SimulatorSystem.cs 145 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. using MECF.Framework.Common.CommonData;
  15. using MECF.Framework.Common.DataCenter;
  16. using System.Configuration;
  17. namespace Venus_Simulator.Instances
  18. {
  19. public class SimulatorSystem : Singleton<SimulatorSystem>
  20. {
  21. private PeriodicJob _thread;
  22. private Random _rd = new Random();
  23. ConfigType type;
  24. private RD_TRIG _trigATM = new RD_TRIG();
  25. private RD_TRIG _trigVAC = new RD_TRIG();
  26. private R_TRIG _trigLLExtend = new R_TRIG();
  27. private R_TRIG _trigLLRetract = new R_TRIG();
  28. private static int count = 0;
  29. private readonly float ATM_THRESHOLD = 750000;
  30. private readonly float ATM_PRESSURE = 760000;
  31. //private readonly float ATM_LoadLock_PRESSURE = 760000;
  32. private readonly uint VAC_SW_PRESSURE = 9500;
  33. private readonly uint PROCESS_GAUGE = 10000;
  34. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  35. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  36. public SimulatorSystem()
  37. {
  38. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  39. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  40. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  41. // TODO
  42. var section = ConfigurationManager.GetSection("customSettings") as System.Collections.Specialized.NameValueCollection;
  43. type = (ConfigType)Convert.ToInt32(section["SimulatorType"]);
  44. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  45. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  46. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  47. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  48. }
  49. ~SimulatorSystem()
  50. {
  51. _thread?.Stop();
  52. }
  53. public void Initialize()
  54. {
  55. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  56. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  57. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  58. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  59. if (type == ConfigType.Kepler2200)
  60. {
  61. SetKepler2200TMDefaultValue();
  62. }
  63. else if (type == ConfigType.Kepler2300)
  64. {
  65. SetKepler2300TMDefaultValue();
  66. }
  67. else if (type == ConfigType.VenusSE)
  68. {
  69. SetSETMDefaultValue();
  70. }
  71. else if (type == ConfigType.VenusDE)
  72. {
  73. SetDETMDefaultValue();
  74. }
  75. Singleton<DataManager>.Instance.Initialize(false);
  76. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  77. }
  78. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  79. {
  80. switch (jetChamber)
  81. {
  82. case JetChamber.VenusSE:
  83. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  84. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  85. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  86. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  87. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  88. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  89. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  90. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  91. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  92. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  93. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  94. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  95. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  96. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  98. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  99. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  100. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  101. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  102. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  103. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  104. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  105. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  106. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  107. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  108. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  109. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  110. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  111. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  112. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  113. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  114. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  115. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  116. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  117. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  118. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  119. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  120. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  121. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  122. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  123. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  124. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  125. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  126. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  127. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  128. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  129. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  130. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  131. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  132. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  133. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  134. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  135. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  136. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  137. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  138. //// pressure
  139. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  140. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  141. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  142. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  143. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  144. //// Temperature
  145. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  146. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  147. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  148. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  149. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  150. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  151. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  152. // Datetime
  153. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  154. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  155. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  156. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  157. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  158. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  159. break;
  160. case JetChamber.VenusDE:
  161. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  162. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  163. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  164. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  165. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  166. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  167. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  168. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  169. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  170. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  171. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  172. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  173. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  174. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  175. IO.DI[$"{mod}.DI_ESC_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  176. IO.DI[$"{mod}.DI_Magnets_Coils_ON_FB"].Value = false;
  177. IO.DI[$"{mod}.DI_ESC_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  178. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  179. IO.DI[$"{mod}.DI_Process_Pressure_1t_Gauge_Alarm"].Value = false;
  180. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  181. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  182. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  183. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  184. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  185. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  186. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  187. //IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  188. //IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  189. //IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  190. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  191. //IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  192. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  195. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  196. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  197. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  198. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  199. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  200. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  201. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  202. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  203. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  204. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  205. IO.DI[$"{mod}.DI_He_Pressure_Switch"].Value = true;
  206. //IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  207. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  208. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  209. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  210. IO.DI[$"{mod}.DI_BIAS_RF_Water_Flow_Switch"].Value = true;
  211. IO.DI[$"{mod}.DI_CHB_Coolant_Flow_SW"].Value = true;
  212. //IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  213. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  214. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  215. //IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  216. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  217. //IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  218. //IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  219. //IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  220. //IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  221. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  222. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  223. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  224. IO.DI[$"{mod}.DI_MAGNET_BOX_FAN_OK"].Value = true;
  225. //// pressure
  226. SetAiValue($"{mod}.AI_Process_Pressure_1t", 100);
  227. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  228. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  229. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  230. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  231. //// Temperature
  232. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  233. //SetAiValue($"{mod}.AI_Gasline_Control_TC_Temp", 27);
  234. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  235. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 28);
  236. //SetAiValue($"{mod}.AI_Gasline_Monitor_TC_Temp", 27);
  237. SetAiValue($"{mod}.AI_CHB_Coolant_Inlet_Temp", 28);
  238. SetAiValue($"{mod}.AI_CHB_Coolant_Outlet_Temp", 27);
  239. SetAiValue($"{mod}.AI_ESC_Coolant_Inlet_Temp", 28);
  240. SetAiValue($"{mod}.AI_ESC_Coolant_Outlet_Temp", 28);
  241. // Datetime
  242. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  243. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  244. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  245. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  246. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  247. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  248. break;
  249. case JetChamber.Kepler2300:
  250. // chamber
  251. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  252. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  253. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  254. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  255. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  256. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  257. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  258. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  259. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  260. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  261. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  262. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  264. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  265. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  266. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  267. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  270. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  271. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  272. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  273. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  274. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  275. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  276. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  277. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  278. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  279. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  280. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  281. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  282. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  283. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  284. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  285. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  286. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  287. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  288. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  289. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  290. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  291. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  292. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  293. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  294. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  295. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  296. //// pressure
  297. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  298. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  299. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  300. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  301. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  302. //// Temperature
  303. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  304. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  305. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  306. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  307. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  308. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  309. // Datetime
  310. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  311. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  312. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  313. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  314. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  315. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  316. break;
  317. case JetChamber.Kepler2200A:
  318. case JetChamber.Kepler2200B:
  319. if (jetChamber == JetChamber.Kepler2200B)
  320. {
  321. IO.DI[$"{mod}.DI_RF_Box_Interlock"].Value = true;
  322. }
  323. IO.DI[$"{mod}.DI_Wafer_Transfer_Posi_SW"].Value = true;
  324. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  325. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  326. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  327. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  328. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  329. IO.DI[$"{mod}.DI_Source_RF_Match_Interlock"].Value = true;
  330. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  331. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  332. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  333. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  334. IO.DI[$"{mod}.DI_TOP_Shield_Cover_closed"].Value = true;
  335. IO.DI[$"{mod}.DI_CHB_M-HT_Control_TC_Broken_Alarm"].Value = false;
  336. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = false;
  337. IO.DI[$"{mod}.DI_CHB_M-HT_OT_Switch_Alarm"].Value = false;
  338. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  339. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  340. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  341. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  342. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  343. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  344. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  345. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  346. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  347. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  348. IO.DI[$"{mod}.DI_GasBox_N2_Flow_Switch"].Value = true;
  349. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  350. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  351. //IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  352. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  353. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  354. //IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  355. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  356. IO.DI[$"{mod}.DI_CHB_Water_Flow_Switch"].Value = true;
  357. IO.DI[$"{mod}.DI_SCRUBBER_OK"].Value = true;
  358. //IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  359. //// pressure
  360. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 100);
  361. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 100);
  362. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  363. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  364. //// Temperature
  365. // SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  366. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", 28);
  367. SetAiValue($"{mod}.AI_Penning_Gauge_Pressure1", 100);
  368. // Datetime
  369. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  370. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  371. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  372. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  373. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  374. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  375. break;
  376. }
  377. }
  378. private void SetKepler2200TMDefaultValue()
  379. {
  380. ModuleName mod = ModuleName.TM;
  381. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  383. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  384. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  385. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  386. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  387. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  388. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  389. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  390. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  391. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  392. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  393. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  394. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  395. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  396. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  397. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  398. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  399. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  400. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  401. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  402. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  403. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  404. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  405. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  406. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  407. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  408. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  409. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  410. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  411. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  412. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  413. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  414. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  415. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  416. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  417. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  418. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  419. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  420. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  421. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  422. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  423. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  424. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  425. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  426. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  427. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  428. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  429. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  430. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  431. // Datetime
  432. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  433. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  434. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  435. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  436. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  437. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  438. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  439. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  440. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  441. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  442. {
  443. SetAiValue($"{mod}.AI_TM_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  444. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  445. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", ConvertPressureUnit.ConvertmTorrToPa(760000));
  446. }
  447. else
  448. {
  449. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 666);
  450. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 666);
  451. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 666);
  452. }
  453. }
  454. private void SetKepler2300TMDefaultValue()
  455. {
  456. ModuleName mod = ModuleName.TM;
  457. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  458. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  459. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  460. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  461. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  462. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  463. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  464. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  465. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  466. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  467. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  468. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  469. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  470. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  471. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  472. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  473. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  474. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  475. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  476. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  477. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  478. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  479. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  480. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  481. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  482. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  483. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  484. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  485. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  486. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  487. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  488. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  489. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  490. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  491. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  492. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  493. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  494. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = false;
  495. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = false;
  496. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = false;
  497. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = false;
  498. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = false;
  499. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = false;
  500. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  501. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  502. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  503. IO.DI[$"{mod}.DI_PMA_Lid_Closed"].Value = true;
  504. IO.DI[$"{mod}.DI_PMB_Lid_Closed"].Value = true;
  505. IO.DI[$"{mod}.DI_PMC_Lid_Closed"].Value = true;
  506. IO.DI[$"{mod}.DI_PMD_Lid_Closed"].Value = true;
  507. // Datetime
  508. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  509. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  510. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  511. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  512. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  513. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  514. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 100);
  515. SetAiValue($"{mod}.AI_LLA_Foreline_Pressure", 150);
  516. SetAiValue($"{mod}.AI_LLB_Foreline_Pressure", 200);
  517. if (SystemConfig.Instance.GetValue<bool>("System.IsATMMode"))
  518. {
  519. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  520. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 760000);
  521. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 760000);
  522. }
  523. else
  524. {
  525. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 5000);
  526. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  527. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  528. }
  529. }
  530. private void SetSETMDefaultValue()
  531. {
  532. string mod = "SETM";
  533. IO.DI[$"{mod}.DI_System_CDA_Pressure_OK"].Value = true;
  534. IO.DI[$"{mod}.DI_LID_DOOR_CLOSED"].Value = true;
  535. IO.DI[$"{mod}.DI_VCE_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  536. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  537. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  538. IO.DI[$"{mod}.DI_VCE_ATM_SW"].Value = true;
  539. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  540. IO.DI[$"{mod}.DI_VCE_Wafer_Senser"].Value = true;
  541. IO.DI[$"{mod}.DI_PMA_Wafer_Senser"].Value = true;
  542. IO.DI[$"{mod}.DI_PMB_Wafer_Senser"].Value = true;
  543. IO.DI[$"{mod}.DI_PMC_Wafer_Senser"].Value = true;
  544. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  545. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW1"].Value = false;
  546. IO.DI[$"{mod}.DI_AC_RACK_Smoke_SW2"].Value = false;
  547. IO.DI[$"{mod}.DI_FA_Smoke_SW"].Value = false;
  548. IO.DI[$"{mod}.DI_Gas_Treatment_Alarm"].Value = false;
  549. IO.DI[$"{mod}.DI_SYSTEM_N2_Pressure_SW"].Value = true;
  550. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  551. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  552. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  553. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  554. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  555. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  556. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  557. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  558. IO.DI[$"{mod}.DI_TM_HE_Pressure_SW"].Value = true;
  559. IO.DI[$"{mod}.DI_TM_N2_Pressure_SW"].Value = true;
  560. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  561. IO.DI[$"{mod}.DI_PCW_Leak_SW"].Value = true;
  562. IO.DI[$"{mod}.DI_TM_CDA_Pressure_SW"].Value = true;
  563. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = false;
  564. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = false;
  565. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_VCE"].Value = true;
  566. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMA"].Value = true;
  567. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMB"].Value = true;
  568. IO.DI[$"{mod}.DI_TM_ROBOT_NOT_EXTEND_PMC"].Value = true;
  569. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  570. SetAiValue($"{mod}.AI_VCE_Pressure", 3000);
  571. SetAiValue($"{mod}.AI_Foreline_Pressure", 3000);
  572. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  573. }
  574. private void SetDETMDefaultValue()
  575. {
  576. string mod = "DETM";
  577. IO.DI[$"{mod}.DI_Smif1_Ready_to_load"].Value = true;
  578. IO.DI[$"{mod}.DI_Smif1_Ready_to_unload"].Value = true;
  579. IO.DI[$"{mod}.DI_Smif2_Ready_to_load"].Value = true;
  580. IO.DI[$"{mod}.DI_Smif2_Ready_to_unload"].Value = true;
  581. IO.DI[$"{mod}.DI_PMA_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  582. IO.DI[$"{mod}.DI_PMB_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  583. IO.DI[$"{mod}.DI_PMC_SLIT_DOOR_OPEN_ENABLE"].Value = true;
  584. IO.DI[$"{mod}.DI_ROBOT_TO_VCEA_RETRACT"].Value = true;
  585. IO.DI[$"{mod}.DI_ROBOT_TO_VCEB_RETRACT"].Value = true;
  586. IO.DI[$"{mod}.DI_ROBOT_TO_PMA_RETRACT"].Value = true;
  587. IO.DI[$"{mod}.DI_ROBOT_TO_PMB_RETRACT"].Value = true;
  588. IO.DI[$"{mod}.DI_ROBOT_TO_PMC_RETRACT"].Value = true;
  589. IO.DI[$"{mod}.DI_ROBOT_TO_PMD_RETRACT"].Value = true;
  590. IO.DI[$"{mod}.DI_VCEA_Wafer_Sensor"].Value = true;
  591. IO.DI[$"{mod}.DI_VCEB_Wafer_Sensor"].Value = true;
  592. IO.DI[$"{mod}.DI_PMA_Wafer_Sensor"].Value = true;
  593. IO.DI[$"{mod}.DI_PMB_Wafer_Sensor"].Value = true;
  594. IO.DI[$"{mod}.DI_PMC_Wafer_Sensor"].Value = true;
  595. IO.DI[$"{mod}.DI_PMD_Wafer_Sensor"].Value = true;
  596. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  597. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  598. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  599. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  600. IO.DI[$"{mod}.DI_TM_N2_1_SW"].Value = true;
  601. IO.DI[$"{mod}.DI_TM_N2_2_SW"].Value = true;
  602. IO.DI[$"{mod}.DI_TM_CDA_SW"].Value = true;
  603. IO.DI[$"{mod}.DI_TM_He_SW"].Value = true;
  604. IO.DI[$"{mod}.DI_LEAK"].Value = true;
  605. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = true;
  606. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = true;
  607. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = true;
  608. IO.DI[$"{mod}.DI_AC_RACK_FAN_OK"].Value = true;
  609. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out1"].Value = false;
  610. IO.DI[$"{mod}.DI_AC_RACK_SMOKE_Out2"].Value = false;
  611. IO.DI[$"{mod}.DI_FACTORY_SMOKE_Out"].Value = false;
  612. IO.DI[$"{mod}.DI_Abnormal_Exhaust_Gas"].Value = true;
  613. IO.DI[$"{mod}.DI_VCEA_Cassette_Present"].Value = true;
  614. IO.DI[$"{mod}.DI_VCEB_Cassette_Present"].Value = true;
  615. IO.DI[$"{mod}.DI_VCEA_ADR_LOCKED"].Value = true;
  616. IO.DI[$"{mod}.DI_VCEB_ADR_LOCKED"].Value = true;
  617. IO.DI[$"{mod}.DI_TM_LID_Close"].Value = true;
  618. IO.DI[$"{mod}.DI_LEFT_SMIF_READY"].Value = true;
  619. IO.DI[$"{mod}.DI_LEFT_SMIF_POD_INPLACE"].Value = true;
  620. IO.DI[$"{mod}.DI_RIGHT_SMIF_POD_INPLACE"].Value = true;
  621. IO.DI[$"{mod}.DI_LEFT_SMIF_ERROR"].Value = true;
  622. IO.DI[$"{mod}.DI_RIGHT_SMIF_ERROR"].Value = true;
  623. IO.DI[$"{mod}.DI_VCEA_EXTEND_ENABLE"].Value = true;
  624. IO.DI[$"{mod}.DI_VCEB_EXTEND_ENABLE"].Value = true;
  625. IO.DI[$"{mod}.DI_PMA_EXTEND_ENABLE"].Value = true;
  626. IO.DI[$"{mod}.DI_PMB_EXTEND_ENABLE"].Value = true;
  627. IO.DI[$"{mod}.DI_PMC_EXTEND_ENABLE"].Value = true;
  628. IO.DI[$"{mod}.DI_EMO"].Value = false;
  629. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  630. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  631. SetAiValue($"{mod}.AI_MFC_Flow", 3000);
  632. SetAiValue($"{mod}.AI_Left_VCE_Pressure", 3000);
  633. SetAiValue($"{mod}.AI_Right_VCE_Pressure", 3000);
  634. SetAiValue($"{mod}.AI_VCE_Foreline_Pressure", 20);
  635. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 20);
  636. SetAiValue($"{mod}.AI_TM_Pressure", 20);
  637. }
  638. private bool OnMonitor()
  639. {
  640. try
  641. {
  642. foreach (var item in jetChambers)
  643. {
  644. switch (item.Value)
  645. {
  646. case JetChamber.Kepler2300:
  647. MonitorSlitDoorInTM(item.Key);
  648. MonitorPin(item.Key);
  649. MonitorPressure_Kepler(item.Key);
  650. //MonitorTemperature(item.Key);
  651. MonitorGas(item.Key);
  652. this.SimulateHe(item.Key);
  653. //MonitorRF(item.Key);
  654. ChangeTime(item.Key);
  655. //MonitorIOPumpCtrl(item.Key);
  656. MonitorLid(item.Key);
  657. break;
  658. case JetChamber.Kepler2200A:
  659. case JetChamber.Kepler2200B:
  660. MonitorSlitDoorInTM(item.Key);
  661. MonitorPressure_Kepler2200(item.Key);
  662. //MonitorTemperature(item.Key);
  663. MonitorGas(item.Key);
  664. MonitorKeplerTMGas();
  665. // MonitorRF(item.Key);
  666. ChangeTime(item.Key);
  667. //MonitorIOPumpCtrl(item.Key);
  668. MonitorLid(item.Key);
  669. MonitorIOHighTemperatureHeater(item.Key);
  670. MonitorKepler2200Heater(item.Key);
  671. break;
  672. case JetChamber.VenusSE:
  673. MonitorPin(item.Key);
  674. //MonitorVenuSESlitDoor(item.Key);
  675. MonitorSEPressure(item.Key);
  676. MonitorSEGas(item.Key);
  677. ChangeTime(item.Key);
  678. this.SimulateSEHe(item.Key);
  679. break;
  680. case JetChamber.VenusDE:
  681. MonitorPin(item.Key);
  682. MonitorDEGas(item.Key);
  683. //MonitorVenuDESlitDoor(item.Key);
  684. MonitorDEPressure(item.Key);
  685. ChangeTime(item.Key);
  686. MonitorLinerDoor(item.Key);
  687. this.SimulateDEHe(item.Key);
  688. break;
  689. }
  690. }
  691. //ChangeTime(ModuleName.TM);
  692. if (type == ConfigType.Kepler2200)
  693. {
  694. ChangeTime(ModuleName.TM);
  695. MonitorMFSlitDoor();
  696. MonitorMFKepler2200Pressure();
  697. }
  698. else if (type == ConfigType.Kepler2300)
  699. {
  700. ChangeTime(ModuleName.TM);
  701. MonitorMFSlitDoor();
  702. MonitorMFKepler2300Pressure();
  703. }
  704. else if (type == ConfigType.VenusSE)
  705. {
  706. MonitorSEMFSlitDoor();
  707. MonitorSEMFPressure();
  708. //MonitorDEMFSlitDoor();
  709. //MonitorDEMFPressure();
  710. }
  711. else if (type == ConfigType.VenusDE)
  712. {
  713. MonitorDEMFSlitDoor();
  714. MonitorDEMFPressure();
  715. }
  716. }
  717. catch (Exception e)
  718. {
  719. LOG.WriteExeption(e);
  720. }
  721. return true;
  722. }
  723. private void ChangeTime(ModuleName mod)
  724. {
  725. // Heartbeat with PLC
  726. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  727. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  728. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  729. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  730. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  731. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  732. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  733. }
  734. //void MonitorVenuSESlitDoor(ModuleName mod)
  735. //{
  736. //}
  737. void MonitorSlitDoorInPM(ModuleName mod)
  738. {
  739. // slit door open
  740. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  741. {
  742. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  743. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  744. }
  745. // slit door close
  746. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  747. {
  748. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  749. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  750. }
  751. }
  752. void MonitorLinerDoor(ModuleName mod)
  753. {
  754. // slit door open
  755. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Open"].Value)
  756. {
  757. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = true;
  758. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = false;
  759. }
  760. // slit door close
  761. if (IO.DO[$"{mod}.DO_PM_Liner_Door_Close"].Value)
  762. {
  763. IO.DI[$"{mod}.DI_Liner_Door_Open_Position"].Value = false;
  764. IO.DI[$"{mod}.DI_Liner_Door_Close_Position"].Value = true;
  765. }
  766. }
  767. void MonitorSlitDoorInTM(ModuleName mod)
  768. {
  769. // slit door open
  770. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Open"].Value)
  771. {
  772. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  773. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  774. }
  775. // slit door close
  776. if (IO.DO[$"TM.DO_{mod}_SlitDoor_Close"].Value)
  777. {
  778. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  779. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  780. }
  781. }
  782. void MonitorMFSlitDoor()
  783. {
  784. ModuleName mod = ModuleName.TM;
  785. // LLA T door open
  786. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  787. {
  788. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  789. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  790. }
  791. // LLB T door open
  792. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  793. {
  794. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  795. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  796. }
  797. // LLA E door open
  798. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  799. {
  800. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  801. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  802. }
  803. // LLB E door open
  804. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  805. {
  806. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  807. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  808. }
  809. // LLA T door close
  810. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  811. {
  812. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  813. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  814. }
  815. // LLB T door close
  816. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  817. {
  818. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  819. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  820. }
  821. // LLA E door close
  822. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  823. {
  824. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  825. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  826. }
  827. // LLB E door close
  828. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  829. {
  830. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  831. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  832. }
  833. // PMA slitdoor door close/open
  834. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  835. {
  836. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = false;
  837. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = true;
  838. }
  839. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  840. {
  841. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_Position"].Value = true;
  842. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_Position"].Value = false;
  843. }
  844. // PMB slitdoor door close/open
  845. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  846. {
  847. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = false;
  848. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = true;
  849. }
  850. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  851. {
  852. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_Position"].Value = true;
  853. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_Position"].Value = false;
  854. }
  855. // PMC slitdoor door close/open
  856. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  857. {
  858. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = false;
  859. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = true;
  860. }
  861. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  862. {
  863. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_Position"].Value = true;
  864. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_Position"].Value = false;
  865. }
  866. // PMD slitdoor door close/open
  867. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  868. {
  869. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = false;
  870. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = true;
  871. }
  872. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  873. {
  874. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_Position"].Value = true;
  875. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_Position"].Value = false;
  876. }
  877. }
  878. void MonitorSEMFSlitDoor()
  879. {
  880. string mod = "SETM";
  881. // VCE T door open
  882. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Open"].Value)
  883. {
  884. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = true;
  885. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = false;
  886. }
  887. // VCE T door Close
  888. if (IO.DO[$"{mod}.DO_VCE_Slit_Door_Close"].Value)
  889. {
  890. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Open_Pos"].Value = false;
  891. IO.DI[$"{mod}.DI_VCE_TM_Slit_Door_Close_Pos"].Value = true;
  892. }
  893. //pma
  894. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Open"].Value)
  895. {
  896. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = true;
  897. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = false;
  898. }
  899. if (IO.DO[$"{mod}.DO_PMA_Slit_Door_Close"].Value)
  900. {
  901. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Open_Pos"].Value = false;
  902. IO.DI[$"{mod}.DI_TM_PMA_Slit_Door_Close_Pos"].Value = true;
  903. }
  904. //pmb
  905. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Open"].Value)
  906. {
  907. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = true;
  908. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = false;
  909. }
  910. if (IO.DO[$"{mod}.DO_PMB_Slit_Door_Close"].Value)
  911. {
  912. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Open_Pos"].Value = false;
  913. IO.DI[$"{mod}.DI_TM_PMB_Slit_Door_Close_Pos"].Value = true;
  914. }
  915. //pmc
  916. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Open"].Value)
  917. {
  918. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = true;
  919. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = false;
  920. }
  921. if (IO.DO[$"{mod}.DO_PMC_Slit_Door_Close"].Value)
  922. {
  923. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Open_Pos"].Value = false;
  924. IO.DI[$"{mod}.DI_TM_PMC_Slit_Door_Close_Pos"].Value = true;
  925. }
  926. }
  927. void MonitorDEMFSlitDoor()
  928. {
  929. string mod = "DETM";
  930. // VCE L door open
  931. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Open"].Value)
  932. {
  933. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = true;
  934. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = false;
  935. }
  936. // VCE R door open
  937. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Open"].Value)
  938. {
  939. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = true;
  940. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = false;
  941. }
  942. // VCE L door Close
  943. if (IO.DO[$"{mod}.DO_VCEA_SlitDoor_Close"].Value)
  944. {
  945. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Open_POS"].Value = false;
  946. IO.DI[$"{mod}.DI_VCEA_SlitDoor_Close_POS"].Value = true;
  947. }
  948. // VCE R door Close
  949. if (IO.DO[$"{mod}.DO_VCEB_SlitDoor_Close"].Value)
  950. {
  951. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Open_POS"].Value = false;
  952. IO.DI[$"{mod}.DI_VCEB_SlitDoor_Close_POS"].Value = true;
  953. }
  954. //pma
  955. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Open"].Value)
  956. {
  957. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = true;
  958. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = false;
  959. }
  960. if (IO.DO[$"{mod}.DO_PMA_SlitDoor_Close"].Value)
  961. {
  962. IO.DI[$"{mod}.DI_PMA_SlitDoor_Open_POS"].Value = false;
  963. IO.DI[$"{mod}.DI_PMA_SlitDoor_Close_POS"].Value = true;
  964. }
  965. //pmb
  966. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Open"].Value)
  967. {
  968. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = true;
  969. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = false;
  970. }
  971. if (IO.DO[$"{mod}.DO_PMB_SlitDoor_Close"].Value)
  972. {
  973. IO.DI[$"{mod}.DI_PMB_SlitDoor_Open_POS"].Value = false;
  974. IO.DI[$"{mod}.DI_PMB_SlitDoor_Close_POS"].Value = true;
  975. }
  976. //pmc
  977. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Open"].Value)
  978. {
  979. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = true;
  980. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = false;
  981. }
  982. if (IO.DO[$"{mod}.DO_PMC_SlitDoor_Close"].Value)
  983. {
  984. IO.DI[$"{mod}.DI_PMC_SlitDoor_Open_POS"].Value = false;
  985. IO.DI[$"{mod}.DI_PMC_SlitDoor_Close_POS"].Value = true;
  986. }
  987. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Open"].Value)
  988. {
  989. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = true;
  990. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = false;
  991. }
  992. if (IO.DO[$"{mod}.DO_PMD_SlitDoor_Close"].Value)
  993. {
  994. IO.DI[$"{mod}.DI_PMD_SlitDoor_Open_POS"].Value = false;
  995. IO.DI[$"{mod}.DI_PMD_SlitDoor_Close_POS"].Value = true;
  996. }
  997. if (IO.DO[$"{mod}.DO_TM_Soft_Pump"].Value)
  998. {
  999. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = true;
  1000. }
  1001. else
  1002. {
  1003. IO.DI[$"{mod}.DI_TM_Soft_Pump"].Value = false;
  1004. }
  1005. if (IO.DO[$"{mod}.DO_TM_Fast_Pump"].Value)
  1006. {
  1007. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = true;
  1008. }
  1009. else
  1010. {
  1011. IO.DI[$"{mod}.DI_TM_Fast_Pump"].Value = false;
  1012. }
  1013. if (IO.DO[$"{mod}.DO_TM_Soft_Vent"].Value)
  1014. {
  1015. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = true;
  1016. }
  1017. else
  1018. {
  1019. IO.DI[$"{mod}.DI_TM_Soft_Vent"].Value = false;
  1020. }
  1021. }
  1022. void MonitorPin(ModuleName mod)
  1023. {
  1024. // lift pin up
  1025. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  1026. {
  1027. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  1028. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  1029. }
  1030. }
  1031. void MonitorLid(ModuleName mod)
  1032. {
  1033. // lift pin up
  1034. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  1035. {
  1036. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  1037. }
  1038. }
  1039. void MonitorExtendAndRetract(ModuleName mod)
  1040. {
  1041. // Extend
  1042. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  1043. if (_trigLLExtend.Q)
  1044. {
  1045. _trigLLRetract.RST = true;
  1046. Thread.Sleep(500);
  1047. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  1048. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  1049. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1050. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1051. }
  1052. // Retract
  1053. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  1054. if (_trigLLRetract.Q)
  1055. {
  1056. count++;
  1057. _trigLLExtend.RST = true;
  1058. Thread.Sleep(500);
  1059. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  1060. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  1061. if (count == 1)
  1062. {
  1063. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  1064. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1065. }
  1066. else if (count == 2)
  1067. {
  1068. count = 0;
  1069. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  1070. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  1071. }
  1072. }
  1073. }
  1074. void MonitorPressure(ModuleName mod)
  1075. {
  1076. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  1077. // Loadlock pressure
  1078. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  1079. // Foreline
  1080. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1081. {
  1082. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1083. }
  1084. else
  1085. {
  1086. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1087. }
  1088. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1089. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1090. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1091. //float chamber_pressure = GetMockChamberPressure(mod);
  1092. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1093. // soft pump & fast pump
  1094. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1095. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1096. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1097. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1098. {
  1099. //任意泵打开
  1100. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1101. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1102. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1103. {//开双泵
  1104. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1105. {
  1106. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1107. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1108. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1109. }
  1110. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1111. {
  1112. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1113. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1114. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1115. }
  1116. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1117. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1118. }
  1119. else if (fast_pump_vlv.Value)//开
  1120. {
  1121. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1122. {
  1123. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1124. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1125. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1126. }
  1127. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1128. {
  1129. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1130. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1131. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1132. }
  1133. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1134. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1135. }
  1136. else if (soft_pump_vlv.Value)
  1137. {
  1138. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1139. {
  1140. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1141. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1142. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1143. }
  1144. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1145. {
  1146. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1147. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1148. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1149. }
  1150. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1151. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1152. }
  1153. else if (turbo_pump_vlv.Value)
  1154. {
  1155. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1156. if ((getAiValue_ChamberPressure - 500) >= 0)
  1157. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1158. else
  1159. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1160. if ((getAiValue_ProcessPressure - 500) >= 0)
  1161. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1162. else
  1163. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1164. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1165. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1166. }
  1167. }
  1168. // fast vent & purge
  1169. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1170. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  1171. //if (vent_vlv.Value || purge_vlv.Value)
  1172. //{
  1173. // if (vent_vlv.Value && purge_vlv.Value)
  1174. // {
  1175. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1176. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1177. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1178. // {
  1179. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  1180. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1181. // }
  1182. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1183. // {
  1184. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1185. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1186. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  1187. // }
  1188. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  1189. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  1190. // }
  1191. // else
  1192. //
  1193. if (vent_vlv.Value)
  1194. {
  1195. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1196. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1197. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1198. {
  1199. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1200. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1201. }
  1202. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1203. {
  1204. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1205. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1206. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1207. }
  1208. else
  1209. {
  1210. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1211. }
  1212. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1213. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1214. }
  1215. // Loadlock Pumping Valve
  1216. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  1217. if (Loadlock_pump_vlv.Value)
  1218. {
  1219. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  1220. }
  1221. // Loadlock vent
  1222. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  1223. if (Loadlock_vent_vlv.Value)
  1224. {
  1225. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  1226. }
  1227. // 压力值越界,复位
  1228. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1229. if (chamber_pressure1 > ATM_PRESSURE)
  1230. {
  1231. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1232. }
  1233. else if (chamber_pressure1 < 20)
  1234. {
  1235. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1236. }
  1237. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1238. if (process_pressure1 > PROCESS_GAUGE)
  1239. {
  1240. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1241. }
  1242. else if (process_pressure1 < 20)
  1243. {
  1244. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1245. }
  1246. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1247. if (foreline_pressure > 10000)
  1248. {
  1249. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  1250. }
  1251. else if (foreline_pressure < 150)
  1252. {
  1253. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  1254. }
  1255. // 模拟压力计漂移
  1256. //int p1 = (int)GetMockChamberPressure(mod);
  1257. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  1258. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  1259. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  1260. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  1261. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  1262. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1263. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  1264. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  1265. // 根据当前压力值设定信号
  1266. //float chamber_pressure2 = GetMockChamberPressure(mod);
  1267. // ATM switch
  1268. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1269. // VAC switch
  1270. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1271. // Throttle valve
  1272. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  1273. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  1274. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  1275. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  1276. // 压力值
  1277. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1278. //{
  1279. // short increase = (short)_rd.Next(20, 30);
  1280. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  1281. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1282. // {
  1283. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1284. // }
  1285. //}
  1286. //else
  1287. //{
  1288. // short increase = (short)_rd.Next(20, 30);
  1289. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  1290. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  1291. // {
  1292. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  1293. // }
  1294. //}
  1295. //// 位置值
  1296. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1297. //{
  1298. // short increase = (short)_rd.Next(20, 30);
  1299. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  1300. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1301. // {
  1302. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1303. // }
  1304. //}
  1305. //else
  1306. //{
  1307. // short increase = (short)_rd.Next(20, 30);
  1308. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  1309. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  1310. // {
  1311. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  1312. // }
  1313. //}
  1314. }
  1315. void MonitorSEPressure(ModuleName mod)
  1316. {
  1317. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1318. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1319. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1320. // Foreline
  1321. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1322. {
  1323. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1324. }
  1325. else
  1326. {
  1327. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1328. }
  1329. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1330. // soft pump & fast pump
  1331. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1332. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1333. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1334. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1335. {
  1336. //任意泵打开
  1337. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1338. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1339. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1340. {//开双泵
  1341. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1342. {
  1343. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1344. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1345. }
  1346. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1347. {
  1348. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1349. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1350. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1351. }
  1352. }
  1353. else if (fast_pump_vlv.Value)//开
  1354. {
  1355. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1356. {
  1357. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1358. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1359. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1360. }
  1361. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1362. {
  1363. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1364. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1365. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1366. }
  1367. }
  1368. else if (soft_pump_vlv.Value)
  1369. {
  1370. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1371. {
  1372. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1373. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1374. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1375. }
  1376. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1377. {
  1378. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1379. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1380. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1381. }
  1382. }
  1383. else if (turbo_pump_vlv.Value)
  1384. {
  1385. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1386. if ((getAiValue_ChamberPressure - 500) >= 0)
  1387. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1388. else
  1389. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1390. if ((getAiValue_ProcessPressure - 500) >= 0)
  1391. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1392. else
  1393. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1394. }
  1395. }
  1396. // fast vent & purge
  1397. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1398. if (vent_vlv.Value)
  1399. {
  1400. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1401. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1402. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1403. {
  1404. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1405. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1406. }
  1407. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1408. {
  1409. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1410. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1411. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1412. }
  1413. else
  1414. {
  1415. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1416. }
  1417. }
  1418. // Loadlock Pumping Valve
  1419. // 压力值越界,复位
  1420. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1421. if (chamber_pressure1 > ATM_PRESSURE)
  1422. {
  1423. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1424. }
  1425. else if (chamber_pressure1 < 20)
  1426. {
  1427. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1428. }
  1429. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1430. if (process_pressure1 > PROCESS_GAUGE)
  1431. {
  1432. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1433. }
  1434. else if (process_pressure1 < 20)
  1435. {
  1436. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1437. }
  1438. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1439. if (foreline_pressure > 1999)
  1440. {
  1441. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1999);
  1442. }
  1443. else if (foreline_pressure < 150)
  1444. {
  1445. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1446. }
  1447. // ATM switch
  1448. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1449. // VAC switch
  1450. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1451. }
  1452. void MonitorDEPressure(ModuleName mod)
  1453. {
  1454. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1455. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1456. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1457. // Foreline
  1458. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1459. {
  1460. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1461. }
  1462. else
  1463. {
  1464. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1465. }
  1466. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1467. // soft pump & fast pump
  1468. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1469. //DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1470. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1471. if (fast_pump_vlv.Value || turbo_pump_vlv.Value)
  1472. {
  1473. //任意泵打开
  1474. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1475. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1476. if (fast_pump_vlv.Value)
  1477. {//开双泵
  1478. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1479. {
  1480. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1481. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1482. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1483. }
  1484. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1485. {
  1486. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1487. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1488. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1489. }
  1490. }
  1491. else if (turbo_pump_vlv.Value)
  1492. {
  1493. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1494. if ((getAiValue_ChamberPressure - 500) >= 0)
  1495. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1496. else
  1497. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1498. if ((getAiValue_ProcessPressure - 500) >= 0)
  1499. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1500. else
  1501. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1502. }
  1503. }
  1504. // fast vent & purge
  1505. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1506. if (vent_vlv.Value)
  1507. {
  1508. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1509. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1510. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1511. {
  1512. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1513. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1514. }
  1515. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1516. {
  1517. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1518. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1519. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1520. }
  1521. else
  1522. {
  1523. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1524. }
  1525. }
  1526. // Loadlock Pumping Valve
  1527. // 压力值越界,复位
  1528. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1529. if (chamber_pressure1 > ATM_PRESSURE)
  1530. {
  1531. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1532. }
  1533. else if (chamber_pressure1 < 20)
  1534. {
  1535. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5);
  1536. }
  1537. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1538. if (process_pressure1 > PROCESS_GAUGE)
  1539. {
  1540. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1541. }
  1542. else if (process_pressure1 < 20)
  1543. {
  1544. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 5);
  1545. }
  1546. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1547. if (foreline_pressure > 10000)
  1548. {
  1549. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1550. }
  1551. else if (foreline_pressure < 150)
  1552. {
  1553. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1554. }
  1555. // ATM switch
  1556. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1557. // VAC switch
  1558. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1559. }
  1560. void MonitorPressure_Kepler(ModuleName mod)
  1561. {
  1562. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1563. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1564. {
  1565. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1566. }
  1567. else
  1568. {
  1569. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1570. }
  1571. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1572. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1573. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1574. //float chamber_pressure = GetMockChamberPressure(mod);
  1575. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1576. // soft pump & fast pump
  1577. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1578. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1579. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1580. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1581. {
  1582. //任意泵打开
  1583. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1584. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1585. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1586. {//开双泵
  1587. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1588. {
  1589. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  1590. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1591. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1592. }
  1593. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1594. {
  1595. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  1596. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1597. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1598. }
  1599. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1600. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1601. }
  1602. else if (fast_pump_vlv.Value)//开
  1603. {
  1604. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1605. {
  1606. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  1607. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1608. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1609. }
  1610. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1611. {
  1612. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  1613. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1614. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1615. }
  1616. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1617. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1618. }
  1619. else if (soft_pump_vlv.Value)
  1620. {
  1621. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1622. {
  1623. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  1624. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1625. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1626. }
  1627. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1628. {
  1629. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  1630. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1631. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1632. }
  1633. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1634. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1635. }
  1636. else if (turbo_pump_vlv.Value)
  1637. {
  1638. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1639. if ((getAiValue_ChamberPressure - 500) >= 0)
  1640. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  1641. else
  1642. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1643. if ((getAiValue_ProcessPressure - 500) >= 0)
  1644. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1645. else
  1646. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  1647. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1648. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1649. }
  1650. }
  1651. // fast vent & purge
  1652. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1653. if (vent_vlv.Value)
  1654. {
  1655. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1656. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1657. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1658. {
  1659. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1660. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1661. }
  1662. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1663. {
  1664. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1665. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1666. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1667. }
  1668. else
  1669. {
  1670. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1671. }
  1672. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1673. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1674. }
  1675. // Loadlock Pumping Valve
  1676. // 压力值越界,复位
  1677. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1678. if (chamber_pressure1 > ATM_PRESSURE)
  1679. {
  1680. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1681. }
  1682. else if (chamber_pressure1 < 20)
  1683. {
  1684. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 1);
  1685. }
  1686. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1687. if (process_pressure1 > PROCESS_GAUGE)
  1688. {
  1689. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1690. }
  1691. else if (process_pressure1 < 20)
  1692. {
  1693. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1694. }
  1695. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1696. if (foreline_pressure > 10000)
  1697. {
  1698. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1699. }
  1700. else if (foreline_pressure < 150)
  1701. {
  1702. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1703. }
  1704. // ATM switch
  1705. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1706. // VAC switch
  1707. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1708. }
  1709. void MonitorPressure_Kepler2200(ModuleName mod)
  1710. {
  1711. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1712. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1713. {
  1714. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(50, 60));
  1715. }
  1716. else
  1717. {
  1718. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(50, 60));
  1719. }
  1720. //SetAiValue($"{mod}.{sAI_Foreline}", 3000);
  1721. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1722. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1723. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1724. //float chamber_pressure = GetMockChamberPressure(mod);
  1725. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1726. // soft pump & fast pump
  1727. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1728. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1729. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1730. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1731. {
  1732. //任意泵打开
  1733. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1734. //float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1735. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1736. {
  1737. //开双泵
  1738. if ((getAiValue_ChamberPressure - 12000) >= 0)
  1739. {
  1740. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 12000);
  1741. }
  1742. else
  1743. {
  1744. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1745. }
  1746. //if (getAiValue_ChamberPressure > 1000)
  1747. //{
  1748. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa( getAiValue_ChamberPressure - 3000 > 0 ? getAiValue_ChamberPressure - 3000 : 0);
  1749. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1750. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1751. //}
  1752. //else if ( getAiValue_ChamberPressure <= 1000)
  1753. //{
  1754. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 150 > 0 ? getAiValue_ProcessPressure - 150 : 0);
  1755. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1756. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1757. //}
  1758. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1759. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1760. }
  1761. else if (fast_pump_vlv.Value)//开
  1762. {
  1763. if ((getAiValue_ChamberPressure - 8000) >= 0)
  1764. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 8000);
  1765. else
  1766. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1767. }
  1768. else if (soft_pump_vlv.Value)
  1769. {
  1770. if ((getAiValue_ChamberPressure - 4000) >= 0)
  1771. {
  1772. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 4000);
  1773. }
  1774. else
  1775. {
  1776. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1777. }
  1778. //if (getAiValue_ChamberPressure > 5000)
  1779. //{
  1780. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ChamberPressure - 1000 > 0 ? getAiValue_ChamberPressure - 1000 : 0);
  1781. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1782. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1783. //}
  1784. //else if (getAiValue_ChamberPressure <= 1000)
  1785. //{
  1786. // float targetChamberPressure = ConvertPressureUnit.ConvertmTorrToPa(getAiValue_ProcessPressure - 110 > 0 ? getAiValue_ProcessPressure - 110 : 0);
  1787. // SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  1788. // SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  1789. //}
  1790. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1791. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1792. }
  1793. else if (turbo_pump_vlv.Value)
  1794. {
  1795. if ((getAiValue_ChamberPressure - 50) >= 0)
  1796. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 50);
  1797. else
  1798. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  1799. }
  1800. }
  1801. // fast vent & purge
  1802. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1803. DOAccessor gas_final_vlv = IO.DO[$"{mod}.DO_Gas_Final_Valve"];
  1804. if (vent_vlv.Value && gas_final_vlv.Value)
  1805. {
  1806. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1807. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1808. if (getAiValue_ChamberPressure > 1000)
  1809. {
  1810. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1811. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1812. }
  1813. else if (getAiValue_ChamberPressure <= 1000)
  1814. {
  1815. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1816. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1817. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 130);
  1818. }
  1819. else
  1820. {
  1821. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 2500);
  1822. }
  1823. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1824. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1825. }
  1826. // Loadlock Pumping Valve
  1827. // 压力值越界,复位
  1828. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1829. if (chamber_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  1830. {
  1831. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  1832. }
  1833. else if (chamber_pressure1 < 20)
  1834. {
  1835. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 0.5F);
  1836. }
  1837. //float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1838. //if (process_pressure1 > ConvertPressureUnit.ConvertmTorrToPa(PROCESS_GAUGE))
  1839. //{
  1840. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1841. //}
  1842. //else if (process_pressure1 < 20)
  1843. //{
  1844. // SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1845. //}
  1846. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1847. if (foreline_pressure > 1000)
  1848. {
  1849. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 1000);
  1850. }
  1851. else if (foreline_pressure < 15)
  1852. {
  1853. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 15);
  1854. }
  1855. // ATM switch
  1856. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  1857. // VAC switch
  1858. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  1859. SetAiValue($"{mod}.AI_Process_Pressure_2t", 0);
  1860. //var chamberPressure = GetAiValue($"{mod}.AI_Chamber_Pressure_10t");
  1861. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa( GetAiValue($"{mod}.AI_Chamber_Pressure_10t")));
  1862. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", ConvertPressureUnit.ConvertmTorrToPa(GetAiValue($"{mod}.AI_Foreline_Pressure_10t")));
  1863. SetAiValue($"{mod}.{sAI_Foreline}",200);
  1864. }
  1865. void MonitorSEMFPressure()
  1866. {
  1867. string mod = "SETM";
  1868. string VCE_ChamberPressure = "AI_VCE_Pressure";
  1869. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1870. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pumping"];
  1871. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pumping"];
  1872. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1873. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1874. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Pumping"];
  1875. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Pumping"];
  1876. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Fast_Vent"];
  1877. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_Soft_Vent"];
  1878. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1879. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1880. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1881. {
  1882. if (getAiValue_TM_ChamberPressure > 10000)
  1883. {
  1884. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1885. }
  1886. else if (getAiValue_TM_ChamberPressure <= 10000)
  1887. {
  1888. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1889. }
  1890. }
  1891. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1892. {
  1893. if (getAiValue_TM_ChamberPressure > 10000)
  1894. {
  1895. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1896. }
  1897. else if (getAiValue_TM_ChamberPressure <= 10000)
  1898. {
  1899. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1900. }
  1901. }
  1902. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1903. {
  1904. if (getAiValue_VCE_ChamberPressure > 10000)
  1905. {
  1906. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1907. }
  1908. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1909. {
  1910. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1911. }
  1912. }
  1913. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1914. {
  1915. if (getAiValue_VCE_ChamberPressure > 10000)
  1916. {
  1917. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1918. }
  1919. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1920. {
  1921. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1922. }
  1923. }
  1924. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1925. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1926. {
  1927. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1928. }
  1929. else if (getAiValue_VCE_ChamberPressure < 20)
  1930. {
  1931. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1932. }
  1933. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1934. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1935. {
  1936. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1937. }
  1938. else if (getAiValue_TM_ChamberPressure < 20)
  1939. {
  1940. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1941. }
  1942. IO.DI[$"{mod}.DI_VCE_VAC_SW"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1943. // VAC switch
  1944. IO.DI[$"{mod}.DI_TM_VAC_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1945. }
  1946. void MonitorDEMFPressure()
  1947. {
  1948. string mod = "DETM";
  1949. string AI_Left_VCE_Pressure = "AI_Left_VCE_Pressure";
  1950. string AI_Right_VCE_Pressure = "AI_Right_VCE_Pressure";
  1951. string TM_AI_ChamberPressure = "AI_TM_Pressure";
  1952. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_Fast_Pump"];
  1953. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_Soft_Pump"];
  1954. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_Fast_Vent"];
  1955. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_Soft_Vent"];
  1956. DOAccessor DO_VCEA_Fast_Pump = IO.DO[$"{mod}.DO_VCEA_Fast_Pump"];
  1957. DOAccessor DO_VCEA_Soft_Pump = IO.DO[$"{mod}.DO_VCEA_Soft_Pump"];
  1958. DOAccessor DO_VCEB_Fast_Pump = IO.DO[$"{mod}.DO_VCEB_Fast_Pump"];
  1959. DOAccessor DO_VCEB_Soft_Pump = IO.DO[$"{mod}.DO_VCEB_Soft_Pump"];
  1960. DOAccessor DO_VCEA_Fast_Vent = IO.DO[$"{mod}.DO_VCEA_Fast_Vent"];
  1961. DOAccessor DO_VCEA_Soft_Vent = IO.DO[$"{mod}.DO_VCEA_Soft_Vent"];
  1962. DOAccessor DO_VCEB_Fast_Vent = IO.DO[$"{mod}.DO_VCEB_Fast_Vent"];
  1963. DOAccessor DO_VCEB_Soft_Vent = IO.DO[$"{mod}.DO_VCEB_Soft_Vent"];
  1964. float getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  1965. float getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  1966. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1967. if (DO_VCEA_Fast_Pump.Value || DO_VCEA_Soft_Pump.Value)
  1968. {
  1969. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  1970. {
  1971. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 30000);
  1972. }
  1973. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  1974. {
  1975. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") - 1500);
  1976. }
  1977. }
  1978. if (DO_VCEB_Fast_Pump.Value || DO_VCEB_Soft_Pump.Value)
  1979. {
  1980. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  1981. {
  1982. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 30000);
  1983. }
  1984. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  1985. {
  1986. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") - 1500);
  1987. }
  1988. }
  1989. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1990. {
  1991. if (getAiValue_TM_ChamberPressure > 10000)
  1992. {
  1993. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1994. }
  1995. else if (getAiValue_TM_ChamberPressure <= 10000)
  1996. {
  1997. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1998. }
  1999. }
  2000. if (DO_VCEA_Fast_Vent.Value || DO_VCEA_Soft_Vent.Value)
  2001. {
  2002. if (getAiValue_AI_Left_VCE_Pressure > 10000)
  2003. {
  2004. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 30000);
  2005. }
  2006. else if (getAiValue_AI_Left_VCE_Pressure <= 10000)
  2007. {
  2008. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") + 1500);
  2009. }
  2010. }
  2011. if (DO_VCEB_Fast_Vent.Value || DO_VCEB_Soft_Vent.Value)
  2012. {
  2013. if (getAiValue_AI_Right_VCE_Pressure > 10000)
  2014. {
  2015. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 30000);
  2016. }
  2017. else if (getAiValue_AI_Right_VCE_Pressure <= 10000)
  2018. {
  2019. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") + 1500);
  2020. }
  2021. }
  2022. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2023. {
  2024. if (getAiValue_TM_ChamberPressure > 10000)
  2025. {
  2026. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2027. }
  2028. else if (getAiValue_TM_ChamberPressure <= 10000)
  2029. {
  2030. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2031. }
  2032. }
  2033. getAiValue_AI_Left_VCE_Pressure = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}");
  2034. if (getAiValue_AI_Left_VCE_Pressure > ATM_PRESSURE)
  2035. {
  2036. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", ATM_PRESSURE);
  2037. }
  2038. else if (getAiValue_AI_Left_VCE_Pressure < 20)
  2039. {
  2040. SetAiValue($"{mod}.{AI_Left_VCE_Pressure}", 20);
  2041. }
  2042. getAiValue_AI_Right_VCE_Pressure = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}");
  2043. if (getAiValue_AI_Right_VCE_Pressure > ATM_PRESSURE)
  2044. {
  2045. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", ATM_PRESSURE);
  2046. }
  2047. else if (getAiValue_AI_Right_VCE_Pressure < 20)
  2048. {
  2049. SetAiValue($"{mod}.{AI_Right_VCE_Pressure}", 20);
  2050. }
  2051. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2052. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2053. {
  2054. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2055. }
  2056. else if (getAiValue_TM_ChamberPressure < 20)
  2057. {
  2058. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2059. }
  2060. // ATM switch
  2061. IO.DI[$"{mod}.DI_TM_ATM_SW"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2062. // VAC switch
  2063. // ATM switch
  2064. IO.DI[$"{mod}.DI_VCEA_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Left_VCE_Pressure}") > ATM_THRESHOLD;
  2065. // ATM switch
  2066. IO.DI[$"{mod}.DI_VCEB_ATM_SW"].Value = GetAiValue($"{mod}.{AI_Right_VCE_Pressure}") > ATM_THRESHOLD;
  2067. }
  2068. void MonitorMFKepler2200Pressure()
  2069. {
  2070. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2071. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2072. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2073. ModuleName mod = ModuleName.TM;
  2074. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2075. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2076. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2077. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2078. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2079. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2080. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2081. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2082. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2083. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2084. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2085. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2086. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2087. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2088. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2089. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2090. {
  2091. if (getAiValue_LLA_ChamberPressure > 20000)
  2092. {
  2093. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 12000);
  2094. }
  2095. else if(getAiValue_LLA_ChamberPressure > 10000)
  2096. {
  2097. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 3000);
  2098. }
  2099. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2100. {
  2101. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 500);
  2102. }
  2103. }
  2104. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2105. {
  2106. if (getAiValue_LLB_ChamberPressure > 20000)
  2107. {
  2108. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 12000);
  2109. }
  2110. else if (getAiValue_LLB_ChamberPressure > 10000)
  2111. {
  2112. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 3000);
  2113. }
  2114. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2115. {
  2116. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 500);
  2117. }
  2118. }
  2119. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2120. {
  2121. if (getAiValue_TM_ChamberPressure > 10000)
  2122. {
  2123. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2124. }
  2125. else if (getAiValue_TM_ChamberPressure <= 10000)
  2126. {
  2127. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2128. }
  2129. }
  2130. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2131. {
  2132. if (getAiValue_LLA_ChamberPressure > 20000)
  2133. {
  2134. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 13000);
  2135. }
  2136. else if (getAiValue_LLA_ChamberPressure > 10000)
  2137. {
  2138. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 2100);
  2139. }
  2140. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2141. {
  2142. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 500);
  2143. }
  2144. }
  2145. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2146. {
  2147. if (getAiValue_LLB_ChamberPressure > 20000)
  2148. {
  2149. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 13000);
  2150. }
  2151. else if (getAiValue_LLB_ChamberPressure > 10000)
  2152. {
  2153. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 2100);
  2154. }
  2155. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2156. {
  2157. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 500);
  2158. }
  2159. }
  2160. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2161. {
  2162. if (getAiValue_TM_ChamberPressure > 10000)
  2163. {
  2164. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2165. }
  2166. else if (getAiValue_TM_ChamberPressure <= 10000)
  2167. {
  2168. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2169. }
  2170. }
  2171. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2172. if (getAiValue_LLA_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2173. {
  2174. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2175. }
  2176. else if (getAiValue_LLA_ChamberPressure < 3)
  2177. {
  2178. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 0.5F);
  2179. }
  2180. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2181. if (getAiValue_LLB_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2182. {
  2183. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2184. }
  2185. else if (getAiValue_LLB_ChamberPressure < 3)
  2186. {
  2187. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 0.5F);
  2188. }
  2189. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2190. if (getAiValue_TM_ChamberPressure > ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE))
  2191. {
  2192. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ConvertPressureUnit.ConvertmTorrToPa(ATM_PRESSURE));
  2193. }
  2194. else if (getAiValue_TM_ChamberPressure < 3)
  2195. {
  2196. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 3);
  2197. }
  2198. // ATM switch
  2199. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2200. // VAC switch
  2201. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2202. // ATM switch
  2203. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2204. // VAC switch
  2205. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2206. // ATM switch
  2207. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ConvertPressureUnit.ConvertmTorrToPa(ATM_THRESHOLD);
  2208. // VAC switch
  2209. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < ConvertPressureUnit.ConvertmTorrToPa(VAC_SW_PRESSURE);
  2210. }
  2211. void MonitorMFKepler2300Pressure()
  2212. {
  2213. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  2214. //{
  2215. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  2216. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  2217. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  2218. ModuleName mod = ModuleName.TM;
  2219. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  2220. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  2221. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  2222. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  2223. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  2224. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  2225. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  2226. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  2227. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  2228. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  2229. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  2230. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  2231. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2232. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2233. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2234. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  2235. {
  2236. if (getAiValue_LLA_ChamberPressure > 10000)
  2237. {
  2238. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  2239. }
  2240. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2241. {
  2242. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  2243. }
  2244. }
  2245. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  2246. {
  2247. if (getAiValue_LLB_ChamberPressure > 10000)
  2248. {
  2249. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  2250. }
  2251. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2252. {
  2253. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  2254. }
  2255. }
  2256. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  2257. {
  2258. if (getAiValue_TM_ChamberPressure > 10000)
  2259. {
  2260. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  2261. }
  2262. else if (getAiValue_TM_ChamberPressure <= 10000)
  2263. {
  2264. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  2265. }
  2266. }
  2267. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  2268. {
  2269. if (getAiValue_LLA_ChamberPressure > 10000)
  2270. {
  2271. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  2272. }
  2273. else if (getAiValue_LLA_ChamberPressure <= 10000)
  2274. {
  2275. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  2276. }
  2277. }
  2278. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  2279. {
  2280. if (getAiValue_LLB_ChamberPressure > 10000)
  2281. {
  2282. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  2283. }
  2284. else if (getAiValue_LLB_ChamberPressure <= 10000)
  2285. {
  2286. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  2287. }
  2288. }
  2289. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  2290. {
  2291. if (getAiValue_TM_ChamberPressure > 10000)
  2292. {
  2293. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  2294. }
  2295. else if (getAiValue_TM_ChamberPressure <= 10000)
  2296. {
  2297. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  2298. }
  2299. }
  2300. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2301. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  2302. {
  2303. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  2304. }
  2305. else if (getAiValue_LLA_ChamberPressure < 20)
  2306. {
  2307. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  2308. }
  2309. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2310. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  2311. {
  2312. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  2313. }
  2314. else if (getAiValue_LLB_ChamberPressure < 20)
  2315. {
  2316. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  2317. }
  2318. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2319. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  2320. {
  2321. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  2322. }
  2323. else if (getAiValue_TM_ChamberPressure < 20)
  2324. {
  2325. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  2326. }
  2327. // ATM switch
  2328. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  2329. // VAC switch
  2330. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2331. // ATM switch
  2332. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  2333. // VAC switch
  2334. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2335. // ATM switch
  2336. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  2337. // VAC switch
  2338. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  2339. // }
  2340. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  2341. //{
  2342. // ModuleName mod = ModuleName.TM;
  2343. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  2344. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  2345. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  2346. //}
  2347. }
  2348. void SetAiValue(string name, float value)
  2349. {
  2350. byte[] flow = BitConverter.GetBytes(value);
  2351. short high1 = BitConverter.ToInt16(flow, 0);
  2352. short low1 = BitConverter.ToInt16(flow, 2);
  2353. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  2354. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  2355. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2356. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2357. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2358. }
  2359. float GetAiValue(string name)
  2360. {
  2361. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  2362. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  2363. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2364. return flow;
  2365. }
  2366. float GetAoValue(string name)
  2367. {
  2368. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  2369. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  2370. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  2371. return flow;
  2372. }
  2373. void MonitorTemperature(ModuleName mod)
  2374. {
  2375. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  2376. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  2377. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  2378. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  2379. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  2380. // 底座
  2381. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2382. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2383. //{
  2384. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  2385. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  2386. //}
  2387. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  2388. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  2389. //{
  2390. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  2391. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  2392. //}
  2393. // Foreline
  2394. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2395. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2396. {
  2397. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  2398. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  2399. }
  2400. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  2401. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  2402. {
  2403. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  2404. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  2405. }
  2406. // Wall
  2407. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2408. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2409. {
  2410. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  2411. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  2412. }
  2413. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  2414. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  2415. {
  2416. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  2417. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  2418. }
  2419. }
  2420. void MonitorGas(ModuleName mod)
  2421. {
  2422. // gas
  2423. this.SimulateMFC(mod, 1);
  2424. this.SimulateMFC(mod, 2);
  2425. this.SimulateMFC(mod, 3);
  2426. this.SimulateMFC(mod, 4);
  2427. this.SimulateMFC(mod, 5);
  2428. this.SimulateMFC(mod, 6);
  2429. this.SimulateMFC(mod, 7);
  2430. this.SimulateMFC(mod, 8);
  2431. this.SimulateN2(mod);
  2432. }
  2433. void MonitorKeplerTMGas()
  2434. {
  2435. this.SimulateKeplerMFC(ModuleName.LLA, 1);
  2436. this.SimulateKeplerMFC(ModuleName.LLB, 1);
  2437. this.SimulateKeplerMFC(ModuleName.TM, 1);
  2438. }
  2439. void MonitorSEGas(ModuleName mod)
  2440. {
  2441. SimulateMFC(mod, 1);
  2442. SimulateMFC(mod, 2);
  2443. SimulateMFC(mod, 3);
  2444. SimulateMFC(mod, 4);
  2445. SimulateMFC(mod, 5);
  2446. SimulateMFC(mod, 6);
  2447. SimulateMFC(mod, 7);
  2448. SimulateMFC(mod, 8);
  2449. SimulateMFC(mod, 9);
  2450. SimulateMFC(mod, 10);
  2451. SimulateMFC(mod, 11);
  2452. SimulateMFC(mod, 12);
  2453. }
  2454. void MonitorDEGas(ModuleName mod)
  2455. {
  2456. SimulateMFC(mod, 1);
  2457. SimulateMFC(mod, 2);
  2458. SimulateMFC(mod, 3);
  2459. SimulateMFC(mod, 4);
  2460. SimulateMFC(mod, 5);
  2461. SimulateMFC(mod, 6);
  2462. SimulateMFC(mod, 7);
  2463. SimulateMFC(mod, 8);
  2464. SimulateMFC(mod, 9);
  2465. SimulateMFC(mod, 10);
  2466. SimulateMFC(mod, 11);
  2467. SimulateMFC(mod, 12);
  2468. }
  2469. private void SimulateMFC(ModuleName mod, byte gasNum)
  2470. {
  2471. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  2472. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)sp);
  2473. }
  2474. private void SimulateKeplerMFC(ModuleName mod, byte gasNum)
  2475. {
  2476. var sp = GetAoValue($"TM.AO_{mod}_MFC{gasNum}_Flow_Setpoint");
  2477. SetAiValue($"TM.AI_{mod}_MFC{gasNum}_Flow", (float)sp);
  2478. }
  2479. private void SimulateN2(ModuleName mod)
  2480. {
  2481. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  2482. //var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2483. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)sp);
  2484. }
  2485. private void SimulateSEHe(ModuleName mod)
  2486. {
  2487. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint");
  2488. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2489. SetAiValue($"{mod}.AI_He_Flow", (float)mock_fb);
  2490. }
  2491. private void SimulateDEHe(ModuleName mod)
  2492. {
  2493. var sp = GetAoValue($"{mod}.AO_ESC_He_Pressure_Setpoint1");
  2494. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2495. SetAiValue($"{mod}.AI_MFC_He1_Flow", (float)mock_fb);
  2496. }
  2497. private void SimulateHe(ModuleName mod)
  2498. {
  2499. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  2500. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2501. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  2502. }
  2503. void MonitorRF(ModuleName mod)
  2504. {
  2505. // RF generator
  2506. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  2507. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  2508. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2509. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  2510. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  2511. }
  2512. void MonitorIOPumpCtrl(ModuleName mod)
  2513. {
  2514. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  2515. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  2516. }
  2517. void MonitorIOHighTemperatureHeater(ModuleName mod)
  2518. {
  2519. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  2520. {
  2521. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  2522. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2523. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2524. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2525. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2526. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2527. }
  2528. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  2529. {
  2530. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2531. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  2532. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2533. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2534. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2535. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2536. }
  2537. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  2538. {
  2539. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2540. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2541. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  2542. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2543. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2544. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2545. }
  2546. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position4"].Value)
  2547. {
  2548. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2549. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2550. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2551. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = true;
  2552. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2553. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2554. }
  2555. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position5"].Value)
  2556. {
  2557. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2558. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2559. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2560. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2561. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = true;
  2562. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  2563. }
  2564. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  2565. {
  2566. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  2567. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  2568. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  2569. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position4_Complete"].Value = false;
  2570. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position5_Complete"].Value = false;
  2571. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  2572. }
  2573. IO.DI[$"{mod}.DI_CHB_M-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_M-HT_Heater_On"].Value;
  2574. var sp = GetAoValue($"{mod}.AO_CHB_M-HT_Temperature_Setpoint");
  2575. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  2576. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  2577. SetAiValue($"{mod}.AI_CHB_M-HT_Control_TC_Temp", (float)mock_fb);
  2578. SetAiValue($"{mod}.AI_Source_TC_Temp", 100.123456F);
  2579. }
  2580. void MonitorKepler2200Heater(ModuleName mod)
  2581. {
  2582. var pendulumHeaterSetpoint = GetAoValue($"{mod}.AO_P_Valve_Temperature_Setpoint");
  2583. SetAiValue($"{mod}.AI_P_Valve_Control_TC_Temp", (float)pendulumHeaterSetpoint);
  2584. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Alarm_Word1", (float)0);
  2585. SetAiValue($"{mod}.AI_CHB_M-HT_Inner_Alarm_Word2", (float)0);
  2586. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Alarm_Word1", (float)0);
  2587. SetAiValue($"{mod}.AI_CHB_M-HT_Outer_Alarm_Word2", (float)0);
  2588. }
  2589. public void Terminate()
  2590. {
  2591. _thread.Stop();
  2592. }
  2593. public void SetCoolantOutletTemp(string module, int Temp)
  2594. {
  2595. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  2596. //{
  2597. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  2598. //}
  2599. }
  2600. }
  2601. }