| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131 | using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using Aitex.Core.RT.DataCenter;using Aitex.Core.RT.Device;using Aitex.Core.RT.Device.Unit;using Aitex.Core.RT.OperationCenter;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs{    public class TM : BaseDevice, IDevice, ITM    {        public virtual double ChamberPressure { get; }        public virtual double ForelinePressure { get; }        public TM(string module) : base(module, module, module, module)        {        }        public virtual bool Initialize()        {            DATA.Subscribe($"{Name}.IsAtm", () => { return CheckAtm(); });            DATA.Subscribe($"{Name}.IsVacuum", () => { return CheckVacuum(); });            DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);            DATA.Subscribe($"{Name}.ForelinePressure", () => ForelinePressure);                       return true;        }        public virtual bool CheckAtm()        {            return false;        }        public virtual bool CheckVacuum()        {            return false;        }        public virtual bool CheckIsPumping()        {            return false;        }        public virtual bool SetFastVentValve(bool isOpen, out string reason)        {            reason = string.Empty;            return true;        }        public virtual bool SetSlowVentValve(bool isOpen, out string reason)        {            reason = string.Empty;            return true;        }        public virtual bool SetFastPumpValve(bool isOpen, out string reason)        {            reason = string.Empty;            return true;        }        public virtual bool SetSlowPumpValve(bool isOpen, out string reason)        {            reason = string.Empty;            return true;        }        public virtual IoSlitValve GetSlitValve(ModuleName module)        {            return null;        }        public virtual bool SetSlitValve(ModuleName module, bool isOpen, out string reason)        {            reason = string.Empty;            return true;        }        public virtual bool CheckSlitValveOpen(ModuleName module)        {            return true;        }        public virtual bool CheckSlitValveClose(ModuleName module)        {            return true;        }        public virtual void Monitor()        {        }        public virtual void Terminate()        {        }        public virtual void Reset()        {        }        //public virtual bool SetPMASlitDoor(bool open)        //{        //    return false;        //}        //public virtual bool SetPMBSlitDoor(bool open)        //{        //    return false;        //}        //public virtual bool SetPMCSlitDoor(bool open)        //{        //    return false;        //}        //public virtual bool SetPMDSlitDoor(bool open)        //{        //    return false;        //}    }}
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