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Framework
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4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
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1 anno fa |
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RecipeEditorControl
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3a078d515d
1.修复ui灯闪烁错误bug
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1 anno fa |
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ThirdParty
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49d9d6dd18
1、fixed ControlState Data;
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1 anno fa |
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Venus_Core
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 anno fa |
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Venus_MainPages
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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1 anno fa |
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Venus_RT
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16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.
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1 anno fa |
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Venus_Setup
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76a22f462f
1.根据tps提供sequence 添加控压功能
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1 anno fa |
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Venus_Simulator
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caba8d94c6
Duplicated Wafer UI显示
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1 anno fa |
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Venus_Themes
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 anno fa |
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Venus_UI
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 anno fa |
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packages
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34b0a3fbfa
1.添加recipe模块功能
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2 anni fa |
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Venus.sln
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caba8d94c6
Duplicated Wafer UI显示
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1 anno fa |
zhouhr
16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.