PMControlPressureRoutine.cs 1.8 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using MECF.Framework.Common.Equipment;
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Text;
  8. using System.Threading.Tasks;
  9. using Venus_Core;
  10. using Venus_RT.Devices;
  11. using Venus_RT.Modules.PMs;
  12. namespace Venus_RT.Modules.PMs
  13. {
  14. class PMControlPressureRoutine : PMRoutineBase, IRoutine
  15. {
  16. private enum ControlPressureStep
  17. {
  18. Delay1s,
  19. StartControlPressure,
  20. End
  21. }
  22. private readonly JetPMBase _chamber;
  23. private int _controlPressureSetPoint = 90;
  24. private int _controlFlowSetPoint = 90;
  25. public PMControlPressureRoutine(JetPMBase chamber) : base(chamber)
  26. {
  27. _chamber = chamber;
  28. }
  29. public RState Start(params object[] objs)
  30. {
  31. _controlPressureSetPoint= SC.GetValue<int>($"{Module}.ControlPressureSetPoint");
  32. _controlFlowSetPoint= SC.GetValue<int>($"{Module}.ControlPressureN2FlowSetPoint");
  33. return Runner.Start(Module, Name);
  34. }
  35. public RState Monitor()
  36. {
  37. Runner.Delay(ControlPressureStep.Delay1s, _delay_1s)
  38. .Run(ControlPressureStep.StartControlPressure, StartControlPressure)
  39. .End(ControlPressureStep.End, End);
  40. return Runner.Status;
  41. }
  42. private bool StartControlPressure()
  43. {
  44. _chamber.StartControlPressure(_controlPressureSetPoint, _controlFlowSetPoint);
  45. return true;
  46. }
  47. private bool End()
  48. {
  49. return true;
  50. }
  51. public void Abort()
  52. {
  53. _chamber.AbortControlPressure();
  54. }
  55. }
  56. }