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ControlJob.cs
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ea68c5c25d
add clean for Venus SE.
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hai 1 ano |
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EnumControlJobState.cs
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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hai 1 ano |
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EnumProcessJobState.cs
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56cd0ab611
add framework
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%!s(int64=2) %!d(string=hai) anos |
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LotInfo.cs
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56cd0ab611
add framework
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%!s(int64=2) %!d(string=hai) anos |
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ProcessJobInfo.cs
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5888197193
1.efem 添加 foup load/unload动画
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hai 1 ano |
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ProcessJobManager.cs
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56cd0ab611
add framework
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%!s(int64=2) %!d(string=hai) anos |
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SequenceInfo.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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hai 1 ano |
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SequenceStepInfo.cs
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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hai 1 ano |
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SequenceStepModuleInfo.cs
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56cd0ab611
add framework
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%!s(int64=2) %!d(string=hai) anos |
zhouhr
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI