JetEfem.cs 25 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using System.Collections;
  7. using Venus_Core;
  8. using Venus_RT.Modules;
  9. using MECF.Framework.Common.CommonData;
  10. using MECF.Framework.Common.Equipment;
  11. using Aitex.Sorter.Common;
  12. using Aitex.Core.Common;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.RT.Log;
  15. using Aitex.Core.Util;
  16. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  17. using Venus_RT.Devices.YASKAWA;
  18. namespace Venus_RT.Devices.EFEM
  19. {
  20. class JetEfem :EfemBase
  21. {
  22. private RState _status;
  23. private bool _IsHomed;
  24. private RobotMoveInfo _robotMoveInfo = new RobotMoveInfo();
  25. private readonly Loadport[] _LPMs = new Loadport[2];
  26. private readonly SignalTower _signalT = new SignalTower();
  27. private readonly AsyncSocket _socket;
  28. private EfemMessage _currentMsg;
  29. private EfemMessage _backroundMsg;
  30. private EfemMessage _revMsg;
  31. public override RState Status { get { return _status; } }
  32. public override bool IsHomed { get { return _IsHomed; } }
  33. public override RobotMoveInfo TMRobotMoveInfo { get { return _robotMoveInfo; } }
  34. public override ILoadport this[ModuleName mod]
  35. {
  36. get
  37. {
  38. if (!ModuleHelper.IsLoadPort(mod))
  39. throw new ApplicationException($"{mod} is NOT Loadport");
  40. return _LPMs[mod - ModuleName.LP1];
  41. }
  42. }
  43. public JetEfem()
  44. {
  45. _socket = new AsyncSocket("");
  46. _socket.Connect(SC.GetStringValue($"EFEM.IPAddress"));
  47. _socket.OnDataChanged += OnReceiveMessage;
  48. _socket.OnErrorHappened += OnErrorHappen;
  49. _status = RState.Init;
  50. _IsHomed = false;
  51. }
  52. public override void Monitor()
  53. {
  54. }
  55. public override void Terminate()
  56. {
  57. }
  58. public override void Reset()
  59. {
  60. _status = RState.End;
  61. }
  62. public override void SetOnline(bool online)
  63. {
  64. }
  65. public override void SetOnline(ModuleName mod, bool online)
  66. {
  67. }
  68. public override void SetBusy(ModuleName mod, bool online)
  69. {
  70. _status = RState.Running;
  71. }
  72. public override bool HomeAll()
  73. {
  74. _currentMsg = new EfemMessage
  75. {
  76. Operation = EfemOperation.Home,
  77. Head = EfemMessage.MsgHead.MOV,
  78. Parameters = new List<string> { Constant.ModuleString[ModuleName.EFEM] }
  79. };
  80. _status = RState.Running;
  81. return _socket.Write(_currentMsg.ToString());
  82. }
  83. public override bool Home(ModuleName mod)
  84. {
  85. if(ModuleHelper.IsLoadPort(mod))
  86. {
  87. _backroundMsg = new EfemMessage
  88. {
  89. Operation = EfemOperation.Home,
  90. Head = EfemMessage.MsgHead.MOV,
  91. Parameters = new List<string> { Constant.ModuleString[mod] }
  92. };
  93. return _socket.Write(_backroundMsg.ToString());
  94. }
  95. else
  96. {
  97. _currentMsg = new EfemMessage
  98. {
  99. Operation = EfemOperation.Home,
  100. Head = EfemMessage.MsgHead.MOV,
  101. Parameters = new List<string> { Constant.ModuleString[mod] }
  102. };
  103. _status = RState.Running;
  104. return _socket.Write(_currentMsg.ToString());
  105. }
  106. }
  107. public override bool Halt()
  108. {
  109. return true;
  110. }
  111. public override bool ClearError()
  112. {
  113. _backroundMsg = new EfemMessage
  114. {
  115. Operation = EfemOperation.ClearError,
  116. Head = EfemMessage.MsgHead.SET,
  117. Parameters = new List<string> { "CLEAR" }
  118. };
  119. return _socket.Write(_backroundMsg.ToString());
  120. }
  121. public override bool PickExtend(ModuleName chamber, int slot, Hand hand)
  122. {
  123. if (!CheckEfemStatus())
  124. return false;
  125. _currentMsg = new EfemMessage
  126. {
  127. Operation = EfemOperation.Extend,
  128. Head = EfemMessage.MsgHead.MOV,
  129. Parameters = new List<string>
  130. {
  131. chamber.ToHWString(),
  132. ExtendPos.GB.ToString(),
  133. Constant.ArmString[hand],
  134. }
  135. };
  136. _status = RState.Running;
  137. return _socket.Write(_currentMsg.ToString());
  138. }
  139. public override bool PickRetract(ModuleName chamber, int slot, Hand hand)
  140. {
  141. if (!CheckEfemStatus())
  142. return false;
  143. _currentMsg = new EfemMessage
  144. {
  145. Operation = EfemOperation.Extend,
  146. Head = EfemMessage.MsgHead.MOV,
  147. Parameters = new List<string>
  148. {
  149. chamber.ToHWString(),
  150. ExtendPos.G4.ToString(),
  151. Constant.ArmString[hand],
  152. }
  153. };
  154. _status = RState.Running;
  155. return _socket.Write(_currentMsg.ToString());
  156. }
  157. public override bool PlaceExtend(ModuleName chamber, int slot, Hand hand)
  158. {
  159. if (!CheckEfemStatus())
  160. return false;
  161. _currentMsg = new EfemMessage
  162. {
  163. Operation = EfemOperation.Extend,
  164. Head = EfemMessage.MsgHead.MOV,
  165. Parameters = new List<string>
  166. {
  167. chamber.ToHWString(),
  168. ExtendPos.PB.ToString(),
  169. Constant.ArmString[hand],
  170. }
  171. };
  172. _status = RState.Running;
  173. return _socket.Write(_currentMsg.ToString());
  174. }
  175. public override bool PlaceRetract(ModuleName chamber, int slot, Hand hand)
  176. {
  177. if (!CheckEfemStatus())
  178. return false;
  179. _currentMsg = new EfemMessage
  180. {
  181. Operation = EfemOperation.Extend,
  182. Head = EfemMessage.MsgHead.MOV,
  183. Parameters = new List<string>
  184. {
  185. chamber.ToHWString(),
  186. ExtendPos.P4.ToString(),
  187. Constant.ArmString[hand],
  188. }
  189. };
  190. _status = RState.Running;
  191. return _socket.Write(_currentMsg.ToString());
  192. }
  193. public override bool Pick(ModuleName station, int slot, Hand hand)
  194. {
  195. if (!CheckEfemStatus())
  196. return false;
  197. Position SrcPos = new Position { Module= station,Slot= (byte)slot };
  198. _currentMsg = new EfemMessage
  199. {
  200. Operation = EfemOperation.Pick,
  201. Head = EfemMessage.MsgHead.MOV,
  202. Parameters = new List<string>
  203. {
  204. SrcPos.ToHWString(),
  205. Constant.ArmString[hand],
  206. WaferSize.WS12.ToString()
  207. }
  208. };
  209. _status = RState.Running;
  210. return _socket.Write(_currentMsg.ToString());
  211. }
  212. public override bool Place(ModuleName station, int slot, Hand hand)
  213. {
  214. if (!CheckEfemStatus())
  215. return false;
  216. Position DestPos = new Position { Module = station, Slot = (byte)slot };
  217. _currentMsg = new EfemMessage
  218. {
  219. Operation = EfemOperation.Place,
  220. Head = EfemMessage.MsgHead.MOV,
  221. Parameters = new List<string>
  222. {
  223. DestPos.ToHWString(),
  224. Constant.ArmString[hand],
  225. WaferSize.WS12.ToString()
  226. }
  227. };
  228. _status = RState.Running;
  229. return _socket.Write(_currentMsg.ToString());
  230. }
  231. public override bool Goto(ModuleName station, Hand hand)
  232. {
  233. if (!CheckEfemStatus())
  234. return false;
  235. Position DestPos = new Position { Module = station, Slot = (byte)0 };
  236. _currentMsg = new EfemMessage
  237. {
  238. Operation = EfemOperation.Goto,
  239. Head = EfemMessage.MsgHead.MOV,
  240. Parameters = new List<string>
  241. {
  242. DestPos.ToHWString(),
  243. Constant.ArmString[hand],
  244. WaferSize.WS12.ToString()
  245. }
  246. };
  247. _status = RState.Running;
  248. return _socket.Write(_currentMsg.ToString());
  249. }
  250. public override bool Grip(Hand blade, bool isGrip)
  251. {
  252. if (!CheckEfemStatus())
  253. return false;
  254. _currentMsg = new EfemMessage
  255. {
  256. Operation = EfemOperation.Grip,
  257. Head = EfemMessage.MsgHead.SET,
  258. Parameters = new List<string>
  259. {
  260. isGrip ? "ON":"OFF",
  261. Constant.ArmString[blade]
  262. }
  263. };
  264. _status = RState.Running;
  265. return _socket.Write(_currentMsg.ToString());
  266. }
  267. public override bool Map(ModuleName mod)
  268. {
  269. if (!CheckEfemStatus())
  270. return false;
  271. _currentMsg = new EfemMessage
  272. {
  273. Operation = EfemOperation.Map,
  274. Head = EfemMessage.MsgHead.MOV,
  275. Parameters = new List<string> { Constant.ModuleString[mod] }
  276. };
  277. _status = RState.Running;
  278. return _socket.Write(_currentMsg.ToString());
  279. }
  280. public override bool SetPinUp(ModuleName mod)
  281. {
  282. if (!CheckEfemStatus())
  283. return false;
  284. _currentMsg = new EfemMessage
  285. {
  286. Operation = EfemOperation.Lift,
  287. Head = EfemMessage.MsgHead.MOV,
  288. Parameters = new List<string> { Constant.ModuleString[mod], "UP" }
  289. };
  290. _status = RState.Running;
  291. return _socket.Write(_currentMsg.ToString());
  292. }
  293. public override bool SetPinDown(ModuleName mod)
  294. {
  295. if (!CheckEfemStatus())
  296. return false;
  297. _currentMsg = new EfemMessage
  298. {
  299. Operation = EfemOperation.Lift,
  300. Head = EfemMessage.MsgHead.MOV,
  301. Parameters = new List<string> { Constant.ModuleString[mod], "DOWN" }
  302. };
  303. _status = RState.Running;
  304. return _socket.Write(_currentMsg.ToString());
  305. }
  306. public override bool Align(ModuleName mod, float delayTime, WaferSize size)
  307. {
  308. if (!CheckEfemStatus())
  309. return false;
  310. _currentMsg = new EfemMessage
  311. {
  312. Operation = EfemOperation.Align,
  313. Head = EfemMessage.MsgHead.MOV,
  314. Parameters = new List<string> { mod.ToHWString(), size.ToString() }
  315. };
  316. _status = RState.Running;
  317. return _socket.Write(_currentMsg.ToString());
  318. }
  319. public override bool SetLamp(LightType light, LightStatus status)
  320. {
  321. _backroundMsg = new EfemMessage
  322. {
  323. Operation = EfemOperation.Light,
  324. Head = EfemMessage.MsgHead.SET,
  325. Parameters = new List<string> { Constant.STOWER, light.ToString(), status.ToString() }
  326. };
  327. return _socket.Write(_backroundMsg.ToString());
  328. }
  329. public override bool Load(ModuleName mod)
  330. {
  331. _backroundMsg = new EfemMessage
  332. {
  333. Operation = EfemOperation.Load,
  334. Head = EfemMessage.MsgHead.MOV,
  335. Parameters = new List<string> { Constant.ModuleString[mod] }
  336. };
  337. return _socket.Write(_backroundMsg.ToString());
  338. }
  339. public override bool Unload(ModuleName mod)
  340. {
  341. _backroundMsg = new EfemMessage
  342. {
  343. Operation = EfemOperation.Unload,
  344. Head = EfemMessage.MsgHead.MOV,
  345. Parameters = new List<string> { Constant.ModuleString[mod] }
  346. };
  347. return _socket.Write(_backroundMsg.ToString());
  348. }
  349. public override bool ReadCarrierId(ModuleName mod)
  350. {
  351. _backroundMsg = new EfemMessage
  352. {
  353. Operation = EfemOperation.CarrierId,
  354. Head = EfemMessage.MsgHead.GET,
  355. Parameters = new List<string> { Constant.ModuleString[mod] }
  356. };
  357. return _socket.Write(_backroundMsg.ToString());
  358. }
  359. public override bool WriteCarrierId(ModuleName mod, string id)
  360. {
  361. _backroundMsg = new EfemMessage
  362. {
  363. Operation = EfemOperation.CarrierId,
  364. Head = EfemMessage.MsgHead.SET,
  365. Parameters = new List<string> { Constant.ModuleString[mod], id }
  366. };
  367. return _socket.Write(_backroundMsg.ToString());
  368. }
  369. public override bool ReadTagData(ModuleName mod)
  370. {
  371. _backroundMsg = new EfemMessage
  372. {
  373. Operation = EfemOperation.CarrierId,
  374. Head = EfemMessage.MsgHead.GET,
  375. Parameters = new List<string> { Constant.ModuleString[mod] }
  376. };
  377. return _socket.Write(_backroundMsg.ToString());
  378. }
  379. public override bool WriteTagData(ModuleName mod, string tagData)
  380. {
  381. _backroundMsg = new EfemMessage
  382. {
  383. Operation = EfemOperation.CarrierId,
  384. Head = EfemMessage.MsgHead.SET,
  385. Parameters = new List<string> { Constant.ModuleString[mod], tagData }
  386. };
  387. return _socket.Write(_backroundMsg.ToString());
  388. }
  389. public override bool Dock(ModuleName mod)
  390. {
  391. _backroundMsg = new EfemMessage
  392. {
  393. Operation = EfemOperation.Dock,
  394. Head = EfemMessage.MsgHead.MOV,
  395. Parameters = new List<string> { Constant.ModuleString[mod]}
  396. };
  397. return _socket.Write(_backroundMsg.ToString());
  398. }
  399. public override bool Undock(ModuleName mod)
  400. {
  401. _backroundMsg = new EfemMessage
  402. {
  403. Operation = EfemOperation.Undock,
  404. Head = EfemMessage.MsgHead.MOV,
  405. Parameters = new List<string> { Constant.ModuleString[mod]}
  406. };
  407. return _socket.Write(_backroundMsg.ToString());
  408. }
  409. public override bool Clamp(ModuleName mod, bool isUnloadClamp)
  410. {
  411. _backroundMsg = new EfemMessage
  412. {
  413. Operation = EfemOperation.Clamp,
  414. Head = EfemMessage.MsgHead.MOV,
  415. Parameters = new List<string> { Constant.ModuleString[mod] }
  416. };
  417. return _socket.Write(_backroundMsg.ToString());
  418. }
  419. public override bool Unclamp(ModuleName mod)
  420. {
  421. _backroundMsg = new EfemMessage
  422. {
  423. Operation = EfemOperation.Unclamp,
  424. Head = EfemMessage.MsgHead.MOV,
  425. Parameters = new List<string> { Constant.ModuleString[mod] }
  426. };
  427. return _socket.Write(_backroundMsg.ToString());
  428. }
  429. public override bool SetThickness(ModuleName mod, string thickness)
  430. {
  431. _backroundMsg = new EfemMessage
  432. {
  433. Operation = EfemOperation.SetThickness,
  434. Head = EfemMessage.MsgHead.SET,
  435. Parameters = new List<string> { Constant.ModuleString[mod], thickness.ToUpper() }
  436. };
  437. return _socket.Write(_backroundMsg.ToString());
  438. }
  439. public override void SetRobotMovingInfo(RobotAction action, Hand hand, ModuleName target)
  440. {
  441. }
  442. private void OnReceiveMessage(string RevMsg)
  443. {
  444. string[] msgs = RevMsg.Split('\r');
  445. foreach (var msg in msgs)
  446. {
  447. if (string.IsNullOrWhiteSpace(msg)) continue;
  448. EfemMessage rec_msg = msg.ToMessage();
  449. switch (rec_msg.Head)
  450. {
  451. case EfemMessage.MsgHead.ACK:
  452. _revMsg = rec_msg;
  453. break;
  454. case EfemMessage.MsgHead.INF:
  455. // 收到INF之后发送ACK确认
  456. string strACK = rec_msg.RawString.Replace("INF", "ACK");
  457. _socket.Write(strACK);
  458. EfemMessage ack_msg = strACK.ToMessage();
  459. ack_msg.Direct = MsgDirection.To;
  460. _revMsg = rec_msg;
  461. OnCommandUpdated(rec_msg);
  462. break;
  463. case EfemMessage.MsgHead.EVT:
  464. OnEventUpdated(new EfemEventArgs
  465. {
  466. EvtStr = rec_msg.ToParamString(),
  467. Module = rec_msg.Port,
  468. CommandType = rec_msg.Operation,
  469. DataList = rec_msg.Data
  470. });
  471. break;
  472. case EfemMessage.MsgHead.NAK:
  473. case EfemMessage.MsgHead.CAN:
  474. case EfemMessage.MsgHead.ABS:
  475. OnErrorOccurred(rec_msg);
  476. break;
  477. }
  478. }
  479. }
  480. private void OnErrorHappen(ErrorEventArgs args)
  481. {
  482. }
  483. private void OnErrorOccurred(EfemMessage message)
  484. {
  485. string description = string.Empty;
  486. switch(message.Head)
  487. {
  488. case EfemMessage.MsgHead.NAK:
  489. description = Constant.FactorString[message.Factor];
  490. break;
  491. case EfemMessage.MsgHead.CAN:
  492. description = Constant.FactorString.ContainsKey(message.Factor) ? Constant.FactorString[message.Factor] : message.Factor;
  493. break;
  494. case EfemMessage.MsgHead.ABS:
  495. description = $"{message.Data[0]}, {message.Data[1]}";
  496. break;
  497. }
  498. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, $"{description}, [{message.Data[0]}], [{message.Factor}]");
  499. }
  500. private void OnEventUpdated(EfemEventArgs eArg)
  501. {
  502. switch (eArg.CommandType)
  503. {
  504. case EfemOperation.SigStatus:
  505. // EVT:SIGSTAT/Parameter/DATA1/DATA2;
  506. string sParam = eArg.DataList[0]; // "SYSTEM" or "Pn"
  507. // DATA1 & DATA2
  508. int nData1 = Convert.ToInt32(eArg.DataList[1], 16);
  509. int nData2 = Convert.ToInt32(eArg.DataList[2], 16);
  510. BitArray baData1 = new BitArray(new int[] { nData1 });
  511. BitArray baData2 = new BitArray(new int[] { nData2 });
  512. if (0 == string.Compare(sParam, Constant.SYS, true))
  513. {
  514. // EVT:SIGSTAT/System/00000000/00000004;
  515. // DATA1
  516. // Post warning and alarm
  517. if (!baData1[0]) // Bit[0] ON=Normal, OFF=Abnormal
  518. {
  519. //EV.Notify(EFEMVacuumPressureError);
  520. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM System vacuum source pressure low");
  521. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  522. }
  523. if (!baData1[1]) // Bit[1] ON=Normal, OFF=Abnormal
  524. {
  525. //EV.Notify(EFEMIonizerAlarm);
  526. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Ionizer compressed air error");
  527. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  528. }
  529. if (!baData1[2]) // Bit[2] ON=Normal, OFF=Abnormal
  530. {
  531. //EV.Notify(EFEMCDAError);
  532. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM System compressed air pressure low");
  533. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  534. }
  535. if (!baData1[4]) // Bit[4] ON=Normal, OFF=Abnormal
  536. {
  537. //EV.Notify(EFEMFlowGaugeSensorError);
  538. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Flow gauge sensor error");
  539. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  540. }
  541. if (!baData1[5]) // Bit[5] ON=Normal, OFF=Abnormal
  542. {
  543. //EV.Notify(EFEMLeakageAlarm);
  544. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Leakage alarm");
  545. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  546. }
  547. if (!baData1[10]) // Bit[10] ON=Normal, OFF=Abnormal
  548. {
  549. //EV.Notify(EFEMIonizerAlarm);
  550. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM Ionizer alarm");
  551. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  552. }
  553. if (!baData1[11]) // Bit[11] ON=Normal, OFF=Abnormal
  554. {
  555. //EV.Notify(EFEMFFUAlarm);
  556. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "FFU alarm");
  557. Singleton<RouteManager>.Instance.EFEM.PostMsg(EfemEntity.MSG.Error);
  558. }
  559. if (!baData1[13]) // Bit[13] ON=RUN, OFF=Maintain
  560. {
  561. //EV.Notify(EFEMOffline);
  562. LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "EFEM switch to Maintain mode, HomeAll to recover");
  563. }
  564. // DATA2
  565. _signalT.ChangeLightStatus(LightType.RED, baData2[0] ? LightStatus.ON : baData2[5] ? LightStatus.BLINK : LightStatus.OFF);
  566. _signalT.ChangeLightStatus(LightType.GREEN, baData2[1] ? LightStatus.ON : baData2[6] ? LightStatus.BLINK : LightStatus.OFF);
  567. _signalT.ChangeLightStatus(LightType.YELLOW, baData2[2] ? LightStatus.ON : baData2[7] ? LightStatus.BLINK : LightStatus.OFF);
  568. _signalT.ChangeLightStatus(LightType.BLUE, baData2[3] ? LightStatus.ON : baData2[8] ? LightStatus.BLINK : LightStatus.OFF);
  569. _signalT.ChangeLightStatus(LightType.WHITE, baData2[4] ? LightStatus.ON : baData2[9] ? LightStatus.BLINK : LightStatus.OFF);
  570. _signalT.ChangeLightStatus(LightType.BUZZER1, baData2[10] ? LightStatus.ON : LightStatus.OFF);
  571. /* EFEM 程序中目前没有实现
  572. _RobotErr.CLK = baData2[27]; // bit 27
  573. bool bArmNotExtendLLA = baData2[30]; // bit 30
  574. bool bArmNotExtendLLB = baData2[31]; // bit 31
  575. */
  576. } // system event
  577. else
  578. {
  579. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  580. } // FOUP EVENT
  581. break;
  582. case EfemOperation.GetWaferInfo:
  583. _LPMs[eArg.Module - ModuleName.LP1].HandleEvent(eArg);
  584. break;
  585. default:
  586. break;
  587. }
  588. }
  589. private void OnCommandUpdated(EfemMessage message)
  590. {
  591. if(_currentMsg.Operation != message.Operation)
  592. {
  593. return;
  594. }
  595. switch(message.Operation)
  596. {
  597. case EfemOperation.ClearError:
  598. case EfemOperation.Pick:
  599. case EfemOperation.Place:
  600. case EfemOperation.Extend:
  601. case EfemOperation.Goto:
  602. _status = RState.End;
  603. break;
  604. }
  605. }
  606. }
  607. }