| .. |
|
EFEM
|
88b91b4ea3
fix routing bugs.
|
1 year ago |
|
LLs
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
1 year ago |
|
LPs
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
|
PMs
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
|
1 year ago |
|
Schedulers
|
73f0d306a7
Enhance routing algorithm.
|
1 year ago |
|
TM
|
187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
|
1 year ago |
|
VCE
|
0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
|
1 year ago |
|
AutoCycle.cs
|
88b91b4ea3
fix routing bugs.
|
1 year ago |
|
Autotransfer_LP_FA.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 year ago |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
1 year ago |
|
ResourceMonitor.cs
|
0ed42d17d1
fix bugs for WaferOffset
|
1 year ago |
|
RouteManager.cs
|
73f0d306a7
Enhance routing algorithm.
|
1 year ago |
|
SETMCycle.cs
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
|
1 year ago |
|
TMCycle.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 year ago |
zhouhr
187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve