1148. if (ret == RState.Failed || ret == RState.Timeout)
  1149. {
  1150. PostMsg(MSG.Error);
  1151. return false;
  1152. }
  1153. return ret == RState.End;
  1154. }
  1155. private bool FnAbortRfPower(object[] param)
  1156. {
  1157. _rfPowerRoutine.Abort();
  1158. if (_gasFlowRoutine._gasStatus)
  1159. {
  1160. _gasFlowRoutine.StopFlow();
  1161. }
  1162. return true;
  1163. }
  1164. private bool FnStartMFCVerification(object[] param)
  1165. {
  1166. _gasVerificationRoutine.Init((string)param[0], Convert.ToDouble(param[1]), (int)param[2]);
  1167. return _gasVerificationRoutine.Start(param) == RState.Running;
  1168. }
  1169. private bool FnMFCVerificationTimeout(object[] param)
  1170. {
  1171. RState ret = _gasVerificationRoutine.Monitor();
  1172. if (ret == RState.Failed || ret == RState.Timeout)
  1173. {
  1174. PostMsg(MSG.Error);
  1175. return false;
  1176. }
  1177. return ret == RState.End;
  1178. }
  1179. private bool FnAbortMFCVerification(object[] param)
  1180. {
  1181. _gasVerificationRoutine.Abort();
  1182. return true;
  1183. }
  1184. private bool FnControlPressure(object[] param)
  1185. {
  1186. if (RouteManager.IsATMMode)
  1187. {
  1188. return true;
  1189. }
  1190. if (IsOnline == true && fsm.State != (int)PMState.Processing && fsm.State != (int)PMState.Clean)
  1191. {
  1192. if (startControlPressureFlag == true)
  1193. {
  1194. startControlPressureFlag = false;
  1195. if (_chamber.GetPVPosition() <= 0)
  1196. {
  1197. LOG.Write(eEvent.WARN_PM, Module, $"{Module} control pressure fail,due to pendulum valve is not Open");
  1198. return false;
  1199. }
  1200. if (_chamber.IsTurboPumpRunning == false)
  1201. {
  1202. LOG.Write(eEvent.WARN_PM, Module, $"{Module} control pressure fail,due to turbo pump is not Open");
  1203. return false;
  1204. }
  1205. _controlPressureSetPoint = SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
  1206. _controlFlowSetPoint = SC.GetValue<int>($"{Module}.ControlPressureN2FlowSetPoint");
  1207. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  1208. }
  1209. }
  1210. else
  1211. {
  1212. if (startControlPressureFlag == false)
  1213. {
  1214. _chamber.AbortControlPressure();
  1215. startControlPressureFlag = true;
  1216. }
  1217. }
  1218. return true;
  1219. }
  1220. #region Exchange wafer with TM
  1221. private bool FnStartPreparePick(object[] param)
  1222. {
  1223. if (!_chamber.PreparePick())
  1224. {
  1225. LOG.Write(eEvent.ERR_PM, Module, $"Prepare Pick failed");
  1226. return false;
  1227. }
  1228. return true;
  1229. }
  1230. private bool FnPreparePickTimeout(object[] param)
  1231. {
  1232. // return _chamber.WaferIsDown && IsSlitDoorOpen;
  1233. return _chamber.PreparePickIsOK();
  1234. }
  1235. private bool FnAbortPreparePick(object[] param)
  1236. {
  1237. return true;
  1238. }
  1239. private bool FnStartFinishPick(object[] param)
  1240. {
  1241. //if (!_chamber.SetSlitDoor(false, out string reason))
  1242. //{
  1243. // LOG.Write(eEvent.ERR_PM, Module, $"Set Slit Door Close failed:{reason}");
  1244. // return false;
  1245. //}
  1246. //return true;
  1247. return _chamber.EndPick();
  1248. }
  1249. private bool FnAbortPick(object[] param)
  1250. {
  1251. return true;
  1252. }
  1253. private bool FnFinishPickTimeout(object[] param)
  1254. {
  1255. //return IsSlitDoorClose;
  1256. return _chamber.EndPickIsOK();
  1257. }
  1258. private bool FnStartDropDownWafer(object[] param)
  1259. {
  1260. if (!_chamber.SetLiftPin(MovementPosition.Down, out string reason))
  1261. {
  1262. LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Down failed:{reason}");
  1263. return false;
  1264. }
  1265. return _chamber.SetLiftPin(MovementPosition.Down, out string _);
  1266. }
  1267. private bool FnDropDownTimeout(object[] param)
  1268. {
  1269. return _chamber.LiftPinIsDown;
  1270. }
  1271. private bool FnStartPreparePlace(object[] param)
  1272. {
  1273. //if (_chamber.ChamberType == JetChamber.Venus || _chamber.ChamberType == JetChamber.Kepler2300)
  1274. //{
  1275. // if (!_chamber.SetLiftPin(MovementPosition.Down, out string reason))
  1276. // {
  1277. // LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin down failed:{reason}");
  1278. // return false;
  1279. // }
  1280. //}
  1281. if (!_chamber.PreparePlace())
  1282. {
  1283. LOG.Write(eEvent.ERR_PM, Module, $"Set Wafer Down failed");
  1284. return false;
  1285. }
  1286. //string reason = "";
  1287. //if (!_chamber.SetLiftPin(MovementPosition.Down, out string reason))
  1288. //{
  1289. // LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin down failed:{reason}");
  1290. // return false;
  1291. //}
  1292. return true;
  1293. }
  1294. private bool FnPreparePlaceTimeout(object[] param)
  1295. {
  1296. return _chamber.PreparePlaceIsOK();
  1297. }
  1298. private bool FnAbortPreparePlace(object[] param)
  1299. {
  1300. return true;
  1301. }
  1302. private bool FnStartLiftUpWafer(object[] param)
  1303. {
  1304. if (!_chamber.SetLiftPin(MovementPosition.Up, out string reason))
  1305. {
  1306. LOG.Write(eEvent.ERR_PM, Module, $"Set Lift Pin Up failed:{reason}");
  1307. return false;
  1308. }
  1309. return true;
  1310. }
  1311. private bool FnLiftUpTimeout(object[] param)
  1312. {
  1313. return _chamber.LiftPinIsUp;
  1314. }
  1315. private bool FnStartFinishPlace(object[] param)
  1316. {
  1317. return _chamber.EndPlace();
  1318. }
  1319. private bool FnAortPlace(object[] param)
  1320. {
  1321. return true;
  1322. }
  1323. private bool FnFinishPlaceTimeout(object[] param)
  1324. {
  1325. //return _chamber.LiftPinIsDown && IsSlitDoorClose;
  1326. return _chamber.EndPlaceIsOK();
  1327. }
  1328. private bool FnStartSwapPlace(object[] param)
  1329. {
  1330. return true;
  1331. }
  1332. private bool FnStartPartialPressure(object[] param)
  1333. {
  1334. return _pmPartialPressureRoutine.Start(param) == RState.Running;
  1335. }
  1336. private bool FnPartialPressureTimeout(object[] param)
  1337. {
  1338. RState ret = _pmPartialPressureRoutine.Monitor();
  1339. if (ret == RState.Failed || ret == RState.Timeout)
  1340. {
  1341. PostMsg(MSG.Error);
  1342. return false;
  1343. }
  1344. return ret == RState.End;
  1345. }
  1346. private bool FnAbortPartialPressure(object[] param)
  1347. {
  1348. _pmPartialPressureRoutine.Abort();
  1349. return true;
  1350. }
  1351. private bool FnStartVATPerformance(object[] param)
  1352. {
  1353. return _pmVATPerformanceRoutine.Start(param) == RState.Running;
  1354. }
  1355. private bool FnVATPerformanceTimeout(object[] param)
  1356. {
  1357. RState ret = _pmVATPerformanceRoutine.Monitor();
  1358. if (ret == RState.Failed || ret == RState.Timeout)
  1359. {
  1360. PostMsg(MSG.Error);
  1361. return false;
  1362. }
  1363. return ret == RState.End;
  1364. }
  1365. private bool FnAbortVATPerformance(object[] param)
  1366. {
  1367. _pmVATPerformanceRoutine.Abort();
  1368. return true;
  1369. }
  1370. //private bool FnStartHeat(object[] param)
  1371. //{
  1372. // if (ChamberType == JetChamber.Kepler2200A || ChamberType == JetChamber.Kepler2200B)
  1373. // {
  1374. // _pmHeatRoutine.Start();
  1375. // }
  1376. // return true;
  1377. //}
  1378. #endregion
  1379. private void _debugRoutine()
  1380. {
  1381. int flag = 0;
  1382. // Test Home routine
  1383. if (flag == 1)
  1384. {
  1385. PostMsg(MSG.Home);
  1386. }
  1387. else if (flag == 2)
  1388. {
  1389. PostMsg(MSG.Vent);
  1390. }
  1391. else if (flag == 3)
  1392. {
  1393. PostMsg(MSG.Pump);
  1394. }
  1395. else if (flag == 4)
  1396. {
  1397. PostMsg(MSG.PumpLoadLock);
  1398. }
  1399. else if (flag == 5)
  1400. {
  1401. PostMsg(MSG.VentLoadLock);
  1402. }
  1403. else if (flag == 6)
  1404. {
  1405. PostMsg(MSG.PurgeLoadLock);
  1406. }
  1407. else if (flag == 7)
  1408. {
  1409. PostMsg(MSG.LaunchPump);
  1410. }
  1411. else if (flag == 8)
  1412. {
  1413. PostMsg(MSG.LaunchTurboPump);
  1414. }
  1415. else if (flag == 9)
  1416. {
  1417. PostMsg(MSG.LoadLockLeakCheck);
  1418. }
  1419. else if (flag == 10)
  1420. {
  1421. PostMsg(MSG.CyclePurge);
  1422. }
  1423. else if (flag == 11)
  1424. {
  1425. PostMsg(MSG.GasLinePurge);
  1426. }
  1427. else if (flag == 12)
  1428. {
  1429. PostMsg(MSG.LeakCheck);
  1430. }
  1431. else if (flag == 13)
  1432. {
  1433. PostMsg(MSG.GasLeakCheck);
  1434. }
  1435. else if (flag == 14)
  1436. {
  1437. PostMsg(MSG.LLPlace);
  1438. }
  1439. else if (flag == 15)
  1440. {
  1441. PostMsg(MSG.LLPick);
  1442. }
  1443. else if (flag == 16)
  1444. {
  1445. PostMsg(MSG.RunRecipe, "7777");
  1446. }
  1447. else if (flag == 17)
  1448. {
  1449. PostMsg(MSG.MFCVerification, "MFC2", (double)50, 10);
  1450. }
  1451. }
  1452. }
  1453. }