RtState.cs 3.7 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. SETMCycle,
  33. SERunning,
  34. ReturnWafer,
  35. SETransfer,
  36. }
  37. public enum PMState
  38. {
  39. Init,
  40. Idle,
  41. Homing,
  42. GasFlowing,
  43. RfPowering,
  44. Heating,
  45. LaunchingPump,
  46. LaunchingTurboPump,
  47. Pumping,
  48. Venting,
  49. Purging,
  50. GasLinePurge,
  51. PumpingLoadLock,
  52. VentingLoadLock,
  53. PurgingLoadLock,
  54. LoadLockLeakCheck,
  55. MoveLift,
  56. Purge,
  57. // transfer
  58. LLPlacing,
  59. LLPicking,
  60. Transfer,
  61. Error,
  62. PrepareTransfer,
  63. PostTransfer,
  64. TransferHandoff,
  65. //Process,
  66. LeakCheck,
  67. GasBoxLeakCheck,
  68. LiftpinMoving,
  69. LiftpinWaiting,
  70. GuidePinMoving,
  71. Clean,
  72. LoadProcessRecipe,
  73. PreProcess,
  74. Processing,
  75. PostProcess,
  76. OpeningLid,
  77. ClosingLid,
  78. MFCVerification,
  79. AllMFCVerification,
  80. // exchange wafer with TM
  81. PreparePick,
  82. PreparePlace,
  83. ReadyForPick,
  84. ReadyForPlace,
  85. DropDownWafer,
  86. LiftUpWafer,
  87. DropDownReady,
  88. LiftUpReady,
  89. FinishPick,
  90. FinishPlace,
  91. PartialPressureTesting,
  92. VATPerformanceTesting
  93. }
  94. public enum TMState
  95. {
  96. Unknown,
  97. Init,
  98. Initializing,
  99. InitializingRB,
  100. Idle,
  101. Error,
  102. Pumping,
  103. Venting,
  104. Purging,
  105. Leakchecking,
  106. Picking,
  107. Placing,
  108. Swaping,
  109. PMPicking,
  110. PMPlacing,
  111. PMSwaping,
  112. Aligning,
  113. Mapping,
  114. Extending,
  115. Retracting,
  116. Swapping,
  117. Gotoing,
  118. ControllingPressure
  119. }
  120. public enum LLState
  121. {
  122. //Unknown,
  123. //Init,
  124. //Initializing,
  125. //Idle,
  126. //Error,
  127. //Pumping,
  128. //Venting,
  129. //Purging,
  130. //Leakchecking,
  131. //Picking,
  132. //Placing,
  133. //Swaping,
  134. //PMPicking,
  135. //PMPlacing,
  136. //PMSwaping,
  137. //Aligning,
  138. //Mapping,
  139. //Extending,
  140. //Retracting,
  141. //Swapping,
  142. //Gotoing,
  143. Unknown,
  144. Init,
  145. Initializing,
  146. Idle,
  147. Error,
  148. Pumping,
  149. Venting,
  150. Purging,
  151. LeakCheck,
  152. Prepare_For_TM,
  153. Prepare_For_EFEM,
  154. Ready_For_TM,
  155. Ready_For_EFEM,
  156. }
  157. public enum EFEMSTATE
  158. {
  159. Unknown, // 0
  160. Initializing, // 1
  161. Idle, // 2
  162. Error, // 3
  163. Picking, // 4
  164. Placing, // 5
  165. Aligning, // 6
  166. Mapping, // 7
  167. Init, // 8
  168. Orgshing, // 9
  169. Lifting, // 10
  170. InitingAL, // 11
  171. InitingRB, // 12
  172. Extending, // 13
  173. Retracting, // 14
  174. //SettingLamp, // 15
  175. Swapping,
  176. Gotoing,
  177. Gripping,
  178. Ungripping,
  179. Fliping,
  180. }
  181. }