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SEMFHomeRoutine.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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пре 1 година |
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SEMFPMPickRoutine.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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пре 1 година |
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SEMFPMPlaceRoutine.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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пре 1 година |
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SEMFPMSwapRoutine.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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пре 1 година |
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SEMFPickRoutine.cs
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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пре 1 година |
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SEMFPlaceRoutine.cs
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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пре 1 година |
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SEMFPumpRoutine.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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пре 1 година |
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SEMFSwapRoutine.cs
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0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
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пре 1 година |
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SEMFVentRoutine.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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пре 2 година |
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SETMEntity.cs
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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пре 1 година |
zhouhr
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.